Abstract:
Ein Ultraviolettlichterzeugungstarget 20 umfasst eine lichtemittierende Schicht 22. Die lichtemittierende Schicht 22 enthält einen YPO4-Kristall, dem zumindest Scandium (Sc) hinzugefügt wird, und empfängt einen Elektronenstrahl EB zur Erzeugung von Ultraviolettlicht W. Ferner umfasst ein Verfahren zur Herstellung des Ultraviolettlichterzeugungstargets 20 einen ersten Schritt der Zubereitung einer Mischung, die Yttriumoxid (Y-Oxid), Sc-Oxid, Phosphorsäure und eine Flüssigkeit enthält, einen zweiten Schritt des Verdampfens der Flüssigkeit und einen dritten Schritt des Brennens der Mischung. Somit werden ein Ultraviolettlichterzeugungstarget, das ein nutzbringendes lichtemittierendes Material zur Elektronenstrahlanregung enthält, das sich von Sc:Al2O3unterscheidet, und ein Verfahren zur Herstellung davon und eine durch Elektronenstrahl angeregte Ultraviolettlichtquelle verwirklicht.
Abstract:
A substrate 18, a cathode 20 and an anode 22 are stored in a space demarcated by a casing 10, and the space is evacuated. The cathode 20 and the anode 22 are provided on the same surface of a substrate 18 having electric insulation, and have a comb-tooth shape so as to be mutually engaged. Therefore, the area of the part in which the cathode 20 and the anode 22 approach each other becomes larger, and thereby photoelectrons discharged from the cathode 20 through the incidence of ultraviolet rays are transmitted in the vacuum, and are favorably collected in the anode 22.
Abstract:
An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz or rock crystal; and a Pr:LuAG polycrystalline film 22, provided on the substrate 21, that generates ultraviolet light upon receiving an electron beam. By using a Pr:LuAG polycrystal as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.
Abstract:
A substrate (18), a cathode (20), and an anode (22) are housed in a space defined by a casing (10), and the space is evacuated. The cathode (20) and the anode (22) are provided on the same face of the electrically insulating substrate (18) and show comb-tooth interdigital shapes. Thus, the area of a section where the cathode (20) is near the anode (22) is large, so that photoelectrons emitted from the cathode (20) by incidence of ultraviolet rays is propagated through the vacuum and are favorably trapped collected by the anode (22).
Abstract:
PROBLEM TO BE SOLVED: To provide an ultraviolet light generating target capable of enhancing ultraviolet light generation efficiency, an electron beam exciting ultraviolet light source, and process of manufacturing the ultraviolet light generating target.SOLUTION: An ultraviolet light generating target 20 includes: a UV-light transmitting substrate 21; a light-emitting layer 22 that is provided on the substrate 21 and generates ultraviolet light UV by receiving an electron beam EB. The light-emitting layer 22 contains a polycrystalline film composed of oxide polycrystal, added with an activator and containing Lu and Si, or a polycrystalline film composed of rare-earth containing aluminum garnet polycrystal, added with an activator.
Abstract:
PROBLEM TO BE SOLVED: To provide: an ultraviolet light-generating target that can increase ultraviolet light generation efficiency; an electron-beam-excited ultraviolet light source; and a method for producing the ultraviolet light-generating target.SOLUTION: An ultraviolet light-generating target 20 is provided with: a substrate 21 comprising sapphire, quartz, or rock crystal; and a Pr:LuAG polycrystalline film 22 that is provided on the substrate 21 and that generates ultraviolet light by receiving an electron beam. It is possible to significantly increase ultraviolet light generation efficiency compared to when using a Pr:LuAG monocrystalline film by means of using Pr:LuAG polycrystals as the target.
Abstract:
PROBLEM TO BE SOLVED: To obtain an information-recording method for recording specific information on a formed amorphous diamond thin film, and an information record medium utilizing the method. SOLUTION: In the information-recording method, a specific information can be recorded by applying an energy beam LB2 to an amorphous diamond thin film 2 corresponding to the specific information to be recorded for transforming an irradiation region and forming an amorphous diamond transformation region 3. Also, the information record medium is provided with the amorphous diamond thin film 2 and applies an energy beam to the specific region of the amorphous diamond thin film 2 corresponding to information to be recorded, thus forming the amorphous diamond transformation region 3 and hence recording the specific information.
Abstract:
PURPOSE:To provide a film forming device capable of measuring the film thickness in the process of film forming on real time. CONSTITUTION:Because a fixed stand 10 is periodically moving, the amt. of particles accumulated on substrates 11, 12 and 13 and the amt. of particles passing through an opening part 14 provided at the fixed stand 10 have a correlation. Thus, measuring means 40 measure the film thickness of thin films formed in such a manner that the particles passed through the opening part 14 are accumulated on the measuring face of a crystal resonator 30, by which the film thickness of thin films formed on the substrates 11, 12 and 13 can be detected.