公开(公告)号：US11415595B2

公开(公告)日：2022-08-16

申请号：US16457849

申请日：2019-06-28

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  Xin Zhang ,  Michael Judy

IPC: G01P15/08 ,  G01P15/125

Abstract: Single-axis teeter-totter accelerometers having a plurality of anchors are disclosed. The plurality of anchors may be arranged about a rotation axis of the teeter-totter proof mass. Each of the plurality of anchors may be coupled to the proof mass by two torsional springs each extending along the rotation axis. The plurality of anchors allows an increased number of torsional springs to be coupled to the proof mass and thus greater torsional stiffness for the proof mass may be achieved. Due to the higher torsional stiffness, the disclosed single-axis teeter-totter accelerometers may be deployed in high-frequency environments where such increased torsional stiffness is required, for example, around 20 kHz and above.

公开(公告)号：US10882735B2

公开(公告)日：2021-01-05

申请号：US16254065

申请日：2019-01-22

Applicant: Analog Devices, Inc.

Inventor： Jinbo Kuang ,  Gaurav Vohra

IPC: B81B3/00 ,  B81C1/00

Abstract: Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.

公开(公告)号：US20200081029A1

公开(公告)日：2020-03-12

申请号：US16129755

申请日：2018-09-12

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Gaurav Vohra ,  Michael Judy

IPC: G01P15/125

Abstract: Z-axis teeter-totter accelerometers with embedded movable structures are disclosed. The teeter-totter accelerometer may include an embedded mass which pivots or translates out-of-plane from the teeter-totter beam. The pivoting or translating embedded mass may be positioned to increase the sensitivity of the z-axis accelerometer by providing greater z-axis displacement than the teeter-totter beam itself exhibits.

公开(公告)号：US20180134543A1

公开(公告)日：2018-05-17

申请号：US15650822

申请日：2017-07-14

Applicant: Analog Devices, Inc.

Inventor： Jinbo Kuang ,  Gaurav Vohra

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0051 ,  B81B3/0013 ,  B81B3/0059 ,  B81B2207/012 ,  B81C1/00976 ,  B81C2201/11 ,  B81C2203/0109 ,  B81C2203/0118

Abstract: Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.

公开(公告)号：US09709595B2

公开(公告)日：2017-07-18

申请号：US14080370

申请日：2013-11-14

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  John A. Geen

IPC: G01C19/5698 ,  G01P15/097 ,  G01C19/5684 ,  G01P15/18 ,  G01P15/125

CPC classification number: G01P15/097 ,  G01C19/5684 ,  G01P15/125 ,  G01P15/18

Abstract: A method of detecting motion provides a resonator having a mass, moves the mass in a translational mode, and actuates the mass in a given bulk mode. The mass moves in the translational and given bulk modes at substantially the same time and, accordingly, the resonator is configured to detect linear and rotational movement when moving and actuating the mass in the translational and given bulk modes. The method produces one or more movement signals representing the detected linear and rotational movement.

公开(公告)号：US09599471B2

公开(公告)日：2017-03-21

申请号：US14531123

申请日：2014-11-03

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  Jeffrey A. Gregory

IPC: G01C19/56 ,  G01C19/5698 ,  G01C19/5684 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01C19/5698 ,  G01C19/5684 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

Abstract: Methods and apparatus for sensing linear acceleration with a MEMS resonator mass, alone, or concurrently with sensing rate of rotation. A resonator mass, which may be a disk or a ring structure, is driven at a resonance frequency of one of the vibration modes of the resonator mass. The amplitude of vibration of that mode is sensed by a set of at least two drive-sense electrodes disposed at opposing positions across the resonator mass. A linear acceleration is derived based at least on a difference between signals of the opposing electrodes. Linear acceleration may be sensed in multiple orthogonal dimensions using multiple pairs of opposing electrodes. Rotation rate may be derived concurrently by sensing the energy coupled into an orthogonal mode of the resonator mass.