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公开(公告)号：JPH07163522A
公开(公告)日：1995-06-27
申请号：JP31054493
申请日：1993-12-10
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KATO TAKAHITO , MATSUMOTO OSAMU
Abstract: PURPOSE:To measure an outside diameter at a high speed without contact. CONSTITUTION:The image of a circle to be measured is formed on a prescribed imaging plane by an optical means 11. Plural one-dimensional measuring means 14, 15 are arranged on the imaging plane and the lengths of the chords of the image of the circle to be measured is respectively measured. Since these one- dimensional measuring means 14, 15 are arranged in parallel with each other, the diameter of the circle to be measured is determined from both the spacing between the one-dimensional measuring means 14, 15 and the lengths of the chords measured by the one-dimensional measuring means 14, 15.
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公开(公告)号：JPH07113168A
公开(公告)日：1995-05-02
申请号：JP25701993
申请日：1993-10-14
Applicant: HAMAMATSU PHOTONICS KK
Inventor： ICHIKAWA NORIO , MATSUMOTO OSAMU , HARA TSUTOMU
IPC: C23C14/28 , C23C14/34 , H01L21/203 , H01L21/268
Abstract: PURPOSE:To provide the method and device for manufacturing the quasicrystalline thin film where the film of impurities is difficult to be produced. CONSTITUTION:The temperature of a substrate 9 is adjusted to an appropriate value by a temperature adjusting means 10, and a target 8 is irradiated with the laser beam by a laser beam irradiating means 2. This constitution emits the particles from the surface of the target 8 (laser abrasion), and the particles are deposited on the substrate 9 to manufacture the quasicrystalline thin film. It is not essential to raise the temperature of the substrate, and the temperature of the substrate can be appropriately selected according to the properties of the quasicrystalline thin film to be produced, and production of the film of impurities can be suppressed by suppressing the chemical reaction by the thermal diffusion between the quasicrystalline thin film to be produced and the substrate 9. The thin film is formed by making use of the laser abrasion, and the quasicrystalline thin film with less deviated composition can be obtained.
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公开(公告)号：JPH061317B2
公开(公告)日：1994-01-05
申请号：JP31007086
申请日：1986-12-24
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SUZUKI HIDEO , OOSUMI YASUTSUGU , MORITA NOBUHIRO , MATSUMOTO OSAMU , KOBAYASHI JUJI , OOHAYASHI YASUSHI
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公开(公告)号：JPH0565803B2
公开(公告)日：1993-09-20
申请号：JP19011389
申请日：1989-07-21
Applicant: HAMAMATSU PHOTONICS KK
Inventor： MATSUMOTO OSAMU
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公开(公告)号：JPH05231951A
公开(公告)日：1993-09-07
申请号：JP3333392
申请日：1992-02-20
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KOBAYASHI YUJI , HORI TERUSHIGE , TOYODA HARUYOSHI , HARA TSUTOMU , SONE AKIHIRO , MATSUMOTO OSAMU
Abstract: PURPOSE:To determine the direction of modulation of a two-dimensional light phase distribution with high precision and at a high speed. CONSTITUTION:An optical heterodyne interference device converts two-dimensional phase information into an optical heterodyne signal superposed on a prescribed carrier frequency on a time basis. A semiconductor laser 71 outputs a reference signal light repeated at a frequency having an asymmetric waveform and corresponding to the aforesaid carrier frequency. Writing in SLM 60 is made by the optical heterodyne signal and reading therefrom is made by a reference signal. In other words, overlapping of the optical heterodyne signal with the reference signal can be determined in two-dimensional parallel. Since the semiconductor laser 71 generates the reference signal light having the asymmetric waveform in this case, the amount of overlapping of the two-dimensional signal with the reference signal at each point increases and decreases in accordance with the direction of phase modulation at each point of the two-dimensional phase information inputted to an optical heterodyne interference means.
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Patent Agency Ranking
公开(公告)号：JPH04249720A
公开(公告)日：1992-09-04
申请号：JP41438690
申请日：1990-12-26
Applicant: HAMAMATSU PHOTONICS KK
Inventor： MATSUMOTO OSAMU
Abstract: PURPOSE:To separate lights for each wavelength and to correct the time waveform by providing a dispersion element on an optical path of an incident light to separate lights for each wavelength and so arranging an image sensor as to display in a two-dimensional manner. CONSTITUTION:An incident light is brought into a deflecting element 1 after being linearly polarized by a polarizing plate 3. A voltage is impressed to the deflecting element 1 from a power source 8. The incident light is deflected to an (x) direction. The deflected light is dispersed to a plurality of lights for each wavelength in a (y) direction by a dispersion element 5. In other words, the light entering from the deflecting element 1 to the dispersion element 5 is diffracted by the dispersion element 5 to a 0-order diffracted light, the first (-first) order diffracted light, the second (-second) order diffracted light,... The dispersed lights are Fourier transformed by a lens 4. As a result, a space waveform in a far viewfield is displayed on a two-dimensional image sensor 6. The space waveform on the image sensor 6 is processed by a display device 7 to be displayed as a time waveform for each wavelength.
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公开(公告)号：JPH04218716A
公开(公告)日：1992-08-10
申请号：JP23515390
申请日：1990-09-05
Applicant: HAMAMATSU PHOTONICS KK
Inventor： HAYASHI AKITAKE , MATSUMOTO OSAMU , HARA TSUTOMU , KOBAYASHI YUJI , FUJITA KATSUYOSHI
Abstract: PURPOSE:To enable a device to be simple and compact for achieving a highly accurate detection by detecting deviation of a movable means which is rotated according to inertia or outer force from a reference position. CONSTITUTION:When water 8 is located at a reference position to a container 4, quantity of light detected by light-receiving surfaces 14a and 14b is nearly equal. For example, when the container 4 is rotated in a counterclockwise direction from this state, the water 8 is shifted from the reference position and is rotated in a clockwise direction, thus enabling the quantity of light arriving at the light-receiving surface 14a from a light source 12 to be increased and that arriving at the light-receiving surface 14b to be reduced. Similarly, when the container 4 is rotated in a clockwise direction, the quantity of light arriving at the light-receiving surface 14a from the light source 12 is reduced and that arriving at the light-receiving surface 14b is increased, thus enabling deviation of the water which is a movable means from the reference position and the deviation direction to be detected.
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公开(公告)号：JPH04109113A
公开(公告)日：1992-04-10
申请号：JP22719690
申请日：1990-08-29
Applicant: HAMAMATSU PHOTONICS KK
Inventor： HAYASHI AKITAKE , MATSUMOTO OSAMU , HARA TSUTOMU , KOBAYASHI YUJI , FUJITA KATSUYOSHI
Abstract: PURPOSE:To obtain a simple, small-sized and lightweight device with high precision by detecting the relative displacement between a displacement detected member and a container with a displacement detecting means based on the driving direction and drive quantity of a returning means. CONSTITUTION:A light source 12 is excited by a control circuit 16 and generates infrared light. A PSD 14 responds to a infrared beam from the light source 12 and detects its incidence position. The circuit 16 prohibits the rotation of a servo motor 2 when it judges that the infrared beam enters the center of the PSD 14. When it judges that the beam enters a position displaced from the center of the PSD 14, it drives the motor 2 to rotate a container 4. The container 4 is rotated in the direction that the beam is returned to the center of the PSD 14. Even if a float 8 is displaced against the container 4, the positional relation between the float 8 and the container 4 is returned to the original state by the circuit 16 and the motor 2. The rotation angle of the container 4 is indirectly detected from the rotation quantity of the motor 2 by a rotation encoder 18 attached to the motor 2, and the angle is displayed on a display device 15.
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公开(公告)号：JPH0466864A
公开(公告)日：1992-03-03
申请号：JP18090090
申请日：1990-07-09
Applicant: HAMAMATSU PHOTONICS KK
Inventor： MATSUMOTO OSAMU
Abstract: PURPOSE:To be able to detect internal information of a measured body in real time by providing a imaging position of beams reflected by the measured body surface oscillated by ultrasonic waves with an image sensor and reading the image-formation with the image sensor. CONSTITUTION:Microscopic unevenness corresponding to internal information of a measured body 12 is occurred in a surface of a mirror 18 when the measured body 12 is given ultrasonic oscillation by a transducer 14. Laser beams emitted from a laser beam source 24, reflected by a half mirror 22, transmitting a glass plate 20 and arriving at the mirror 18 are scattered by the microscopic unevenness, converged by a lens 30 and imaged on an image sensor 28. At this time, rectilinear beams are intercepted by a knife edge 32 arranged a converged point 34, only the scattered beams arrive at the sensor 28 and the image corresponding to an ultrasonic intensity distribution on the surface of the mirror 18 is formed. This image is two-dimensionally read by the sensor 28 and the two-dimensional intensity of the ultrasonic waves incident upon the glass plate 20 can be measured. Namely, the internal information of the measured body 12 can be observed.
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公开(公告)号：JPH01178938A
公开(公告)日：1989-07-17
申请号：JP33371287
申请日：1987-12-29
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SUZUKI HIDEO , OSUMI YASUTSUGU , MORITA NOBUHIRO , MATSUMOTO OSAMU , KOBAYASHI YUJI , OBAYASHI YASUSHI
IPC: G02F1/39
Abstract: PURPOSE:To vary the angle of the optical axis of exciting light to the optical axis of nonlinear optical crystal and to vary the output wavelength of oscillation light at a high speed by deflecting the exciting light by an optical deflector which utilizes the optoelastic effect of an optical material. CONSTITUTION:When specific electric power is supplied to the oscillator 13 of the optical deflector 10 and its oscillation frequency is varied within a specific range, the exciting light 5a changes its traveling direction and is deflected into exciting light 5b. Consequently, the light is reflected and converged by one focusing mirror 16, the angle ph of phase matching between the optical axis 19 of the exciting light 5b entering the nonlinear optical crystal 3 through an incidence mirror 14 and the optical axis 8 of the nonlinear optical crystal 3 varies, and the oscillation light 18 projected through a projection mirror 15 varies in wavelength corresponding to said variation. This utilizes the optoelastic effect of the optical material such as acoustooptic effect and electrooptic effect. Consequently, the deflecting speed of the exciting light 5a is increased to facilitate fast variation in the output wavelength of the oscillation light 18 and also eliminate the need for a crystal rotational mechanism.
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