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公开(公告)号：JP2006008347A
公开(公告)日：2006-01-12
申请号：JP2004189444
申请日：2004-06-28
Applicant: Masayuki Tsuda , Watanabe Shoko:Kk , 株式会社渡辺商行 , 昌之 都田
Inventor： TSUDA MASAYUKI , UMEDA MASARU
IPC: B65G51/03 , B65G49/07 , H01L21/677
CPC classification number: B65G51/03 , B65G47/24 , H01L21/67784
Abstract: PROBLEM TO BE SOLVED: To provide a floatation transport device capable of adjusting an article to be carried when the article to be carried is displaced from the center of a carrying passage.
SOLUTION: The floatation transport device is provided with the carrying passage forming a carrying route for the article to be carried, a plurality of injection nozzles to be floated to carry the article to be carried along the carrying passage, one or more detecting parts for detecting carrying direction of the article to be carried in the carrying passage, and a control part for separately controlling the plurality of injection nozzles on the basis of results of the detection by the detecting parts.
COPYRIGHT: (C)2006,JPO&NCIPIAbstract translation: 要解决的问题：提供一种浮起运输装置，其能够在待运送物品从承载通道的中心位移时调节待携带的物品。 解决方案：浮选运送装置设有运送通道，形成用于待运送物品的运送路线，多个注射喷嘴被浮起以携带沿运送通道运送的物品，一个或多个检测 用于检测携带在运送通道中的物品的传送方向的部件，以及用于基于检测部分的检测结果分别控制多个喷嘴的控制部件。 版权所有（C）2006，JPO＆NCIPI
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22.发明专利
公开(公告)号：JP2005328085A
公开(公告)日：2005-11-24
申请号：JP2005216010
申请日：2005-07-26
Applicant: Masayuki Tsuda , Watanabe Shoko:Kk , 株式会社渡辺商行 , 昌之 都田
Inventor： TSUDA MASAYUKI , KUSUHARA MASAKI , DOI MIKIO , UMEDA MASARU , FUKAGAWA MITSURU , SUGANO YOICHI , UCHISAWA OSAMU , YAMAMOTO KOHEI , MEGURO TOSHIKATSU
IPC: C23C16/448 , H01L21/31
Abstract: PROBLEM TO BE SOLVED: To provide a vaporizer for MOCVD, adapted to produce vaporized gas containing uniformly dispersing ingredient solution, and to provide a method of vaporizing the ingredient solution. SOLUTION: The vaporizer for MOCVD comprises (1) a distributor section 8, having a gas inlet 4 for introducing a pressurized carrier gas 3 into gas passage, a means for supplying ingredient solution 5a to the gas passage, and a gas outlet 7 for delivering the ingredient-solution-containing carrier gas to a vaporizer section 22; (2) the vaporizer section 22, having vaporizing pipe 20 with one end connected to a reaction pipe of an MOCVD apparatus and the other connected to the gas outlet 7, and a heating means for heating the vaporizing pipe 20, wherein the vaporizer section 22 is adapted to heat the ingredient-solution-containing carrier gas delivered from the distributor section 8 to vaporize it, (3) wherein the distributor section 8 has a dispersing body 1, including a cylindrical hollow member and a rod 10 having an outside diameter smaller than the inside diameter of the cylindrical hollow member, the rod 10 having a spiral groove 60 on the outer periphery on the vaporizer-section 22 side, and the rod 10 is inserted into the cylindrical hollow member. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种适于产生含有均匀分散成分溶液的汽化气体的MOCVD蒸发器，并提供蒸发成分溶液的方法。 解决方案：用于MOCVD的蒸发器包括（1）分配器部分8，其具有用于将加压载气3引入气体通道的气体入口4，用于将成分溶液5a供应到气体通道的装置和气体出口 7用于将含成分溶液的载气输送到蒸发器部分22; （2）蒸发器部分22，其蒸汽管20的一端连接到MOCVD装置的反应管，另一端连接到气体出口7;加热装置，用于加热蒸发管20，其中蒸发器部分22 适于加热从分配器部分8输送的含成分溶剂的载气以使其蒸发，（3）其中分配器部分8具有分散体1，分散体1包括圆柱形中空构件和具有较小外径的杆10 圆柱形中空构件的内径比棒状物10在蒸发部22侧的外周具有螺旋形槽60，杆10插入到圆筒状中空部件中。 版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JPWO2003100840A1
公开(公告)日：2005-09-29
申请号：JP2004508397
申请日：2003-05-29
IPC: H01L21/31 , C23C16/40 , C23C16/448 , H01L21/00
CPC classification number: C23C16/40 , C23C16/4481 , C23C16/4486 , H01L21/6708
Abstract: 目詰まりなどを起こすことがなく長期使用が可能であり、かつ、反応部への安定的な原料供給が可能な気化器を提供すること。化学量論比に調整された原料を連続的にしかも安定することができると共に成膜された膜内の炭素の残留量を低減させる効果のある気化器、分散器及び成膜装置並びに気化方法、分散方法及び成膜方法を提供すること目的とする。原料溶液をキャリアガスに含ませて気化させる気化器において、該原料溶液を含む前の該キャリアガスに、該原料溶液の溶媒を含ませるための手段を設けたことを特徴とする気化器。
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24.发明专利
公开(公告)号：JP2005243802A
公开(公告)日：2005-09-08
申请号：JP2004049789
申请日：2004-02-25
Applicant: Takashi Sugino , Watanabe Shoko:Kk , 隆 杉野 , 株式会社渡辺商行
Inventor： SUGINO TAKASHI , KUSUHARA MASAKI , UMEDA MASARU
IPC: H01L21/331 , H01L21/338 , H01L29/737 , H01L29/778 , H01L29/812
Abstract: PROBLEM TO BE SOLVED: To provide a semiconductor device which has an excellent high frequency characteristic which can cope with a demand of a communication apparatus operating in a high frequency region or an electronic system of an automobile.
SOLUTION: A film containing boron, carbon and nitrogen atoms having a low dielectric constant is introduced into a compound semiconductor device, thereby materializing enhancements of transistor characteristics and enhancements of high frequency characteristics by making a surface of a semiconductor inactive. Further, the film at the low dielectric constant is also used as an interlayer dielectric of a wiring, thereby materializing the semiconductor device which enhances a frequency characteristic of a semiconductor device markedly.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：提供一种具有优异的高频特性的半导体器件，该半导体器件能够应付在汽车的高频区域或电子系统中操作的通信设备的需求。 解决方案：将具有低介电常数的硼，碳和氮原子的膜引入化合物半导体器件中，从而通过使半导体的表面无效而实现晶体管特性的增强和高频特性的增强。 此外，低介电常数的膜也用作布线的层间电介质，从而实现了显着提高半导体器件的频率特性的半导体器件。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2005154059A
公开(公告)日：2005-06-16
申请号：JP2003394016
申请日：2003-11-25
Applicant: Watanabe Shoko:Kk , 株式会社渡辺商行
Inventor： UEHARA AKIRA , TSUDA MASAYUKI , KANEKO KAZUHISA
Abstract: PROBLEM TO BE SOLVED: To provide a floating conveying device capable of realizing space saving of an installation space of a conveyed body and securing degree of designing freedom of a conveyance route. SOLUTION: A plurality of lower-stage conveying units 43 for floating and conveying the conveyed body in a predetermined direction with pressure gas injected from each tip of the nozzles 22d formed in a plurality of nozzle members are arranged adjacently in the same plane. A plurality of upper-stage conveying units 44 for floating and conveying the conveyed body in the predetermined direction with the pressure gas injected from each tip of the nozzles formed in the plurality of nozzle members 22d are arranged adjacently in the same plane over the lower-stage conveying units. The conveyed body is delivered between the lower-stage conveying units 43 and the upper-stage conveying units 44 by a lift conveying unit 45 for floating and lifting the conveyed body with the pressure gas injected from each tip of the nozzles 22d formed in the plurality of nozzle members. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种能够实现空间节省输送体的安装空间并确保输送路径的设计自由度的浮动输送装置。 解决方案：用于在形成在多个喷嘴构件中的喷嘴22d的每个尖端喷射的压力气体沿预定方向浮动和输送输送体的多个下级输送单元43被相邻布置在同一平面 。 多个用于在从多个喷嘴构件22d中形成的喷嘴的每个尖端喷射的压力气体沿预定方向浮动和传送输送体的上部输送单元44相邻布置在相同的平面中， 舞台输送单元。 被输送的主体通过升降输送单元45在下级输送单元43和上段输送单元44之间输送，用于使从多个喷嘴22d中形成的多个喷嘴22d喷射的压力气体浮起并提升输送体 的喷嘴构件。 版权所有（C）2005，JPO＆NCIPI
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Patent Agency Ranking26.发明专利Dispersing device for vaporizer, vaporizer for mocvd using the same, and method of vaporizing carrier gas 审中-公开用于蒸发器的分散装置，用于使用其的MOCVD的蒸发器，以及运载气体的方法
公开(公告)号：JP2005072195A
公开(公告)日：2005-03-17
申请号：JP2003298829
申请日：2003-08-22
Applicant: Masayuki Tsuda , Watanabe Shoko:Kk , 株式会社渡辺商行 , 昌之 都田
Inventor： KUSUHARA MASAKI , TSUDA MASAYUKI
IPC: C23C16/448 , H01L21/31
CPC classification number: C23C16/4481
Abstract: PROBLEM TO BE SOLVED: To provide a dispersing device for vaporizer that prevents the crystallization of a dispersed liquid when a carrier gas is jetted from a terminating-end jetting port after thin film forming materials are dispersed in the carrier gas, and also to provide a vaporizer for MOCVD using the dispersing device and a method of vaporizing carrier gas.
SOLUTION: The dispersing device for vaporizer disperses a plurality of thin film forming materials in the carrier gas introduced into a gas passage 35 into which the carrier gas is introduced by a dispersing section positioned to the middle section of the gas passage 35 and jets an air flow roughly along the jetted direction of the carrier gas, in which the thin film forming materials jetted from a terminating-end jetting port 35b positioned to the downstream-side end section of the passage 35 are dispersed, from an air flow jetting port 38 formed near the jetting port 35b.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：提供一种用于蒸发器的分散装置，其在将薄膜形成材料分散在载气中之后，当从终端喷射口喷射载气时，防止分散液体的结晶，并且还 以使用分散装置提供用于MOCVD的蒸发器和使载气蒸发的方法。 解决方案：用于蒸发器的分散装置将多个薄膜形成材料分散在引入气体通道35的载气中，载气通过位于气体通道35的中间部分的分散部分引入到该气体通道35中， 喷射大致沿着载气的喷射方向的空气流，其中从位于通道35的下游侧端部的终端喷射口35b喷射的薄膜形成材料从空气流喷射 端口38形成在喷射口35b附近。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JPWO2002097843A1
公开(公告)日：2004-09-30
申请号：JP2003500934
申请日：2002-05-28
Abstract: 従来のスピント型冷陰極やカーボンナノチューブやカーボンナノファイバの電子放出特性の更なる改善を図り、低電圧で高輝度の電子放出が可能な高性能電子放出装置を作製し、フラットパネルディスプレー、撮像装置、電子ビーム装置、マイクロ波進行波管のキーデバイスとして提供する。スピント型冷陰極やカーボンナノチューブやカーボンナノファイバおよび凹凸を有する金属や半導体基板に厚さ50nm以下の電子親和力4.0eV以下の半導体膜を設けて電子放出装置を作製する。前記半導体薄膜として窒化アルミニウム、窒化ホウ素、窒化アルミニウムホウ素、窒化アルミニウムガリウム、窒化ホウ素ガリウムなどのIII族原子と窒素原子の化合物、窒化ホウ素炭素、ダイヤモンドのいずれを用いる。
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公开(公告)号：JP2004193509A
公开(公告)日：2004-07-08
申请号：JP2002362847
申请日：2002-12-13
Applicant: Watanabe Shoko:Kk , 株式会社渡辺商行
Inventor： KUSUHARA MASAKI
IPC: C23C16/455 , H01L21/205
Abstract: PROBLEM TO BE SOLVED: To provide a shower nozzle, whereby avoidance of the heat influence due to a substrate is made possible, and the distance between the substrate and the shower nozzle is reduced so as to be able to perform proper film formation, and to form a film having no spot, to provide a film-forming apparatus, and to provide an oxygen heater capable of forming a film having no impurity.
SOLUTION: In the shower nozzle disposed in a film-forming chamber and having many formed holes and used for introducing a gas into the film-forming chamber, a heat-reflecting layer is formed on its surface opposed to a substrate provided in the film-forming chamber. The heat-reflecting layer is made of one from among gold, silver, or copper. The aspect ratio of each hole is 1/2-1/8.
COPYRIGHT: (C)2004,JPO&NCIPI-
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30.发明专利ウエハ分離装置、ウエハ分離搬送装置、ウエハ分離方法、ウエハ分離搬送方法及び太陽電池用ウエハ分離搬送方法 有权晶片剥离装置，晶片分离输送装置，晶片分离过程中，用于太阳能电池的晶片分离转移方法和晶片分离搬运方法
公开(公告)号：JP5965316B2
公开(公告)日：2016-08-03
申请号：JP2012523925
申请日：2011-07-08
Applicant: 株式会社渡辺商行
IPC: H01L21/304 , B65G49/07 , H01L21/677
CPC classification number: H01L21/67092 , H01L21/67057
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