公开(公告)号：JP4185213B2

公开(公告)日：2008-11-26

申请号：JP12298399

申请日：1999-04-28

Applicant: 浜松ホトニクス株式会社

Inventor： 真城 伊藤 ,  勇二郎 清

IPC: F21V29/00 ,  F21V29/02 ,  F21L13/00 ,  F21L14/00 ,  F21V8/00 ,  G01J3/02 ,  G01J3/10 ,  G01N21/01 ,  H01J61/68

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/0272 ,  G01J3/0286 ,  G01J3/0291 ,  H01J61/68

公开(公告)号：JP2005233828A

公开(公告)日：2005-09-02

申请号：JP2004044724

申请日：2004-02-20

Applicant: Canon Inc ,  キヤノン株式会社

Inventor： KANAZAWA HAJIME ,  MIYAKE AKIRA ,  MASAKI BUNTARO

IPC: G01J3/36 ,  G01J3/00 ,  G01J3/18 ,  G01N23/207 ,  G01T1/29 ,  G01T1/36 ,  G03F7/20 ,  G21K1/06 ,  H05G2/00

CPC classification number: G01J3/18 ,  G01J3/0286 ,  G01J3/0291 ,  G01N23/2076 ,  G03F7/70575 ,  G21K1/06 ,  H05G2/001

Abstract: PROBLEM TO BE SOLVED: To provide an EUV ray spectrum measuring instrument capable of measuring precisely a spectrum of an EUV ray emitted from the divergent center of an extreme ultraviolet (EUV) ray source in every emission direction, and to provide a power calculation method for calculating precisely EUV ray power.
SOLUTION: This EUV ray spectrum measuring instrument concerned in the present invention for measuring the spectrum of the EUV ray emitted from the divergent center of the EUV ray source has a driving mechanism for making a spectrum measuring means having a spectral diffraction element and a detector having spatial resolution along a spectral dispersion direction by the spectral diffraction element movable with respect to the divergent center.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种EUV射线光谱测量仪器，其能够精确地测量在每个发射方向上从极紫外（EUV）射线源的发散中心发射的EUV射线的光谱，并提供功率 精确计算EUV射线功率的计算方法。 解决方案：本发明涉及的用于测量从EUV射线源的发散中心发射的EUV射线的光谱的EUV射线光谱测量仪具有用于制造具有光谱衍射元件的光谱测量装置的驱动机构， 检测器，其通过相对于发散中心可移动的光谱衍射元件沿着光谱色散方向具有空间分辨率。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004108970A

公开(公告)日：2004-04-08

申请号：JP2002272724

申请日：2002-09-19

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： TANAKA TOYOHIKO

IPC: G01J3/45 ,  G01J3/02 ,  G01J3/453

CPC classification number: G01J3/02 ,  G01J3/0286 ,  G01J3/453

Abstract: PROBLEM TO BE SOLVED: To provide a fourier transform infrared spectrophotometer that includes an optical element using an optical material having deliquescence and can dispense with or reduce desiccant exchanging working.
SOLUTION: In this fourier transform infrared spectrophotometer, a drying unit 5 provided with a Peltier element is provided in order to maintain the inside of a hermetically sealed chamber 1 in a dried state. The cooling side 6 and heating side 7 of the Peltier element are respectively disposed on the inside and outside of the hermetically sealed chamber 1. The drying unit 5 is provided with a moisture absorbent 8 so as to carry moisture from the cooling side 6 to the heating side 7. When the Peltier element of the unit 5 is energized, the moisture in the hermetically sealed chamber 1 is condensed into dew in a cooling section which is in contact with the cooling side 6 in the chamber 1 and the dew is carried to the heating side 7 on the outside of the chamber 7 through the absorbent 8 and evaporated to the outside after the dew is heated by the heating side 7.
COPYRIGHT: (C)2004,JPO

Abstract translation: 要解决的问题：提供一种傅里叶变换红外分光光度计，其包括使用具有潮解性的光学材料的光学元件，并且可以省去或减少干燥剂交换工作。 解决方案：在这种傅立叶变换红外分光光度计中，设置有设置有珀尔帖元件的干燥单元5，以将密封室1的内部保持在干燥状态。 珀耳帖元件的冷却侧6和加热侧7分别设置在气密密封室1的内部和外部。干燥单元5设置有吸湿剂8，以将来自冷却侧6的水分输送到 加热侧7.当单元5的珀尔帖元件通电时，气密密封室1中的水分在与室1中的冷却侧6接触的冷却部中冷凝为露水，并将露水运送到 通过吸收剂8在室7的外侧的加热侧7，并且在露出被加热侧7加热后蒸发到外部。版权所有（C）2004，JPO

公开(公告)号：JPS58178308A

公开(公告)日：1983-10-19

申请号：JP5170283

申请日：1983-03-29

Applicant: Zeiss Stiftung

Inventor： MAINRAATO MEHIRAA

IPC: G02B7/02 ,  G01J3/02 ,  G02B7/00

CPC classification number: G01J3/02 ,  G01J3/0262 ,  G01J3/0286 ,  G02B7/008 ,  Y10S359/90

公开(公告)号：JPS58178307A

公开(公告)日：1983-10-19

申请号：JP5170183

申请日：1983-03-29

Applicant: Zeiss Stiftung

Inventor： MAINRAATO MEHIRAA ,  RIHIYARUTO ZAKUSE ,  HORUSUTO SHIYUTATSUKURIISU ,  AHIMU SHINTORAA

IPC: G02B7/00 ,  G02B7/02 ,  G02B27/62 ,  G12B5/00

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0286 ,  G02B7/004 ,  G02B7/023 ,  G02B27/62 ,  G12B5/00 ,  Y10S359/90 ,  Y10T156/1744

Abstract: For the adjustment and mounting of an optical component in an optical instrument, the optical component is held by an adjusting device not forming part of the instrument. After the adjusting process is completed, the component is attached to the instrument by a liquid or pasty substance which solidifies with slight change in volume. The optical component or its mount and the instrument are so developed that a form-locked, force-locked, or adherence-locked attachment is produced between them. The adjusting process can be made objective by a position-resolving receiver; the evaluation of the adjustment image and the carrying out of the adjustment movements can be effected by a computer which can also carry out the entire adjustment process completely automatically. After the firm attachment of the optical component to the instrument, the adjusting device is removed.

公开(公告)号：JPS5739322A

公开(公告)日：1982-03-04

申请号：JP11479780

申请日：1980-08-22

Applicant: Hitachi Ltd

Inventor： TAKAHASHI KATSUAKI

IPC: G01J3/02 ,  G01J3/10

CPC classification number: G01J3/02 ,  G01J3/0286 ,  G01J3/10

Abstract: PURPOSE:To improve the accuracy of measurement by providing an evaporating part for heat pipes near a light source lamp, and quickly conducting the heat of the light source to the outside thereby stabilizing the quantity of irradiation light. CONSTITUTION:Working fluid 11 such as water, ammonia, methanol, ''Dowtherm A '' is put in a metallic pipe 10 of copper, aluminum, stainless steel or the like, and the inside of the pipe is evacuated and sealed, whereby a heat pipe 14 is formed. If the plural heat pipes 14 are put near a light source lamp 6 and an evaporating part 12 is heated, the working fluid 11 deprives of evaporating heat and evaporates. The heat of evaporation is dissipated in a condensing part 13 to the outside of a photometer cover 1. Since the circumferential part of the lamp 6 is effectively cooled without using any fan, the stable quantity of light is emitted. The light transmits through a flow cell 2 sucking up a sample soln. 5, is divided to respective wavelengths by grating 3, are photoelectrically converted by a detector 4, the outputs whereof are recorded in a recorder 16 via an amplifier 15. Thereby, the stable light source is formed by the simple construction, and the accuracy of measurement is improved.

Abstract translation: 目的：通过为光源灯附近的热管提供蒸发部件，快速地将光源的热量传导到外部，从而稳定照射光量，从而提高测量精度。 构成：将水，氨，甲醇，“道路A”等工作流体11放入铜，铝，不锈钢等的金属管10中，将管内抽真空并密封， 形成热管14。 如果将多个热管14放置在光源灯6附近并且蒸发部12被加热，则工作流体11剥夺蒸发热并蒸发。 蒸发的热量在冷凝部13中散发到光度计盖1的外部。由于灯6的圆周部分在不使用任何风扇的情况下被有效地冷却，所以发出稳定的光量。 光透过吸取样品溶胶的流动池2。 如图5所示，通过光栅3被分割成各个波长，由检测器4进行光电转换，其输出通过放大器15记录在记录器16中。由此，稳定光源通过简单的结构形成，并且精度 测量得到改善。

公开(公告)号：WO2017137970A1

公开(公告)日：2017-08-17

申请号：PCT/IL2016/050166

申请日：2016-02-11

Applicant: CI SYSTEMS (ISRAEL) LTD.

Inventor： CABIB, Dario ,  LAVI, Moshe ,  SINGHER, Liviu

IPC: G01J3/28

CPC classification number: G01J3/28 ,  G01J3/0205 ,  G01J3/0286 ,  G01J3/0289 ,  G01J3/108 ,  G01J3/36 ,  G01J5/522 ,  G01J2003/1213 ,  G01J2003/2866 ,  G01J2003/2869 ,  G01J2005/0048

Abstract: A device images radiation from a scene. An image forming optical component forms an image of the scene on an uncooled detector having two separate regions. A first filter allows radiation in a first wavelength band to be imaged on the first detector region. A second filter allows radiation in a second wavelength band to be imaged on the second detector region, Two fixedly positioned wedge-shaped components each direct radiation from the scene through the image forming optical component onto the detector through an f-number of less than 1.5. A blackbody source positioned within, the.device reduces drift induced by -environmental, changes surrounding the devices. The blackbody source projects radiation through one of the wedge- shaped components onto a region of the detector that does not receive radiation from the scene. Pixel signals produced from the scene radiation are modified based on pixel signals produced from the blackbody.

Abstract translation:

设备对来自场景的辐射进行成像。 图像形成光学部件在具有两个单独区域的非冷却检测器上形成场景的图像。 第一滤波器允许第一波长带中的辐射成像在第一检测器区域上。 第二滤波器允许第二波长带中的辐射成像在第二检测器区域上。两个固定定位的楔形部件中的每一个将来自场景的辐射通过成像光学部件引导到检测器上，通过小于1.5的f值 。 位于该设备内的黑体源减少了由环境引起的漂移以及设备周围的变化。 黑体源通过其中一个楔形部件将辐射投射到检测器的不接收场景辐射的区域上。 根据黑体产生的像素信号修改从场景辐射产生的像素信号。

公开(公告)号：WO2017040622A1

公开(公告)日：2017-03-09

申请号：PCT/US2016/049646

申请日：2016-08-31

Applicant: SPECTRASENSORS, INC.

Inventor： COHEN, Joshua ,  ST. JOHN, Nathan ,  FEITISCH, Alfred

IPC: G01J3/02 ,  G01J3/42

CPC classification number: G01N21/01 ,  G01J3/0286 ,  G01J3/42 ,  G01N21/27 ,  G01N2201/0231 ,  G01N2201/0636 ,  G02B7/008 ,  G02B7/028 ,  H01S3/0071 ,  H01S3/1317 ,  H01S5/0071 ,  H01S5/06804

Abstract: An optical head assembly (160) for use in a spectrometer is provided that is configured to characterize one or more constituents within a sample gas. The assembly includes a thermoelectric cooler (TEC) (310) having a cold side on one end and a hot side on an opposite end, a cold plate (315) in thermal communication with the cold side of the TEC, a hot block (305) in thermal communication with the hot side of the TEC, a light source (105) in thermal communication with the cold plate such that a change in temperature of the TEC causes one or more properties of the light source (e.g., wavelength, etc.) to change, and an optical element (325) in thermal communication with the cold plate positioned to collimate light emitted by the light source through the sample gas (such that properties of the optical element vary based on a change in temperature of the TEC).

Abstract translation: 提供了一种用于光谱仪的光学头组件（160），其被配置为表征样品气体中的一种或多种组分。 该组件包括热电冷却器（TEC）（310），其在一端具有冷侧，另一端具有热侧，与TEC的冷侧热连通的冷板（315），热块（305） ）与TEC的热侧热连通，与冷板热连通的光源（105），使得TEC的温度变化导致光源的一个或多个属性（例如波长等） ）和与冷板热连通的光学元件（325），其被定位成准直由光源通过样品气体发射的光（使得光学元件的性质基于TEC的温度变化而变化） 。

公开(公告)号：WO2017033419A1

公开(公告)日：2017-03-02

申请号：PCT/JP2016/003636

申请日：2016-08-08

Applicant: パナソニックIPマネジメント株式会社

Inventor： 柳　一寛 ,  平田　啓二

IPC: G01N21/27

CPC classification number: G01N21/27 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/06 ,  G01J3/10 ,  G01J3/42 ,  G01J3/4338 ,  G01N33/0062

Abstract: 物質検出装置は、物質の検出領域内及び検出領域外へ第１の非可視光を出射し、検出領域内及び検出領域外において、第１の非可視光の出射方向を変更し、検出領域外において検出対象の物質が格納された参照セルを、第１の非可視光が通過した光である第３の非可視光を受光し、第３の非可視光の波長特性に基づいて、第１の非可視光の温度を調整して第１の非可視光の波長を制御する。

Abstract translation: 这种物质检测装置：向物质检测区域和检测区域外部发射第一不可见光; 改变检测区域和检测区域外的第一不可见光的发射方向; 接收到第一不可见光的第三不可见光，该第一不可见光穿过检测区域外的参考单元，并存储有要检测的物质; 并且通过基于第三不可见光的波长特性调节第一不可见光的温度来控制第一不可见光的波长。

公开(公告)号：WO2016167863A1

公开(公告)日：2016-10-20

申请号：PCT/US2016/017567

申请日：2016-02-11

Applicant: RAYTHEON COMPANY

Inventor： ROSS, Thomas, William ,  MILES, Steven, A. ,  MANN, David, C. ,  AVILA, Marco, A. ,  MCDONALD, David, Russell ,  GALLAGHER, Jeffery, M.

IPC: G01J3/02 ,  G01S17/00 ,  G01S7/497 ,  H04N5/225 ,  H04N9/09

CPC classification number: G01B11/272 ,  G01J1/0266 ,  G01J1/0411 ,  G01J1/4228 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0286 ,  G01J3/0289 ,  G01J5/0806 ,  G01J5/089 ,  G02B7/287 ,  G02B27/34 ,  G02B27/36 ,  H04N5/2258 ,  H04N5/23212 ,  H04N17/002

Abstract: System and method for sensor alignment. In one example, a reimaging optical system includes reimaging foreoptics positioned to receive and reimage incident electromagnetic radiation to produce an intermediate image plane and output an optical beam of the received incident electromagnetic radiation, an imaging optical apparatus positioned to receive the optical beam and focus the electromagnetic radiation of the optical beam onto a first focal plane, a first imaging sensor positioned at the first focal plane and configured to produce a first image responsive to receiving the electromagnetic radiation of the optical beam, an alignment object selectively positioned at the intermediate image plane and configured to superimpose an alignment tool upon the first image, and a controller coupled to the first imaging sensor and configured to perform an alignment process for the first imaging sensor based on at least a position of the alignment tool in the first image.

Abstract translation: 用于传感器校准的系统和方法。 在一个示例中，重建成像光学系统包括对定位成接收和再成像入射电磁辐射的前置光谱，以产生中间图像平面并输出接收到的入射电磁辐射的光束;成像光学装置，定位成接收光束并聚焦 光束在第一焦平面上的电磁辐射，位于第一焦平面处的第一成像传感器，其被配置为产生响应于接收光束的电磁辐射的第一图像;对准物体选择性地定位在中间像平面 并且被配置为将对准工具叠加在第一图像上，以及控制器，耦合到第一成像传感器并且被配置为基于至少第一图像中的对准工具的位置来执行第一成像传感器的对准处理。