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公开(公告)号:KR1020080072249A
公开(公告)日:2008-08-06
申请号:KR1020070010745
申请日:2007-02-01
Applicant: 고려대학교 산학협력단
IPC: H01L27/108
CPC classification number: H01L28/55 , H01L21/02197 , H01L21/02266 , H01L28/65
Abstract: An MIM capacitor using BaTi4O9 and a manufacturing method thereof are provided to raise an integration scale of a semiconductor device by satisfying requirements of an ITRS(International Technology Roadmap or Semiconductor). An MIM(Metal-Insulator-Metal) capacitor includes a substrate(105), which has a Pt/Ti/SiO2/Si structure, a dielectric thin film layer(150), and an upper electrode layer(160). A Pt layer(140) is a lower electrode and has a thickness of 70 nm. An SiO2 layer(120) protects a surface of an Si layer and used as a base layer. A BaTi4O9 thin film is formed on the substrate as the dielectric thin film. The upper electrode layer, which is used as an upper electrode of the MIM capacitor, is formed on the dielectric thin film.
Abstract translation: 提供使用BaTi4O9的MIM电容器及其制造方法,以通过满足ITRS(国际技术路线图或半导体)的要求来提高半导体器件的集成度。 一种MIM(金属 - 绝缘体 - 金属)电容器包括具有Pt / Ti / SiO 2 / Si结构的基底(105),电介质薄膜层(150)和上电极层(160)。 Pt层(140)是下电极,其厚度为70nm。 SiO 2层(120)保护Si层的表面并用作基底层。 在基板上形成BaTiO4O9薄膜作为电介质薄膜。 用作MIM电容器的上电极的上电极层形成在电介质薄膜上。
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公开(公告)号:KR1020160116863A
公开(公告)日:2016-10-10
申请号:KR1020150045205
申请日:2015-03-31
Applicant: 고려대학교 산학협력단
Abstract: 적층형액츄에이터는상호이격되도록구비된전극들및 상기전극들사이에개재되며, 무연압전체를포함하고, 상기무연압전체는아래의화학식1을가진다. [화학식1] NaKNb(Cu,Mn)O(여기서, x는 0 ≤ x ≤0.5, y는 0
Abstract translation: 多层致动器包括:设置成彼此间隔开的电极; 以及插入在电极之间的无铅压电体,其中无铅压电体具有如下化学式1:[化学式1] NaxK1-xNb1-y(Cu,Mn)yO3,其中x和y具有组成范围 0≤x≤0.5,0
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公开(公告)号:KR1020160044085A
公开(公告)日:2016-04-25
申请号:KR1020140138139
申请日:2014-10-14
Applicant: 고려대학교 산학협력단
Abstract: 본발명은고출력노킹센서용압전세라믹조성물및 이의제조방법에관한것으로 xPb(ZrTi)O-(1-x)Pb(NiZn)NbO(0.60
Abstract translation: 本发明涉及一种高输出爆震传感器的压电陶瓷组合物及其制造方法。 用于高输出敲击传感器的压电陶瓷组合物具有xPb(Zr_(1-y)Ti_y)O_3-(1-x)Pb(Ni_0.4Zn_0.6)_(1/3)Nb(2 / 3)O_3,其中x大于0.60且小于0.69; y大于0.500且小于0.525。 压电陶瓷组合物具有高的压电应变常数并且具有低介电常数,从而能够具有高的压电电压常数。
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公开(公告)号:KR101243131B1
公开(公告)日:2013-03-12
申请号:KR1020110106252
申请日:2011-10-18
Applicant: 고려대학교 산학협력단
CPC classification number: H01L41/1876 , C04B35/491 , H01L41/113 , H01L41/43
Abstract: PURPOSE: A high performance piezoelectric material for energy harvesting and a manufacturing method thereof are provided to improve energy density by controlling the fine structure and the composition of a piezoelectric material. CONSTITUTION: A mixture is made by performing a wet mixing process on raw powder for 4-36 hours. A thermal annealing process is performed on the mixture in a temperature of 700-1000 °C for 1-10 hours to form a first powder. A second powder is made by performing a wet mixing process on the first powder for 4-36 hours. [Reference numerals] (AA) Raw materials(PbO,ZrO_2,TiO_2,NiO,ZnO,Nb_2O_5); (BB) First ball milling(nylon jar and zirconia ball 24 hours); (CC) Calcination(850°C/2 hours); (DD) Second ball milling(nylon jar, powder and additive, and zirconia ball 48 hours); (EE) Forming powder(200 mesh); (FF) Molding(100kg/cm^2); (GG) Sintering(930-1100°C/5 minutes - 2 hours)
Abstract translation: 目的:提供用于能量收集的高性能压电材料及其制造方法,以通过控制压电材料的精细结构和组成来提高能量密度。 构成:通过对原料粉进行湿式混合处理4-36小时制成混合物。 在700-1000℃的温度下对该混合物进行热退火处理1-10小时以形成第一粉末。 通过对第一粉末进行湿式混合处理4-36小时制备第二种粉末。 (AA)原料(PbO,ZrO_2,TiO_2,NiO,ZnO,Nb_2O_5); (BB)第一次球磨(尼龙罐和氧化锆球24小时); (CC)煅烧(850℃/ 2小时); (DD)第二球磨(尼龙罐,粉末和添加剂,氧化锆球48小时); (EE)成型粉末(200目); (FF)成型(100kg / cm ^ 2); (GG)烧结(930-1100℃/ 5分钟-2小时)
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公开(公告)号:KR1020100091057A
公开(公告)日:2010-08-18
申请号:KR1020090010334
申请日:2009-02-09
Applicant: 고려대학교 산학협력단
IPC: C04B35/20
CPC classification number: C04B35/20 , C04B35/62615 , C04B35/62625 , C04B35/62655 , C04B35/64 , C04B2235/3206 , C04B2235/3418 , C04B2235/3445 , C04B2235/96 , H01B3/12
Abstract: PURPOSE: A microwave dielectric ceramics and a manufacturing method thereof are provided to secure the high quality factor and the low dielectric constant, and to economically manufacture the microwave dielectric ceramics. CONSTITUTION: A manufacturing method of a microwave dielectric ceramics comprises the following steps: wet-mixing MgO material powder and SiO2 material powder, and firstly crushing to make first mixed powder; calcining the first mixed powder after drying; wet-mixing the calcined first mixed powder and secondly crushing to make second mixed powder; and dry-molding the second mixed powder, and sintering the second mixed powder in 1,350~1,450 deg C to make a MgSiO_3 dielectric ceramics.
Abstract translation: 目的:提供微波介电陶瓷及其制造方法,以确保高品质因数和低介电常数,并且经济地制造微波介电陶瓷。 构成:微波介电陶瓷的制造方法包括以下步骤:将MgO材料粉末和SiO 2材料粉末进行湿式混合,首先粉碎制成第一混合粉末; 干燥后第一次混合粉末煅烧; 将经煅烧的第一混合粉末进行湿式混合,二次粉碎制成第二混合粉末; 并对第二混合粉末进行干法成型,并在第1,350〜1450℃下烧结第二混合粉末,制成MgSiO_3电介质陶瓷。
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公开(公告)号:KR101650656B1
公开(公告)日:2016-08-23
申请号:KR1020150080523
申请日:2015-06-08
Applicant: 고려대학교 산학협력단
Abstract: (NaK)NbO구조식을갖는판상페로브스카이트구조물의제조방법에있어서, (1-y)NaOH-yKOH (여기서, 0.35≤y≤0.90임) 및 NbO를출발물질로하여수열합성공정을통하여 (KNa)NbO·nHO 전구체(여기서, 0
Abstract translation: 在制备具有(Na_1-xK_x)NbO_3结构式的平面钙钛矿结构的方法中,使用(1-y)NaOH-yKOH(0.35 <= y <= 0.90)和Nb_2O_5作为原料形成(K_8 -8xNa_8x)Nb_6O_19nH_2O前体(0
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27.
公开(公告)号:KR101615568B1
公开(公告)日:2016-04-28
申请号:KR1020140094487
申请日:2014-07-25
Applicant: 고려대학교 산학협력단
IPC: H01L41/187 , H01L41/22
Abstract: 본발명은압전특성이우수함과동시에낮은유전율가지며, 저온소결공정으로압전체제조가가능한것을특징으로하는신규조성의압전에너지하베스트용세라믹조성물과이를이용한압전체및 압전에너지하베스트에관한것이다.
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公开(公告)号:KR1020150122418A
公开(公告)日:2015-11-02
申请号:KR1020140048629
申请日:2014-04-23
Applicant: 고려대학교 산학협력단
Inventor: 남산
Abstract: 자동차노킹센서용비연계압전체는 (NaK)NbO; 및 z mol%의첨가제 CuO를포함하고, 940 내지 980˚C의소결온도를갖는다. 여기서, x는 0.5 또는 1이며, 0.5≤z≤2.0 이다.
Abstract translation: 用于车辆爆震传感器的无铅压电材料包括:(Na_(1-x)K_x)NbO_3; 和zmol%的添加剂CuO,烧结温度为940〜980℃,其中x为0.5或1,0.5≤z≤2.0。
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30.
公开(公告)号:KR101089495B1
公开(公告)日:2011-12-02
申请号:KR1020090017291
申请日:2009-02-27
Applicant: 고려대학교 산학협력단
IPC: C04B35/453 , C04B35/14
Abstract: 본 발명은 마이크로파 유전체 세라믹스 조성물 및 이를 이용한 마이크로파 유전체 세라믹스 제조방법에 관한 것으로, 특히 Bi
4 (SiO
4 )
3 세라믹스에 소결조제로 B
2 O
3 를 첨가함으로써 900℃ 이하의 저온에서 소결이 가능하며, 우수한 마이크로파 유전특성을 가지면서 동시에 저온으로 내부 도체 전극과 동시소결이 가능하여 고주파 소자의 적층화에 매우 적합한 마이크로파 유전체 세라믹스 조성물 및 그 제조방법에 관한 것이다.
유전체 세라믹스, 저온 소결, 동시소결, 적층 세라믹 콘덴서Abstract translation: 微波介质陶瓷组合物及使用其制造微波介质陶瓷的方法本发明涉
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