公开(公告)号：AT257001B

公开(公告)日：1967-09-25

申请号：AT592564

申请日：1964-07-09

Applicant: STEGER ROBERT HOGU

Inventor： STEGER ROBERT HOGU

IPC: H05B3/16

Abstract: A heat/stress resistant ceramic compound comprises:- .30%.Czech blue clay .21%.fireclay .15%.crystallized alumina .29%.Austrian steatite .3%.kaolin .3%.other admixtures

公开(公告)号：AT251123B

公开(公告)日：1966-12-12

申请号：AT5964

申请日：1964-01-07

Applicant: STEGER ROBERT HUGO

Inventor： STEGER ROBERT HUGO

IPC: H05B20060101

公开(公告)号：DE1968229U

公开(公告)日：1967-09-14

申请号：DEST021225

申请日：1967-04-28

Applicant: STEGER ROBERT HUGO

Inventor： STEGER ROBERT HUGO

公开(公告)号：DE1905688U

公开(公告)日：1964-12-03

申请号：DEST017489

申请日：1964-07-11

Applicant: STEGER ROBERT HUGO

Inventor： STEGER ROBERT HUGO

公开(公告)号：IL167491A

公开(公告)日：2009-08-03

申请号：IL16749105

申请日：2005-03-16

Applicant: LAM RES CORP ,  STEGER ROBERT J

Inventor： STEGER ROBERT J

IPC: H05H1/46 ,  C23C16/50 ,  H01J37/32 ,  H01L21/3065

Abstract: A method for processing a plurality of substrates in a plasma processing chamber of a plasma processing system, each of the substrate being disposed on a chuck and surrounded by an edge ring during the processing. The method includes processing a first substrate of the plurality of substrates in accordance to a given process recipe in the plasma processing chamber. The method further includes adjusting, thereafter, a capacitance value of a capacitance along a capacitive path between a plasma sheath in the plasma processing chamber and the chuck through the edge ring by a given value. The method additionally includes processing a second substrate of the plurality of substrates in accordance to the given process recipe in the plasma processing chamber after the adjusting, wherein the adjusting is performed without requiring a change in the edge ring.

公开(公告)号：DE2262832A1

公开(公告)日：1974-06-27

申请号：DE2262832

申请日：1972-12-22

Applicant: STEGER ROBERT HUGO

Inventor： STEGER ROBERT HUGO

IPC: H01B7/285 ,  H05B3/36

公开(公告)号：DE1964292A1

公开(公告)日：1971-06-24

申请号：DE1964292

申请日：1969-12-22

Applicant: STEGER ROBERT

Inventor： STEGER ROBERT

IPC: H05B3/26

公开(公告)号：DE1933741A1

公开(公告)日：1971-01-14

申请号：DE1933741

申请日：1969-07-03

Applicant: STEGER ROBERT

Inventor： STEGER ROBERT

IPC: H05B3/84

公开(公告)号：DE1615445A1

公开(公告)日：1970-06-04

申请号：DE1615445

申请日：1967-10-19

Applicant: STEGER ROBERT HUGO

Inventor： HUGO STEGER ROBERT

IPC: H05B3/26

公开(公告)号：DE1454269A1

公开(公告)日：1969-01-23

申请号：DE1454269

申请日：1963-10-15

Applicant: STEGER ROBERT

Inventor： STEGER ROBERT

IPC: F24C7/06