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    PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER
    21.
    发明专利
    PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER 未知

    公开(公告)号：CA3024961A1

    公开(公告)日：2017-11-30

    申请号：CA3024961

    申请日：2017-05-01

    Applicant: HAMAMATSU PHOTONICS KK

    Inventor： KASAHARA TAKASHI ,  SHIBAYAMA KATSUMI ,  HIROSE MASAKI ,  KAWAI TOSHIMITSU ,  OYAMA HIROKI ,  KURAMOTO YUMI

    IPC: G02B26/00 ,  B81B3/00 ,  B81C1/00

    Abstract: A production method for a Fabry-Perot interference filter, the production method comprising a formation step, a cutting step that is after the formation step, and a removal step that is between the formation step and the cutting step or after the cutting step. The formation step is for: forming, on a first main surface of a wafer, a first mirror layer that has a plurality of first mirror parts, a sacrificial layer that has a plurality of removal parts, and a second mirror layer that has a plurality of second mirror parts; and forming a first thinned region at which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer has been partially thinned along each of a plurality of lines. The cutting step is for: forming a reformed region inside the wafer along each of the plurality of lines by irradiation with laser light; and cutting the wafer along the plurality of lines into a plurality of substrates. The removal step is for removing the removal parts from the sacrificial layer by etching.

    Spektralsensor
    22.
    发明专利
    Spektralsensor 未知

    公开(公告)号：DE112013002556T5

    公开(公告)日：2015-01-29

    申请号：DE112013002556

    申请日：2013-05-08

    Applicant: HAMAMATSU PHOTONICS KK

    Inventor： SHIBAYAMA KATSUMI ,  KASAHARA TAKASHI

    IPC: G01J3/26 ,  G01J3/36

    Abstract: Ein Spektralsensor 1A umfasst eine Interferenzfiltereinheit 20A, ein Lichterfassungssubstrat 30A und eine Trenneinrichtung 15. Die Interferenz-Filtereinheit 20A weist eine Hohlschicht 21 und erste und zweite Spiegelschichten 22, 23 auf, die einander durch die Hohlschicht 21 gegenüberliegen, und überträgt dadurch selektiv einen vorbestimmten Wellenlängenbereich von Licht, gemäß seiner Einfallposition, von der Seite der ersten Spiegelschicht 22 zu der Seite der zweiten Spiegelschicht 23. Das Lichterfassungssubstrat 30A weist eine Licht-empfangende Oberfläche 32a zum Empfangen von durch die Interferenz-Filtereinheit 20A übertragenem Licht auf, und erfasst das auf der Licht-empfangenden Oberfläche 32a einfallende Licht. Die Trenneinrichtung 15 erstreckt sich von der Hohlschicht 21 zu zumindest einer der ersten und zweiten Spiegelschichten 22, 23, und trennt optisch die Interferenz-Filtereinheit 20A, im Blick in eine vorbestimmte Richtung, welche die Licht-empfangende Oberfläche 32a schneidet.

    LIGHT-DETECTING DEVICE
    26.
    发明公开
    LIGHT-DETECTING DEVICE 审中-公开
    LICHTDETEKTOR

    公开(公告)号：EP3064912A4

    公开(公告)日：2017-09-06

    申请号：EP14857161

    申请日：2014-10-31

    Applicant: HAMAMATSU PHOTONICS KK

    Inventor： SHIBAYAMA KATSUMI ,  KASAHARA TAKASHI ,  HIROSE MASAKI ,  KAWAI TOSHIMITSU

    IPC: G01J3/26 ,  G01J3/02 ,  G01J3/45 ,  G01J5/04 ,  G01J5/20 ,  G02B26/00

    CPC classification number: G01J3/26 ,  G01J3/0286

    Abstract: A spectral sensor 1 includes a wiring substrate 2 which has a principal surface; a light detector 3 which is disposed on the principal surface 2A of the wiring substrate 2 and is electrically connected to the wiring substrate 2; spacer 4 which is disposed around the light detector 3, on the principal surface 2A of the wiring substrate 2; and a Fabry-Perot interference filter 10 which has a light transmission region 11 and is disposed on the principal surface 2A of the wiring substrate 2 with the spacer 4 therebetween. The spacer 4 support the Fabry-Perot interference filter 10 in a surrounding region R1 of the light transmission region 11 and the spacer 4 has opening A1 communicating with an inner side of the surrounding region R1 and an outer side of the surrounding region R1, when viewed from a light transmission direction in the light transmission region 11.

    Abstract translation: 光谱传感器1包括具有主表面的布线基板2; 设置在配线基板2的主面2A上并与配线基板2电连接的光检测器3， 在布线基板2的主面2A上配置在光检测器3的周围的间隔件4， 以及法布里 - 珀罗干涉滤光片10，其具有透光区域11，隔着间隔物4配置在布线基板2的主面2A上。 间隔物4在光透射区域11的周围区域R1中支撑法布里 - 珀罗干涉滤光片10，并且当隔离物4具有与周围区域R1的内侧和周围区域R1的外侧连通的开口A1时 从光透射区域11中的光透射方向观察。

    FABRY-PEROT INTERFERENCE FILTER
    29.
    发明公开
    FABRY-PEROT INTERFERENCE FILTER 审中-公开

    公开(公告)号：EP3106910A4

    公开(公告)日：2018-01-10

    申请号：EP15748967

    申请日：2015-02-03

    Applicant: HAMAMATSU PHOTONICS KK

    Inventor： SHIBAYAMA KATSUMI ,  KASAHARA TAKASHI ,  HIROSE MASAKI ,  KAWAI TOSHIMITSU

    IPC: G02B26/00 ,  G01J3/26 ,  G02B5/28

    CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B5/284

    Abstract: A Fabry-Perot interference filter 10A includes a fixed mirror 31 and a movable mirror 41 disposed opposite to the fixed mirror 31 via a gap S, distance between the fixed mirror 31 and the movable 41 in a light transmission region 11 being adjusted by electrostatic force. A plurality of first annular grooves 44 surrounding the light transmission region 11 and a plurality of first through-holes 45 opening to the gap S side and the opposite side are formed at a surrounding portion 41 a surrounding the light transmission region 11 in the movable mirror 41.

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