公开(公告)号：JPS62232506A

公开(公告)日：1987-10-13

申请号：JP7602286

申请日：1986-04-01

Applicant: CHUGAI RO KOGYO KAISHA LTD

Inventor： SHINTANI MASANORI

IPC: E06B1/70 ,  E06B1/56 ,  E06B7/12 ,  E06B7/26 ,  G01B11/06

Abstract: PURPOSE:To accurately measure the thickness of a surface layer without receiving the effect of an external condition by one measuring system, by a method wherein infrared rays are incident on an article to be measured through an opening and closing means and the reflected rays are discriminated so as to be classified by opening and closing modes to be subjected to signal processing. CONSTITUTION:Infrared rays of a reference infrared ray source 5 are reflected by a spherical or non-spherical mirror 3 and a painted strip plate 1 through a chopper 6 to be condensed to an infrared ray sensor 12 through a rotary sector 9. Because a notch 7 is provided to the chopper 6 and a filter 10 is provided to the sector 9, four operation modes are generated by the rotation of the chopper 6 and the sector 9 and the mode to which the signal of the sensor 12 belongs is discriminated by a mode discrimination device 14 and the thickness of the film 12 on the specimen 1 is measured by a film thickness conversion device 15. Therefore, the thickness of a surface layer can be accurately measured by one ray measuring system without receiving the effect of the temp. of a specimen, the variation in the characteristics of a ray source and the change in the characteristics of an optical system etc.

公开(公告)号：JP2003141994A

公开(公告)日：2003-05-16

申请号：JP2001334723

申请日：2001-10-31

Applicant: CHUGAI RO KOGYO KAISHA LTD

Inventor： SHINTANI MASANORI

IPC: C03B23/207 ,  C03B23/13 ,  C03B23/213 ,  H01J9/26 ,  H01J9/385 ,  H01J11/46 ,  H01J11/48 ,  H01J11/54 ,  H01J11/02

Abstract: PROBLEM TO BE SOLVED: To provide a sealing method of a tip pipe that prevents a force inflicted from an unintended direction on the tip pipe sealed on the glass panel and that has realized prevention of damage and steady sealing process of the tip pipe, and to provide an exhaust air head for the same. SOLUTION: The exhaust air head 1A, which supports the tip pipe 12 that is sealed on the ventilation aperture part of the glass panel 14, comprises a chip pipe insertion space 16 provided capable of evacuation, and a ring-shape seal part 17 for holding airtight the outer circumference of the tip pipe 12 inside this tip pipe insertion space 16, and is supported by a spring 22 and is also formed capable of displacement only in upward and downward direction by a slide guide 2A.

公开(公告)号：JP2002329464A

公开(公告)日：2002-11-15

申请号：JP2001134076

申请日：2001-05-01

Applicant: CHUGAI RO KOGYO KAISHA LTD

Inventor： SHINTANI MASANORI

IPC: F04B37/16 ,  H01J9/385

Abstract: PROBLEM TO BE SOLVED: To prevent that external dust advances into a tip tube of an exhaust head, and it adheres to a sealing component. SOLUTION: In the method of connecting the tip tube 2 and the exhaust head 3 of a glass panel 1 by keeping the tip tube 2 of the glass panel 1 airtight by the sealing component 12a inside of a tip tube wearing part 8 of the exhaust head 3, after equipping with the above tip tube 2 in the tip pipe wearing part 8 while making purge gas flow from an insertion opening 8a of the tip tube wearing part 8 of the above exhaust head 3, the tip tube 2 is kept airtight by the above sealing component 12a. Then, if the tip tube 2 is made airtight by the sealing component 12a, introduction of the purge gas is stopped.

公开(公告)号：JP2001143895A

公开(公告)日：2001-05-25

申请号：JP2000063697

申请日：2000-03-08

Applicant: CHUGAI RO KOGYO KAISHA LTD

Inventor： SHINTANI MASANORI ,  FURUYA EIJI

IPC: H05H1/34 ,  C23C14/32 ,  C23C16/513 ,  H01J27/08

Abstract: PROBLEM TO BE SOLVED: To provide a pressure gradient plasma gun that produces stable continuous plasma with a durability. SOLUTION: The pressure gradient plasma gun 1A includes a first intermediate electrode 21 arranged at the front of the cathode part 10, second intermediate electrode 22 arranged at the front of the first intermediate electrode 22, and anti-spatterable members 25 arranged in their central front portions so as to be replaced.

公开(公告)号：JPH08239750A

公开(公告)日：1996-09-17

申请号：JP3989095

申请日：1995-02-28

Applicant: CHUGAI RO KOGYO KAISHA LTD

Inventor： KISODA KINYA ,  SHINTANI MASANORI

IPC: C23C14/02 ,  C23C14/56 ,  C23F4/00

Abstract: PURPOSE: To perform the treatment causing no changes in the material characteristics of sheet and capable of improving adhesion and film quality. CONSTITUTION: A sheet S, composed of copper, aluminum, or alloy thereof, is wound on a cooling roll 9 and conveyed. Simultaneously, the temp. of the sheet is maintained at

公开(公告)号：JPH04329868A

公开(公告)日：1992-11-18

申请号：JP10096591

申请日：1991-05-02

Applicant: CHUGAI RO KOGYO KAISHA LTD

Inventor： SHINTANI MASANORI

IPC: C23C4/12 ,  C23C14/24 ,  C23C14/30 ,  C23C14/54 ,  H01J37/30

Abstract: PURPOSE:To provide a PVD device in which a thin film can be vapor-deposited on the surface of a substrate in a uniform thickness and the area of vapor deposition can easily be varied. CONSTITUTION:In a PVD device, a plasma jet 3 from a plasma gun 2 is led to the top of a crucible 5 contg. starting material 4 to be evaporated with a magnetic field to evaporate the starting material 4 and a thin film is formed on the surface of a substrate 10 set over the starting material 4. Plural permanent magnets 6 are arranged under the crucible 5 in the PVD device so that they can be moved up and down.