ELECTROPHORETIC PHOTORESIST COMPOSITION

    公开(公告)号:GB1286560A

    公开(公告)日:1972-08-23

    申请号:GB5962970

    申请日:1970-12-22

    Applicant: IBM

    Inventor: BAKOS PETER

    Abstract: 1286560 Photosensitive compositions INTERNATIONAL BUSINESS MACHINES CORP 22 Dec 1970 [23 Dec 1969] 59629/70 Heading C3P [Also in Divisions C7 and G2] A photosensitive composition comprises an emulsion of an organic solution of a polychloroprene, a photosensitizer, a stabilizer and a polymeric binder and an aqueous solution of a wetting agent, N-methyl-2-pyrrolidene and a plasticizer. The composition may be electrophoretically deposited on an electrically conductive support and then image-wise exposed and developed to produce a resist on the support which may subsequently be etched. The polychloroprene and photosensitizer may be as disclosed in Specification 1,147,272, the stabilizer may be hydroquinone, the polymeric binder may be an epoxy resin, polyvinylcinnanate, polystyrene or an acrylic resin and the plasticizer may be triethanolamine or diallylisophthalate.

    RESIST STRIPPING COMPOSITION
    22.
    发明专利

    公开(公告)号:GB1277862A

    公开(公告)日:1972-06-14

    申请号:GB5475470

    申请日:1970-11-18

    Applicant: IBM

    Abstract: 1277862 Resist stripping composition INTERNATIONAL BUSINESS MACHINES CORP 18 Nov 1970 [23 Dec 1969] 54754/70 Heading C5D A composition for removing photosensitive resist material from a substrate used in microelectronic circuitry comprises a mixture of a first solution of an amine in a halogenated hydrocarbon and a second solution of an organic acid in a polar organic solvent. The amine may be monoethanolamine, diethanolamine or triethanolamine. The acid may be trichloroacetic, picric or maleic acid. The halogenated hydrocarbon may be methylene chloride, trichloroethane or tetrachloroethylene. The polar solvent may be cyclohexanone, acetone, methylisobutyl ketone, dimethylsulphoxide or N-methyl-2- pyrrolidone.

    23.
    发明专利
    未知

    公开(公告)号:IT1165392B

    公开(公告)日:1987-04-22

    申请号:IT2773979

    申请日:1979-11-30

    Applicant: IBM

    Inventor: BAKOS PETER

    Abstract: The porosity and surface roughness of ceramic substrates are improved by coating the surface with silicon compounds, drying the coated substrate, and then subjecting the substrate to elevated temperature so as to convert the silicon compounds to silicon oxides. Coated substrates obtained by the above process as well as specific preferred organosilane compositions are provided.

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