公开(公告)号：US10816569B2

公开(公告)日：2020-10-27

申请号：US16125604

申请日：2018-09-07

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Gaurav Vohra

IPC: G01P15/125 ,  G01P15/08

Abstract: Z-axis microelectromechanical systems (MEMS) accelerometers are described. The z-axis MEMS accelerometers are of a teeter-totter type, having a pivoting beam suspended above a substrate. A non-uniform gap distance between the pivoting beam and the substrate is provided to increase the sensitivity of the accelerometer to z-axis acceleration. In some embodiments, the non-uniform gap distance is created by one or more substrate layers, such as one or more layers of polysilicon on the substrate above which the pivoting beam is suspended. In some embodiments, the non-uniform gap distance is created by the use of one or more bumps on the beam. In some embodiments, both substrate layers and bumps are used to provide a non-uniform gap distance for different electrodes of the accelerometer. The non-uniform gap distance may include a gap of reduced height, resulting in increased sensitivity of the accelerometer to z-axis accelerations.

公开(公告)号：US20200241036A1

公开(公告)日：2020-07-30

申请号：US16775316

申请日：2020-01-29

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Jianglong Zhang ,  Alan O'Donnell

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/08 ,  B81B3/00

Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.

公开(公告)号：US20200069890A1

公开(公告)日：2020-03-05

申请号：US16270481

申请日：2019-02-07

Applicant: Analog Devices, Inc.

Inventor： Gabriele Vigevani ,  Xin Zhang

IPC: A61M11/00 ,  H01L41/047 ,  H01L41/053 ,  H01L41/09 ,  H01L41/187 ,  H01L41/23 ,  H01L41/29 ,  H01L41/316 ,  H01L41/332 ,  A61M15/00 ,  C25D7/12 ,  C25D5/54

Abstract: Microelectromechanical systems (MEMS) mesh-membrane nebulizers are described. The MEMS mesh-membrane nebulizers may include a piezoelectric MEMS mesh membrane. The piezoelectric MEMS mesh membrane may include a piezoelectric active layer patterned with openings for making droplets. One electrode of the piezoelectric MEMS mesh membrane may serve as an electrode for electroplating. Activation of the piezoelectric MEMS mesh membrane may generate droplets suitable for delivery of medicines or other uses.

公开(公告)号：US20190154725A1

公开(公告)日：2019-05-23

申请号：US15818713

申请日：2017-11-20

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang

IPC: G01P15/08 ,  G01P15/125

Abstract: A microelectromechanical system (MEMS) apparatus is described. The MEMS apparatus may comprise inertial sensors and energy harvesters configured to convert mechanical vibrational energy into electric energy. The harvested energy may be used to power an electronic circuit, such as the circuit used to sense acceleration from the inertial sensors. The inertial sensors and the energy harvesters may be disposed on the same substrate, and may share the same proof mass. The energy harvesters may include a piezoelectric material layers disposed on a flexible structure. When the flexible structures flexes in response to vibration, stress arises in the piezoelectric material layer, which leads to the generation of electricity. Examples of inertial sensors include accelerometers and gyroscopes.

公开(公告)号：US10203352B2

公开(公告)日：2019-02-12

申请号：US15228229

申请日：2016-08-04

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  William A. Clark ,  Michael Judy

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/08

Abstract: A microelectromechanical systems (MEMS) accelerometer is described. The MEMS accelerometer may comprise a proof mass configured to sense accelerations in a direction parallel the plane of the proof mass, and a plurality of compensation structures. The proof mass may be connected to one or more anchors through springs. The compensation structures may be coupled to the substrate of the MEMS accelerometer through a rigid connection to respective anchors. A compensation structure may comprise at least one compensation electrode forming one or more lateral compensation capacitors. The compensation capacitor(s) may be configured to sense displacement of the anchor to which the compensation structures is connected.

公开(公告)号：US10073113B2

公开(公告)日：2018-09-11

申请号：US14695421

申请日：2015-04-24

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael Judy

IPC: G01P15/08 ,  B81C1/00 ,  H01L21/48 ,  G01C19/5769

CPC classification number: G01P15/0802 ,  B81B3/0059 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00261 ,  B81C2203/0109 ,  G01C19/5769

Abstract: In one aspect, the disclosure is directed to a MEMS device. The MEMS device includes a silicon-based movable MEMS sensor element. The MEMS device also includes a plurality of wells formed into at least one surface of the movable MEMS sensor element. Each well is filled with at least one metal so as to increase the effective mass of the movable MEMS sensor element. The metal may be tungsten or tantalum, or an alloy with tungsten or tantalum.

公开(公告)号：US20160097791A1

公开(公告)日：2016-04-07

申请号：US14505928

申请日：2014-10-03

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0021 ,  B81B3/0054 ,  B81B2201/0235 ,  B81B2203/058 ,  G01P2015/0831

Abstract: In some exemplary embodiments, a MEMS accelerometer includes a device wafer having a proof mass and a plurality of tracking anchor points attached to a substrate. Each tracking anchor is configured to deflect in response to asymmetrical deformation in the substrate, and transfer mechanical forces generated in response to the deflection to tilt the proof mass in a direction of the deformation.

Abstract translation: 在一些示例性实施例中，MEMS加速度计包括具有校准质量块和附接到衬底的多个跟踪锚点的器件晶片。 每个跟踪锚被配置为响应于衬底中的不对称变形而偏转，并且传递响应于偏转产生的机械力，以使变形块的方向倾斜。

公开(公告)号：US09297825B2

公开(公告)日：2016-03-29

申请号：US13785624

申请日：2013-03-05

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Howard R. Samuels ,  Michael W. Judy

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P15/08 ,  G01P2015/0831 ,  G01P2015/0834

Abstract: A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.

Abstract translation: 单轴倾斜模式微机电加速度计结构。 该结构包括具有由第一端和第二端限定的顶表面的基底。 耦合到衬底的是第一不对称形状的质量块，悬挂在衬底上方，可在第一端和第二端之间围绕衬底上的第一枢转点枢转，并且悬挂在衬底上方的第二不对称形状的质量可围绕第二枢转点枢转 第一端和第二端之间的衬底。 该结构还包括位于衬底上并位于第一不对称形状的质量下方的第一组电极和位于衬底上并位于第二不对称形状的质量下方的第二组电极。

公开(公告)号：US20150355222A1

公开(公告)日：2015-12-10

申请号：US13910755

申请日：2013-06-05

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael W. Judy

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0086 ,  B81B3/0094 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  G01P2015/0837

Abstract: An MEMS device has a dynamically variable reference capacitor that provides a reference to a sense capacitance. In some embodiments, a 3-axis accelerometer includes a proof mass suspended above a substrate from an anchor, and a cantilevered Z-axis reference capacitor arm suspended above the substrate from the same anchor. In some embodiments, the proof mass is suspended from a plurality of anchors, and each anchor also supports one or more cantilevered arms, the cantilevered arms forming a dynamically variable reference capacitance.

Abstract translation: MEMS器件具有动态可变参考电容器，其提供对感测电容的参考。 在一些实施例中，3轴加速度计包括悬挂在来自锚固件的基板上方的检验质量块，以及从相同锚点悬挂在基板上方的悬臂Z轴参考电容臂。 在一些实施例中，证明物质从多个锚固体悬挂，并且每个锚固件还支撑一个或多个悬臂，悬臂构成动态可变参考电容。

公开(公告)号：US12153065B2

公开(公告)日：2024-11-26

申请号：US17589745

申请日：2022-01-31

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Jianglong Zhang ,  Alan O'Donnell

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  G01P15/18 ,  H02J50/00 ,  H02N2/18 ,  H10N10/13

Abstract: Sensing devices are described. A sensing device includes an inertial sensor, a read-out circuit configured to determine first data indicative of an acceleration of the structure using an output of the inertial sensor, an energy harvester configured to capture energy, and a power management unit. The power management unit comprises a plurality of energy storage components coupled to the energy harvester and a plurality of switches coupled to respective energy storage components of the plurality of energy storage components. The power management unit monitors energy levels stored in the energy storage components, selectively charges the plurality of energy storage components by selectively activating the plurality of switches, and provides power to one or more of the inertial sensor and the read-out circuit based on the monitored energy levels.