公开(公告)号：US6046659A

公开(公告)日：2000-04-04

申请号：US080326

申请日：1998-05-15

Applicant: Robert Y. Loo ,  Adele Schmitz ,  Julia Brown ,  Jonathan Lynch ,  Debabani Choudhury ,  James Foschaar ,  Daniel J. Hyman ,  Brett Warneke ,  Juan Lam ,  Tsung-Yuan Hsu ,  Jae Lee ,  Mehran Mehregany

Inventor： Robert Y. Loo ,  Adele Schmitz ,  Julia Brown ,  Jonathan Lynch ,  Debabani Choudhury ,  James Foschaar ,  Daniel J. Hyman ,  Brett Warneke ,  Juan Lam ,  Tsung-Yuan Hsu ,  Jae Lee ,  Mehran Mehregany

IPC: H01H1/50 ,  H01H59/00 ,  H01P1/12 ,  H01P1/10 ,  H01H57/00

CPC classification number: B81B3/0072 ,  H01G5/18 ,  H01G5/38 ,  H01G5/40 ,  H01H59/0009 ,  H01P1/12 ,  B81B2201/014 ,  B81B2203/0118 ,  H01H1/50

Abstract: Methods for the design and fabrication of micro-electro-mechanical switches are disclosed. Two different switch designs with three different switch fabrication techniques are presented for a total of six switch structures. Each switch has a multiple-layer armature with a suspended biasing electrode and a conducting transmission line affixed to the structural layer of the armature. A conducting dimple is connected to the conducting line to provide a reliable region of contact for the switch. The switch is fabricated using silicon nitride as the armature structural layer and silicon dioxide as the sacrificial layer supporting the armature during fabrication. Hydrofluoric acid is used to remove the silicon dioxide layer with post-processing in a critical point dryer to increase yield.

Abstract translation: 公开了微机电开关的设计和制造方法。 提出了三种不同的开关制造技术的两种不同的开关设计，共有六种开关结构。 每个开关具有多层电枢，其具有悬置的偏置电极和固定到电枢的结构层的导电传输线。 导电凹坑连接到导线，为开关提供可靠的接触区域。 该开关使用氮化硅作为电枢结构层和二氧化硅作为在制造期间支撑电枢的牺牲层制造。 氢氟酸用于在临界点干燥器中进行后处理以去除二氧化硅层以提高产率。

公开(公告)号：US6029337A

公开(公告)日：2000-02-29

申请号：US783021

申请日：1997-01-14

Applicant: Mehran Mehregany ,  Francis Lawrence Merat

Inventor： Mehran Mehregany ,  Francis Lawrence Merat

IPC: G02B26/08 ,  G02B26/10 ,  G02B26/12 ,  H02N1/00 ,  H02K15/04

CPC classification number: H02N1/004 ,  G02B26/0816 ,  G02B26/106 ,  G02B26/121 ,  Y10T29/49012 ,  Y10T29/49812

Abstract: Micromotors are fabricated with utilitarian features on their rotors. In some embodiments, the features are formed by the molded addition of material on top of a rotor surface. In other embodiments, the features are formed by the provision of an additional layer on top of the rotor, and the selective removal of material therefrom. In yet other embodiments, the features are defined by the selective removal of material from the rotor itself. The disclosure is particularly illustrated with reference to the fabrication of a polygon (nickel) mirror on a polysilicon, electrostatic micromotor rotor for use in scanning applications. However, the principles of the invention can likewise be applied to fabrication of a variety of other features, such as optical gratings, shutters, mechanical actuators, pump impellers and fins, and to a variety of different micromotor constructions.

Abstract translation: 微电机在其转子上用功利特征制造。 在一些实施例中，通过在转子表面的顶部上模制添加材料形成特征。 在其它实施例中，特征是通过在转子顶部设置附加层以及从中选择性地移除材料形成的。 在其它实施例中，通过从转子本身选择性地去除材料来限定特征。 具体地参考多晶硅（镍）反射镜在多晶硅（静电微电机转子）上制造用于扫描应用的公开。 然而，本发明的原理同样可以应用于各种其他特征的制造，例如光栅，百叶窗，机械致动器，泵叶轮和翅片，以及各种不同的微电机结构。

公开(公告)号：US5712609A

公开(公告)日：1998-01-27

申请号：US258427

申请日：1994-06-10

Applicant: Mehran Mehregany ,  Kenneth G. Goldman ,  Vijayakumar R. Dhuler

Inventor： Mehran Mehregany ,  Kenneth G. Goldman ,  Vijayakumar R. Dhuler

IPC: G01L1/18 ,  B81B3/00 ,  G01D9/18 ,  G01D15/00 ,  G01K5/60 ,  G01P15/08 ,  H01H1/00 ,  H01H9/00 ,  H01H35/14 ,  H01H35/34 ,  H01H37/52 ,  H01H37/74 ,  H01H61/02 ,  H01L29/84 ,  H01H37/10

CPC classification number: G01P15/0891 ,  G01P15/0802 ,  G01P2015/0814 ,  H01H1/0036 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H35/14 ,  H01H35/34 ,  H01H37/52 ,  H01H37/74 ,  H01H61/02

Abstract: A micromechanical memory sensor. The sensor comprises a latch member mechanically latching upon detection of a threshold value of a variable condition and circuitry for detecting such latching. A sensor further includes a resetting mechanism for electrically unlatching the latch member whereby the sensor latched purely mechanically is electrically reset for repeat use.

公开(公告)号：US5093594A

公开(公告)日：1992-03-03

申请号：US542202

申请日：1990-06-22

Applicant: Mehran Mehregany

Inventor： Mehran Mehregany

IPC: H01L21/321 ,  H02N1/00

CPC classification number: H01L21/321 ,  H02N1/004

Abstract: A microfabricated, harmonic side-drive "wobble" type micromotor exhibiting increased torque output without the need for air levitation or for insulation on the rotor. Stator pieces are arranged about a circular space. In the center of that space is a bearing. An annular rotor in the space, about the bearing, has an inner surface always in rolling contact with the bearing. The outer surface of the rotor is separated from the stator by an air gap.

Abstract translation: 微调式谐波侧驱动“摆动”型微电机显示出增加的扭矩输出，而不需要空气悬浮或转子上的绝缘。 定子片围绕圆形空间布置。 在这个空间的中心是一个轴承。 围绕轴承的空间中的环形转子具有始终与轴承滚动接触的内表面。 转子的外表面通过气隙与定子分离。

公开(公告)号：US08739632B2

公开(公告)日：2014-06-03

申请号：US13355149

申请日：2012-01-20

Applicant: Shih-Shian Ho ,  Srihari Rajgopal ,  Mehran Mehregany

Inventor： Shih-Shian Ho ,  Srihari Rajgopal ,  Mehran Mehregany

IPC: G01L9/12 ,  G01L9/00

CPC classification number: G01L9/0072 ,  G01L9/12 ,  Y10T29/49007

Abstract: A pressure sensor can include a diaphragm plate of an electrically conductive material, the diaphragm plate including substantially planar opposed first and second surfaces. A layer of a dielectric material can be provided at the first surface of the diaphragm plate along a periphery thereof such that a flexion region of the first surface is substantially free of the dielectric material. The dielectric layer can be configured to engage a fixed structure within a housing to support the flexion region as to enable deflection thereof relative to the fixed structure that changes an electrical characteristic of the pressure sensor in response to application of force at the second surface of the diaphragm plate.

Abstract translation: 压力传感器可以包括导电材料的隔膜板，所述隔膜板包括基本上平面的相对的第一和第二表面。 可以在隔膜板的第一表面沿其周边设置电介质材料层，使得第一表面的弯曲区域基本上不含电介质材料。 电介质层可以被配置成与壳体内的固定结构接合以支撑弯曲区域，以便能够相对于固定结构进行偏转，从而响应于在第二表面施加力而改变压力传感器的电特性 隔膜板。

公开(公告)号：US08372677B2

公开(公告)日：2013-02-12

申请号：US13466595

申请日：2012-05-08

Applicant: Mehran Mehregany

Inventor： Mehran Mehregany

IPC: H01L21/00 ,  G01P15/13

CPC classification number: G01P15/18 ,  B81B2201/0235 ,  B81C1/00182 ,  B81C2201/0111 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10T29/49156

Abstract: MEMS accelerometers have a substrate, and a proof mass portion thereof which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.

Abstract translation: MEMS加速度计具有基板和其与其周围的基板间隔开的检验质量部分。 导电锚固体耦合到检测质量块，并且与防护物质分离的多个导电悬浮肛门从锚固体延伸并且耦合到围绕证明物质的基底。 多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。 制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。 锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

公开(公告)号：US20120204652A1

公开(公告)日：2012-08-16

申请号：US13355149

申请日：2012-01-20

Applicant: Shih-Shian Ho ,  Srihari Rajgopal ,  Mehran Mehregany

Inventor： Shih-Shian Ho ,  Srihari Rajgopal ,  Mehran Mehregany

IPC: G01L9/12 ,  G01R3/00 ,  G01L7/08

CPC classification number: G01L9/0072 ,  G01L9/12 ,  Y10T29/49007

Abstract: A pressure sensor can include a diaphragm plate of an electrically conductive material, the diaphragm plate including substantially planar opposed first and second surfaces. A layer of a dielectric material can be provided at the first surface of the diaphragm plate along a periphery thereof such that a flexion region of the first surface is substantially free of the dielectric material. The dielectric layer can be configured to engage a fixed structure within a housing to support the flexion region as to enable deflection thereof relative to the fixed structure that changes an electrical characteristic of the pressure sensor in response to application of force at the second surface of the diaphragm plate.

Abstract translation: 压力传感器可以包括导电材料的隔膜板，所述隔膜板包括基本上平面的相对的第一和第二表面。 可以在隔膜板的第一表面沿其周边设置电介质材料层，使得第一表面的弯曲区域基本上不含电介质材料。 电介质层可以被配置成与壳体内的固定结构接合以支撑弯曲区域，以便能够相对于固定结构进行偏转，从而响应于在第二表面施加力而改变压力传感器的电特性 隔膜板。

公开(公告)号：US08153280B2

公开(公告)日：2012-04-10

申请号：US11736964

申请日：2007-04-18

Applicant: Mehran Mehregany ,  Christian A. Zorman ,  Xiao-An Fu ,  Jeremy L. Dunning

Inventor： Mehran Mehregany ,  Christian A. Zorman ,  Xiao-An Fu ,  Jeremy L. Dunning

IPC: B32B9/00

CPC classification number: C23C16/325

Abstract: A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.

Abstract translation: 公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。 还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。

公开(公告)号：US20090024487A1

公开(公告)日：2009-01-22

申请号：US12039631

申请日：2008-02-28

Applicant: Mehran Mehregany

Inventor： Mehran Mehregany

IPC: G06Q30/00

CPC classification number: G06Q30/06 ,  G06Q20/102 ,  G06Q30/0625

Abstract: A method for facilitating the development of research proposals is provided. Each user is registered as a supplier or as a buyer. Then, for each of the suppliers, one or more proposal abstracts are accepted. Each proposal abstract is stored in a database. A search request for proposal abstracts meeting a criteria is received from at least one of the buyers. A list of matching proposal abstracts that meet the criteria of the search request is sent to the one of the buyer. A request to view one or more of the proposal abstracts from the list of matching proposal abstracts is received from one of the buyers. Each of the one or more proposal abstracts is sent to the buyer.

Abstract translation: 提供了一种促进研究计划开发的方法。 每个用户都注册为供应商或作为买方。 然后，对于每个供应商，一个或多个提案摘要被接受。 每个提案摘要都存储在数据库中。 从至少一个买方收到符合标准的提案摘要的搜索请求。 符合搜索请求条件的匹配提案摘要列表将发送给买方。 从其中一个买方收到从匹配投标摘要列表中查看一个或多个提案摘要的请求。 每个一个或多个提案摘要都会发送给买方。

公开(公告)号：US07261919B2

公开(公告)日：2007-08-28

申请号：US10716006

申请日：2003-11-18

Applicant: Mehran Mehregany ,  Christian A. Zorman ,  Xiao-An Fu ,  Jeremy L. Dunning

Inventor： Mehran Mehregany ,  Christian A. Zorman ,  Xiao-An Fu ,  Jeremy L. Dunning

IPC: C23C16/00

CPC classification number: C23C16/325

Abstract: A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.

Abstract translation: 公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。 还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。