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公开(公告)号：KR1020100060594A
公开(公告)日：2010-06-07
申请号：KR1020080119244
申请日：2008-11-28
Applicant: 부경대학교 산학협력단
CPC classification number: D01F9/22 , B82Y40/00 , D01D1/02 , D01D5/06 , D01D10/02 , D01F6/18 , D10B2101/12 , D10B2321/10 , D10B2401/061 , D10B2401/063 , D10B2505/02
Abstract: PURPOSE: A manufacturing method of polyacrylonitrile-based precursor fiber for manufacturing carbon fiber by a supercritical fluid processor is provided to gain acrylonitrile nanofiber using supercritical carbon dioxide as polymerization fluid. CONSTITUTION: Polyacrylonitrile-based precursor fiber for manufacturing carbon fiber of a nano size is manufactured by a RESOLV(rapid expansion of supercritical solution into a liquid solvent) method using supercritical carbon dioxide. A manufacturing method of the polyacrylonitrile-based precursor fiber includes the following steps: dissolving polyacrylonitrile in a mixed solution of dimethylformamide and supercritical carbon dioxide; spinning the solution in a sodium chloride solution with capillary nozzle; manufacturing poly acrylonitrile nanofiberl and manufacturing the carbon fiber with the poly acrylonitrile nanofiber.
Abstract translation: 目的：提供一种通过超临界流体处理器制造碳纤维的聚丙烯腈基前体纤维的制造方法，以获得使用超临界二氧化碳作为聚合流体的丙烯腈纳米纤维。 构成：通过RESOLV（超临界溶液快速膨胀到液体溶剂中）使用超临界二氧化碳制造用于制造纳米尺寸碳纤维的聚丙烯腈基前体纤维。 聚丙烯腈系前体纤维的制造方法包括以下步骤：将聚丙烯腈溶解在二甲基甲酰胺和超临界二氧化碳的混合溶液中; 用毛细喷嘴将溶液旋转在氯化钠溶液中; 制造聚丙烯腈纳米纤维，并用聚丙烯腈纳米纤维制造碳纤维。
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公开(公告)号：KR1020100032652A
公开(公告)日：2010-03-26
申请号：KR1020080091629
申请日：2008-09-18
Applicant: 부경대학교 산학협력단
IPC: H01L21/00
CPC classification number: H01L21/02312 , H01L21/02112 , H01L21/324
Abstract: PURPOSE: A method for being restored to a former state hydrophobicity of an organosilicate film of a low dielectric constant which is damaged in the supercritical carbon dioxide eliminates the unnecessary water peak adsorbed in the film doing the heat pretreatment in the organosilicate film and is damaged. The moisture re-adsorption by exposure can be shirked among the air. CONSTITUTION: A property of an organosilicate film of a low dielectric constant which is used after a plasma etching process/ashing for the insulating layer of the damaged and low dielectric constant is restored using the supercritical carbon dioxide. In order that film has the hydrophobicity to the surface inside, film is heat-treated. The heat-treated film as described above is restored using the silylating agent in the supercritical carbon dioxide. It is processed.
Abstract translation: 目的：在超临界二氧化碳中损坏的低介电常数有机硅酸盐膜的前态疏水性的方法消除了在有机硅酸盐膜中进行热预处理而吸附在薄膜中的不必要的水峰，并被损坏。 通过暴露的湿度再吸附可以在空气中推挤。 构成：使用超临界二氧化碳恢复在等离子体蚀刻工艺/用于绝缘层的损伤和低介电常数的灰化之后使用的低介电常数的有机硅酸盐膜的性质。 为了使膜具有与表面内部的疏水性，将膜进行热处理。 使用超临界二氧化碳中的甲硅烷基化剂恢复如上所述的热处理膜。 它被处理。
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公开(公告)号：KR1020090083969A
公开(公告)日：2009-08-05
申请号：KR1020080009860
申请日：2008-01-31
Applicant: 부경대학교 산학협력단
Abstract: A contamination removing method is provided to remove the contaminant from the substrate surface without destruction of pattern by dissolving the contaminant using the mixture of supercritical carbon dioxide, surfactant, additive and co-solvent. A contamination removing method is as follows. A supporter containing contaminant is put into a high-pressure reactor(16), and then the high pressure reactor is closed by a lid attached to ultrasonic equipment(20). Supercritical carbon dioxide containing a cleaning material is injected in the high pressure reactor. The ultrasonic equipment removes the contaminant and the supercritical fluid mixture is separated. The top of the supporter is rinsed in pure supercritical carbon dioxide. The pure supercritical carbon dioxide is removed and the contaminant-removed supporter is separated.
Abstract translation: 提供污染物去除方法以通过使用超临界二氧化碳，表面活性剂，添加剂和助溶剂的混合物溶解污染物从基材表面除去污染物而不破坏图案。 污染除去方法如下。 将含有污染物的载体放入高压反应器（16）中，然后通过附着在超声波设备（20）上的盖子关闭高压反应器。 将包含清洁材料的超临界二氧化碳注入高压反应器中。 超声波设备去除污染物，超临界流体混合物分离。 支持者的顶部在纯超临界二氧化碳中漂洗。 去除纯超临界二氧化碳，分离除去污染物的载体。
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公开(公告)号：KR100855171B1
公开(公告)日：2008-08-29
申请号：KR1020070013477
申请日：2007-02-09
Applicant: 부경대학교 산학협력단
CPC classification number: Y02P20/544 , C08K7/24 , C08K3/22 , C08K5/54 , C08K9/04 , C08K2201/001 , C08K2201/011
Abstract: A method for preparing a nanocomposite by using supercritical carbon dioxide is provided to obtain a nanocomposite comprising an inorganic oxide in a conductive polymer in an eco-friendly manner with a high conversion while facilitating easy separation of a desired product and avoiding a solubilization problem. A method for preparing a nanocomposite comprising an inorganic oxide homogeneously in a conductive polymer comprises the steps of performing surface modification of an inorganic oxide with a silane coupling agent, and polymerizing the surface-modified inorganic oxide together with a conductive monomer and oxidant catalyst in supercritical carbon dioxide, wherein the conductive monomer is monomer X represented by the following formula 1 or monomer Y represented by the following formula 2, includes a polymer obtained by homopolymerization of monomer X or monomer Y, and has a weight average molecular weight of 1,000-10,000,000; the inorganic oxide is selected from TiO2, SiO2, Al2O3, CaCO3, ZrO3, ZnO2 and SnO2; the oxidant catalyst is selected from ammonium persulfate, ferric chloride, cupric chloride, copper(II) fluoroborate, copper(II) oxychloride and potassium perchromate; and the supercritical carbon dioxide has a temperature of 31-100 deg.C and a pressure of 137.9-500 bars. In the formulae, Z is an imine or vinyl; Q is S, Se or N-R7; and each of R1-R7 is selected from H, OH, a halogen, halide, C50 or lower alkyl, alkoxy, alkylcarboxy, alkylester, alkylhydroxyl, nitroalkyl, cyanoalkyl, haloalkyl, oxyhaloalkyl, cyanohaloalkyl, aryl, oxyaryl, haloaryl, nitroaryl, cyanoaryl, oxyhaloalkylaryl, haloalkylaryl, nitrohaloalkylaryl and cyanohaloalkylaryl.
Abstract translation: 提供了一种通过使用超临界二氧化碳制备纳米复合材料的方法，以便以易于分离所需产物并避免溶解问题，以高转化率以环保的方式获得包含导电聚合物中的无机氧化物的纳米复合材料。 一种在导电聚合物中均匀地制备包含无机氧化物的纳米复合材料的方法包括以下步骤：用硅烷偶联剂进行无机氧化物的表面改性，并将表面改性的无机氧化物与导电单体和氧化剂催化剂在超临界 二氧化碳，其中，导电性单体为下述式1表示的单体X或下述式2所示的单体Y，包括通过单体X或单体Y均聚而得到的聚合物，其重均分子量为1,000〜10000,000 ; 无机氧化物选自TiO 2，SiO 2，Al 2 O 3，CaCO 3，ZrO 3，ZnO 2和SnO 2; 氧化剂催化剂选自过硫酸铵，氯化铁，氯化铜，氟硼酸铜（II），氯化铜（II）和过铬酸钾; 超临界二氧化碳的温度为31-100℃，压力为137.9-500巴。 在配方中，Z是亚胺或乙烯基; Q是S，Se或N-R7; 并且R 1 -R 7各自选自H，OH，卤素，卤素，C 50或低级烷基，烷氧基，烷基羧基，烷基酯，烷基羟基，硝基烷基，氰基烷基，卤代烷基，氧卤代烷基，氰基卤代烷基，芳基，氧芳基，卤代芳基，硝基芳基，氰基芳基 ，卤代烷基芳基，卤代烷基芳基，硝基卤代烷基芳基和氰基卤代烷基芳基。
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公开(公告)号：KR100774093B1
公开(公告)日：2007-11-06
申请号：KR1020060074962
申请日：2006-08-09
Applicant: 부경대학교 산학협력단
IPC: H01L21/304
Abstract: A method for preventing pattern collapse in supercritical carbon dioxide drying is provided to prevent a pattern from being expanded by processing the pattern in liquid carbon dioxide by using a surfactant after a wet process. A pattern is rinsed by using water, so that a predetermined pattern is formed on a photo-sensitive film made of an organic material on a substrate. The pattern is processed by using carbon dioxide containing a surfactant, so that a micro pattern is dried. A pattern layer having the pattern formed on the substrate is rinsed. The pattern is transferred into a high pressure drying chamber and the water is completely removed by using a mixture of liquid carbon dioxide and a surfactant for the carbon dioxide. An inner temperature of a high pressure drying chamber is increased and the pattern is processed by using a supercritical carbon dioxide, such that remainders are removed.
Abstract translation: 提供了一种防止超临界二氧化碳干燥中的图案塌陷的方法，以通过在湿法处理之后使用表面活性剂来防止图案在液态二氧化碳中加工图案而膨胀。 通过使用水冲洗图案，使得在由基材上的有机材料制成的感光膜上形成预定图案。 通过使用含有表面活性剂的二氧化碳处理图案，使得干燥图案。 漂洗具有形成在基板上的图案的图案层。 将图案转移到高压干燥室中，并且通过使用液体二氧化碳和用于二氧化碳的表面活性剂的混合物来完全除去水。 高压干燥室的内部温度升高，并且通过使用超临界二氧化碳处理图案，从而去除剩余物。
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Patent Agency Ranking26.发明公开초임계이산화탄소를 이용한 퍼아세틸레이티드 사이클로덱스트린 및 약물의 포접체 초미립자, 이의 제조방법 및 이의 용도 有权使用超临界二氧化碳包埋环孢菌素和药物复合物的超细颗粒，其制备方法及其用途
公开(公告)号：KR1020160044925A
公开(公告)日：2016-04-26
申请号：KR1020140140036
申请日：2014-10-16
Applicant: 부경대학교 산학협력단
Inventor： 임권택
CPC classification number: A61K47/6949 , A61K9/0053 , A61K9/1682 , A61K47/6951
Abstract: 본발명은초임계이산화탄소를이용한퍼아세틸레이티드사이클로덱스트린및 약물의포접체초미립자및 이의제조방법에관한것이다. 또한, 본발명은상기포접체초미립자를포함하는경구용약제조성물에관한것이다. 본발명에따른포접체초미립자는, 초임계이산화탄소내의퍼아세틸레이티드사이클로덱스트린(PAc-CD) 및약물의혼합물을모세관노즐을통하여대기상또는용액상으로방출하여제조됨으로써, 간단하고, 경제적방법으로포접체초미립자을제조할수 있고, 상기포접체초미립자는포접율및 분산성이우수하여경구용조성물로이용될수 있다.
Abstract translation: 本发明涉及过乙酰化环糊精（PAc-CD）的包合物与使用超临界二氧化碳的药物的超细颗粒及其制备方法。 此外，本发明涉及包含所述包合物的超细颗粒的口服药物组合物。 根据本发明的包合络合物的超细颗粒通过将超临界二氧化碳中的PAc-CD和药物的混合物通过毛细管喷嘴释放到气相或溶液相来制备。 因此，可以用简单且成本有效的方法制备包合物的超微粒子。 此外，包合络合物的超微粒子具有优异的包合率和优异的分散性，因此可以用作口腔用组合物。
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公开(公告)号：KR1020110055327A
公开(公告)日：2011-05-25
申请号：KR1020090113049
申请日：2009-11-23
Applicant: 부경대학교 산학협력단
Inventor： 임권택
IPC: H01L21/306
CPC classification number: H01L21/31111 , H01L21/31116
Abstract: PURPOSE: A method and system for etching a silicon oxide film using a dense carbon dioxide are provided to eliminate generation of etching byproducts, thereby omitting an additional cleaning process. CONSTITUTION: A semiconductor substrate for forming a structure is provided into a processing chamber(S10). Highly dense carbon dioxide is supplied into the processing chamber to etch a sacrificial film(S20). Pure highly dense carbon dioxide is supplied so that fluid in the processing chamber is eliminated(S30). The pressure of the processing chamber is lowered so that the substrate is dried(S40).
Abstract translation: 目的：提供使用致密二氧化碳蚀刻氧化硅膜的方法和系统，以消除蚀刻副产物的产生，从而省略附加的清洁工艺。 构成：在处理室中设置用于形成结构的半导体基板（S10）。 将高密度二氧化碳供应到处理室中以蚀刻牺牲膜（S20）。 提供纯高密度的二氧化碳，使得处理室中的流体被消除（S30）。 处理室的压力降低，使得基板被干燥（S40）。
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公开(公告)号：KR1020100129811A
公开(公告)日：2010-12-10
申请号：KR1020090048356
申请日：2009-06-02
Applicant: 부경대학교 산학협력단
IPC: H01L21/306 , H01L21/302
CPC classification number: H01L21/31111 , H01L21/0206 , H01L21/02101
Abstract: PURPOSE: A silicon oxide etching method and a method for cleaning etching residue are provided to efficiently remove the etching residue generated by the reaction between a sacrificial layer and etchant by using supercritical carbon dioxide. CONSTITUTION: A semiconductor substrate is supplied to a processing chamber from the outside(E0). Supercritical carbon dioxide and etchant are injected to the processing chamber and are stirred(E1). The pressure is applied from the supercritical solvent supply unit to the supply chamber. The etching is performed by injecting etchant into a process chamber by closing and opening a valve between a supply chamber and a process chamber.
Abstract translation: 目的：提供氧化硅蚀刻方法和蚀刻残渣的清洗方法，以通过使用超临界二氧化碳来有效地去除由牺牲层和蚀刻剂之间的反应产生的蚀刻残留物。 构成：将半导体基板从外部（E0）供给到处理室。 将超临界二氧化碳和蚀刻剂注入处理室并搅拌（E1）。 压力从超临界溶剂供应单元施加到供应室。 通过在供给室和处理室之间关闭和打开阀来将蚀刻剂注入到处理室中来进行蚀刻。
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公开(公告)号：KR1020090021739A
公开(公告)日：2009-03-04
申请号：KR1020070086507
申请日：2007-08-28
Applicant: 부경대학교 산학협력단
Abstract: A manufacturing method of nanocomposite is provided to improve dispersibility within supercritical carbon dioxide and zygosity with the other materials by reforming surface of the magnetic property nano particle using a silane coupling agent. A manufacturing method of nanocomposite comprises a step of including uniformly magnetic property inorganic oxide in conductivity polymer at a step of polymerizing magnetic property inorganic oxide particle surface-modified with conductivity monomer using a silane coupling agent in supercritical carbon dioxide. A nanocomposite including the magnetic property inorganic oxide in the conductivity polymer includes one or more magnetic property inorganic oxide particles in a conductivity polymer particle.
Abstract translation: 提供一种纳米复合材料的制造方法，以通过使用硅烷偶联剂将磁性纳米颗粒的表面重整，从而提高超临界二氧化碳和其它材料的分散性。 纳米复合材料的制造方法包括在超临界二氧化碳中使用硅烷偶联剂在使用导电性单体表面改性的磁性无机氧化物粒子的聚合步骤中，使导电性聚合物中的无机氧化物均匀地具有磁性的步骤。 包含导电性聚合物中的磁性无机氧化物的纳米复合体包含导电性聚合物粒子中的一种以上的磁性无机氧化物粒子。
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公开(公告)号：KR1020080074410A
公开(公告)日：2008-08-13
申请号：KR1020070013478
申请日：2007-02-09
Applicant: 부경대학교 산학협력단
CPC classification number: Y02P20/544 , B82B3/00 , B82Y40/00 , C01B13/14 , C01G1/02
Abstract: A method for preparing core-shell type nanocomposite particles is provided to facilitate a separation of the product by pressure reduction of a reactor, and to produce the deformation-free product without causing a solubilization problem during a solvent removal step. A method for preparing core-shell type nanocomposite particles includes a steps of dispersing a surface-modified inorganic oxide in supercritical carbon dioxide, and using an organic monomer and a surfactant to prepare the core-shell type nanoparticles comprising an inorganic oxide core and an organic polymer shell layer, wherein the surface-modified inorganic oxide is obtained by surface-modifying an inorganic oxide using a silane coupling agent. The inorganic oxide is at least one selected from titanium dioxide, silicon dioxide, dialuminum trioxide, calcium carbonate, zirconium trioxide, zinc oxide, zinc dioxide, and tin dioxide. Further, the organic polymer is one or more selected from methyl mthacrylate, glycidyl methacrylate, styrene and divinyl benzene.
Abstract translation: 提供了制备核 - 壳型纳米复合材料颗粒的方法，以通过反应器的压力降低来促进产物的分离，并且在溶剂去除步骤中产生不变形的产物而不引起溶解问题。 制备核 - 壳型纳米复合材料颗粒的方法包括将表面改性的无机氧化物分散在超临界二氧化碳中，并使用有机单体和表面活性剂制备包含无机氧化物核和有机的核 - 壳型纳米颗粒的步骤 聚合物壳层，其中通过使用硅烷偶联剂对无机氧化物进行表面改性而获得表面改性的无机氧化物。 无机氧化物是选自二氧化钛，二氧化硅，三氧化二铝，碳酸钙，三氧化锆，氧化锌，二氧化锌和二氧化锡中的至少一种。 此外，有机聚合物是选自甲基丙烯酸甲酯，甲基丙烯酸缩水甘油酯，苯乙烯和二乙烯基苯中的一种或多种。
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