公开(公告)号：US06566725B1

公开(公告)日：2003-05-20

申请号：US09628201

申请日：2000-07-28

Applicant: Kyle Lebouitz

Inventor： Kyle Lebouitz

IPC: H01L31058

CPC classification number: G01J5/40 ,  B81B3/0081 ,  B81B2201/0278 ,  B81B2201/032 ,  B81B2203/0118 ,  G01J5/02 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/06

Abstract: This invention relates to the construction of microfabricated devices and, in particular, to types of microfabricated devices requiring thermal isolation from the substrates upon which they are built. This invention discloses vertical thermal isolators and methods of fabricating the vertical thermal isolators. Vertical thermal isolators offer an advantage over thermal isolators of the prior art, which were substantially horizontal in nature, in that less wafer real estate is required for the use of the vertical thermal isolators, thereby allowing a greater density per unit area of the microfabricated devices.

公开(公告)号：US5709802A

公开(公告)日：1998-01-20

申请号：US415821

申请日：1995-04-03

Applicant: Tomotake Furuhata ,  Toshiki Hirano

Inventor： Tomotake Furuhata ,  Toshiki Hirano

IPC: B23Q1/34 ,  B81B3/00 ,  B81C1/00 ,  H01L41/09 ,  B23Q16/00 ,  H02N2/00

CPC classification number: B81B3/0054 ,  B23Q1/34 ,  B81C1/0019 ,  B81C1/00198 ,  H02N1/002 ,  H02N2/0025 ,  H02N2/026 ,  B81B2201/032 ,  B81B2201/11 ,  B81B2203/0315 ,  B81B2207/053 ,  B81C2203/032 ,  Y10T29/42

Abstract: A method of fabricating a semiconductor integrated microactuator device that includes the steps of: bonding or laminating a driving element to a substrate for generating a vertical motion, and coupling a conversion element to the driving element for converting the vertical motion into rotational motion. The method can be effectively used for micro-actuators that utilize Coulomb's force, vibration, and fluid pressure as their driving force.

Abstract translation: 一种制造半导体集成微致动器装置的方法，包括以下步骤：将驱动元件接合或层压到用于产生垂直运动的基板，以及将转换元件耦合到用于将垂直运动转换成旋转运动的驱动元件。 该方法可以有效地用于利用库仑力，振动和流体压力作为驱动力的微型致动器。

公开(公告)号：US5489812A

公开(公告)日：1996-02-06

申请号：US233486

申请日：1994-04-26

Applicant: Tomotake Furuhata ,  Toshiki Hirano

Inventor： Tomotake Furuhata ,  Toshiki Hirano

IPC: B23Q1/34 ,  B81B3/00 ,  B81C1/00 ,  H01L41/09 ,  H02N2/00 ,  B23Q16/00

CPC classification number: B81B3/0054 ,  B23Q1/34 ,  B81C1/0019 ,  B81C1/00198 ,  H02N1/002 ,  H02N2/0025 ,  H02N2/026 ,  B81B2201/032 ,  B81B2201/11 ,  B81B2203/0315 ,  B81B2207/053 ,  B81C2203/032 ,  Y10T29/42

Abstract: A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by a device which includes a driving section bonded to a silicon wafer for applying a driving force to excite vertical motion, and a mechanism for converting this vertical motion into rotational motion. Three types of micro actuators are described herein: one, that uses vibration as its driving force; a second, that uses Coulomb's force; and a third, that utilizes fluid pressure, such as air.

Abstract translation: 一种用于提供微定位的装置，其分别在X和Y方向上具有亚微米级的工作范围。 定位是通过一种装置实现的，该装置包括结合到硅晶片的驱动部分，用于施加驱动力以激发垂直运动，以及用于将该垂直运动转换成旋转运动的机构。 这里描述了三种微型致动器：一种是使用振动作为其驱动力; 一秒钟，使用库仑的力量; 第三个，利用流体压力，如空气。

公开(公告)号：US5351412A

公开(公告)日：1994-10-04

申请号：US890455

申请日：1992-05-29

Applicant: Tomotake Furuhata ,  Toshiki Hirano

Inventor： Tomotake Furuhata ,  Toshiki Hirano

IPC: B23Q1/34 ,  B81B3/00 ,  B81C1/00 ,  H01L41/09 ,  B23Q16/00

CPC classification number: B81B3/0054 ,  B23Q1/34 ,  B81C1/0019 ,  B81C1/00198 ,  H02N1/002 ,  H02N2/0025 ,  H02N2/026 ,  B81B2201/032 ,  B81B2201/11 ,  B81B2203/0315 ,  B81B2207/053 ,  B81C2203/032 ,  Y10T29/42

Abstract: A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by depositing a pair of aluminum electrodes on a piezoelectric element bonded on a silicon wafer, vertically moving the piezoelectric element, arranging a plurality of micro actuators whose contact pin ends, formed on the aluminum electrodes, rotate on a surface as an array, and displacing in the horizontal direction a moving member arranged on the micro actuator array.

Abstract translation: 一种用于提供微定位的装置，其分别在X和Y方向上具有亚微米级的工作范围。 通过在键合在硅晶片上的压电元件上沉积一对铝电极，垂直移动压电元件来实现定位，将形成在铝电极上的接触针端部的多个微致动器布置成在阵列的表面上旋转 并且在水平方向上移动布置在微致动器阵列上的移动构件。

公开(公告)号：TWI512938B

公开(公告)日：2015-12-11

申请号：TW102127210

申请日：2013-07-30

Applicant: 亞太優勢微系統股份有限公司 ,  ASIA PACIFIC MICROSYSTEMS. INC.

Inventor： 謝哲偉 ,  HSIEH, JER WEI

IPC: H01L25/04

CPC classification number: B81B7/0038 ,  B81B7/0058 ,  B81B2201/032 ,  B81C1/00238 ,  B81C1/00817 ,  B81C1/00825 ,  B81C2201/053 ,  B81C2201/056 ,  B81C2203/0785

公开(公告)号：TW200535535A

公开(公告)日：2005-11-01

申请号：TW094103104

申请日：2005-02-01

Applicant: 皇家飛利浦電子股份有限公司 KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventor： 得克 真 包爾 BROER, DIRK JAN ,  克麗斯丁 瑪利亞 羅沙帝 迪 魏悌 DE WITZ, CHRISTIANE MARIA ROSETTE ,  葛瑞堤 尼堤 莫爾 MOL, GRIETJE NEELTJE ,  羅爾 潘特曼 PENTERMAN, ROEL

IPC: G02F

CPC classification number: G02B26/02 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/047 ,  Y10T156/11

Abstract: 本發明揭示一種機械結構包含一元件，該元件可在具有第一形狀的第一狀態與具有不同的第二形狀之第二狀態之間，藉由非機械方式移動，像是熱或輻射。為此，該元件包含定向聚合液晶層，該層在受到這種外力時會展現出各向異性延伸。為了幫助製造，將元件放置在具有高黏性區域以及低黏性區域的基板上，以用於聚合液晶。為了製造這種結構，一定向聚合液晶層形成於一基板(201)上，該基板具有圖案表面，該圖案表面提供具有高黏性的黏性區域(204)於聚合液晶，以及具有低黏性的非黏性區域(203)於聚合液晶。聚合之後，例如施加熱衝擊，導致當剩餘部分固定於黏性區域時，聚合液晶層在非黏性區域上分層。因此，該方法不需要耗時的底層蝕刻步驟(under–etching steps)下並不耗時。

Abstract in simplified Chinese: 本发明揭示一种机械结构包含一组件，该组件可在具有第一形状的第一状态与具有不同的第二形状之第二状态之间，借由非机械方式移动，像是热或辐射。为此，该组件包含定向聚合液晶层，该层在受到这种外力时会展现出各向异性延伸。为了帮助制造，将组件放置在具有高黏性区域以及低黏性区域的基板上，以用于聚合液晶。为了制造这种结构，一定向聚合液晶层形成于一基板(201)上，该基板具有图案表面，该图案表面提供具有高黏性的黏性区域(204)于聚合液晶，以及具有低黏性的非黏性区域(203)于聚合液晶。聚合之后，例如施加热冲击，导致当剩余部分固定于黏性区域时，聚合液晶层在非黏性区域上分层。因此，该方法不需要耗时的底层蚀刻步骤(under–etching steps)下并不耗时。

公开(公告)号：EP2504274B1

公开(公告)日：2016-04-20

申请号：EP10787532.0

申请日：2010-11-22

Applicant: BAE Systems PLC

Inventor： ELEY, Rebecka ,  HUCKER, Martyn John ,  STURLAND, Ian Michael

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/22

CPC classification number: H02N2/043 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0109 ,  H01L41/0933 ,  H01L41/22

Abstract: A MEMS device, and method of fabrication thereof, comprising: a wall arranged as a closed loop(for example, comprising a plurality of interconnected lengths (11-18)); and a bridging portion (54) having two ends and an intermediate portion between these ends; the bridging portion (54) is connected at one end to a first portion of the wall and at the other end to a second portion of the wall non-contiguous to the first; whereby when the intermediate portion is displaced in a direction through a plane defined between the two ends, the portions of the wall connected to the bridging portion (54) are each displaced in a respective direction in the plane, and at least one further portion of the wall is displaced in a direction that is in the plane and that is different to the directions that the two portions connected to the bridging portion (54) are displaced in.

公开(公告)号：EP2945276A1

公开(公告)日：2015-11-18

申请号：EP13868579.7

申请日：2013-12-27

Applicant: Alps Electric Co., Ltd. ,  National Institute Of Advanced Industrial Science

Inventor： TAKATSUKA, Tomomasa ,  TAKAHASHI, Isao ,  SUGAWARA, Teppei ,  MITSUMORI, Kenichi ,  ASAKA, Kinji ,  SUGINO, Takushi

IPC: H02N11/00 ,  C08K3/04 ,  C08K7/02 ,  C08L101/00

CPC classification number: B81B3/0021 ,  B81B2201/032 ,  F03G7/005

Abstract: Provided is a polymer actuator element that can maintain satisfactory durability and has a great displacement amount or a great generating force, and excellent responsiveness.
A polymer actuator element 1 includes an electrolyte layer 2 and electrode layers 3 and 4, in which the electrode layers 3 and 4 include an activated carbon nanofiber and a carbon nanohorn.

Abstract translation: 本发明提供一种高分子致动器元件，其能够维持良好的耐久性，位移量或发生力大，响应性优异。 聚合物致动器元件1包括电解质层2和电极层3和4，其中电极层3和4包括活性碳纳米纤维和碳纳米角。

公开(公告)号：EP2833542A1

公开(公告)日：2015-02-04

申请号：EP13769062.4

申请日：2013-03-28

Applicant: National Institute Of Advanced Industrial Science

Inventor： SUGINO, Takushi ,  ASAKA, Kinji ,  TAKAHASHI, Isao ,  TAKATSUKA, Tomomasa ,  MITSUMORI, Kenichi ,  HAGA, Nobuaki

IPC: H02N11/00 ,  B81B3/00 ,  C01B31/02 ,  C08K3/04 ,  C08K5/00 ,  C08L101/00

CPC classification number: H02N1/002 ,  B32B27/08 ,  B32B27/20 ,  B32B2262/106 ,  B32B2307/202 ,  B32B2457/00 ,  B81B3/0021 ,  B81B2201/032 ,  C08K3/041 ,  C08K3/044 ,  C08K3/046 ,  C08K5/315 ,  C08K5/3445 ,  C08K2201/011 ,  F03G7/005 ,  H01B1/24

Abstract: An object of this invention is to create an actuator in which the amount of deformation is maintained and no displacement in the reverse direction occurs, even when a constant voltage is continuously applied for a long period of time.
As a means for achieving the above object, the invention provides a conductive thin film comprising a polymer gel containing at least one organic molecule selected from the group consisting of electron-donating organic molecules and electron-withdrawing organic molecules, a nano-carbon material, an ionic liquid, and a polymer.

Abstract translation: 本发明的目的在于提供一种致动器，即使在长时间连续施加恒定电压的情况下，也能够维持变形量且不产生相反方向的位移。 作为实现上述目的的手段，本发明提供了一种导电薄膜，其包含含有至少一种选自给电子有机分子和吸电子有机分子的有机分子的聚合物凝胶，纳米碳材料， 离子液体和聚合物。

公开(公告)号：EP2785633A1

公开(公告)日：2014-10-08

申请号：EP12794949.3

申请日：2012-11-29

Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Inventor： CASSET, Fabrice

IPC: B81B3/00 ,  F03G7/06 ,  H01L41/113 ,  H02N10/00 ,  H02N2/00 ,  H03H9/15 ,  F24J3/00 ,  H03H9/24

CPC classification number: F24V99/00 ,  B81B3/0024 ,  B81B3/0081 ,  B81B2201/0271 ,  B81B2201/031 ,  B81B2201/032 ,  F03G7/06 ,  H01L41/1136 ,  H02N2/18

Abstract: The invention relates to a device for generating a second temperature variation ΔΤ
2 from a first use temperature variation ΔΤ
1 , comprising an elastocaloric material layer (30), the internal temperature of which is capable of varying from ΔΤ
2 in response to a given variation Δσ in a mechanical stress applied onto said elastocaloric material layer, the given variation Δσ being induced by the first temperature variation ΔΤ
1 , and a suspended element (24) in mechanical contact with the elastocaloric material layer such as to apply, onto said layer, a mechanical stress that varies in response to the use temperature variation ΔΤ
1 . Said suspended element (24) is set up such as to cause variation, from Δσ, in the mechanical stress applied onto the elastocaloric material layer in response to the temperature variation ΔΤ
1 such as to thereby generate the second temperature variation ΔΤ
2 .