公开(公告)号：EP3327413A1

公开(公告)日：2018-05-30

申请号：EP16200570.6

申请日：2016-11-24

Applicant: IMEC VZW

Inventor： YURT, Abdulkadir ,  LIN, Ziduo ,  STAHL, Richard ,  VANMEERBEECK, Geert

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J9/0215 ,  G01J2009/0223 ,  G03H1/0443 ,  G03H1/0465 ,  G03H2001/0447 ,  G03H2223/12 ,  G03H2223/19

Abstract: A method of holographic wavefront sensing is disclosed. The method comprises: receiving (302) a light beam (202) on a transparent, flat substrate (102), provided with a lattice (104) of opaque dots (106); detecting (304) by an image sensor (108) an interference pattern (204) formed by diffracted light, being scattered by the opaque dots (106), and undiffracted light of the light beam (202); processing (306) the detected interference pattern (204) to digitally reconstruct a representation of a displaced lattice (206), which would form the interference pattern (204) on the image sensor (108) upon receiving the light with a known wavefront; and comparing (308) the representation of the displaced lattice (206) to a known representation of the lattice (104) to determine a representation of the wavefront form of the received light beam (202).
An apparatus (100) and a system (400) for holographic wavefront sensing are also disclosed.

公开(公告)号：EP3077876A1

公开(公告)日：2016-10-12

申请号：EP14809614.2

申请日：2014-12-02

Applicant: IMEC VZW

Inventor： STAHL, Richard ,  JAYAPALA, Murali ,  LAMBRECHTS, Andy ,  VANMEERBEECK, Geert

IPC: G03H1/04 ,  H04N9/04

CPC classification number: G03H1/0443 ,  G01N15/1429 ,  G01N15/1434 ,  G01N15/147 ,  G01N2015/1454 ,  G03H1/0404 ,  G03H1/0465 ,  G03H1/0486 ,  G03H1/0493 ,  G03H1/0866 ,  G03H2001/0212 ,  G03H2001/0428 ,  G03H2001/0447 ,  G03H2001/0452 ,  G03H2001/0497 ,  G03H2001/266 ,  G03H2210/12 ,  G03H2210/13 ,  G03H2222/14 ,  G03H2226/11 ,  G03H2240/62 ,  H04N5/332 ,  H04N9/045

Abstract: An apparatus, associated method, use and computer program product for performing in-line lens-free digital holography of an object (4), the apparatus comprising: - a single point light source (2) adapted for emitting coherent light; - an image sensing device (5) adapted for recording interference patterns resulting from interference from light waves directly originating from the point light source and object light waves (7) originating from scattering or reflection of light waves from the point light source by the object (4), the image sensing device comprising a plurality of pixels (50); wherein the image sensing device is adapted for receiving and recording, at the same moment in time, a plurality of interference patterns by a respective plurality of disjoint subsets of pixels. Advantageously, the source is a broadband light source, and each said subsets of pixels is registered with a colour filter selected among a set (e.g. 4) of narrow band, non-overlapping wavelength filters (I,II,III,IV).

Abstract translation: （2）适于发射相干光的单个点光源; - ：用于执行对象的直列无透镜数字全息（4），该装置包括一种装置，相关联的方法，用途和计算机程序产品 - （图像感测装置（5）适于记录的干涉图案由从光波从所述点光源和对象光波（7）发起直接源自由对象散射或来自点光源的光波的反射干涉产生 4），所述图像感测装置，其包括像素的多个（50）; worin图像感测装置是用于angepasst通过像素的不相交子集的respectivement多元性时间接收和记录，在同一时刻，干涉图案的多个。 有利地，所述源是一个宽带光源，并且像素的每个所述子集与窄带，不重叠的波长滤波器的一组（例如，4）中选择的滤色器注册（I，II，III，IV）。