公开(公告)号：US09076808B2

公开(公告)日：2015-07-07

申请号：US14240677

申请日：2012-08-31

Applicant: Roberto Gaddi ,  Richard L. Knipe ,  Robertus Petrus Van Kampen ,  Anartz Unamuno

Inventor： Roberto Gaddi ,  Richard L. Knipe ,  Robertus Petrus Van Kampen ,  Anartz Unamuno

IPC: H03H9/00 ,  H01L49/02 ,  H01G5/18 ,  H01G5/38 ,  H01G5/40 ,  H01H59/00 ,  H03K17/16 ,  H03K17/687

CPC classification number: H01L28/60 ,  B81B3/0086 ,  B81B2201/016 ,  B81B2207/015 ,  H01G5/18 ,  H01G5/38 ,  H01G5/40 ,  H01H59/0009 ,  H03K17/162 ,  H03K17/6872 ,  H03K2217/0009 ,  H03K2217/0036 ,  H03K2217/009

Abstract: The present invention generally relates to an architecture for isolating an RF MEMS device from a substrate and driving circuit, series and shunt DVC die architectures, and smaller MEMS arrays for high frequency communications. The semiconductor device has one or more cells with a plurality of MEMS devices therein. The MEMS device operates by applying an electrical bias to either a pull-up electrode or a pull-down electrode to move a switching element of the MEMS device between a first position spaced a first distance from an RF electrode and a second position spaced a second distance different than the first distance from the RF electrode. The pull-up and/or pull-off electrode may be coupled to a resistor to isolate the MEMS device from the substrate.

Abstract translation: 本发明一般涉及用于将RF MEMS器件与衬底以及驱动电路，串联和并联DVC管芯结构隔离的架构，以及用于高频通信的较小的MEMS阵列。 该半导体器件具有其中具有多个MEMS器件的一个或多个单元。 MEMS器件通过将电偏压施加到上拉电极或下拉电极来操作，以将MEMS器件的开关元件移动在与RF电极间隔开第一距离的第一位置和间隔第二位置的第二位置 距离与RF电极的第一距离不同。 上拉和/或下拉电极可以耦合到电阻器以将MEMS器件与衬底隔离。

公开(公告)号：US09040854B2

公开(公告)日：2015-05-26

申请号：US13614936

申请日：2012-09-13

Applicant: Arun K. Gupta ,  William C. McDonald

Inventor： Arun K. Gupta ,  William C. McDonald

IPC: H01H57/00 ,  B81B3/00

CPC classification number: H02N2/12 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0013 ,  B81B7/02 ,  B81B2201/016 ,  B81B2201/0221 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/053 ,  B81B2203/058 ,  B81B2203/06

Abstract: A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.

Abstract translation: MEMS静电致动器包括固定到基板的底板和悬挂在底板上方的顶板。 顶板具有平行板中心部分和两个电连接到中心部分的旋转部件。 每个旋转构件安装在旋转构件的中心，用于围绕旋转轴线旋转到一组锚柱。 附件包括沿着每个轴线附接的至少一对扭转弹簧，每个弹簧包括矩形金属正方形，随着旋转构件的旋转，该正方形扭曲。 静电下拉电极位于每个旋转构件的下方。

公开(公告)号：US09036327B2

公开(公告)日：2015-05-19

申请号：US13864430

申请日：2013-04-17

Applicant: Nikon Corporation

Inventor： Hiroshi Konishi ,  Junji Suzuki

IPC: H01G7/06 ,  H01G5/16 ,  H01G7/00 ,  G02B26/08 ,  B81B3/00 ,  H01G5/18 ,  H01L23/522 ,  H01L27/08

CPC classification number: G02B26/08 ,  B81B3/0086 ,  B81B2201/016 ,  H01G5/16 ,  H01G5/18 ,  H01L23/5223 ,  H01L27/0808 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

Abstract: An electronic element includes a fixed portion, and a movable portion which is movable with respect to the fixed portion and which is provided to generate a spring force to make restoration to a predetermined position. The fixed portion is provided with a first driving electrode and a first signal electrode. The movable portion is provided with a second driving electrode and a second signal electrode. An electrostatic force is generated between the first driving electrode and the second driving electrode by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

Abstract translation: 电子元件包括固定部分和可相对于固定部分移动并且被设置成产生弹簧力以使其恢复到预定位置的可动部分。 固定部设置有第一驱动电极和第一信号电极。 可动部设置有第二驱动电极和第二信号电极。 通过施加在第一驱动电极和第二驱动电极之间的电压产生静电力，使得静电力抵抗弹簧力; 并且第一和第二驱动电极以及第一和第二信号电极被布置成使得在第一和第二信号电极之间的间隔距离变宽的方向产生静电力。

公开(公告)号：US20140300404A1

公开(公告)日：2014-10-09

申请号：US14240677

申请日：2012-08-31

Applicant: Roberto Gaddi ,  Richard L. Knipe ,  Robertus Petrus Van Kampen ,  Anartz Unamuno

Inventor： Roberto Gaddi ,  Richard L. Knipe ,  Robertus Petrus Van Kampen ,  Anartz Unamuno

IPC: H01L49/02 ,  H03K17/687 ,  H03K17/16

CPC classification number: H01L28/60 ,  B81B3/0086 ,  B81B2201/016 ,  B81B2207/015 ,  H01G5/18 ,  H01G5/38 ,  H01G5/40 ,  H01H59/0009 ,  H03K17/162 ,  H03K17/6872 ,  H03K2217/0009 ,  H03K2217/0036 ,  H03K2217/009

Abstract: The present invention generally relates to an architecture for isolating an RF MEMS device from a substrate and driving circuit, series and shunt DVC die architectures, and smaller MEMS arrays for high frequency communications. The semiconductor device has one or more cells with a plurality of MEMS devices therein. The MEMS device operates by applying an electrical bias to either a pull-up electrode or a pull-down electrode to move a switching element of the MEMS device between a first position spaced a first distance from an RF electrode and a second position spaced a second distance different than the first distance from the RF electrode. The pull-up and/or pull-off electrode may be coupled to a resistor to isolate the MEMS device from the substrate.

Abstract translation: 本发明一般涉及用于将RF MEMS器件与衬底以及驱动电路，串联和并联DVC管芯结构隔离的架构，以及用于高频通信的较小的MEMS阵列。 该半导体器件具有其中具有多个MEMS器件的一个或多个单元。 MEMS器件通过将电偏压施加到上拉电极或下拉电极来操作，以将MEMS器件的开关元件移动在与RF电极间隔开第一距离的第一位置和间隔第二位置的第二位置 距离与RF电极的第一距离不同。 上拉和/或下拉电极可以耦合到电阻器以将MEMS器件与衬底隔离。

公开(公告)号：US08853797B2

公开(公告)日：2014-10-07

申请号：US12990123

申请日：2009-05-06

Applicant: Robertus T. F. van Schaijk

Inventor： Robertus T. F. van Schaijk

IPC: H01L27/12 ,  B81B3/00

CPC classification number: B81B3/0086 ,  B81B3/0078 ,  B81B2201/016 ,  B81B2203/0118

Abstract: A MEMS device and method, comprising: a substrate; a beam; and a cavity located therebetween; the beam comprising a first beam layer and a second beam layer, the first beam layer being directly adjacent to the cavity, the second beam layer being directly adjacent to the first beam layer; the first beam layer comprising a metal or a metal alloy containing silicon; and the second beam layer comprising a metal or a metal alloy substantially not containing silicon. Preferably the second beam layer is thicker than the first beam layer e.g. at least five times thicker, and the first beam layer comprises a metal or alloy containing between 1% and 2% of silicon. The second beam layer provides desired mechanical and/or optical properties while the first beam layer prevents spiking.

Abstract translation: 一种MEMS器件和方法，包括：衬底; 一束 和位于其间的腔体; 所述光束包括第一光束层和第二光束层，所述第一光束层直接邻近所述空腔，所述第二光束层直接邻近所述第一光束层; 所述第一束层包含含有硅的金属或金属合金; 并且第二束层包含基本上不含硅的金属或金属合金。 优选地，第二光束层比第一光束层厚。 至少五倍厚，第一束层包含含有1％至2％硅的金属或合金。 第二光束层提供期望的机械和/或光学特性，而第一光束层防止尖峰。

公开(公告)号：US20140231236A1

公开(公告)日：2014-08-21

申请号：US14041983

申请日：2013-09-30

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Hanyi DING ,  Qizhi LIU ,  Anthony K. STAMPER

IPC: H01H1/00 ,  G06F17/50

CPC classification number: H01H1/0036 ,  B81B7/0006 ,  B81B2201/016 ,  G06F17/5063 ,  G06F17/5068 ,  H01P1/127

Abstract: A micro-electro-mechanical system (MEMS), methods of forming the MEMS and design structures are provided. The method includes forming a coplanar waveguide (CPW) comprising a signal electrode and a pair of electrodes on a substrate. The method includes forming a first sacrificial material over the CPW, and a wiring layer over the first sacrificial material and above the CPW. The method includes forming a second sacrificial material layer over the wiring layer, and forming insulator material about the first sacrificial material and the second sacrificial material. The method includes forming at least one vent hole in the insulator material to expose portions of the second sacrificial material, and removing the first and second sacrificial material through the vent hole to form a cavity structure about the wiring layer and which exposes the signal line and pair of electrodes below the wiring layer. The vent hole is sealed with sealing material.

Abstract translation: 提供了微机电系统（MEMS），形成MEMS和设计结构的方法。 该方法包括在基板上形成包括信号电极和一对电极的共面波导（CPW）。 该方法包括在CPW上形成第一牺牲材料，以及在第一牺牲材料上方和CPW上方的布线层。 该方法包括在布线层上形成第二牺牲材料层，以及围绕第一牺牲材料和第二牺牲材料形成绝缘体材料。 所述方法包括在所述绝缘体材料中形成至少一个通气孔以暴露所述第二牺牲材料的部分，以及通过所述通气孔去除所述第一和第二牺牲材料以形成围绕所述布线层的空腔结构，并且暴露所述信号线和 一对电极在布线层下方。 通气孔用密封材料密封。

公开(公告)号：US08698257B2

公开(公告)日：2014-04-15

申请号：US13377898

申请日：2010-06-30

Applicant: Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

Inventor： Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

IPC: H01L29/84

CPC classification number: H03H3/0072 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/019 ,  B81C1/00142 ,  B81C1/0015 ,  H03H9/02338 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/02511

Abstract: A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.

Abstract translation: 提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。 谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。 梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

公开(公告)号：US08441773B2

公开(公告)日：2013-05-14

申请号：US12412744

申请日：2009-03-27

Applicant: Hiroshi Konishi ,  Junji Suzuki

Inventor： Hiroshi Konishi ,  Junji Suzuki

IPC: H01G7/06 ,  H01G5/16 ,  H01G7/00

CPC classification number: G02B26/08 ,  B81B3/0086 ,  B81B2201/016 ,  H01G5/16 ,  H01G5/18 ,  H01L23/5223 ,  H01L27/0808 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

Abstract: Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion provided with a first driving electrode and a first signal electrode, and a movable portion provided with a second driving electrode and a second signal electrode, movable with respect to the fixed portion and provided to generate a spring force to make restoration to a predetermined position. An electrostatic force is generated between the first and second driving electrodes by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

Abstract translation: 在等于或大于常规范围的移动范围内驱动是可能的，其驱动电压具有小于引入电压的范围。 电子元件包括设置有第一驱动电极和第一信号电极的固定部分，以及设置有第二驱动电极和第二信号电极的可动部分，该第二驱动电极和第二信号电极可相对于固定部分移动，并产生弹簧力 恢复到预定位置。 通过施加在第一和第二驱动电极之间的电压产生静电力，使得静电力抵抗弹簧力; 并且第一和第二驱动电极以及第一和第二信号电极被布置成使得在第一和第二信号电极之间的间隔距离变宽的方向产生静电力。

公开(公告)号：US20120091547A1

公开(公告)日：2012-04-19

申请号：US13377898

申请日：2010-06-30

Applicant: Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

Inventor： Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

IPC: H01L29/84 ,  H01L21/02

CPC classification number: H03H3/0072 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/019 ,  B81C1/00142 ,  B81C1/0015 ,  H03H9/02338 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/02511

Abstract: A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.

Abstract translation: 提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。 谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。 梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

公开(公告)号：US08089131B2

公开(公告)日：2012-01-03

申请号：US12502500

申请日：2009-07-14

Applicant: Hiroaki Yamazaki

Inventor： Hiroaki Yamazaki

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84 ,  H01L23/02

CPC classification number: H01H59/0009 ,  B81B3/0086 ,  B81B7/007 ,  B81B2201/016 ,  B81B2201/0264 ,  B81B2207/098 ,  H01H2059/0054

Abstract: A micro movable device includes a protection cap for protecting a movable unit arranged above a semiconductor substrate and the movable unit, signal line for transmitting a high-frequency signal formed above the semiconductor substrate, and insulation layer that has projection formed to project upward from the semiconductor substrate and coated surfaces with the signal line.

Abstract translation: 微型可移动装置包括用于保护布置在半导体衬底上方的可移动单元的保护盖和用于传输形成在半导体衬底上方的高频信号的可移动单元，信号线，以及具有突起的绝缘层，所述突起形成为从 半导体衬底和涂有表面的信号线。