公开(公告)号：US08462328B2

公开(公告)日：2013-06-11

申请号：US13003725

申请日：2009-07-21

Applicant: David Fisch ,  Yigal Katzir

Inventor： David Fisch ,  Yigal Katzir

IPC: G01N21/00

CPC classification number: G01N21/8806 ,  G01N2021/8825 ,  G01N2021/9513 ,  G01N2021/95638 ,  G01N2201/062 ,  G01N2201/0675

Abstract: A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction.

Abstract translation: 描述了一种使用区域传感器（或线传感器）的机器视觉系统的新架构，其具有远心成像光学复合物与远心照明模块。 照明模块可以包括明场照明源和/或暗场照明源。 远心成像光学器件包括具有孔径光阑的上成像模块和位于上成像模块和物体之间的下成像模块，使得光源和孔径光阑位于下成像模块的后焦平面中。 下部成像模块将照明源成像到上部成像模块的孔径光阑的平面内。 上成像模块的光轴相对于下成像模块偏移。 远心照明模块的光轴相对于下成像模块的轴线在相反方向上偏移。

公开(公告)号：US08456639B2

公开(公告)日：2013-06-04

申请号：US13174815

申请日：2011-07-01

Applicant: Shankar Krishnan ,  Haiming Wang

Inventor： Shankar Krishnan ,  Haiming Wang

IPC: G01N21/55 ,  G01N21/00

CPC classification number: G01N21/55 ,  G01B11/065 ,  G01B2210/56 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/42 ,  G01N21/00 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214 ,  G01N2201/0675

Abstract: A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

Abstract translation: 一种用于在衬底上进行多波长，多方位角，多角度入射读数的光谱仪器，该仪器具有用于产生照明光束的宽带光源，用于将多个方位角的照明引导到衬底上的物镜 角度和多个入射角，从而产生反射光束，具有照明孔的孔板和形成在其中的多个收集孔，用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器，以及用于解释读数的处理器。

公开(公告)号：US20120069344A1

公开(公告)日：2012-03-22

申请号：US13146550

申请日：2010-01-28

Applicant: Zhaowei Liu

Inventor： Zhaowei Liu

IPC: G01B9/02

CPC classification number: G02B21/16 ,  G01B9/04 ,  G01B11/2441 ,  G01N21/6458 ,  G01N21/648 ,  G01N2201/0635 ,  G01N2201/0675 ,  G02B5/008 ,  G02B27/60

Abstract: Disclosed are systems, apparatus, methods and devices, including a method that includes generating two or more sequential surface plasmon interference patterns, at least one of the two or more sequential surface plasmon interference patterns being different from another of the two or more sequential surface plasmon interference patterns, and capturing respective images of a specimen resulting from the interference patterns. Also disclosed is a method that includes generating two or more sequential optical interference patterns, at least one of the two or more sequential optical interference patterns being different from another of the interference patterns, and removing from each of the generated interference patterns, using a beam stopper, a corresponding zero-order diffraction light component included in the respective generated patterns to obtain resultant corresponding two or more sequential optical interference patterns, directed at a specimen, with missing respective zero-order light components.

Abstract translation: 公开了一种系统，装置，方法和装置，包括一种方法，包括产生两个或多个顺序表面等离子体激元干涉图案，两个或更多个顺序表面等离子体激元干涉图案中的至少一个不同于两个或多个顺序表面等离子体激元 干涉图案，并捕获由干涉图案产生的样本的各个图像。 还公开了一种方法，其包括生成两个或多个顺序光学干涉图案，所述两个或更多个顺序光学干涉图案中的至少一个与干涉图案中的另一个不同，以及使用光束从每个所生成的干涉图案中移除 阻挡器，包括在各个生成的图案中的对应的零级衍射光分量，以获得指向样本的相应的两个或更多个顺序的光学干涉图案，缺少相应的零级光分量。

公开(公告)号：US20110226963A1

公开(公告)日：2011-09-22

申请号：US13048068

申请日：2011-03-15

Applicant: Werner Knebel

Inventor： Werner Knebel

IPC: G01J1/58

CPC classification number: G01N21/6408 ,  G01N21/6458 ,  G01N2201/0675 ,  G02B21/0076

Abstract: A method of performing fluorescence correlation spectroscopy with a fluorescence microscope includes selecting an illumination area of a sample, generating an illumination light beam and splitting the illumination light beam into at least three partial beams. The partial light beams are focused onto the selected illumination area using a microscope optical system of the fluorescence microscope so as to excite fluorescent dye particles in the illumination area to fluoresce. Fluorescent light emitted by the dye particles is detected and at least one diffusion coefficient representative of a diffusibility of the fluorescent dye particles is determined based on the detected fluorescent light.

Abstract translation: 用荧光显微镜进行荧光相关光谱的方法包括选择样品的照明区域，产生照明光束并将照明光束分成至少三个部分光束。 使用荧光显微镜的显微镜光学系统将部分光束聚焦在所选择的照明区域上，以激发照明区域中的荧光染料颗粒发荧光。 检测由染料颗粒发射的荧光，并且基于检测到的荧光来确定代表荧光染料颗粒的扩散性的至少一个扩散系数。

公开(公告)号：US20100314554A1

公开(公告)日：2010-12-16

申请号：US12744125

申请日：2008-11-21

Applicant: Massimo Galimberti ,  Francesco Saverio Pavone

Inventor： Massimo Galimberti ,  Francesco Saverio Pavone

IPC: G01N21/64 ,  G02B5/18

CPC classification number: G01N21/6458 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/14 ,  G01J3/4406 ,  G01J2003/1286 ,  G01N21/645 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2201/0675

Abstract: A device to illuminate a object, to excite its fluorescence light emission, and detect the emitted fluorescence spectrum, comprising: at least one illumination system (13), adapted to receive light from a light source (11), to select at least one wavelength bands of light spectrum of the source (11), to illuminate a object (15) with light filtered in that way (14); and a detection system (17), adapted to detect fluorescence light (16) emitted by the object (15), to select at least one wavelength bands of fluorescence, light spectrum (16), to record the spectrum of the filtered light; characterized in that said illumination system (13) comprises: at least one first dispersive element (41), at least one focusing optics (43), at least one spatial fitter of excitation (44), at least one collimating optics (45) and at least one second dispersive element (47), wherein said detection system (17) comprises: at least one dispersive element (81), at least one focusing optics (83), at least one spatial filter of detection (84), at least one imaging optics (85) and at least one light detector (87).

Abstract translation: 用于照亮物体以激发其荧光发射并检测发射的荧光光谱的装置，包括：适于接收来自光源（11）的光的至少一个照明系统（13），以选择至少一个波长 源（11）的光谱带，用以这种方式过滤的光照射物体（15）（14）; 以及检测系统（17），其适于检测由所述物体（15）发射的荧光（16），以选择荧光的至少一个波长带（光谱），以记录所述滤光的光谱; 其特征在于，所述照明系统（13）包括：至少一个第一分散元件（41），至少一个聚焦光学器件（43），至少一个激发器空间拟合器（44），至少一个准直光学器件（45）和 至少一个第二分散元件（47），其中所述检测系统（17）包括：至少一个分散元件（81），至少一个聚焦光学元件（83），至少一个检测空间滤波器（84） 一个成像光学器件（85）和至少一个光检测器（87）。

公开(公告)号：US20060012781A1

公开(公告)日：2006-01-19

申请号：US10890800

申请日：2004-07-14

Applicant: Keren Fradkin ,  Noam Dotan

Inventor： Keren Fradkin ,  Noam Dotan

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2201/0675

Abstract: A programmable spatial filter for use as a Fourier plane filter in dark field wafer inspection systems, based on the use of MEMS (Micro-Electro-Mechanical Systems) devices. In comparison with prior art systems, especially those using LCD's, the use of MEMS devices provide a number of potential advantages, including good transmission in the UV, a high fill factor, polarization independence and a high extinction ratio since the shutter is opaque when closed. The MEMS devices can be flap devices, artificial eyelid, or double shutter devices. Additionally, a novel spatial light modulator (SLM) assembly having a double layer of SLM arrays is described, in which the fill factor is increased in comparison to a single layer SLM using the same devices, by positioning the dead areas of the elements of both arrays collinearly in the modulated beam. This SLM assembly can be implemented using pixelated LCD arrays or MEMS arrays.

Abstract translation: 一种可编程空间滤波器，用于基于MEMS（微机电系统）设备的使用，用于暗视场晶圆检测系统中的傅立叶平面滤波器。 与现有技术的系统（特别是使用LCD的系统）相比，MEMS器件的使用提供了许多潜在的优点，包括UV中的良好透射，高填充因子，偏振独立性和高消光比，因为当关闭时快门是不透明的 。 MEMS器件可以是襟翼装置，人造眼睑或双快门装置。 另外，描述了一种具有双层SLM阵列的新型空间光调制器（SLM）组件，其中与使用相同装置的单层SLM相比，填充因子通过将两者的元素的死区定位 阵列共线在调制束中。 该SLM组件可以使用像素化LCD阵列或MEMS阵列来实现。

公开(公告)号：US20020044278A1

公开(公告)日：2002-04-18

申请号：US09905839

申请日：2001-07-13

Inventor： Tuan Le

IPC: G01N021/88

CPC classification number: G01N21/95623 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/0675

Abstract: A dynamic reflective spatial attenuator for use in an optical inspection apparatus. The attenuator takes the form of a two-dimensional micro-mechanical reflective array that, in the first operative position of a mirror element, reflects the desired scattered light toward a detector and, in the second operative position of a mirror element, reflects undesired scattered light into a light dump. The mirror array's fast response and flexibility allows for changes during mid-scan to increase the defect's or contaminant's signal relative to the substrate surface's signal.

Abstract translation: 一种用于光学检测装置的动态反射空间衰减器。 衰减器采取二维微机械反射阵列的形式，其在镜元件的第一操作位置中将所需的散射光反射到检测器，并且在镜元件的第二操作位置反射不期望的散射 光线进入轻型堆场。 反射镜阵列的快速响应和灵活性允许在中间扫描期间进行更改，以增加相对于基板表面信号的缺陷或污染物信号。

公开(公告)号：US5327286A

公开(公告)日：1994-07-05

申请号：US937987

申请日：1992-08-31

Applicant: Jeffrey B. Sampsell ,  Rachelle J. Bienstock

Inventor： Jeffrey B. Sampsell ,  Rachelle J. Bienstock

IPC: G01N21/88 ,  G01N21/93 ,  G01N21/956 ,  G02B26/08 ,  G02B27/46 ,  G02F3/00 ,  G06E3/00 ,  G06K9/74 ,  G06T7/00 ,  G02B9/64

CPC classification number: G06K9/745 ,  G01N21/95623 ,  G02B27/46 ,  G06E3/005 ,  G01N2201/0675

Abstract: An optical correlation unit for correlating the images of an inspection object and a reference object. The unit uses two phase modulating reflective spatial light modulators. A first spatial light modulator receives electronic input in the form of image data representing the inspection object. It modulates incoming light with this input and reflects the modulated output to a first Fourier transform lens. This lens provides the optical input to a second spatial light modulator, whose electronic input is transform data representing the complex conjugate of the Fourier transform of the reference image. The electronic input modulates the optical input, resulting in the Fourier product of the two images, which is then transformed to provide correlation data.

Abstract translation: 一种光学相关单元，用于将检查对象和参考对象的图像相关联。 该单元使用两个相位调制反射空间光调制器。 第一空间光调制器以表示检查对象的图像数据的形式接收电子输入。 它用该输入调制入射光，并将调制输出反射到第一傅立叶变换透镜。 该透镜向第二空间光调制器提供光输入，其电子输入是表示参考图像的傅里叶变换的复共轭的变换数据。 电子输入调制光学输入，产生两个图像的傅里叶积，然后将其转换以提供相关数据。

公开(公告)号：WO2019106614A1

公开(公告)日：2019-06-06

申请号：PCT/IB2018/059492

申请日：2018-11-30

Applicant: FONDAZIONE ISTITUTO ITALIANO DI TECNOLOGIA

Inventor： BIANCHINI, Paolo ,  DEGUCHI, Takahiro ,  DIASPRO, Alberto

IPC: G02B21/00 ,  G01N21/64 ,  G02B21/16 ,  G02B27/58

CPC classification number: G02B27/58 ,  G01N21/6458 ,  G01N2201/0675 ,  G02B21/0032 ,  G02B21/0076 ,  G02B21/16

Abstract: Lightening method of at least one biological sample (S), in which said at least one biological sample includes at least one or more fluorophores, at the focal point (F) of at least one objective lens (L) having a main optical axis (z-z), the method comprising the following operational steps:- lightening (step 10) said at least one biological sample (S) with at least one excitation beam (EB), which propagates between said at least one objective lens (L) and said at least one biological sample (S) along at least one first propagation axis (a-a);- lightening (step 20) said at least one biological sample (S) with at least two depletion beams (DB, DB'), which propagate between said at least one objective lens (L) and said at least one biological sample (S) along the respective second propagation axes (b-b, b'-b'), said depletion beams being donut-shaped, each one in a plane orthogonal to the respective second propagation axis (b-b, b'-b'); whereby said at least one first propagation axis (a-a) and said at least second propagation axes (b-b, b'-b') are angularly inclined with each other, and said at least one first propagation axis (a-a) and said second propagation axes (b-b, b'-b') intersect on said at least one biological sample (s) only at the focal point (F) of said at least one objective lens (L), so that an effective fluorescence volume (FV) is generated in said at least one biological sample (S) which is limited both orthogonally and axially with respect to said main optical axis (z-z).

公开(公告)号：WO2017123926A1

公开(公告)日：2017-07-20

申请号：PCT/US2017/013408

申请日：2017-01-13

Applicant: NXGEN PARTNERS IP, LLC

Inventor： ASHRAFI, Solyman

IPC: G01N21/59

CPC classification number: G01N21/65 ,  A61B5/0075 ,  A61B5/14532 ,  A61B5/1455 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/44 ,  G01N21/21 ,  G01N21/3586 ,  G01N2021/6417 ,  G01N2021/655 ,  G01N2201/0675

Abstract: An apparatus for detecting a material within a sample includes a light emitting unit for directing at least one light beam through the sample. A plurality of units receive the light beam that has passed through the sample and performs a spectroscopic analysis of the sample based on the received light beam. Each of the plurality of units analyze a different parameter with respect to the sample a provide a separate output signal with respect to the analysis. A processor detects the material with respect each of the provided separate output signals.

Abstract translation: 用于检测样品内的材料的设备包括用于引导至少一个光束通过样品的发光单元。 多个单元接收已经通过样本的光束，并基于接收到的光束执行样本的光谱分析。 多个单元中的每一个分析关于样本a的不同参数，提供关于分析的单独输出信号。 处理器根据每个提供的单独输出信号检测材料。