SINGLE LITHOGRAPHY METHODS FOR INTERCONNECT ARCHITECTURES

    公开(公告)号:US20230420346A1

    公开(公告)日:2023-12-28

    申请号:US17846303

    申请日:2022-06-22

    Abstract: Various embodiments disclosed relate to a semiconductor assembly interconnect structure. The present disclosure includes an interconnect structure that case include a substrate, a metallic layer thereon, an adhesion promoter film formed over the metallic layer and forming a flat region over a flat portion of the metallic layer, a solder resist layer formed over the adhesion promoter film, an opening in the solder resist layer and the adhesion promoter film in the flat region of the adhesion promotion film, the opening connecting to the flat portion of the metallic layer, and a stacked electrical connector formed on the metallic layer within the opening. Methods of making an interconnect structure can include patterning a metallic layer on a substrate, depositing an adhesion promoter layer on the metallic layer opposite the substrate, patterning the adhesion promoter layer to expose selected portions of the metallic layer, and depositing a surface finish layer on the exposed selected portions of the metallic layer.

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