公开(公告)号：EP4303908A1

公开(公告)日：2024-01-10

申请号：EP22183148.0

申请日：2022-07-05

Applicant: ASML Netherlands B.V.

Inventor： HAARTSEN, Thomas Izaak Fred ,  BOSCH, Niels, Johannes, Maria ,  GRASMAN, Jasper, Hendrik ,  SMEETS, Martin, Frans, Pierre ,  SLOT, Erwin ,  PRIL, Wouter, Onno ,  HEMPENIUS, Peter, Paul

IPC: H01J37/21

Abstract: The present disclosure relates to apparatus and methods for assessing samples using a plurality of charged particle beams. In one arrangement, at least a subset of a beam grid of a plurality of charged particle beams and respective target portions of a sample surface are scanned relative to each other to process the target portions. Signal charged particles from the sample are detected to generate detection signals. A sample surface topographical map is generated that represents a topography of the sample surface by analyzing the detection signals.

公开(公告)号：EP4181167A1

公开(公告)日：2023-05-17

申请号：EP21207845.5

申请日：2021-11-11

Applicant: ASML Netherlands B.V.

Inventor： WIELAND, Marco, Jan-Jaco ,  SLOT, Erwin

IPC: H01J37/02 ,  H01J37/28

Abstract: The present invention provides a charged particle assessment system for projecting a beam of charged particles towards a sample. The system comprises a sample holder configured to hold a sample; a charged particle optical system configured to project a beam of charged particles from a charged particle source downbeam towards the sample and comprising a cleaning target; and a cleaning device. The cleaning device is configured to supply cleaning medium in a cleaning flow towards the cleaning target incident on the cleaning target so that the cleaning flow approaches the cleaning target from downbeam of the cleaning target, and to stimulate the cleaning medium at or near the cleaning target such that the cleaning medium cleans at least a portion of the surface of the cleaning target.

公开(公告)号：EP4113570A1

公开(公告)日：2023-01-04

申请号：EP21182521.1

申请日：2021-06-29

Applicant: ASML Netherlands B.V.

Inventor： SLOT, Erwin

IPC: H01J37/147

Abstract: Disclosed herein is a method of aligning a sample in a charged particle assessment system. The system comprises a support for supporting a sample, and is configured to project charged particles in a multi-beam towards a sample along a multi-beam path, the multi-beam comprising an arrangement of beamlets, and to detect signal particles emitted from the sample in response to a corresponding beamlet of the multi-beam. The method comprises: directing the multi-beam of charged particles along the multi-beam path towards an alignment feature of the sample, such that the field of view of the multi-beam of charged particles encompasses the alignment feature; detecting the signal particles emitted from the sample; generating a dataset representative of the alignment feature based on the detecting of the signal particles; and determining a global alignment of the sample with respect to the multi-beam path, using the dataset.

公开(公告)号：EP4009349A1

公开(公告)日：2022-06-08

申请号：EP20211715.6

申请日：2020-12-03

Applicant: ASML Netherlands B.V.

Inventor： SLOT, Erwin ,  MANGNUS, Albertus Victor Gerardus

IPC: H01J37/304

Abstract: A charged-particle tool configured to generate a plurality of sub-beams from a beam of charged particles and direct the sub-beams downbeam toward a sample 600 position, the tool charged-particle tool comprising;
at least three charged-particle-optical components 201,111,235,234;
a detector module 240 configured to generate a detection signal in response to charged particles that propagate upbeam from the direction of the sample position; and
a controller configured to operate the tool in a calibration mode; wherein:
the charged-particle-optical components include: a charged-particle source 201 configured to emit a beam of charged particles and a beam generator 111 configured to generate the sub-beams; and
the detection signal contains information about alignment of at least two of the charged-particle-optical components.