Abstract:
PROBLEM TO BE SOLVED: To provide a method of forming fine patterns using a block copolymer. SOLUTION: The method of forming fine patterns includes processing first regions of a substrate including the first regions to form a first pattern, the first regions defining a second region between adjacent first regions, arranging a block copolymer including a first component and a second component on the first and second regions so that the first component of the block copolymer may be aligned on the first regions, and selectively removing one of the first and second components of the block copolymer to form a second pattern having a pitch that is less than a pitch of a first region and an adjacent second region. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide method or the like for measuring a brain wave which can minimize noise by heart rate. SOLUTION: The brain wave measuring method includes the peak information abstract step 100 to abstract a positive peak value and a negative peak value from EKG signals corresponding to heart rate information and to abstract a positive peak value from EEG signals reflecting noise information and brain wave information by the heart rate, the EEG signal classification step 200 to classify a first peak group in which an effect by the heart rate is more than that by the brain wave and a second peak group in which the effect by the brain wave is more than that by the heart rate based on the positive peak values of the EEG signals and EKG signals, and the noise canceling step 300 to cancel the noise of the first peak group and the second peak group from the EEG signals. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a plasma processing device in which uniform plasma can be generated, and a uniform processing against a substrate having a large area is possible, and a processing method. SOLUTION: The plasma processing device includes a vacuum chamber 10, a lower part electrode arranged interior lower side of the vacuum chamber 10 and composed of a plurality numbers of blocks, an upper part electrode 20 arranged at the interior upper side of the vacuum chamber 10 and grounded, a processing gas supply part 40 to supply the processing gas to the interior of the vacuum chamber 10, a source power supply part 50 that is connected to the lower part electrode to apply the source power, a bias power supply part 60 connected to each block of the lower electrodes individually to apply the bias power independently to each block, and a control part that calculates the bias power applied to each block 32 of the lower part electrodes to control the bias power supply part. COPYRIGHT: (C)2008,JPO&INPIT