Abstract:
An electro-kinetic electro-static air conditioner includes a self-contained ion generator that provides electro-kinetically moved air with ions and safe amounts of ozone. The ion generator includes a high voltage pulse generator whose output pulses are coupled between first and second electrode arrays. Preferably the first array comprises one or more wire electrodes spaced staggeringly apart from a second array comprising hollow "U"-shaped electrodes. Preferably a ratio between effective area of an electrode in the second array compared to effective area of an electrode in the first array exceeds about 15:1 and preferably is about 20:1. An electric field produced by the high voltage pulses between the arrays produces an electrostatic flow of ionized air containing safe amounts of ozone. A bias electrode, electrically coupled to the second array electrodes, affects net polarity of ions generated. The outflow of ionized air and ozone is thus conditioned.
Abstract:
PROBLEM TO BE SOLVED: To provide an ozone generating element capable of suppressing the reduction a generating quantity of ozone due to deterioration of a protective layer and a method for manufacturing the same.SOLUTION: A laminated body 12 is constituted by laminating dielectric layers 18a to 18e. A discharge electrode 14 is provided on the dielectric layer 18a. An induction electrode 16 faces the discharge electrode 14 via the dielectric layer 18a by being arranged on the dielectric layer 18b. A protective layer 20 is arranged on the first dielectric layer 18a so as to cover the discharge electrode 14, and comprises a glass ceramic.
Abstract:
PROBLEM TO BE SOLVED: To provide a method for measuring ozone gas concentration for simply measuring concentration of ozone gas. SOLUTION: In a bevel part cleaning device 10 for removing a CF system deposit 18 sticking to a bevel part of a wafer W, a process gas generator 22 generates a process gas containing an ozone gas from a raw material gas containing an oxygen gas, and a mass flow controller 23 for process gas measures a flow rate of the process gas, and a controller 33 calculates a pace of decrease of the flow rate from the raw material gas to the process gas, and then calculates a concentration of the ozone gas contained in the process gas based on the pace of decrease of the flow rate. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
A corona discharge apparatus comprising: (a) an elongate inner electrode, (b) an elongate dielectric sleeve mounted on the inner electrode, (c) an elongate outer electrode mounted on the dielectric sleeve, and (d) an ozone-producing region over which the outer electrode extends, the ozone- producing region having an inlet end and an outlet end, the ozone-producing region defined by three sealing members at the inlet end thereof and three sealing members at the outlet end thereof, the sealing members forming a seal between the inner electrode and the dielectric sleeve.