Abstract:
Methods for manufacturing a microstructure, wherein use is made of powder blasting and/or etching and a single mask layer with openings and structures of varying dimensions, characterized in that the mask layer at least at one given point in time has been wholly worn away within at least one region by mask erosion while the microstructure is not yet wholly realized. Use can be made of a combination of 'vertical' erosion, i.e. parallel to the thickness direction, and 'horizontal' erosion, i.e. perpendicularly of the thickness direction, of the mask layer. The horizontal mask erosion occurs at the edges of the mask structure. By selecting the size of the mask openings and the mask structures in a correct manner the mask layer in a region with smaller mask structures will be fully worn away at a given point in time, while in another region with larger structures the mask layer still has sufficient thickness to serve as protection against the powder blasting or etching.
Abstract:
A system for fluidic coupling and uncoupling of fluidic conduits (2,2') and a microfluidic chip (3), wherein the fluidic conduits are connected mechanically to a first structural part (7) and the microfluidic chip is carried by a second structural part (8), which structural parts are moved according to the invention perpendicularly toward and away from each other by means of a mechanism (4) provided for this purpose. Outer ends of the fluidic conduits can thus be moved over a determined distance substantially perpendicularly to an outer surface of the microfluidic chip and connecting openings present in the outer surface of the microfluidic chip, this enabling accurate realization of fluidic couplings and uncouplings without the occurrence of undesirable moments of force and with a minimal risk of damage to the fluidic conduits or the connecting openings. With such a system requirements which can be set in respect of convenience of use, speed of operation, temperature resistance, sealing, chemical resistance, reproducibility and so forth, can be fulfilled.
Abstract:
The present invention relates to a method for dividing a substrate into a number of individual chip parts, comprising the steps of: forming a number of chip parts in the substrate, comprising, for each chip part, of arranging recesses in the substrate for containing fluid; arranging one or more breaking grooves in the substrate along individual chip parts; applying mechanical force to the substrate to break the substrate along the breaking grooves. The invention also relates to a substrate as well as a chip part.
Abstract:
A method for forming an electrically conductive via in a substrate that includes the steps of: forming a through hole in a first substrate; bringing a first surface of a second substrate into contact with the first surface of the first substrate, such that the through hole in the first substrate is covered by the first surface of the second substrate; filling the through hole in the first substrate with an electrically conductive material by electroplating to form the electrically conductive via, and removing the second substrate, wherein the first surface of the first and the second substrate each have a surface roughness Ra of less than 2 nm, preferably less than 1 nm, more preferably less than 0.5 nm, and the first surface of the first and the second substrate are brought in direct contact with each other, such that a direct bond is formed there between.
Abstract:
The invention relates to a microfluidic device comprising: a substrate provided with a fluid channel; a plurality of electro osmotic flow drive sections for providing electro osmotic flow in the channel, each drive section comprising electric field electrodes, exposed to the channel, and one or more gate electrodes, separated from the channel by an insulating layer, and control means connected to said electrodes of each drive section so as to control the direction of the electro osmotic flow in the channel.
Abstract:
A process for the modification of a solid material, said process comprising contacting a surface of the solid material comprising nucleophilic groups with a hydrosilane in a first step to produce a hydrosilanized surface, and contacting said hydrosilanized surface with at least one alkene and/or alkyne under irradiation with visible and/or ultraviolet light in a second step.
Abstract:
The present invention relates to a method for dividing a substrate into a number of individual chip parts, comprising the steps of: forming a number of chip parts in the substrate, comprising, for each chip part, of arranging recesses in the substrate for containing fluid; arranging one or more breaking grooves in the substrate along individual chip parts; applying mechanical force to the substrate to break the substrate along the breaking grooves;
wherein the steps of arranging recesses in the substrate and arranging breaking grooves in the substrate are performed substantially simultaneously, wherein the substrate comprises a first and a second substrate part, and the method comprises the steps of: a) arranging in the first substrate part at least one recess for containing fluid; b) arranging in the second substrate part passages to the recess in the first substrate part, wherein a first passage forms a fluid feed and a second passage forms a fluid discharge; c) arranging one or more breaking grooves in at least one of the substrate parts; d) placing the second substrate part on the first substrate part; e) breaking the substrate along the breaking grooves.
Abstract:
Micromixing chamber, roughly in the form of an hourglass which is provided at a first outer end with a tangential inflow opening (3a, 3c) and at a second outer end with a tangential outflow opening (5a, 5d), which mixing chamber in the overall flow direction first narrows more or less gradually and subsequently widens more or less abruptly. Also micromixer comprising a plurality of such micromixing chambers connected fluidically in series. Also methods for manufacturing such a micromixing chamber or such a micromixer. Also methods for mixing by means of such a micromixing chamber or by means of such a micromixer. A circulating flow in the form of a helix is formed in such a micromixing chamber. A circulating movement forming the beginning of the helix is created in a first part. The circulating movement is gradually accelerated by the more or less gradual narrowing. The gradualness is important in keeping the overall pressure drop over the micromixing chamber within limits. A more or less abrupt widening of the rapidly rotating helix then takes place which is found to provide an additionally good mixing. It is thus found possible to achieve a very efficient and rapid mixing. A micromixing chamber or micromixer according to the invention compatible with known microfluidic devices can be manufactured here from materials usual for the purpose, such as glass, preferably by means of techniques usual in the relevant field, such as powder blasting, etching and bonding.