公开(公告)号：EP1596240B1

公开(公告)日：2009-08-26

申请号：EP05016097.7

申请日：2001-04-06

Applicant: Microsoft Corporation

Inventor： Sinclair, Michael J. ,  Levitan, Jeremy A.

IPC: G02B26/08 ,  G02B26/02 ,  B81B3/00 ,  B81B5/00 ,  G02B6/35 ,  H01H50/00

CPC classification number: H01H50/005 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2203/058 ,  G02B6/3518 ,  G02B6/3572 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/085 ,  G02B26/101 ,  H01F7/066 ,  H01F7/08 ,  H01F7/14 ,  H01F21/04 ,  H01F2005/006 ,  H01F2007/068 ,  H02K41/0356 ,  Y10S359/904

公开(公告)号：EP1202096A3

公开(公告)日：2004-02-04

申请号：EP01124608.9

申请日：2001-10-15

Applicant: MICROSOFT CORPORATION

Inventor： Sinclair, Michael J. ,  Starkweather, Gary K.

IPC: G02B26/08 ,  G02B26/02 ,  G02B5/00 ,  G02B26/04

CPC classification number: G02B6/353 ,  G02B6/3512 ,  G02B6/3554 ,  G02B6/356 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594 ,  G02B26/02 ,  H04N5/7408 ,  H04N5/7416

Abstract: A MEMS optical display system includes an illumination source for providing illumination light, a collimating lens for receiving the illumination light and forming from it collimated illumination light, and a converging microlens array having an array of lenslets that converge the collimated illumination light. The converging microlens array directs the illumination light to a microelectrical mechanical system (MEMS) optical modulator. The MEMS optical modulator includes, for example, a planar substrate through which multiple pixel apertures extend and multiple MEMS actuators that support and selectively position MEMS shutters over the apertures. A MEMS actuator and MEMS shutter, together with a corresponding aperture, correspond to pixel. The light from the converging microlens array is focused through the apertures and is selectively modulated according to the positioning of the MEMS shutters by the MEMS actuators, thereby to impart image information on the illumination light. The light is then passed to a diffused transmissive display screen by a projection microlens array.

公开(公告)号：EP1350758A2

公开(公告)日：2003-10-08

申请号：EP03002122.4

申请日：2003-01-30

Applicant: MICROSOFT CORPORATION

Inventor： Sinclair, Michael J.

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶片臂，其在一端被固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。

公开(公告)号：EP1202096A2

公开(公告)日：2002-05-02

申请号：EP01124608.9

申请日：2001-10-15

Applicant: MICROSOFT CORPORATION

Inventor： Sinclair, Michael J. ,  Starkweather, Gary K.

IPC: G02B6/43 ,  G02B26/08

CPC classification number: G02B6/353 ,  G02B6/3512 ,  G02B6/3554 ,  G02B6/356 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594 ,  G02B26/02 ,  H04N5/7408 ,  H04N5/7416

Abstract: A MEMS optical display system includes an illumination source for providing illumination light, a collimating lens for receiving the illumination light and forming from it collimated illumination light, and a converging microlens array having an array of lenslets that converge the collimated illumination light. The converging microlens array directs the illumination light to a microelectrical mechanical system (MEMS) optical modulator. The MEMS optical modulator includes, for example, a planar substrate through which multiple pixel apertures extend and multiple MEMS actuators that support and selectively position MEMS shutters over the apertures. A MEMS actuator and MEMS shutter, together with a corresponding aperture, correspond to pixel. The light from the converging microlens array is focused through the apertures and is selectively modulated according to the positioning of the MEMS shutters by the MEMS actuators, thereby to impart image information on the illumination light. The light is then passed to a diffused transmissive display screen by a projection microlens array.

Abstract translation: MEMS光学显示系统包括用于提供照明光的照明源，用于接收照明光并从其准备的准直照明光的准直透镜，以及具有会聚准直照明光的小透镜阵列的会聚微透镜阵列。 会聚微透镜阵列将照明光导向微电子机械系统（MEMS）光调制器。 MEMS光调制器包括例如多个像素孔延伸的平面基板和支撑并选择性地将MEMS百叶窗定位在孔上的多个MEMS致动器。 MEMS致动器和MEMS快门以及对应的孔对应于像素。 来自会聚微透镜阵列的光通过孔聚焦，并且根据MEMS致动器的MEMS快门的定位来选择性地调制，由此赋予照明光的图像信息。 然后通过投影微透镜阵列将光传递到扩散透射显示屏。

公开(公告)号：EP1201602A2

公开(公告)日：2002-05-02

申请号：EP01124609.7

申请日：2001-10-15

Applicant: MICROSOFT CORPORATION

Inventor： Sinclair, Michael J.

IPC: B81B3/00

CPC classification number: B81B3/0024 ,  B81B2201/042 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/058

Abstract: An out-of-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material (e.g., silicon). The actuator includes first and second anchors secured to the substrate and multiple elongated thermal buckle beams that are secured between the anchors. The buckle beams are formed of semiconductor material, such as polysilicon. In one implementation, the buckling beams are coupled together by a pivot frame that includes a frame base secured to each buckle beam and at least one pivot arm that is coupled to the frame base at one end and includes a free end that pivots out-of-plane when the actuator is activated. A current source directs electrical current through the thermal buckle beams via the anchors to impart thermal expansion of the buckle beams and hence a buckling motion of them out of the plane (i.e., away from) the substrate. Some implementations may include an out-of-plane buckle bias that predisposes the buckle beams to move away from the substrate when activated.

Abstract translation: 在半导体材料（例如硅）的平面基板上形成面外热弯曲束微电子机械致动器。 致动器包括固定到基板的第一和第二锚固件以及固定在锚固件之间的多个细长的热带扣梁。 带扣梁由诸如多晶硅的半导体材料形成。 在一个实施方案中，弯曲梁通过枢轴框架联接在一起，枢轴框架包括固定到每个带扣梁的框架基座和至少一个枢转臂，该枢轴臂在一端处联接到框架基座，并且包括枢转在外侧的自由端 当执行器被激活时平面。 电流源通过锚定装置引导电流通过热带扣梁以赋予带扣热束的热膨胀，并因此使其翘曲运动离开平面（即远离基板）。 一些实施方案可以包括平面外的扣环偏压，其在激活时易于使带扣梁移动离开衬底。