公开(公告)号：DE502006008527D1

公开(公告)日：2011-01-27

申请号：DE502006008527

申请日：2006-10-05

Applicant: PLANSEE SE

Inventor： ABENTHUNG PETER ,  HUBER KARL ,  LACKNER HARALD ,  LEICHTFRIED GERHARD ,  POLCIK PETER ,  WERATSCHNIG CHRISTIAN

IPC: C23C14/34

公开(公告)号：AU2006301946A1

公开(公告)日：2007-04-19

申请号：AU2006301946

申请日：2006-10-05

Applicant: PLANSEE SE

Inventor： WERATSCHNIG CHRISTIAN ,  ABENTHUNG PETER ,  LACKNER HARALD ,  HUBER KARL ,  LEICHTFRIED GERHARD ,  POLCIK PETER

IPC: C23C14/34

Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.