Abstract:
PURPOSE: A production method of trichlorosilane and a trickle bed reactor for the method are provided to obtain greater than 40% of the conversion ratio of tetrachlorosilane in a reaction condition at a temperature lower than 300°C. CONSTITUTION: A production method of trichlorosilane comprises the following steps: filling a trickle bed reactor (100) with a catalyst; supplying liquid tetrachlorosilane and gaseous hydrogen into the reactor; and reacting the liquid tetrachlorosilane and the gaseous hydrogen supplied to the reactor by the following reaction equation: SiCl4(l) + H2(g) → SiHCl3(g) + HCl(g). [Reference numerals] (AA) Non-reactive liquid phase STC
Abstract:
PURPOSE: A perfluorinated compound containing halogen group acid gas is provided to have excellent decomposition effect and durability by containing optimum ruthenium-phosphorous-aluminum ternary system. CONSTITUTION: A Ru-P-Al ternary perfluorinated compound comprises a decomposition catalyst for aluminum oxide catalyst and a co-catalyst supported in the surface of the catalyst. The co-catalyst comprises 0.05-0.3 parts by weight of Ru, 1.0-5.0 parts by weight of P, and 1 part by weight of an aluminum oxide catalyst. The catalyst for decomposing the perfluorinated compound decomposes the perfluorinated compound in a process containing halogen acid gas. A manufacturing method of the catalyst for decomposing the perfluorinated compound comprises a step of preparing a precursor solution by dissolving the Ru and P compounds in distilled water; and a step of dipping Ru and P in aluminum oxide using the precursor solution. [Reference numerals] (AA) Conversion rate(%); (BB) Example 1; (CC) Control group; (DD) Time(hr)