Method of forming fine pattern using block copolymer
    252.
    发明专利
    Method of forming fine pattern using block copolymer 有权
    使用嵌段共聚物形成精细图案的方法

    公开(公告)号:JP2009042760A

    公开(公告)日:2009-02-26

    申请号:JP2008204672

    申请日:2008-08-07

    CPC classification number: B81C1/00031 B81C2201/0149 B82Y30/00

    Abstract: PROBLEM TO BE SOLVED: To provide a method of forming fine patterns using a block copolymer. SOLUTION: The method of forming fine patterns includes processing first regions of a substrate including the first regions to form a first pattern, the first regions defining a second region between adjacent first regions, arranging a block copolymer including a first component and a second component on the first and second regions so that the first component of the block copolymer may be aligned on the first regions, and selectively removing one of the first and second components of the block copolymer to form a second pattern having a pitch that is less than a pitch of a first region and an adjacent second region. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供使用嵌段共聚物形成精细图案的方法。 解决方案:形成精细图案的方法包括处理包括第一区域的基板的第一区域以形成第一图案,第一区域限定相邻第一区域之间的第二区域,布置包括第一部件和 第二组分在第一和第二区域上,使得嵌段共聚物的第一组分可以在第一区域上排列,并且选择性地除去嵌段共聚物的第一组分和第二组分中的一种,以形成具有较小间距的第二图案 而不是第一区域和相邻第二区域的间距。 版权所有(C)2009,JPO&INPIT

    Method and instrument for measuring brain wave, and recording medium
    254.
    发明专利
    Method and instrument for measuring brain wave, and recording medium 有权
    用于测量脑波的方法和仪器,以及记录介质

    公开(公告)号:JP2008229307A

    公开(公告)日:2008-10-02

    申请号:JP2007129656

    申请日:2007-05-15

    CPC classification number: A61B5/0476 A61B5/04017 A61B5/7203 A61B5/7264

    Abstract: PROBLEM TO BE SOLVED: To provide method or the like for measuring a brain wave which can minimize noise by heart rate. SOLUTION: The brain wave measuring method includes the peak information abstract step 100 to abstract a positive peak value and a negative peak value from EKG signals corresponding to heart rate information and to abstract a positive peak value from EEG signals reflecting noise information and brain wave information by the heart rate, the EEG signal classification step 200 to classify a first peak group in which an effect by the heart rate is more than that by the brain wave and a second peak group in which the effect by the brain wave is more than that by the heart rate based on the positive peak values of the EEG signals and EKG signals, and the noise canceling step 300 to cancel the noise of the first peak group and the second peak group from the EEG signals. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供用于测量可以通过心率降低噪声的脑电波的方法等。 解决方案:脑波测量方法包括峰值信息抽象步骤100,从对应于心率信息的EKG信号中抽出正峰值和负峰值,并从反映噪声信息的EEG信号中抽取正峰值, 通过心率的脑波信息,EEG信号分类步骤200,对心率的影响大于脑波的影响的第一峰组和脑波的影响的第二峰组进行分类 大于基于EEG信号和EKG信号的正峰值的心率的噪声消除步骤300,以从EEG信号消除第一峰值组和第二峰值组的噪声。 版权所有(C)2009,JPO&INPIT

    Polymer or resist pattern, the metal thin film pattern using the same, a metal pattern, a polymer mold and method the formation of these

    公开(公告)号:JP2008535019A

    公开(公告)日:2008-08-28

    申请号:JP2008503975

    申请日:2006-11-06

    Abstract: 本発明は、リソグラフィ工程時に入射光の進行方向及び透過度を調節する方法で、多様な傾斜及び形状を有するポリマー又はレジストパターン及びこれを利用した金属薄膜パターン、金属パターン、ポリマーモールド並びにこれらの形成方法に関する。
    本発明に係るポリマー又はレジストパターンの形成方法は、基板上に所定の形状にポリマー又はレジストパターンを形成する方法において、(a)前記基板上に感光性ポリマー又はレジストを塗布して、ポリマー又はレジスト膜を形成するステップと、(b)前記ポリマー又はレジスト膜上にフォトマスクを位置させて、露光部分を決定するステップと、(c)露光される光の経路上に光調節膜を位置させるステップと、(d)前記光調節膜を調節して、前記ポリマー又はレジスト膜に照射される光の進行方向及び透過度を調節するステップと、を含むことを特徴とする。 本発明に係るポリマー又はレジストパターンの形成方法によれば、多様な傾斜及び形状の3次元構造のポリマー又はレジストパターン、金属薄膜パターン、金属パターン構造、ポリマーモールドを簡便に形成できる。

    Plasma processing device and plasma processing method
    257.
    发明专利
    Plasma processing device and plasma processing method 有权
    等离子体处理装置和等离子体处理方法

    公开(公告)号:JP2008198601A

    公开(公告)日:2008-08-28

    申请号:JP2008017093

    申请日:2008-01-29

    Inventor: KO TAKYO CHO KOEI

    Abstract: PROBLEM TO BE SOLVED: To provide a plasma processing device in which uniform plasma can be generated, and a uniform processing against a substrate having a large area is possible, and a processing method.
    SOLUTION: The plasma processing device includes a vacuum chamber 10, a lower part electrode arranged interior lower side of the vacuum chamber 10 and composed of a plurality numbers of blocks, an upper part electrode 20 arranged at the interior upper side of the vacuum chamber 10 and grounded, a processing gas supply part 40 to supply the processing gas to the interior of the vacuum chamber 10, a source power supply part 50 that is connected to the lower part electrode to apply the source power, a bias power supply part 60 connected to each block of the lower electrodes individually to apply the bias power independently to each block, and a control part that calculates the bias power applied to each block 32 of the lower part electrodes to control the bias power supply part.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种能够产生均匀等离子体并且可以对具有大面积的基板进行均匀处理的等离子体处理装置以及处理方法。 解决方案:等离子体处理装置包括真空室10,设置在真空室10的下侧的下部电极,并且由多个块组成,上部电极20布置在 真空室10接地,将处理气体供给到真空室10的内部的处理气体供给部40,连接到下部电极以施加源电力的源极供电部50,偏置电源 部分60分别连接到每个下部电极块,以独立地施加偏置功率到每个块,以及控制部分,其计算施加到下部电极的每个块32的偏置功率,以控制偏置电源部分。 版权所有(C)2008,JPO&INPIT

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