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    SPECTRAL DETECTION METHOD AND DEVICE, AND DEFECT INSPECTION METHOD AND APPARATUS USING THE SAME
    202.
    发明申请
    SPECTRAL DETECTION METHOD AND DEVICE, AND DEFECT INSPECTION METHOD AND APPARATUS USING THE SAME 有权
    光谱检测方法和装置，以及缺陷检查方法和使用其的装置

    公开(公告)号：US20100182589A1

    公开(公告)日：2010-07-22

    申请号：US12626963

    申请日：2009-11-30

    Applicant: Takenori HIROSE ,  Minoru Yoshida ,  Hideaki Sasazawa ,  Yasuhiro Yoshitake

    Inventor： Takenori HIROSE ,  Minoru Yoshida ,  Hideaki Sasazawa ,  Yasuhiro Yoshitake

    IPC: G01J3/08 ,  G01J3/00

    CPC classification number: G01J3/02 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01N21/95607

    Abstract: In spectral detection for detecting the shape of repeating pattern structures uniformly formed on a surface of a test object, it is advantageous to use light having a wide wavelength range in a short wavelength region. However, it is not easy to realize a relatively simple optical system capable of spectral detection of light having a wide wavelength range in a short wavelength region, namely in ultraviolet region. The present invention provides an inspection apparatus for detecting pattern defects. The inspection apparatus includes a spectral detection optical system capable of spectral detection of light in a wavelength range from deep ultraviolet to near infrared. The spectral detection optical system includes a spatially partial mirror serving as a half mirror and a reflecting objective provided with an aperture stop for limiting the angle and direction of light to be applied to and reflected by a test object.

    Abstract translation: 在用于检测在测试对象的表面上均匀形成的重复图案结构的形状的光谱检测中，有利的是在短波长范围内使用宽波长范围的光。 然而，实现能够在短波长区域即紫外线区域中具有宽波长范围的光的光谱检测的相对简单的光学系统是不容易的。 本发明提供一种用于检测图案缺陷的检查装置。 检查装置包括能够对从深紫外线到近红外线的波长范围内的光进行光谱检测的光谱检测光学系统。 光谱检测光学系统包括用作半反射镜的空间部分反射镜和设置有孔径光阑的反射物镜，该孔径光阑用于限制被施加到测试对象并由被测物体反射的光的角度和方向。

    Optical measuring method for semiconductor multiple layer structures and apparatus therefor
    205.
    发明授权
    Optical measuring method for semiconductor multiple layer structures and apparatus therefor 有权
    半导体多层结构的光学测量方法及其设备

    公开(公告)号：US07038768B2

    公开(公告)日：2006-05-02

    申请号：US10642184

    申请日：2003-08-18

    Applicant: Hideo Takeuchi ,  Yoshitsugu Yamamoto

    Inventor： Hideo Takeuchi ,  Yoshitsugu Yamamoto

    IPC: G01J3/00 ,  G01J3/08 ,  G01J3/28

    CPC classification number: G01J3/4338 ,  G01J2001/4242 ,  G01N21/47 ,  G01N21/6489 ,  G01N2021/4735

    Abstract: In a measuring apparatus for a semiconductor multiple layer structure, a spectrometer disperses light from a sample for measurement of the photoluminescence spectrum or disperses probe light to irradiate the sample for the measurement of the reflection spectrum. A controller makes a guide member guide the white light to the spectrometer and acquire electric signals from a first detector for the measurement of the reflection spectrum, and makes the guide member guide the light from the spectrometer to a second detector to acquire electric signals for the measurement of the photoluminescence spectrum.

    Abstract translation: 在半导体多层结构的测量装置中，光谱仪从用于测量光致发光光谱的样品中分散光，或者分散探针光以照射样品用于测量反射光谱。 控制器使引导构件将白光引导到光谱仪，并从第一检测器获取用于测量反射光谱的电信号，并且使引导构件将来自光谱仪的光引导到第二检测器，以获取电信号 测量光致发光光谱。

    Spectrometer system for optical reflectance measurements
    206.
    发明申请
    Spectrometer system for optical reflectance measurements 有权
    用于光学反射测量的光谱仪系统

    公开(公告)号：US20050259254A1

    公开(公告)日：2005-11-24

    申请号：US11113347

    申请日：2005-04-25

    Applicant: Babs Soller ,  Patrick Phillipps ,  Michael Parker

    Inventor： Babs Soller ,  Patrick Phillipps ,  Michael Parker

    IPC: G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01N21/27 ,  G01N21/35 ,  G01N21/49

    CPC classification number: G01J3/108 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/08 ,  G01J3/10 ,  G01N21/274 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/3563 ,  G01N21/3577 ,  G01N21/49 ,  G01N2201/08

    Abstract: A spectrometer system includes a thermal light source for illuminating a sample, where the thermal light source includes a filament that emits light when heated. The system additionally includes a spectrograph for measuring a light spectrum from the sample and an electrical circuit for supplying electrical current to the filament to heat the filament and for controlling a resistance of the filament. The electrical circuit includes a power supply that supplies current to the filament, first electrical components that sense a current through the filament, second electrical components that sense a voltage drop across the filament, third electrical components that compare a ratio of the sensed voltage drop and the sensed current with a predetermined value, and fourth electrical components that control the current through the filament or the voltage drop across the filament to cause the ratio to equal substantially the predetermined value.

    Abstract translation: 光谱仪系统包括用于照亮样品的热光源，其中热光源包括在加热时发光的灯丝。 该系统还包括用于测量来自样品的光谱的光谱仪和用于向灯丝提供电流以加热灯丝并控制灯丝电阻的电路。 该电路包括向灯丝提供电流的电源，感测通过灯丝的电流的第一电气部件，感测灯丝两端的电压降的第二电气部件，将感测到的电压降和/ 具有预定值的感测电流以及控制通过灯丝的电流的第四电气部件或穿过灯丝的电压降使得该比率基本上等于预定值。

    Broad band referencing reflectometer
    207.
    发明申请
    Broad band referencing reflectometer 有权
    宽带参考反射计

    公开(公告)号：US20050006590A1

    公开(公告)日：2005-01-13

    申请号：US10909126

    申请日：2004-07-30

    Applicant: Dale Harrison

    Inventor： Dale Harrison

    IPC: G01J3/08 ,  G01J3/28 ,  G01J3/36 ,  G01J3/42 ,  G01N3/28 ,  G01N21/21 ,  G01N21/27 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01J5/00

    CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

    Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

    Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

    Optical measuring device, particularly using spectrophotometry
    208.
    发明授权
    Optical measuring device, particularly using spectrophotometry 失效
    光学测量装置，特别是使用分光光度法

    公开(公告)号：US5450194A

    公开(公告)日：1995-09-12

    申请号：US210126

    申请日：1994-03-17

    Applicant: Bernard Dureault ,  Jacques Lordet ,  Claude Bonnejean

    Inventor： Bernard Dureault ,  Jacques Lordet ,  Claude Bonnejean

    IPC: G01J3/02 ,  G01N21/05 ,  G01N21/25 ,  G01N21/27 ,  G02B6/28 ,  H01S3/00 ,  G01J3/42 ,  G01J3/08

    CPC classification number: G01N21/253 ,  G02B6/2848 ,  G01J3/02

    Abstract: An optical measuring device, particularly using spectrophotometry, which comprises at least one group of optical fibers (24) connected to measuring cells, at least one auxiliary optical fiber (30) and at least one selection member connecting the latter to the group. The selective member establishes a link between the auxiliary fiber and one of the fibers of the group. The selection member comprises fixed optical means (32, 34 ) for establishing the link between the group and the auxiliary fiber and retractable seals (36) associated with the fibers of the group and which seal the ends of auxiliary fibers leading to said member.

    Abstract translation: 特别是使用分光光度法的光学测量装置，其包括连接到测量单元的至少一组光纤（24），至少一个辅助光纤（30）和将其连接到该组的至少一个选择部件。 选择构件在辅助纤维和组中的一个纤维之间建立连接。 选择构件包括固定光学装置（32,34），用于建立组和辅助光纤之间的连接以及与组的纤维相关联的可缩回的密封件（36），并且密封通向所述构件的辅助纤维的端部。

    Optical property measuring device
    210.
    发明授权
    Optical property measuring device 失效
    光学性能测量装置

    公开(公告)号：US4810872A

    公开(公告)日：1989-03-07

    申请号：US076292

    申请日：1987-07-22

    Applicant: Takeo Murakoshi ,  Sadao Minakawa

    Inventor： Takeo Murakoshi ,  Sadao Minakawa

    IPC: G01M11/00 ,  G01J3/08 ,  G01J3/42 ,  G01N21/25 ,  G01N21/27 ,  G02F1/01 ,  G01J3/50

    CPC classification number: G01N21/255 ,  G01J2003/425 ,  G01J3/08 ,  G01J3/42 ,  G01N2021/1742

    Abstract: Light irradiated to a sample is detected by a detector in order to measure the optical properties of the sample. The image of a minute virtual light source for the light is focused in the neighborhood of the measuring face of the sample by a first optical system arranged between the light source and the sample. The light outgoing from the sample is incident to the detector by way of a second optical system arranged between the sample and the detector and having conjugate points in the neighborhood of the measuring face of the sample and of the light receiving point of the detector.

    Abstract translation: 通过检测器检测照射到样品的光，以测量样品的光学性质。 用于光的微小虚拟光源的图像通过布置在光源和样品之间的第一光学系统集中在样品的测量面的附近。 从样品出射的光通过布置在样品和检测器之间的第二光学系统入射到检测器，并且在样品的测量面和检测器的光接收点附近具有共轭点。

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