Ultraviolettlichterzeugungstarget, Verfahren zur Herstellung eines Ultraviolettlichterzeugungstargets und durch Elektronenstrahl angeregte Ultraviolettlichtquelle

    公开(公告)号:DE112019006250T5

    公开(公告)日:2021-08-26

    申请号:DE112019006250

    申请日:2019-12-13

    Abstract: Ein Ultraviolettlichterzeugungstarget 20 umfasst eine lichtemittierende Schicht 22. Die lichtemittierende Schicht 22 enthält einen YPO4-Kristall, dem zumindest Scandium (Sc) hinzugefügt wird, und empfängt einen Elektronenstrahl EB zur Erzeugung von Ultraviolettlicht W. Ferner umfasst ein Verfahren zur Herstellung des Ultraviolettlichterzeugungstargets 20 einen ersten Schritt der Zubereitung einer Mischung, die Yttriumoxid (Y-Oxid), Sc-Oxid, Phosphorsäure und eine Flüssigkeit enthält, einen zweiten Schritt des Verdampfens der Flüssigkeit und einen dritten Schritt des Brennens der Mischung. Somit werden ein Ultraviolettlichterzeugungstarget, das ein nutzbringendes lichtemittierendes Material zur Elektronenstrahlanregung enthält, das sich von Sc:Al2O3unterscheidet, und ein Verfahren zur Herstellung davon und eine durch Elektronenstrahl angeregte Ultraviolettlichtquelle verwirklicht.

    PHOTOSENSOR
    3.
    发明专利

    公开(公告)号:AU2003236112A1

    公开(公告)日:2003-10-27

    申请号:AU2003236112

    申请日:2003-04-11

    Abstract: A substrate 18, a cathode 20 and an anode 22 are stored in a space demarcated by a casing 10, and the space is evacuated. The cathode 20 and the anode 22 are provided on the same surface of a substrate 18 having electric insulation, and have a comb-tooth shape so as to be mutually engaged. Therefore, the area of the part in which the cathode 20 and the anode 22 approach each other becomes larger, and thereby photoelectrons discharged from the cathode 20 through the incidence of ultraviolet rays are transmitted in the vacuum, and are favorably collected in the anode 22.

    PHOTOSENSOR
    6.
    发明公开
    PHOTOSENSOR 审中-公开
    OPTISCHER传感器

    公开(公告)号:EP1498706A4

    公开(公告)日:2009-04-29

    申请号:EP03746462

    申请日:2003-04-11

    CPC classification number: G01J1/02 G01J1/0204 G01J1/0271 G01J1/429 H01J40/04

    Abstract: A substrate (18), a cathode (20), and an anode (22) are housed in a space defined by a casing (10), and the space is evacuated. The cathode (20) and the anode (22) are provided on the same face of the electrically insulating substrate (18) and show comb-tooth interdigital shapes. Thus, the area of a section where the cathode (20) is near the anode (22) is large, so that photoelectrons emitted from the cathode (20) by incidence of ultraviolet rays is propagated through the vacuum and are favorably trapped collected by the anode (22).

    Abstract translation: 基板(18),阴极(20)和阳极(22)容纳在由壳体(10)限定的空间中,并且该空间被抽空。 阴极(20)和阳极(22)设置在电绝缘基板(18)的同一面上,并显示出梳齿叉指形状。 因此,阴极(20)靠近阳极(22)的部分的面积很大,使得通过紫外线入射从阴极(20)发射的光电子在真空中传播并且有利地被 阳极(22)。

    Ultraviolet light-generating target, electron-beam-excited ultraviolet light source, and method for producing ultraviolet light-generating target
    8.
    发明专利
    Ultraviolet light-generating target, electron-beam-excited ultraviolet light source, and method for producing ultraviolet light-generating target 有权
    超紫外线发光靶,电子束激光紫外光源,以及生产超紫外线发光靶的方法

    公开(公告)号:JP2012229306A

    公开(公告)日:2012-11-22

    申请号:JP2011097260

    申请日:2011-04-25

    CPC classification number: F21K2/00 C09K11/7766 H01J63/04 H01J63/06

    Abstract: PROBLEM TO BE SOLVED: To provide: an ultraviolet light-generating target that can increase ultraviolet light generation efficiency; an electron-beam-excited ultraviolet light source; and a method for producing the ultraviolet light-generating target.SOLUTION: An ultraviolet light-generating target 20 is provided with: a substrate 21 comprising sapphire, quartz, or rock crystal; and a Pr:LuAG polycrystalline film 22 that is provided on the substrate 21 and that generates ultraviolet light by receiving an electron beam. It is possible to significantly increase ultraviolet light generation efficiency compared to when using a Pr:LuAG monocrystalline film by means of using Pr:LuAG polycrystals as the target.

    Abstract translation: 解决的问题:提供:能够提高紫外线发生效率的紫外线发光靶; 电子束激发的紫外光源; 以及紫外线发生靶的制造方法。 解决方案:紫外线发光靶20设置有:包括蓝宝石,石英或岩石晶体的基板21; 以及设置在基板21上并通过接收电子束产生紫外线的Pr:LuAG多晶膜22。 与使用Pr:LuAG多晶体作为目标的Pr:LuAG单晶膜相比,可以显着提高紫外线发光效率。 版权所有(C)2013,JPO&INPIT

    INFORMATION-RECORDING METHOD AND INFORMATION RECORDING MEDIUM

    公开(公告)号:JP2001023171A

    公开(公告)日:2001-01-26

    申请号:JP19172599

    申请日:1999-07-06

    Abstract: PROBLEM TO BE SOLVED: To obtain an information-recording method for recording specific information on a formed amorphous diamond thin film, and an information record medium utilizing the method. SOLUTION: In the information-recording method, a specific information can be recorded by applying an energy beam LB2 to an amorphous diamond thin film 2 corresponding to the specific information to be recorded for transforming an irradiation region and forming an amorphous diamond transformation region 3. Also, the information record medium is provided with the amorphous diamond thin film 2 and applies an energy beam to the specific region of the amorphous diamond thin film 2 corresponding to information to be recorded, thus forming the amorphous diamond transformation region 3 and hence recording the specific information.

    FILM FORMING DEVICE
    10.
    发明专利

    公开(公告)号:JPH0565639A

    公开(公告)日:1993-03-19

    申请号:JP22727191

    申请日:1991-09-06

    Inventor: ICHIKAWA NORIO

    Abstract: PURPOSE:To provide a film forming device capable of measuring the film thickness in the process of film forming on real time. CONSTITUTION:Because a fixed stand 10 is periodically moving, the amt. of particles accumulated on substrates 11, 12 and 13 and the amt. of particles passing through an opening part 14 provided at the fixed stand 10 have a correlation. Thus, measuring means 40 measure the film thickness of thin films formed in such a manner that the particles passed through the opening part 14 are accumulated on the measuring face of a crystal resonator 30, by which the film thickness of thin films formed on the substrates 11, 12 and 13 can be detected.

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