公开(公告)号：FR3031096A1

公开(公告)日：2016-07-01

申请号：FR1463360

申请日：2014-12-26

Applicant: DELFMEMS

Inventor： ROLLIER ANNE SOPHIE ,  BONNABEL ANTOINE

IPC: B81B3/00 ,  H01H1/00

Abstract: Le dispositif microélectromécanique ou nanoélectromécanique (1 A) comporte une membrane (3), qui est supportée au-dessus d'un substrat (2), en étant espacée dudit substrat (2), et au moins une électrode d'actionnement (5 ou 5'), qui est formée sur ledit substrat (2), qui est positionnée au moins en partie au-dessous de la membrane (3), et qui permet d'actionner électrostatiquemement la membrane (3). La membrane (3) est mobile en translation le long d'au moins un premier axe de translation (XX') sensiblement parallèle au substrat (2), avec une course de déplacement le long de cet axe (XX') qui est limitée entre deux positions extrêmes. La face inférieure (3a) de la membrane comporte une zone d'actionnement électrostatique (31a) qui, lorsque la membrane (3) est au repos, est espacée de la face supérieure (5a) de l'électrode d'actionnement 5 ou 5') d'une distance minimum (DR) mesurée perpendiculairement au substrat (2). La face inférieure (3a) de ladite membrane (3) n'est pas entièrement plane et est profilée en dehors de la zone d'actionnement électrostatique (31a), de telle sorte que, lorsque la membrane (3) est au repos, et pour toutes les positions en translation de la membrane (3) au repos entre lesdites positions extrêmes le long de ce premier axe de translation (XX'), la face inférieure (3a) de la membrane (3), en tout point de sa surface en regard de la face supérieure (5a) de l'électrode d'actionnement (5 ou 5'), est espacée de la face supérieure (5a) de l'électrode d'actionnement (5 ou 5') d'une distance (D) mesurée perpendiculairement au substrat (2), qui est supérieure ou égale à ladite distance minium au repos (DR).

公开(公告)号：CA2602187C

公开(公告)日：2014-05-06

申请号：CA2602187

申请日：2006-03-07

Applicant: DELFMEMS

Inventor： MILLET OLIVIER

IPC: H01H1/00 ,  H01H59/00

Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/ figure 1) and a second position (on- state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3), which is bendable under the action of the actuation means (7), and which can freely slide relatively to the support means (3) during its bending movement.

公开(公告)号：CA2823973A1

公开(公告)日：2012-10-04

申请号：CA2823973

申请日：2012-03-20

Applicant: DELFMEMS

Inventor： PAVAGEAU CHRISTOPHE

IPC: H01H59/00 ,  H01P1/12

Abstract: The RF MEMS crosspoint switch (1) comprising a first transmission (10) line and a second transmission line (11) that crosses the first transmission line; the first transmission line (10) comprises two spaced-apart transmission line portions (100, 101), and a switch element (12) that permanently electrically connects the said two spaced-apart transmission line portions (100, 101); the second transmission line (11) crosses the first transmission line (10) between the two spaced-apart transmission line portions (100, 101); the RF MEMS crosspoint switch (1) further comprises actuation means (121) for actuating the switch element (12) at least between a first position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and the first (10) and second (11) transmission lines are electrically disconnected, and a second position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and is also electrically connecting the two transmission lines (10, 11) together.

公开(公告)号：IL215099D0

公开(公告)日：2011-12-29

申请号：IL21509911

申请日：2011-09-12

Applicant: DELFMEMS

IPC: H01H20060101

Abstract: The MEMS structure comprises: - a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), - at least one pillar (3, 3') under the flexible membrane (6), - electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state - electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state. The electric lowering actuation means (7) or the electric raising actuation means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) on both sides of the said at least one pillar (3) in the longitudinal direction (X).

公开(公告)号：AU2006226642B2

公开(公告)日：2010-11-11

申请号：AU2006226642

申请日：2006-03-07

Applicant: DELFMEMS

Inventor： MILLET OLIVIER

IPC: H01H1/00 ,  H01H59/00

Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/ figure 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3) and which is bendable under the action of the actuation means (7).

公开(公告)号：CA2755052A1

公开(公告)日：2010-09-23

申请号：CA2755052

申请日：2010-03-18

Applicant: DELFMEMS

Inventor： SEGUENI KARIM ,  LORPHELIN NICOLAS

IPC: H01H59/00

Abstract: The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), at least one pillar (3, 3') under the flexible membrane (6), electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state. The electric lowering actuation means (7) or the electric raising actuation means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) simultaneously on both sides of the said at least one pillar (3) in the longitudinal direction (X).

公开(公告)号：ZA200707988B

公开(公告)日：2008-06-25

申请号：ZA200707988

申请日：2007-09-17

Applicant: DELFMEMS

Inventor： OLIVIER MILLET

IPC: H01H20090101

Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/ figure 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3) and which is bendable under the action of the actuation means (7).

公开(公告)号：PT1705676E

公开(公告)日：2008-02-07

申请号：PT05370005

申请日：2005-03-21

Applicant: DELFMEMS

Inventor： MILLET OLIVIER

IPC: H01H1/00 ,  H01H59/00

公开(公告)号：TW201426829A

公开(公告)日：2014-07-01

申请号：TW102138420

申请日：2013-10-24

Applicant: 代爾夫門斯公司 ,  DELFMEMS S. A. S.

Inventor： 帕瓦吉沃 克里斯托夫 ,  PAVAGEAU, CHRISTOPHE

IPC: H01L21/28 ,  H01L29/92

CPC classification number: H01L28/65 ,  H01G5/16 ,  H01G2005/02 ,  H01L23/5223 ,  H01L2924/0002 ,  H01L2924/00

Abstract: 微機電系統固定電容器(1)，包含一底部金屬電極(3)，形成於一基板(S)之上、一頂部金屬電極(2)，由底部金屬電極(3)上方之金屬柱(5)支撐、以及一內含氣體之間隙(4)，形成一非固體介電層於頂部(2)與底部(3)金屬電極之間；介於頂部(2)與底部(3)金屬電極之間的距離(D)不超過1微米且頂部金屬電極(2)之厚度(E)不小於1微米。

Abstract in simplified Chinese: 微机电系统固定电容器(1)，包含一底部金属电极(3)，形成于一基板(S)之上、一顶部金属电极(2)，由底部金属电极(3)上方之金属柱(5)支撑、以及一内含气体之间隙(4)，形成一非固体介电层于顶部(2)与底部(3)金属电极之间；介于顶部(2)与底部(3)金属电极之间的距离(D)不超过1微米且顶部金属电极(2)之厚度(E)不小于1微米。

公开(公告)号：TWI436938B

公开(公告)日：2014-05-11

申请号：TW099108122

申请日：2010-03-19

Applicant: 代爾夫門斯公司 ,  DELFMEMS S. A. S.

Inventor： 沙格尼 卡林 ,  SEGUENI, KARIM ,  洛弗林 尼可拉斯 ,  LORPHELIN, NICOLAS

IPC: B81B3/00 ,  H01H59/00 ,  G02B26/08