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公开(公告)号:JPH0211899A
公开(公告)日:1990-01-16
申请号:JP16092088
申请日:1988-06-30
Applicant: SUMITOMO CEMENT CO , EBARA CORP
Inventor: HAYASHI MIKIO , SUGIYAMA HIROKI , SHINJO RYOICHI , ISAKA SHINICHI
Abstract: PURPOSE:To prevent surfaces of a liner from wearing in its corner part by forming an irregular surface in the surfaces of ceramics along a flow direction of gas in the corner part formed by a bottom wall part of the liner and its side wall part. CONSTITUTION:A channel-shaped liner 20, protected and coated in its internal side surface with ceramics 21, is connected to each blade plate 2 of an impeller. Surfaces of ceramics 21a, 21b in right and left corner parts 25, 26 of the liner 20 are irregularly formed along its lengthwise direction. Consequently, the corner part 25 is prevented from generating a smooth flow of gas, weakening simultaneously even flow energy of dust, and the liner 20 is prevented from easily generating wear in its surface by the dust.
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公开(公告)号:JPH114995A
公开(公告)日:1999-01-12
申请号:JP17761597
申请日:1997-06-17
Applicant: EBARA CORP
Inventor: NISHIOKA YUKIKO , SHINJO RYOICHI , ISHII YOSHIHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a dry cleaning system to make laundry to be cleanly washed by keeping a petroleum solvent clean, capable of preventing the ignition or explosion of the petroleum solvent, and inexpensive in price and running cost. SOLUTION: In this dry cleaning system with using a petroleum solvent as a cleaning liquid, provided with an ozone adding part (an air diffuser pipe 11) at an appropriate place in a dry cleaning liquid circulatory system between an exhausting side of a washing tub of the dry cleaning device and a circulating pump, and adapted for adding an ozone gas supplied from an ozone generating device 10 into the cleaning liquid through the ozone adding part, the ozone generating device 10 is a device for generating the ozone gas from an oxygen- enriched air as a raw gas, generated by an oxygen enrichment machine 15, and is to introduce a nitrogen-enriched air exhausted when the oxygen-enriched air is generated by the oxygen enrichment machine 15 to a vapor phase part for a solvent storing tank 2 and/or a vapor phase part for the washing tub 8.
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公开(公告)号:JPH0859214A
公开(公告)日:1996-03-05
申请号:JP22415194
申请日:1994-08-24
Applicant: EBARA CORP , TOSHIBA CORP
Inventor: HARADA MINORU , SHINJO RYOICHI , TSUJIMURA MANABU , NAKADA RENPEI , MIYAZAKI KUNIHIRO , KAJI SHIGEHIKO
Abstract: PURPOSE: To provide an ozonizer not being stained with a Cr compound or stained in such a slight degree as not to cause problems in production of semiconductors of high integration by eliminating NOx, HF and SOx contained in an ozone gas as a main cause of the occurrence of a Cr compound. CONSTITUTION: In this ozonizer 10 for supplying a raw material gas to an ozone generating cell 11 to which a high voltage is impressed and sending a generated ozone gas through ozone gas transporting flow channels 14 and 15, the ozone gas transporting flow channels are equipped with a removing means for eliminating one or more of NOx, HF and SOx. The ozone gas from the ozone generating cell 11 is passed through the removing means to remove one or more of NOx, HF and SOx contained in the ozone gas and delivered.
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公开(公告)号:JPH0859210A
公开(公告)日:1996-03-05
申请号:JP22415094
申请日:1994-08-24
Applicant: EBARA CORP , TOSHIBA CORP
Inventor: HARADA MINORU , SHINJO RYOICHI , TSUJIMURA MANABU , NAKADA RENPEI , MIYAZAKI KUNIHIRO , KAJI SHIGEHIKO
IPC: C01B13/11
Abstract: PURPOSE: To enable extreme reduction of a Cr compound in a generated ozone gas by constituting at least a part coming into contact with ozone gas, from a material not containing Cr, in an ozonizer. CONSTITUTION: In this ozonizer equipped with an ozone gas generating cell for supplying a raw material gas and impressing a high voltage from a high- voltage electric source to the raw material gas to generate ozone gas and an ozone gas sending route for transporting generated ozone gas, materials of at least parts coming into contact with ozone gas, such as pipes, joints, valves and gas filters of the ozone sending route on and after the ozone generating cells are composed of materials not containing chromium or materials coated with a material not containing chromium. One or more of aluminum, an aluminum alloy, Teflon, nickel treated with fluorine, a nickel alloy, glass composed of silicon oxide as a main component and high-purity aluminum oxide are preferable as the materials not containing chromium.
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公开(公告)号:JPH04203616A
公开(公告)日:1992-07-24
申请号:JP33784390
申请日:1990-11-30
Applicant: EBARA CORP
Inventor: NODA YUMIKO , KAMIYA ICHIRO , SHINJO RYOICHI , TOSHIMITSU MANABU , SATO YOSHIO
Abstract: PURPOSE:To enhance dynamic pressure generating groove forming accuracy by coating a base material of a dynamic pressure bearing made of ceramics with resin or oil capable of absorbing a YAGQ switch pulse laser beam, radiating the YAGQ laser beam so as to form a recess portion formed into a predetermined shape, and removing the residual coating film. CONSTITUTION:A coating film 14 made of resin or oil, e.g. dimethyl silicone oil colored into blue capable of efficiently absorbing a YAGQ switch pulse laser beam is formed on a base material 10 of a dynamic pressure bearing made of ceramics. The YAGQ switch pulse laser beam is radiated onto the base material 10 made of ceramics along a trace 11 so that a recess portion 15 such as dynamic pressure generating groove or the like of a slide bearing is formed on the base material 10. After forming the recess portion 15, the residual coating film 14 is removed.
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公开(公告)号:JPH1121111A
公开(公告)日:1999-01-26
申请号:JP18761597
申请日:1997-06-27
Applicant: EBARA CORP
Inventor: SHINJO RYOICHI , HARADA MINORU , NISHIOKA YUKIKO
IPC: C01B13/11
Abstract: PROBLEM TO BE SOLVED: To provide an ozone generator of a discharge system which uses high-purity gaseous oxygen to obviate the degradation in the ozone concn. in gaseous ozone as a raw material. SOLUTION: The ozone generator of the discharge system for generating the gaseous ozone by the discharge in discharge cells by using the high-purity gaseous oxygen as the gaseous raw material is provided with an ozone concn. meter 6 for detecting the ozone concn. of the gaseous ozone passing a gaseous ozone discharge tube 5. The output of the ozone concn. meter 6 is fed back to a control section 3 which maintains the ozone concn. of the gaseous ozone at a prescribed value. Subsequent one unit among the several discharge cells 1-1 to 1-6 is stopped for the prescribed time until the ozone concn. is restored and the ozone is generated by the remaining discharge cells.
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公开(公告)号:JPH09299687A
公开(公告)日:1997-11-25
申请号:JP14822096
申请日:1996-05-17
Applicant: EBARA CORP , TSUU M KASEI KK , KOEI DRY KK
Inventor: NISHIOKA YUKIKO , SHINJO RYOICHI , ISHII YOSHIHIRO
IPC: D06F43/08
Abstract: PROBLEM TO BE SOLVED: To efficiently wash Japanese clothes and silk products in whole at a low cost by adding silicone soap to a petroleum solvent at the time of washing in the dry cleaning method using the petroleum solvent as a washing liquid and adding ozone gas to it to wash the laundry. SOLUTION: The laundry is inserted into a washing tub 8, a petroleum solvent is fed to the washing tub 8 from a solvent storage tank 2 and circulated by a circulating pump 5 to wash the laundry, an air diffusing pipe 11 is arranged at the bottom section of a button trap 3, and ozone gas is mixed into the solvent. Silicone soap (detergent) is fed into the washing tub 8 from a soap feeding means 18. The soap in the solvent is adsorbed to the laundry, its concentration in the solvent is decreased as the quantity of the laundry is increased, and the soap quantity is controlled in sequence to maintain the prescribed concentration. The output of an electric conductivity sensor 12 is monitored by a control means 17, and the soap feeding means 18 is controlled to maintain the electric conductivity in the solvent at the prescribed value during the washing of the laundry.
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公开(公告)号:JPH06126156A
公开(公告)日:1994-05-10
申请号:JP12086893
申请日:1993-04-22
Applicant: EBARA CORP
Inventor: KAMIYA ICHIRO , SHINJO RYOICHI , MURAKAMI TAKESHI , NISHIOKA YUKIKO , HARADA MINORU
Abstract: PURPOSE:To provide an electric discharge reaction device capable of generating a clean ozone with features such as being harmless to a semi-conductor manufacturing process, high performance, long life and outstanding reliability. CONSTITUTION:A dielectric 2 is allowed to be present between a high voltage electrode 3 and a grounded electrode 4, and silent discharge and/or a creeping discharge is allowed to generate between the dielectric 2 and the high voltage electrode 3 as well as the dielectric 2 and the grounded electrode 4. Further, a substance which passage through a discharge space or is held in the space is allowed to undergo a reactive process in the discharge space. In this electric discharge device, a quartz glass(SiO2 00.99wt.%min) refined to high purity, a monocrystal sapphire of crystallized alumina refined to high purity or high- purity alumina obtained by sintering aluminum oxide refined to high purity, is used as a dielectric material.
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公开(公告)号:JPH0550077A
公开(公告)日:1993-03-02
申请号:JP22642291
申请日:1991-08-13
Applicant: EBARA CORP
Inventor: NISHIOKA YUKIKO , HARADA MINORU , SHINJO RYOICHI , KAMIYA ICHIRO
IPC: C01B13/10 , B01D35/027 , C02F1/78 , E04H4/00 , E04H4/12
Abstract: PURPOSE:To save water by utilizing a portion of treated water as cooling water of an ozonizer. CONSTITUTION:A hair catcher 2, a forced feeding pump 3, a filter 4, a boiler 7 are provided from the upper stream on a circuit pipe R1 connecting an inlet catchment port 1a of a pool 1 and a circulated water inflow port 1b of the pool 1, and from the vicinity of an ejecting port of the forced feeding pump 3, a branched circuit pipe R2 being interposed with a gas-liquid mixer 5 and a reaction tank 6 on the way is branched, and water is returned to the upper stream of the forced feeding pump 3. The gas-liquid mixer 5 is connected to the ozonizer 8 with an ozone supplying pipe R3. A portion of the pool water is introduced to the ozonizer 8 from the more upper stream part than the gas- liquid mixer 5 of the branched circuit pipe R2 through a cooling water supplying pipe R4 and, after the ozonizer 8 is cooled with it, it is returned to a circle system of the pool water from the vicinity of the outlet of a reaction tank 6 of the branched circuit pipe R2 through a cooling water pipe R5.
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公开(公告)号:JPH01288509A
公开(公告)日:1989-11-20
申请号:JP11806488
申请日:1988-05-17
Applicant: EBARA CORP
Inventor: SAKURAI KEIZO , OSADA NORIYUKI , SHINJO RYOICHI , UMEZAWA KOICHI
Abstract: PURPOSE:To maintain a cargo loading surface in a same plane and make a curvature radius of direction change smaller by attaching a rhombus plate at each pitch and on a link outer surface of one side of a single row chain with the longitudinal direction of the rhombus perpendicular to the chain center line and with its outer side surface constituting a common surface. CONSTITUTION:A roller chain is constituted with a pair of parallel links 1a, 1b and a roller 1c. On the outside of the link la of the roller chain 1, an elongated rhombus-shaped plate 2 made of plastic material or the like is attached with its longitudinal direction directed perpendicular to the center line of the chain 1 and with all the outer surfaces of the plates 2 located in a common plane. When a conveyor chain C constituted in this way makes a directio change of a transfer path, the chain can be bent as far as the angle theta formed by the tapered edges of adjacent plates 2 becomes zero and both edges come in contact with each other to make a curvature radius smaller. At the same time, a cargo loading surface can be maintained in a common plane.
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