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公开(公告)号：EP0361064A3
公开(公告)日：1991-01-16
申请号：EP89115267.0
申请日：1989-08-18
Applicant: ANRITSU CORPORATION
Inventor： Sonobe, Yoji , Tanimoto, Takao
CPC classification number: G01J3/28 , G01J1/1626 , G01J3/447 , G01J4/00
Abstract: A spectroscope device (13) of the dispersion type receives light (a) to be measured and emits it as dispersed light which corresponds to each of wavelengths to be measured. An optical-path switching device (17) directs the dispersed light emitted from the spectroscope device (13) to pass through first and second paths. A first photoelectric converter (18) receives the light which is directed to pass through the first path by the optical-path switching device (17). A polarizing/separating device (19) poralizes and separates the light, which is directed to pass through the second path by the optical-path switching device (17), into two polarized lights (b, c). Second and third photoelectric converter (20, 21) respectively receive the two polarized lights (b, c) polarized and separated by the polarizing/separating device. An arithmetical process section (25) corrects a first optical spectrum strength according to an output from the first photoelectric converter (18) with at least a ratio of second and third optical spectrum strengths according to outputs from the second and third photoelectric converter (20, 21), to thereby calculate absolute spectrum values of the measured light every wavelength to be measured about the light.
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公开(公告)号：EP0131183A2
公开(公告)日：1985-01-16
申请号：EP84107044.4
申请日：1984-06-20
Applicant: International Business Machines Corporation
Inventor： Bjorklund, Gary Carl , Levenson, Marc David
IPC: G01J3/42
CPC classification number: G01J3/4338 , G01J3/447 , G01J9/04 , G01N21/19
Abstract: A method and device for detecting dichroic and/or birefringent narrow spectral features in a sample is described. The method includes the steps of providing a beam of light having an optical frequency bandwidth which is narrow compared to the width of the narrow spectral feature and having a center frequency ωc which lies near the narrow spectral feature, polarization phase modulating a beam of light with a single RF frequency to provide a pure FM spectrum having upper and lower sidebands in which either the carrier and sidebands have been polarized differently with respect to one another, exposing the sample containing the narrow spectral feature to the polarized modulated light so that the FM sidebands probe the narrow spectral feature, polarization analyzing and then photodetecting the light emerging from the sample to detect a RF beat at the specific RF frequency used for the polarization phase modulation, and electronically monitoring the amp- l i tude of the RF beat signal to indicate the strength of the narrow spectral feature. The device includes a polarization phase modulator (17) and a polarization analyzer (18) positioned on opposite sides of the sample (16). In a preferred embodiment the polarization phase modulator produces a frequency modulated optical spectrum with the sidebands polarized precisely orthogonal to the carrier (Fig. 3).
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公开(公告)号：KR20180036757A
公开(公告)日：2018-04-09
申请号：KR20187005985
申请日：2016-08-29
CPC classification number: G01N21/276 , G01J3/0286 , G01J3/32 , G01J3/36 , G01J3/42 , G01J3/433 , G01J3/447 , G01N21/21 , G01N21/35 , G01N21/474 , G01N21/4785 , G01N21/49 , G01N2021/4709 , G01N2021/4778 , G01N2201/0221 , G01N2201/12707 , G01N2201/12723
Abstract: 본내용은샘플링계면에서샘플(620) 내의물질의농도및 유형을측정하기위한시스템(600) 및방법에관한것이다. 시스템(600)은광원(602), 하나이상의광학체(606, 610, 612), 하나이상의변조기(634, 636), 레퍼런스(608), 검출기(630), 및제어기(640)를포함한다. 개시된시스템및 방법은상이한측정광 경로들사이의하나이상의컴포넌트를공유함으로써광원, 하나이상의광학체, 및검출기로부터비롯된드리프트를해결할수 있다. 추가적으로, 시스템은광원과샘플또는기준재료사이에하나이상의변조기를배치함으로써상이한유형의드리프트를분별하고미광(stray light)으로인한잘못된측정을배제할수 있다. 또한, 시스템은검출기픽셀및 마이크로광학체를샘플내의위치및 깊이로맵핑함으로써샘플내의다양한위치및 깊이를따라물질을검출할수 있다.
Abstract translation: 本公开涉及用于在采样接口处测量样本（620）中的物质的浓度和类型的系统（600）和方法。 系统600包括光源602，一个或多个光学体606,610,612，一个或多个调制器634,636，参考608，检测器630和控制器640。 所公开的系统和方法可以通过在不同测量光路径之间共享一个或多个组件来解决源自光源，一个或多个光学器件和检测器的漂移。 此外，系统可以区分不同类型的漂移，并通过在光源和样品或参比材料之间放置一个或多个调制器来消除杂散光导致的错误测量。 此外，系统可以通过将探测器像素和微光学器件映射到样品内的位置和深度来沿着样品中的各个位置和深度检测材料。
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公开(公告)号：KR1020160097576A
公开(公告)日：2016-08-18
申请号：KR1020150019426
申请日：2015-02-09
Applicant: 한양대학교 에리카산학협력단
Inventor： 안일신
CPC classification number: G01J3/447 , G01N21/211
Abstract: 본발명은이미징타원해석기에관한것으로, 단색광원으로부터방출된빛을통과시켜원편광시키는원형편광기, 상기원편광된빛을반사시켜편광상태를변화시키는시편, 상기편광상태가변화된빛을확대또는축소시키는이미징광학계, 상기확대또는축소된빛을원형편광성분으로나누는원형편광분석기, 및상기빛의원형편광성분의밝기분포를밝기상으로나타내는이차원어레이검출기를포함함으로써, 빠르게타원해석기상을구할수 있다.
Abstract translation: 本发明涉及一种成像椭偏仪，包括：圆偏振镜，用于穿透从单个光源发射的光被圆偏振; 用于反射圆偏振光并改变偏振态的样本; 用于放大或缩小极化状态改变的光的图像光学系统; 用于通过圆偏振分量来分割放大或缩小的光的圆偏振分析器; 以及用于示出光的圆偏振分量的亮度色散的二维阵列检测器，从而快速获得椭圆计图像。
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公开(公告)号：KR1020090049951A
公开(公告)日：2009-05-19
申请号：KR1020070116334
申请日：2007-11-14
Applicant: 한국표준과학연구원
CPC classification number: G01B11/0641 , G01N21/211 , G01N21/8422 , G01J3/447
Abstract: The present invention relates to The present invention relates to an ellipsometer, and more particularly, to a linear focused-beam ellipsometer which linearly focuses a light on a specimen using a cylindrical optical system and then measures variation in polarization state of the reflected light. A light split by the beam splitting part is linearly focused onto a plurality of specimens and variation in polarization state of the reflected light is measured with respect to multiple angles of incidence. Therefore, it is possible to measure a plurality of specimens at the same time.
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Patent Agency Ranking
公开(公告)号：KR100765709B1
公开(公告)日：2007-10-11
申请号：KR1020060026486
申请日：2006-03-23
Applicant: 오므론 가부시키가이샤 , 국립대학법인 홋가이도 다이가쿠
IPC: G01J3/447
Abstract: 과제
채널화된 분광 편광 계측법에 있어서, 이상자(移相子; 위상을 변화시키는 장치)의 리타데이션이 시료의 상태에 의해 다양하게 변동함에 의해 생기는 시료의 분광 편광 특성을 나타내는 파라미터의 계측 오차를 효과적으로 제거한다.
해결 수단
이상자의 리타데이션을 일정인 것으로 하는데는, 이상자를 통과하는 광의 입사 방향을 안정시키면 좋다는 것에 착안하여, 이상자를 시료에 대해 광원측에 배치하고, 계측 오차에 관계되는 시료에 의한 광선 방향의 변동 등의 영향을 효과적으로 제거하였다.
분광편광계측-
公开(公告)号：KR1020060103848A
公开(公告)日：2006-10-04
申请号：KR1020060026486
申请日：2006-03-23
Applicant: 오므론 가부시키가이샤 , 국립대학법인 홋가이도 다이가쿠
IPC: G01J3/447
Abstract: 과제
채널화된 분광 편광 계측법에 있어서, 이상자(移相子; 위상을 변화시키는 장치)의 리타데이션이 시료의 상태에 의해 다양하게 변동함에 의해 생기는 시료의 분광 편광 특성을 나타내는 파라미터의 계측 오차를 효과적으로 제거한다.
해결 수단
이상자의 리타데이션을 일정인 것으로 하는데는, 이상자를 통과하는 광의 입사 방향을 안정시키면 좋다는 것에 착안하여, 이상자를 시료에 대해 광원측에 배치하고, 계측 오차에 관계되는 시료에 의한 광선 방향의 변동 등의 영향을 효과적으로 제거하였다.
분광편광계측-
公开(公告)号：KR1020030086859A
公开(公告)日：2003-11-12
申请号：KR1020020025063
申请日：2002-05-07
IPC: G01J4/00
CPC classification number: G01J4/04 , G01J3/447 , G01N21/211
Abstract: PURPOSE: An integral type spectroscopic ellipsometry device is provided to simplify a structure of a spectroscopic ellipsometry device by accommodating all optical parts in a box type case. CONSTITUTION: An integral type spectroscopic ellipsometry device includes a box type case(114) having an opening. Light radiated from a light source section(100) is incident into a test sample(104) placed on one surface of the box type case(114) through a polarized light generator(102). Polarized light reflected from the test sample(104) is analyzed. Then, light is detected according to wavelength thereof. The detecting signal is transmitted into a computer(116) so as to analyze optical information of the test sample(104). The light source radiates light towards the polarized light generator(102). The polarized light generator(102) is rotated or modulated by means of a driving section.
Abstract translation: 目的：提供一种整体型分光椭圆偏振装置，通过容纳盒型壳体中的所有光学部件来简化分光椭圆测量装置的结构。 构成：整体型分光椭圆测量装置包括具有开口的箱型壳体（114）。 从光源部分（100）辐射的光通过偏振光发生器（102）入射到放置在箱型壳体（114）的一个表面上的测试样品（104）中。 分析从测试样品（104）反射的偏振光。 然后，根据其波长检测光。 将检测信号发送到计算机（116），以分析测试样本（104）的光学信息。 光源向偏振光发生器（102）发射光。 偏振光发生器（102）通过驱动部分旋转或调制。
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公开(公告)号：KR1020000037382A
公开(公告)日：2000-07-05
申请号：KR1020000021148
申请日：2000-04-21
Applicant: 강선모
IPC: G01J3/28
CPC classification number: G01J3/447 , G01J1/0238 , G01J1/4257
Abstract: PURPOSE: An apparatus and a method for measuring light wavelength of a portable polarized light interferometer are provided to simplify the structure in a compact and portable size and manufacture a precise apparatus stable in external environments. CONSTITUTION: A method for measuring light wavelength of a portable polarized light interferometer in an apparatus including a light conversion element having a light processing part having first and second polarizing elements and a phase delay, and a light detecting part, a wavelength measuring element, and a signal processing part, includes the steps of generating a difference of phase with relation to a reference shaft by selecting a predetermined polarized light component(600), polarizing the selected polarized light component having the difference of phase to a predetermined shaft(610), outputting a current signal by detecting a light power strength including the difference of phase with relation to respective shafts(620), outputting a voltage signal according to a log ratio operation on the basis of the current signal(630), and diagrammatizing functions for wavelength on the basis of the voltage signal to output(640).
Abstract translation: 目的：提供一种用于测量便携式偏振光干涉仪的光波长的装置和方法，以简化紧凑且便携式尺寸的结构，并制造在外部环境中稳定的精确装置。 一种用于测量便携式偏振光干涉仪的光波长的方法，该装置包括具有第一和第二偏振元件的光处理部分和相位延迟的光转换元件，以及光检测部分，波长测量元件和 信号处理部分包括以下步骤：通过选择预定的偏振光分量（600）产生相对于参考轴的相位差，将所选择的具有相位差的偏振光分量偏振到预定轴（610）， 通过检测包括与各轴相关的相位差的光功率强度来输出电流信号（620），根据电流信号输出根据对数比操作的电压信号（630），以及波长的图示功能 基于电压信号输出（640）。
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公开(公告)号：US20240337535A1
公开(公告)日：2024-10-10
申请号：US18749966
申请日：2024-06-21
Inventor： DONG YAO , HANGANG LIANG , CHUNMING JIANG
CPC classification number: G01J3/447 , G01J3/2823 , G06T5/70 , G06V10/764 , G06V10/82 , G06V20/10
Abstract: A polarization intelligent sensing system and a polarization intelligent sensing method are provided. The polarization intelligent sensing method includes performing the polarization imaging on the target scene to obtain the polarization image, performing the calculation on the polarization image to obtain the polarization information of the target scene, generating the image information to be restored of the target scene according to the polarization information of the target scene, and constructing the multi-dimensional target detection neural network based on the DETR, and obtaining the interpretation information of the target scene based on the image information to be restored of the target scene, the spectral information, or the intensity information through the neural networks. The system and the method are widely applied to environments of various carrying platforms, has strong environmental adaptability, and is capable of obtaining target scene information that cannot be sensed by a conventional optical sensor.
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