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    METHOD FOR FABRICATION OF PATTERNED CARBON NANOTUBE FILMS
    22.
    发明专利
    METHOD FOR FABRICATION OF PATTERNED CARBON NANOTUBE FILMS 未知

    公开(公告)号：CA2315132A1

    公开(公告)日：2001-02-18

    申请号：CA2315132

    申请日：2000-08-04

    Applicant: LUCENT TECHNOLOGIES INC ,  UNIV NORTH CAROLINA

    Inventor： BOWER CHRISTOPHER A ,  ZHU WEI ,  ZHOU OTTO

    IPC: B82B3/00 ,  C01B31/02 ,  H01J1/304 ,  H01J9/02 ,  C23C16/02 ,  C23C16/26

    Abstract: A method for fabricating adherent, patterned carbon nanotube films is provided. According to the invention, a substrate is patterned with a carbide-forming material, a carbon-dissolving material, or a low melting point metal. Carbon nanotubes are then deposited onto the patterned substrate, but have relatively poor adhesion to either the substrate material or the patterned material. The substrate is then annealed, typically in vacuum, at a temperature dependent on the particular patterning material, e.g., a temperature at which carbide formation occurs, at which carbon dissolution occurs, or at which the low melting point metal melts. The annealing thereby provides an adherent nanotube film over the patterned areas, while the nanotubes deposited onto the non-patterned areas are easily removed, e.g., by blowing, rubbing, brushing and/or ultrasonication in a solvent such as methanol.

    Microwave vacuum tube device employing grid-modulated cold cathode source having nanotube emitters
    25.
    发明专利
    Microwave vacuum tube device employing grid-modulated cold cathode source having nanotube emitters 未知

    公开(公告)号：AU5771901A

    公开(公告)日：2002-02-07

    申请号：AU5771901

    申请日：2001-07-30

    Applicant: LUCENT TECHNOLOGIES INC ,  TELEDYNE TECH INC

    Inventor： GORE YEHUDA ,  ZHU WEI ,  KOCHANSKI GREGORY P ,  JIN SUNGHO

    IPC: H01J9/02 ,  H01J21/10 ,  H01J23/04 ,  H01J23/06 ,  H01J23/05 ,  H01J1/304

    Abstract: A gridded microwave tube contains a cold cathode, an anode, and a grid located between the anode and cathode. In one embodiment, the cold cathode has a refractory metal substrate (30,50,60,70,80,90) and carbon nanotube emitters (32,42,53,62,73), the emitters (32,42,53,62,73) having a diameter of 1 to 300nm and a length of 0.05 to 100µm. The grid-cathode spacing is 1 to 100µm, the grid (34,43,54,63,74) contains apertures having a maximum dimension of 0.5 to 100µm, and the grid thickness is 0.1 to 50µm. Emission from the cathode directly onto the grid material itself, which undesirably heats the grid, is reduced by either (a) the presence of a shadow mask (33) between the grid (34) and the emitters (32) or (b) selective formation of the emitters (42,53,62,73) on the surface of the substrate (50,60,70,80,90). The microwave tube operates at a frequency of greater than 0.5GHz, advantageously greater than 2GHz.

    29.
    发明专利
    未知

    公开(公告)号：DE69900076T2

    公开(公告)日：2001-11-15

    申请号：DE69900076

    申请日：1999-03-02

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： CHIEN-SHING PAI ,  ZHU WEI

    IPC: C23C14/06 ,  H01L21/312 ,  H01L21/314 ,  H01L21/768 ,  H01L23/522 ,  C23C14/22 ,  H01L21/00

    Abstract: Ion beam deposition, using a carbon- and fluorine-containing source or sources, is used to form a fluorinated diamond-like carbon layer in a device, the FDLC layer exhibiting a dielectric constant of 3.0 or less along with a thermal stability of at least 400 DEG C. During the ion beam deposition, due to the unique nature of carbon chemistry, the carbon atoms combine at the substrate surface to form all possible combinations of sp , sp and sp bonds. However, ion beam etching occurs along with deposition, such that atoms of the weaker carbon structures - carbyne and graphite - are removed preferentially. This leads to a buildup of a diamond-like, sp -bonded structure with fluorine atoms, it is believed, substituted for some carbon atoms within the structure, this structure providing the desirable properties of the layer.

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