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公开(公告)号：BE585028A
公开(公告)日：1960-03-16
申请号：BE585028
申请日：1959-11-25
Applicant: IBM
Inventor： COWDEN RICHARD C , BERTELSEN BRUCE I , KUMP HERBERT J
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公开(公告)号：CA813886A
公开(公告)日：1969-05-27
申请号：CA813886D
Applicant: IBM
Inventor： MAISSEL LEON I , FLUR BARRY L , BERTELSEN BRUCE I
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Patent Agency Ranking
公开(公告)号：CA683211A
公开(公告)日：1964-03-31
申请号：CA683211D
Applicant: IBM
Inventor： KUMP HERBERT J , BERTELSEN BRUCE I
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公开(公告)号：CA1049158A
公开(公告)日：1979-02-20
申请号：CA262458
申请日：1976-10-01
Applicant: IBM
Inventor： BABINSKI JOHN P , BERTELSEN BRUCE I , RAACKE KARL H , SIRGO VALDEKO H , TOWNSEND CLARENCE J
Abstract: TRANSPORT SYSTEM FOR SEMICONDUCTOR WAFER MULTIPROCESSING STATION SYSTEM The teaching discloses a dual bidirectional minimum volume self-centering air tract system for transporting semiconductor wafers or geometrically similar parts-in-process to and from processing tool stations in a random type manner and embodying controls to identify and collect of the fluid within and utilized by the transport system while supplying and receiving wafers to processing tool stations which may have a wide variation of ambient conditions. Further said transport system embodies among other features means for bidirectional travel with cross over intersections, directional control means, buffer sections and fluid vector means from a lower plenum for maintaining wafers centered on a fluidic cushion track so as to avoid edge contact of the wafer against any part of the apparatus and minimal backside or back flat face contact with the track membrane. The system also provides a means for sending wafers into the system and collecting processed pieces in suitable containers in lot or random form.
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公开(公告)号：CA783810A
公开(公告)日：1968-04-23
申请号：CA783810D
Applicant: IBM
Inventor： BERTELSEN BRUCE I , KUMP HERBERT J , HOTTENROTT HANS G
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公开(公告)号：CA780341A
公开(公告)日：1968-03-12
申请号：CA780341D
Applicant: IBM
Inventor： BERTELSEN BRUCE I , REIMER ARNOLD E
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