公开(公告)号：US20130050689A1

公开(公告)日：2013-02-28

申请号：US13565702

申请日：2012-08-02

Applicant: Juergen Reich ,  Charles Amsden ,  Jiayao Zhang ,  Christian Wolters

Inventor： Juergen Reich ,  Charles Amsden ,  Jiayao Zhang ,  Christian Wolters

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/555 ,  G01N2021/8835 ,  G01N2021/8845 ,  G01N2201/103 ,  H01L22/12

Abstract: The illumination power density of a multi-spot inspection system is adjusted in response to detecting a large particle in the inspection path of an array of primary illumination spots. At least one low power, secondary illumination spot is located in the inspection path of an array of relatively high power primary illumination spots. Light scattered from the secondary illumination spot is collected and imaged onto one or more detectors without overheating the particle and damaging the wafer. Various embodiments and methods are presented to distinguish light scattered from secondary illumination spots. In response to determining the presence of a large particle in the inspection path of a primary illumination spot, a command is transmitted to an illumination power density attenuator to reduce the illumination power density of the primary illumination spot to a safe level before the primary illumination spot reaches the large particle.

Abstract translation: 响应于检测主照明点阵列的检查路径中的大颗粒，调整多点检查系统的照明功率密度。 至少一个低功率次级照明点位于相对较高功率的初级照明点的阵列的检查路径中。 从二次照明点散射的光被收集并成像到一个或多个检测器上，而不会使颗粒过热并损坏晶片。 呈现各种实施例和方法来区分从二次照明点散射的光。 响应于确定主照明点的检查路径中的大颗粒的存在，将命令发送到照明功率密度衰减器，以将主照明点的照明功率密度降低到初级照明点之前的安全水平 到达大颗粒。

公开(公告)号：US20120073972A1

公开(公告)日：2012-03-29

申请号：US13123518

申请日：2009-10-09

Applicant: Fraser McNeil Watson

Inventor： Fraser McNeil Watson

IPC: G01N27/447 ,  G01N15/02 ,  G01N21/00

CPC classification number: G01N21/253 ,  B01L3/5025 ,  B01L2300/0829 ,  B01L2400/0421 ,  G01N21/03 ,  G01N21/51 ,  G01N27/44721 ,  G01N2015/1493 ,  G01N2021/0346 ,  G01N2021/4707 ,  G01N2021/513 ,  G01N2201/103 ,  G01N2201/105

Abstract: A high-throughput optical suspension characterization instrument is disclosed, which can include hydraulically separate and at least partially transparent sample containers. A selection mechanism is operative to selectively direct light from a light source (12) through different ones of the sample containers along an optical axis, and an off-axis scattering detector (38,24) is responsive to scattered light from the light source after it has interacted with a sample. Phase analysis light scattering is used to determine the electrophoretic mobility and zeta potential of samples. A second instrument is disclosed, wherein all sample containers are illuminated simultaneously. Transmitted light is collected by a camera. The electrophoretic mobility and hydrodynamic size of the samples may be determined.

Abstract translation: 公开了一种高通量光学悬浮表征仪器，其可以包括液压分离和至少部分透明的样品容器。 选择机构可操作以沿着光轴选择性地将来自光源（12）的光引导通过不同的样本容器，并且离轴散射检测器（38,24）响应于来自光源的散射光， 它已经与样本进行了互动。 相位分析光散射用于确定样品的电泳迁移率和ζ电位。 公开了第二种仪器，其中所有的样品容器都是同时照射的。 透射光被照相机收集。 可以确定样品的电泳迁移率和流体动力学尺寸。

公开(公告)号：US20120044505A1

公开(公告)日：2012-02-23

申请号：US13202681

申请日：2010-01-22

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01B11/24

CPC classification number: G01N21/9501 ,  G01N2201/103

Abstract: A surface inspecting apparatus rotates a semiconductor wafer 100 (inspection object) as a main scan while translating the semiconductor wafer 100 as an auxiliary scan, illuminates the surface of the semiconductor wafer 100 with illuminating light 21, thereby forms an illumination spot 3 as the illumination area of the illuminating light 21, detects scattered or diffracted or reflected light from the illumination spot, and detects a foreign object existing on the surface of the semiconductor wafer 100 or in a part of the semiconductor wafer 100 in the vicinity of the surface based on the result of the detection. In the surface inspecting apparatus, the translation speed of the auxiliary scan is controlled according to the distance from the rotation center of the semiconductor wafer 100 in the main scan to the illumination spot. With this control, the inspection time can be shortened while the deterioration in the detection sensitivity and the increase in the thermal damage during the surface inspection are suppressed.

Abstract translation: 表面检查装置将作为辅助扫描的半导体晶片100作为主扫描旋转半导体晶片100（检查对象），用照明光21照射半导体晶片100的表面，从而形成照明点3作为照明 照射光21的区域，检测来自照明光点的散射或衍射或反射的光，并且基于以下方式检测存在于半导体晶片100的表面上的异物或半导体晶片100的表面附近的异物 检测结果。 在表面检查装置中，根据从主扫描中的半导体晶片100的旋转中心到照明点的距离来控制辅助扫描的平移速度。 通过该控制，可以在检测灵敏度的劣化和表面检查时的热损伤的增加被抑制的同时缩短检查时间。

公开(公告)号：US20110267600A1

公开(公告)日：2011-11-03

申请号：US13142554

申请日：2009-12-16

Applicant: Toshihiko Ouchi ,  Shintaro Kasai

Inventor： Toshihiko Ouchi ,  Shintaro Kasai

IPC: G01N21/35 ,  G01B11/28

CPC classification number: G01N21/3581 ,  G01N21/3563 ,  G01N21/8806 ,  G01N21/9505 ,  G01N2201/103

Abstract: In an examining apparatus or method, values of thickness and characteristic of an object, or distributions thereof can be simultaneously acquired. The examining apparatus includes a portion 9 for irradiating an object 2 with radiation, a portion 10 for detecting the radiation from the object, an acquiring portion 26, a storing portion 21 and a calculating portion 20. The acquiring portion acquires transmission time associated with detection time of radiation, and amplitude of the radiation. The storing portion beforehand stores relationship data between the transmission time and amplitude, and representative values of characteristic of the object. The calculating portion obtains values of thickness and characteristic of the object based on the transmission time, amplitude and relationship data.

Abstract translation: 在检查装置或方法中，可以同时获取对象的厚度和特征值或其分布。 检查装置包括用于对物体2照射辐射的部分9，用于检测来自物体的辐射的部分10，获取部分26，存储部分21和计算部分20.获取部分获取与检测相关的传输时间 辐射时间和辐射幅度。 存储部预先存储发送时间和振幅之间的关系数据以及对象的特征的代表值。 计算部分根据传输时间，幅度和关系数据，获得对象的厚度和特征值。

公开(公告)号：US20100123088A1

公开(公告)日：2010-05-20

申请号：US12692758

申请日：2010-01-25

Applicant: Petri KIVELÄ

Inventor： Petri KIVELÄ

IPC: G01J1/58

CPC classification number: G01N21/253 ,  G01N21/13 ,  G01N21/6428 ,  G01N21/6452 ,  G01N21/76 ,  G01N2021/6421 ,  G01N2021/6441 ,  G01N2021/6471 ,  G01N2021/6482 ,  G01N2021/6484 ,  G01N2201/0446 ,  G01N2201/0453 ,  G01N2201/0826 ,  G01N2201/103

Abstract: The present invention relates generally to the field of biochemical laboratory instrumentation for different applications of measuring properties of samples on e.g. microtitration plates and corresponding sample supports. The object of the invention is achieved by providing an optical measurement instrumentation wherein a sample (281-285) is activated (212AS, 218AS) and the emission is detected (291, 292), wherein between the activation and detection phases of measuring the sample, a shift is made in the relative position between the sample and means (218) directing the activation radiation to the sample as well as in the relative position between the sample and the means (293) receiving the emission radiation from the sample. This can be implemented e.g. by moving (299) the sample assay plate and/or a measuring head between the activation and emission phases of a sample. The invention allows a simultaneous activation of a first sample and detecting emission from a second sample thus enhancing efficiency of the measurement.

Abstract translation: 本发明一般涉及生物化学实验室仪器领域，用于不同应用样品的测量性质。 微量滴定板和相应的样品支架。 本发明的目的是通过提供一种光学测量仪器实现的，其中样品（281-285）被激活（212AS，218AS）并且检测到发射（291,292），其中在测量样品的激活和检测阶段之间 在样品和将激活辐射指向样品的装置（218）之间的相对位置以及样品和接收来自样品的发射辐射的装置（293）之间的相对位置进行位移。 这可以被实现。 通过在样品的活化和发射阶段之间移动（299）样品测定板和/或测量头。 本发明允许同时激活第一样品并检测来自第二样品的发射，从而提高测量的效率。

公开(公告)号：US07312453B2

公开(公告)日：2007-12-25

申请号：US11535025

申请日：2006-09-25

Applicant: Bruce R. Davis ,  Paul H. Shelley

Inventor： Bruce R. Davis ,  Paul H. Shelley

IPC: G01J5/02

CPC classification number: G01N25/00 ,  G01N21/3563 ,  G01N21/55 ,  G01N33/20 ,  G01N2021/8887 ,  G01N2021/95615 ,  G01N2201/103

Abstract: Methods for determining corrosion products on a substrate are disclosed. In one embodiment, a non-destructive method for determining an amount of corrosion product on a metallic substrate includes non-destructively determining a value Ia of infrared energy absorbed in a corrosion product on a metallic substrate; and correlating the value Ia of the infrared energy absorbed to an amount of the corrosion product.

Abstract translation: 公开了用于确定基板上的腐蚀产物的方法。 在一个实施例中，用于确定金属基底上的腐蚀产物量的非破坏性方法包括非破坏性地确定在金属基底上的腐蚀产物中吸收的红外能量的值Ia; 并将吸收的红外能量的值Ia与腐蚀产物的量相关联。

公开(公告)号：US06992758B2

公开(公告)日：2006-01-31

申请号：US10359529

申请日：2003-02-05

Applicant: Andrew D. Kaplan ,  James C. Mansfield ,  Douglas C. Mark

Inventor： Andrew D. Kaplan ,  James C. Mansfield ,  Douglas C. Mark

IPC: G01N21/01

CPC classification number: G01N21/23 ,  G01N2021/9513 ,  G01N2201/101 ,  G01N2201/103

Abstract: The disclosure is directed to systems and methods for precisely measuring birefringence properties of large-format samples of optical elements. A gantry-like configuration is employed for precise movement of birefringence measurement system components relative to the sample. There is also provided an effective large-format sample holder that adequately supports the sample to prevent induced birefringence therein while still presenting a large area of the sample to the unhindered passage of light.

Abstract translation: 本公开涉及用于精确测量大幅面光学元件样品的双折射性质的系统和方法。 双折射测量系统部件相对于样品的精确运动采用了龙门式结构。 还提供了一种有效的大幅面样品保持器，其充分地支撑样品以防止其中引起的双折射，同时仍然将大面积的样品提供给无阻碍的光通过。

公开(公告)号：US20040217290A1

公开(公告)日：2004-11-04

申请号：US10427006

申请日：2003-04-29

Inventor： Bruce R. Davis ,  Paul H. Shelley

IPC: G01N021/35

CPC classification number: G01N25/00 ,  G01N21/3563 ,  G01N21/55 ,  G01N33/20 ,  G01N2021/8887 ,  G01N2021/95615 ,  G01N2201/103

Abstract: A non-destructive method is provided for determining amount and distribution of a corrosion product on a metallic substrate. A value of infrared energy reflected from the metallic substrate without corrosion is determined. A value of infrared energy reflected from the metallic substrate with the corrosion product is determined. A value of infrared energy absorbed in the corrosion product is determined, and the value of the infrared energy absorbed in the corrosion product is correlated to an amount of the corrosion product.

Abstract translation: 提供了用于确定金属基底上的腐蚀产物的量和分布的非破坏性方法。 确定从没有腐蚀的金属基材反射的红外能量的值。 确定从具有腐蚀产物的金属基底反射的红外能量的值。 确定在腐蚀产物中吸收的红外能量的值，并且腐蚀产物中吸收的红外能量的值与腐蚀产物的量相关。

公开(公告)号：US20040075834A1

公开(公告)日：2004-04-22

申请号：US10359529

申请日：2003-02-05

Applicant: Hinds Instruments, Inc.

Inventor： Andrew D. Kaplan ,  James C. Mansfield ,  Douglas C. Mark

IPC: G01J004/00

CPC classification number: G01N21/23 ,  G01N2021/9513 ,  G01N2201/101 ,  G01N2201/103

Abstract: The disclosure is directed to systems and methods for precisely measuring birefringence properties of large-format samples of optical elements. A gantry-like configuration is employed for precise movement of birefringence measurement system components relative to the sample. There is also provided an effective large-format sample holder that adequately supports the sample to prevent induced birefringence therein while still presenting a large area of the sample to the unhindered passage of light.

Abstract translation: 本公开涉及用于精确测量大幅面光学元件样品的双折射性质的系统和方法。 双折射测量系统部件相对于样品的精确运动采用了龙门式结构。 还提供了一种有效的大幅面样品保持器，其充分地支撑样品以防止其中引起的双折射，同时仍然将大面积的样品呈现给无阻碍的光通过。

公开(公告)号：US5689109A

公开(公告)日：1997-11-18

申请号：US295740

申请日：1994-08-30

Applicant: Raimund Schutze

Inventor： Raimund Schutze

IPC: G01N33/483 ,  C12M1/34 ,  G01N1/28 ,  G01N15/02 ,  G01N15/10 ,  G01N15/14 ,  G01N21/27 ,  G02B21/32 ,  H05H3/04

CPC classification number: G01N15/0205 ,  C12M41/46 ,  G01N2201/103 ,  G01N2201/1087

Abstract: Apparatus for the manipulation, processing and observation of small particles, in particular biological particles, is disclosed. A first laser (4) generates light beams in a first wavelength range, which are focused with a first optical device (12, 13; 14, 15) and form an optical trap. A object holder (22) serves to contain the relevant particles. In addition a light source (17) for observation light is provided, whereas observation and recording devices serve to observe particles and record their behavior. A second laser (3) generates light beams in a second wavelength range, which are focused in order to manipulate particles in the object holder. The optical devices for the individual light beams can be positioned and focused independently of one another, and at the beginning of manipulation and observation the beams are focused in the same object plane of the object holder independently of their wavelengths.

Abstract translation: PCT No.PCT / EP94 / 00090 Sec。 371日期1994年8月30日 102（e）日期1994年8月30日PCT 1994年1月13日PCT PCT。 公开号WO94 / 16543 日期：1994年7月21日公开了用于操作，加工和观察小颗粒，特别是生物颗粒的装置。 第一激光器（4）产生第一波长范围内的光束，它们与第一光学装置（12,13; 14,15）聚焦并形成光阱。 物体保持器（22）用于容纳相关颗粒。 此外，提供用于观察光的光源（17），而观察和记录装置用于观察颗粒并记录其行为。 第二激光器（3）产生在第二波长范围内的光束，其被聚焦以便操纵物体保持器中的颗粒。 用于各个光束的光学装置可以彼此独立地定位和聚焦，并且在操纵和观察开始时，光束被聚焦在物体保持器的相同物体平面中，而与其波长无关。