METHOD FOR FABRICATION OF DISCRETE DYNODE ELECTRON MULTIPLIERS
    209.
    发明公开
    METHOD FOR FABRICATION OF DISCRETE DYNODE ELECTRON MULTIPLIERS 失效
    制造离散多维电子倍增器的方法

    公开(公告)号:EP0846332A1

    公开(公告)日:1998-06-10

    申请号:EP96925463.0

    申请日:1996-07-25

    IPC: H01J9

    CPC classification number: H01J9/125 H01J2201/32

    Abstract: A method for manufacturing a discrete dynode electron multiplier includes employing micromachining and thin film techniques to produce tapered apertures in an etchable substrate, bonding the substrates together and activating the internal surfaces of the etched substrate using chemical vapor deposition or oxidizing and nitriding techniques.

    Abstract translation: 用于制造分立的倍增极电子倍增器的方法包括采用微机械加工和薄膜技术在可蚀刻基板中产生锥形孔,将基板粘合在一起并使用化学气相沉积或氧化和氮化技术活化蚀刻基板的内表面。

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