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    PROCEDE DE PREPARATION DE POUDRE DE CARBURE DE SILICIUM EN VUE DE SON UTILISATION DANS DES EQUIPEMENTS SEMI-CONDUCTEURS.
    22.
    发明专利
    PROCEDE DE PREPARATION DE POUDRE DE CARBURE DE SILICIUM EN VUE DE SON UTILISATION DANS DES EQUIPEMENTS SEMI-CONDUCTEURS. 未知

    公开(公告)号：FR2679219B1

    公开(公告)日：1994-04-01

    申请号：FR9208833

    申请日：1992-07-17

    Applicant: SUMITOMO METAL IND ,  BRIDGESTONE CORP

    Inventor： KOJIMA SHOICHI ,  MINAGAWA KAZUHIRO ,  SAITO TASUKU ,  KURACHI YASUO ,  KANO HARUYUKI

    IPC: C04B35/565 ,  H01L21/67 ,  C01B31/36 ,  H01L21/68

    Abstract: La présente invention concerne un procédé pour la préparation d'une poudre de carbure de silicium béta appropriée pour l'utilisation dans la fabrication d'équipements à semi-conducteurs et ayant une teneur de 1 ppm ou moins de chaque atome nuisible à la fabrication de dispositifs à semi-conducteurs, comprenant les opérations consistant à préparer un mélange de départ contenant du carbone et du silicium comprenant (a) au moins un produit siliceux choisi parmi les composés liquides du silicium et les substances siliceuses solides dérivées d'un composé du silicium hydrolysable, et (b) au moins un produit carboné choisi parmi les composés organiques polymérisables ou réticulables préparés en présence d'un catalyseur qui est pratiquement exempt d'atomes nuisibles à la fabrication de dispositifs à semi-conducteurs, au moins un produit utilisé comme composant (a) ou (b) étant une substance liquide; à solidifier le mélange de départ par chauffage et/ou en utilisant un catalyseur ou un agent de durcissement; et à calciner le corps solide résultant dans une atmosphère non oxydante dans des conditions suffisantes pour obtenir une poudre de carbure de silicium béta.

    23.
    发明专利
    未知

    公开(公告)号：DE4223667A1

    公开(公告)日：1993-01-21

    申请号：DE4223667

    申请日：1992-07-17

    Applicant: SUMITOMO METAL IND ,  BRIDGESTONE CORP

    Inventor： KOJIMA SHOICHI ,  MINAGAWA KAZUHIRO ,  SAITO TASUKU ,  KURACHI YASUO ,  KANO HARUYUKI

    IPC: C01B31/36 ,  C04B35/565 ,  H01L21/67

    Abstract: A process for the preparation of a beta-silicon carbide powder of high purity which is suitable for use in the manufacture of semiconductor equipment and which has a content of 1 ppm or less of each atom harmful to the manufacture of semiconductor devices. The process comprises preparing a carbon- and silicon-containing starting mixture comprising (a) at least one siliceous material selected from liquid silicon compounds and solid siliceous substances derived from a hydrolyzable silicon compound, and (b) at least one carbonaceous material selected from polymerizable or cross-linkable organic compounds prepared in the presence of a catalyst which is substantially free from atoms harmful to the manufacture of semiconductor devices. The starting mixture comprises at least one liquid substance used as component (a) or (b). The starting mixture is then solidified by heating and/or by use of a catalyst or a curing agent. The resulting solid body is optionally heat treated in a non-oxidizing atmosphere at a temperature in the range of from 500 DEG C. to 1300 DEG C. for a period sufficient to remove volatiles. The cured and optionally heat-treated body is calcined in a non-oxidizing atmosphere under conditions sufficient to give beta-silicon carbide powder.

    ELECTROVISCOUS FLUID, ITS PRODUCTION, AND METHOD FOR ITS STORAGE
    25.
    发明专利
    ELECTROVISCOUS FLUID, ITS PRODUCTION, AND METHOD FOR ITS STORAGE 失效

    公开(公告)号：JPH11172275A

    公开(公告)日：1999-06-29

    申请号：JP34551797

    申请日：1997-12-15

    Applicant: BRIDGESTONE CORP

    Inventor： ENDO SHIGEKI ,  MARUYAMA TAKAYUKI ,  WADA HIROAKI ,  SAITO TASUKU

    IPC: F16F9/53 ,  C10M169/04 ,  C10M171/00 ,  C10N20/00 ,  C10N20/06 ,  C10N40/14 ,  C10N60/00

    Abstract: PROBLEM TO BE SOLVED: To obtain an electroviscous fluid which scarcely undergoes dielectric breakdown such as the generation of discharge even when a high voltage is applied thereto and has high reliability. SOLUTION: There is provided an electroviscous fluid prepared by dispersing microparticles in an oily medium having electrical insulation properties and having a dielectric breakdown strength of 4 kV/mm or above. This can be achieved by meeting the requirement that the electroviscous fluid does not foam when it is subjected to a reduced pressure of 10 Pa or that at least one gas selected among, for example, SF6 , CCl2 F2 , F2 , C3 F8 , C2 F6 , C5 F8 , CF3 CN, C2 F5 CN, Cl2 , SOF2 , C2 ClF5 , and ClO3 F and having a dielectric break down strength of 4 kV/mm or above constitutes at least 20 vol.% of the gases contained in the oily medium.

    ELECTROVISCOUS FLUID
    28.
    发明专利
    ELECTROVISCOUS FLUID 失效

    公开(公告)号：JPH06122885A

    公开(公告)日：1994-05-06

    申请号：JP15985091

    申请日：1991-06-05

    Applicant: BRIDGESTONE CORP

    Inventor： ISHINO YUICHI ,  MARUYAMA TAKAYUKI ,  SAITO TASUKU

    IPC: C01B31/00 ,  C10M101/02 ,  C10M171/06 ,  C10N20/06 ,  C10N30/04 ,  C10N40/14

    Abstract: PURPOSE:To obtain an electroviscous fluid, having great electroviscous effects and good in stability for a long period by dispersing dielectric grains which are hollow microspheres having a specific grain diameter as a disperse phase in an oily medium liquid phase having high electrical insulating properties and the surface layer composed of a carbonaceous substance at a specific carbon-hydrogen atomic ratio. CONSTITUTION:This electroviscous fluid is obtained by coating 100 pts.wt. hollow microspheres such as a phenol resin with 1000 pts.wt. 12% solution of a resol-based phenolic resin, etc., in methanol with a spray dryer, providing powder composed of the hollow microspheres, then treating the resultant powder at 600 deg.C in a nitrogen gas stream, subsequently well dispersing the treated powder in a 64wt.% silicone oil which is a liquid-phase component and thereby dispersing the resultant dielectric grains as a disperse phase in the liquid medium composed of an oily medium excellent in electrical insulating properties. The dielectric grains are hollow microspheres having 0.1-500mum average grain diameter and at least the surface layer of the hollow microspheres is composed of a carbonaceous substance at 1.2-5.0 atomic ratio (C/H) of the carbon atoms to the hydrogen atoms. This fluid has great electroviscous effects with small power consumption and is excellent in responsiveness and stability for a long period.

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