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公开(公告)号：JPH0565641A
公开(公告)日：1993-03-19
申请号：JP22575491
申请日：1991-09-05
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： SHINTANI MASANORI
Abstract: PURPOSE:To provide a vacuum evaporation device capable of forming a film uniform in thickness by making the shape of a plasma current, focusing range and deposition area changeable. CONSTITUTION:A plasma current 3 from a plasma gun 2 is drawn into a vacuum chamber 1 by the magnetic field generated from an air-core coil 9 and conducted onto a vaporization material crucible 5 to vaporize the material, and a thin film is formed on the surface of a substrate W placed above the material. In this vacuum evaporation device, auxiliary air-core coils 14a and 14b are provided on both sides of the air-core coil. A power unit 7 is furnished to supply a current of optional value to the auxiliary air-core coil or the auxiliary air-core coil and the air-core coil, and a device 8 is provided to indicate a current value to be supplied to the auxiliary air-core coil or the auxiliary air-core coil and the air-core coil to the power unit.
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公开(公告)号：JP2003176146A
公开(公告)日：2003-06-24
申请号：JP2001375909
申请日：2001-12-10
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： SHINTANI MASANORI
Abstract: PROBLEM TO BE SOLVED: To provide a chip pipe sealing and cutting device with which the facilitation of installation, the reduction of the number of units, the improvement of durability, the prevention of the damage of panels, are achieved. SOLUTION: The chip pipe sealing and cutting device 1 has a thermally insulating casing 2 formed with a through-hole 8 for housing the chip pipe and a heater 3 for heating the outer peripheral part of a chip pipe disposed in this casing 2 which is formed of divided structures consisting of two operable and closable thermally insulating casings 2x and 2y and the casings 2x and 2y are provided with heaters 3 for heating the outer peripheral part of the chip pipe. COPYRIGHT: (C)2003,JPO
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公开(公告)号：JP2003146409A
公开(公告)日：2003-05-21
申请号：JP2001343336
申请日：2001-11-08
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： SHINTANI MASANORI
Abstract: PROBLEM TO BE SOLVED: To provide a method for stacking a panel on an evacuation cart that can allow a robot to insert a panel into a panel insertion space and transfer it to an appropriate position without a collision with another part, and can improve the working efficiency. SOLUTION: When the robot stacks a panel P on the evacuation cart 10, the height of a panel insertion space I is measured, and whether a panel insertion is possible into the panel insertion space I or not is determined. If possible, according to vent center position information on the panel P and center position information on a tip tube 23 on an evacuation head, a movement stopping position of a robot hand holding the panel P is corrected, if necessary, to align both center positions, before the panel P is transferred onto panel supports 27.
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公开(公告)号：JP2003145467A
公开(公告)日：2003-05-20
申请号：JP2001344590
申请日：2001-11-09
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： SHINTANI MASANORI
Abstract: PROBLEM TO BE SOLVED: To provide a method for carrying out an evacuated panel from an evacuation cart in which breakage of a chip pipe and leakage from the panel can be avoided when carrying out the panel from the evacuation cart by a robot. SOLUTION: When carrying out the panel from the evacuation cart by using the robot, the position of a chip pipe clip 1 having a reference marker 3 is detected, the axes of a robot hand and the chip pipe clip 1 are agreed with each other to remove the chip pipe clip 1, and the position of a chip pipe 23 fitted to an evacuation head 24 is detected. Acceptance/rejection of the fitting a heater for sealing and cutting the chip pipe to the chip pipe 23 is determined based on the position information, and if the fitting is possible, the chip pipe 23 is sealed and cut after the fitting, a lower side of the panel P is supported by the robot hand to take out and transfer the panel P from the evacuation cart.
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公开(公告)号：JP2002313600A
公开(公告)日：2002-10-25
申请号：JP2001118121
申请日：2001-04-17
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： SHINTANI MASANORI
Abstract: PROBLEM TO BE SOLVED: To provide a pressure gradient type plasma gun capable of reducing the time required for initial ignition. SOLUTION: The pressure gradient type plasma gun 1 includes a cathode part 13 provided to protrude from the front side of a cathode mount 12; a first intermediate electrode 22 provided in front of the cathode part 13 and electrically insulated from the cathode mount 12 by an insulating tube 21 surrounding the cathode part 13; a second intermediate electrode 24 provided in front of the first intermediate electrode 22 and electrically insulated from the first intermediate electrode 22 by an insulating member 23 formed of an annular ring; and a cylindrical mounting short tube 25 provided to protrude forwardly from the second intermediate electrode 24 and electrically insulated from the second intermediate electrode 24 by an insulating member 26 formed of an annular ring. The cathode part 13 is electrically insulated from the cathode mount 12.
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Patent Agency Ranking
公开(公告)号：JPH1180952A
公开(公告)日：1999-03-26
申请号：JP24518897
申请日：1997-09-10
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： SHINTANI MASANORI
Abstract: PROBLEM TO BE SOLVED: To provide a activating reaction vapor depositing method for oxide thin film capable of stably obtaining thin film over a long time. SOLUTION: In a activating reaction vapor depositing method in which a pressure gradient type plasma gun 2 is used to form oxide thin film on a substrate W, the degree of vacuum in a treating chamber is detected, and the exhausting rate from the treating chamber is controlled so as to make the detected value equal to the set value. Furthermore, the partial pressure of oxygen in the treating chamber is detected, and the amt. of oxygen to be introduced into the treating chamber is controlled so as to make the detected value equal to the set value.
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公开(公告)号：JPH0978230A
公开(公告)日：1997-03-25
申请号：JP23981195
申请日：1995-09-19
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： SHINTANI MASANORI
Abstract: PROBLEM TO BE SOLVED: To deform plasma flow to a desired sheet shape without bringing the plasma flow into contact with the electrodes of a plasma gun, vacuum chamber, etc. SOLUTION: This sheet-like plasma generator deforms the columnar plasma flow from the plasma gun 3 to a sheet shape by drawing out the columnar plasma flow in a vacuum chamber 1 direction by the magnetic field generated by an air-core coil 8, then holding the columnar plasma flow with a pair of first permanent magnets 17. The plasma generator has a pair of second permanent magnets 18 for further holding the sheet-like plasma flow deformed to the sheet shape by a pair of the permanent magnets 17 within the vacuum chamber 1.
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公开(公告)号：JPH0925575A
公开(公告)日：1997-01-28
申请号：JP17327695
申请日：1995-07-10
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： KISODA KINYA , SHINTANI MASANORI
Abstract: PROBLEM TO BE SOLVED: To form an ITO film having low resistivity on a substrate in a state in which the temp. of the substrate is lowly held. SOLUTION: At the time of forming an ITO film on a substrate by an activated reaction vapor deposition method using a pressure gradient type plasma gun 5, the temp. of a substrate 11 is held within a region including the temp. at which the resistivity of the film reaches the minimum value and also from the low temp. side one to the high temp. side one in a temp. region in which desired resistivity can be obtd.
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公开(公告)号：JP2003123648A
公开(公告)日：2003-04-25
申请号：JP2001322024
申请日：2001-10-19
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： SHINTANI MASANORI
Abstract: PROBLEM TO BE SOLVED: To provide an installation method of a chip pipe on the exhaust-air head in which the chip pipe can be held to the correct position in the chip pipe insertion hole of the exhaust-air head. SOLUTION: When the chip pipe 28 is installed by a robot in the chip pipe insertion hole of the exhaust-air head 23 supported by the exhaust-air cart 10, the reference travel-stop position of a robot hand is corrected beforehand by the stop-position information of the exhaust-air cart 10 and the center position information of the chip pipe insertion hole, and the descending-stop position of the robot hand from the reference travel-stop position or the chip pipe carrying position of the robot hand in the chip pipe tray is corrected beforehand by the length information of the chip pipe 28, and then, by operation the robot hand, the chip pipe 28 is inserted and held in the chip pipe insertion hole of the exhaust-air head 23.
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公开(公告)号：JP2002129312A
公开(公告)日：2002-05-09
申请号：JP2000320881
申请日：2000-10-20
Applicant: CHUGAI RO KOGYO KAISHA LTD
Inventor： SHINTANI MASANORI
IPC: C23C14/32
Abstract: PROBLEM TO BE SOLVED: To provide a vacuum film deposition apparatus capable of making good film by eliminating influence of radiant heat from plasma on a substrate. SOLUTION: The vacuum film deposition apparatus is provided with a hollow cathode type plasma gun 12, a plasma introducing entrance 17 exists on a wall of a film making room 11 in which the plasma gun is fitted, a space 4 exists between a film making field and a part of wall 3 above the entrance 17, and magnetic field deflector plates 2 constructed from a magnetic material formed into the shape of a groove in section, is arranged open to the wall 3 of the film making room 11 in the space 4.
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