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公开(公告)号：JPH09287581A
公开(公告)日：1997-11-04
申请号：JP5108097
申请日：1997-02-19
Applicant: EBARA CORP
Inventor： NAKANIWA MASARU , ISHIBASHI KINNOSUKE , SHIOZUKA TAKANORI , UMEZAWA KOICHI
Abstract: PROBLEM TO BE SOLVED: To reduce the weight and the moment of inertia of rotors by fitting rotar shells bendingly formed along the contour of the lobe of a rotor and made of plate-like metal constituted by confronting the end faces to each other to rotary shafts through connecting parts. SOLUTION: Elliptical shaft holes 3a having straight parts for inserting rotary shafts 6 are formed on the central part of a pair of side plates blockading both ends of rotor shells 2 which are bendingly formed along the profile of two lobes out of plate bodies such as stainless steel plates, and the rotary shafts 6 are fixed to the rotor shells 2 by welding so as to contact the rotary shafts 6 with the straight parts of cutout faces. Reinforcing pins 8 arranged between the rotary shaft 6 and the rotor shell 2 are fixedly secured to the rotary shaft 6 at one ends by screws and the like, extended vertically from the rotary shaft 6 and joined with the top end parts T of the lobe L of a rotor 1 at the other ends by welding or the like, so as to reinforce connection of the rotor shell 2 with the rotary shaft 6. In this way, the rotor shell is constituted out of a shell member of uniform and relatively small wall thickness, and hence the weight of the rotor can be remarkably reduced.
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公开(公告)号：JPH03156231A
公开(公告)日：1991-07-04
申请号：JP29513089
申请日：1989-11-15
Applicant: EBARA CORP , FUJITSU LTD
Inventor： UMEZAWA KOICHI , SAITO HARUMITSU , FUJIE NOBUO , SONODA HIROAKI
Abstract: PURPOSE:To get a required clean atmosphere with an air volume as less as possible by a method wherein a feeding-in side of an item to be cleaned is provided with an opening, a part other than the opening is substantially closed, a ceiling part at a feeding-out side is provided with a filter device and clean air blown from the filter device is flowed out of the opening. CONSTITUTION:A feeding-in side of a casing 2 for an item to be cleaned, for example, a water carrier is formed with an opening 5 defined by a ceiling part 3 and a cleaning part 4. A feeding-out side of the ceiling part 3 is provided with a filter device 6 comprised of a filter 7 and a fan 8. In the event that a cleaning operation is carried out, the cleaning part 4 is operated and the filter device 6 is operated, resulting in that air sucked by the fan 8 as indicated by an arrow A is cleaned by the filter 7. The air is blown against the cleaning part 4a below the filter 7 and passed along a cleaning part 4b at the opening 5 having no filter device 6 above as indicated by an arrow B. The air is dis charged from the opening 5 and an entire atmosphere at the cleaning part 4 is cleaned by one filter device 4 with the clean air flow B.
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公开(公告)号：JPH03156952A
公开(公告)日：1991-07-04
申请号：JP29513389
申请日：1989-11-15
Applicant: EBARA CORP , FUJITSU LTD
Inventor： UMEZAWA KOICHI , SAITO HARUMITSU , FUJIE NOBUO , SONODA HIROAKI
Abstract: PURPOSE:To enhance conveyance efficiency, to save labor and to prevent wafer carriers from being contaminated by installing hangers which are installed so as to protrude from a freely rotatable support erected on a base plate having a freely movable bottom face and which hold the wafer carriers in positions at equal distances from the center of rotation of the support. CONSTITUTION:The following are installed: a caster 2; and hangers 8 which are installed so as to protrude from freely rotatable supports 6 erected on a base plate 3 having a freely movable bottom face and which hold wafer carriers C at equal distances from the center of rotation of the supports 6. A stocker A which has held and housed the carriers C in all the hangers 8 is set on a treatment apparatus B via a positioning means 18; the supports 6 are turned and positioned by using an indexing means 12; the carriers are thrown into the apparatus B one after another from the upper part by using an up-and-down movement means 11 and a gripping and conveyance means 15; the treated carriers C are housed one after another in the stocker A. Thereby, it is possible to enhance a conveyance efficiency, to save labor and to prevent the carriers from being contaminated.
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公开(公告)号：JPH01288509A
公开(公告)日：1989-11-20
申请号：JP11806488
申请日：1988-05-17
Applicant: EBARA CORP
Inventor： SAKURAI KEIZO , OSADA NORIYUKI , SHINJO RYOICHI , UMEZAWA KOICHI
Abstract: PURPOSE:To maintain a cargo loading surface in a same plane and make a curvature radius of direction change smaller by attaching a rhombus plate at each pitch and on a link outer surface of one side of a single row chain with the longitudinal direction of the rhombus perpendicular to the chain center line and with its outer side surface constituting a common surface. CONSTITUTION:A roller chain is constituted with a pair of parallel links 1a, 1b and a roller 1c. On the outside of the link la of the roller chain 1, an elongated rhombus-shaped plate 2 made of plastic material or the like is attached with its longitudinal direction directed perpendicular to the center line of the chain 1 and with all the outer surfaces of the plates 2 located in a common plane. When a conveyor chain C constituted in this way makes a directio change of a transfer path, the chain can be bent as far as the angle theta formed by the tapered edges of adjacent plates 2 becomes zero and both edges come in contact with each other to make a curvature radius smaller. At the same time, a cargo loading surface can be maintained in a common plane.
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公开(公告)号：JPH03156954A
公开(公告)日：1991-07-04
申请号：JP29512989
申请日：1989-11-15
Applicant: EBARA CORP , FUJITSU LTD
Inventor： UMEZAWA KOICHI , SAITO HARUMITSU , FUJIE NOBUO , SONODA HIROAKI
IPC: H01L21/673 , H01L21/304 , H01L21/68
Abstract: PURPOSE:To surely fix a wafer carrier so as to be attached and detached easily and to prevent it from being levitated at a cleaning operation by installing the following: a main body on which the wafer carrier is placed; a plurality of pairs of levers which have been attached to the main body via axes; spring means which energize the levers to the side of the wafer carrier. CONSTITUTION:The following are installed: a main body 10 on which a wafer carrier C is placed; a plurality of pairs of levers 13 which have been attached to the main body 10 via axes; and spring means 15 which energize the levers 13 to the side of the wafer carrier C. When the wafer carrier C is lowered into a cleaning tank A, it is positioned appropriately by using a guide lever 1; when it is lowered further, side parts of the carrier C press and extend protective rollers 16 which are turned and moved inward; its bottom part 25 reaches the main body 10; the wafer carrier is positioned automatically by the pressing protective rollers 16 and is fixed. When the wafer carrier C is pulled up, the protective rollers 16 are turned and its fixation is released. Thereby, the wafer carrier can be fixed surely so as to be attached and detached easily, and it is possible to prevent it from being levitated in a cleaning operation.
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Patent Agency Ranking
公开(公告)号：JPH03156953A
公开(公告)日：1991-07-04
申请号：JP29513489
申请日：1989-11-15
Applicant: EBARA CORP , FUJITSU LTD
Inventor： UMEZAWA KOICHI , SAITO HARUMITSU , FUJIE NOBUO , SONODA HIROAKI
IPC: B65G1/133 , B65G47/80 , H01L21/673 , H01L21/677 , H01L21/68 , H01L23/02
Abstract: PURPOSE:To execute an accurate positioning operation and an accurate indexing operation of a direction of rotation by installing the following: a stocker carring-in detection means; a stocker fixation means; a stocker rotation and drive means; a rotarystocker positioning means; a positioning detection means; and a control means. CONSTITUTION:When a stocker is set to a fixation apparatus and a carrying-in detection switch 22 is turned on, a cylinder 25 for escape use is extened and actuated; a wheel 23 for clamp use situated at a lower position is turned upward. After that, a cylinder 26 for clamp use is extended, actuated and retreated; a flange part 6a of a disk 6 is sandwiched, held and fixed in cooperation with a wheel 24 for drive use. Then, a motor 33 is actuated; the disk 6 is turned by using the wheel 24 for drive use; a cylinder 36 for stop use is extended and actuated; a stop mechanism 37 is advanced; the disk 6 is hooked via a stopper 7; an indexing operation is executed. Thereby, an accurate positioning operation and an accurate indexing operation of a direction of rotation can be executed.
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公开(公告)号：JPH01294488A
公开(公告)日：1989-11-28
申请号：JP11806388
申请日：1988-05-17
Applicant: EBARA CORP
Inventor： SAKURAI KEIZO , OSADA NORIYUKI , SHINJO RYOICHI , UMEZAWA KOICHI
Abstract: PURPOSE:To continuously and promptly cool a plurality of containers, by arranging a continuous transfer means and a cool air-blowing-out means for containers and by feeding a plurality of containers from a charging opening of a freezer and discharging required numbers of the containers from another discharging opening. CONSTITUTION:Respective jugs J placed on a conveyor C from a charging opening 1 are transferred continuously by the guide of respective guide walls G and cooled effectively by blowing of cool air due to respective fans 21 on the way. When the first jug J reaches the end of the path, it abuts against the stopper 22 by a holding lever 24 and stops. When the corresponding button to required numbers of jugs is pushed, a solenoid 25 is energized and a hook 24b of the holding lever 24 relieves the connection of a pin on the lower face of the stopper 22 and the first jug J reaches the discharging opening 2, pushing a discharging door 1. The solenoid 25 is relieved by a sensor detecting the revolved angle of the stopper 22 after its proceeding by an angle corresponding to required numbers of jugs J and the holding hook 24b returns to the preventing position of revolutions of the stopper.
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公开(公告)号：JPH01288513A
公开(公告)日：1989-11-20
申请号：JP11806588
申请日：1988-05-17
Applicant: EBARA CORP
Inventor： SAKURAI KEIZO , OSADA NORIYUKI , SHINJO RYOICHI , UMEZAWA KOICHI
Abstract: PURPOSE:To make stop and release smooth and reliable in a gate mechanism of a conveyor or the like by disposing a stopper plate made of a disk with its outer circumference formed with arcuate recesses of a radius smaller than the radius of a cylindrical body on a base plate capable of advancing and retracting elastically relative to a travel path and controlling it by means of an external signal. CONSTITUTION:A hook 7a of a restraint lever 7 engages with a bolt head portion 6of a stopper plate 3 projecting by a maximum limit from an opening Ga of a guide wall G into a travel path to make the stopper plate 3 immovable. A cylindrical vessel B transported by a conveyor C comes into contact with an end 3a of an arcuate portion 3b of the stopper plate 3 and stops. When a solenoid 12 is urged by a control signal to retract the restraint lever 7 and release the bolt 6, the stopper plate 3 is rotated by the conveyor C and by the vessel B being urged forward so that the vessels B are passed through in succession. This arrangement makes the stop and release smooth and reliable.
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公开(公告)号：JPH03156925A
公开(公告)日：1991-07-04
申请号：JP29513289
申请日：1989-11-15
Applicant: EBARA CORP , FUJITSU LTD
Inventor： UMEZAWA KOICHI , SAITO HARUMITSU , FUJIE NOBUO , SONODA HIROAKI
IPC: B08B7/04 , C30B35/00 , H01L21/304
Abstract: PURPOSE:To obtain a highly clean degree suitable for manufacturing a highly integrated semiconductor by a method wherein a wafer carrier where a plurality of grooves have been made in sidewalls is immersed in a liquid and is cleaned. CONSTITUTION:A wafer carrier A where a plurality of grooves have been made in sidewalls is immersed in a liquid 12 and is cleaned. A cleaning means is a brush 7 which is turned; the brush 7 is formed of a chemical fiber material. It is preferable that its wire diameter is 0.2 to 0.4mm and that the number of revolutions is 100 to 200 per minute. The wafer carrier A is cleaned while the liquid 12 in which it is immersed is overflowed; it is preferable to reuse the overflowed liquid by circulating and filtering. Thereby, various kinds of dust particles on the wafer carrier can be removed effectively, and a highly integrated semiconductor can be manufactured surely.
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公开(公告)号：JPH03156924A
公开(公告)日：1991-07-04
申请号：JP29513189
申请日：1989-11-15
Applicant: EBARA CORP , FUJITSU LTD
Inventor： UMEZAWA KOICHI , SAITO HARUMITSU , FUJIE NOBUO , SONODA HIROAKI
IPC: B08B1/04 , C30B35/00 , H01L21/304
Abstract: PURPOSE:To uniformly clean a whole wafer groove by a method wherein a total width of brushes sandwiching a rotation means is formed to be narrower than a width of a wafer carrier and the brushes can be moved in an up-and- down direction and a horizontal direction and can be turned in a forward direction and a reverse direction. CONSTITUTION:A wafer carrier 1 is fixed in a position faced with a brush axial line inside a water tank filled with pure water; an end face of one brush 36a is positioned at the upper part of a position coming into slight pressure- contact with one side face 5a; while the brush is being turned forward, it is lowered down to the bottom of the wafer carrier 1 and is raised in succession; wafer grooves 6 and wall faces in parts coming into contact with the brush 36a are cleaned. Then, the brush 36a is reversed and the same cleaning operation is executed; the brush is moved further; an end face of the other brush 36b is situated at the upper part of a position coming into slight pressure-contact with the other side wall 5b; the same cleaning operation is executed. Thereby, the whole surface of the wafer carrier is cleaned; all the wafer grooves can be cleaned uniformly and cleanly; it is possible to surely prevent a wafer from being contaminated.
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