Abstract:
This system includes: an ozone generating device (3) having discharge electrodes (30) that form a discharge space (305); a gas supplying device (1); a power source device that supplies power to the discharge electrodes (30); a temperature adjustment device (7) that adjusts a temperature of the discharge electrodes (30); a control unit (4) that controls an operation of the ozone generating device (3); and a detection unit (25) that detects an ozone generation parameter (Di) in the ozone generating device (3); wherein, the control unit (4) causes the temperature of the discharge electrodes (30) to increase up to a vaporizing temperature of dinitrogen pentoxide by controlling the temperature adjustment device (7) and the gas supplying device (1) or the temperature adjustment device (7) and the power source device in their cooperative manner, based on the ozone generation parameter (Di) output from the detection unit (25), to thereby switch the operation from a normal operation mode to a cleaning operation mode in which surfaces of the discharge electrodes (30) and the discharge space (305) are cleaned up in a state of continuing generation of ozone in the discharge space (305).
Abstract:
An object of the present invention is to achieve downsizing of a nitrogen-free ozone generation unit provided with a function having a plurality of means for outputting an ozone gas with a high purity and a high concentration. In the present invention, a gas pipe integrated block (30) has a plurality of internal pipe paths (R30a to R30f). The plurality of internal pipe paths are connected to a nitrogen-free ozone generator (1) in which a photocatalytic material for generating ozone is applied to a discharge surface, a controller (an MFC (3), a gas filter (51), and an APC (4)), a raw material gas supply port (14), and an ozone gas output port (15). Thereby, a raw material gas input pipe path extending from the raw material gas supply port through the APC to the nitrogen-free ozone gas generator, and an ozone gas output pipe path extending from the nitrogen-free ozone generator through the gas filter and the MFC to the ozone gas output port, are formed in an integrated unit.
Abstract:
An ozonizer has a flat plate-shaped low voltage electrode 7, a first and second high voltage electrode 3-1, 3-2 provided facing the low voltage electrode 7, a first dielectric 5-1 and first spacer provided between the low voltage electrode 7 and the electrode 3-1, a second dielectric 5-2 and a second spacer provided between the electrode 7 and the electrode 3-2. The ozonizer also has a first electrode cooling sheet 1-1 provided facing the electrode 3-1 at a side opposite a first discharge gap 6-1, a second electrode cooling sheet 1-2 provided facing the electrode 3-2 at a side opposite a second discharge gap 6-2, a first thermal conducting/electric insulating sheet 2-1 sandwiched between the first high voltage electrode 3-1 and the first electrode cooling sheet 1-1 and a second thermal conducting/electric insulating sheet 2-2 sandwiched between the second high voltage electrode 3-2 and the second electrode cooling sheet 1-2.
Abstract:
An ozonizer has a flat plate-shaped low voltage electrode 7, a first and second high voltage electrode 3-1, 3-2 provided facing the low voltage electrode 7, a first dielectric 5-1 and first spacer provided between the low voltage electrode 7 and the electrode 3-1, a second dielectric 5-2 and a second spacer provided between the electrode 7 and the electrode 3-2. The ozonizer also has a first electrode cooling sheet 1-1 provided facing the electrode 3-1 at a side opposite a first discharge gap 6-1, a second electrode cooling sheet 1-2 provided facing the electrode 3-2 at a side opposite a second discharge gap 6-2, a first thermal conducting/electric insulating sheet 2-1 sandwiched between the first high voltage electrode 3-1 and the first electrode cooling sheet 1-1 and a second thermal conducting/electric insulating sheet 2-2 sandwiched between the second high voltage electrode 3-2 and the second electrode cooling sheet 1-2.
Abstract:
In an ozonizer for producing ozone by supplying an oxygen gas to a discharge between two electrodes which are disposed across a predetermined gap on the two sides of a dielectric sheet, the ozone producing efficiency is improved the better for the narrower gap. However, the heat generation of the electrodes lowers the efficiency, so that a cooling passage 23 has to be disposed in the electrodes to cool them with water. As a result, the electrodes are liable to be deformed by the water pressure or the heat. On the other hand, the dielectric sheet 4 is liable to warp or crack so that an extremely narrow gap cannot be realized. In the surface of the electrode, there is formed a first recess 600, in which a spacer 601 and gap adjusting sheets 603 are fitted so that the gap can be adjusted according to the number of the gap adjusting sheets.
Abstract:
Ozone is produced in that oxygene is subjected to a high frequency alternating current with high voltage over a dielectricum. Oxygen is admitted to a narrow space between two plates (2) of aluminum oxide, and the current is applied to an electrode net (3) in the space, whereas the opposite sides of the plates are earthed and cooled.