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公开(公告)号：BRPI0617249A2
公开(公告)日：2011-07-19
申请号：BRPI0617249
申请日：2006-10-05
Applicant: PLANSEE SE
Inventor： ABENTHUNG PETER , HUBER KARL , LACKNER HARALD , LEICHTFRIED GERHARD , POLCIK PETER , WERATSCHNIG CHRISTIAN
IPC: C23C14/34
Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.
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公开(公告)号：CA2793736A1
公开(公告)日：2011-10-20
申请号：CA2793736
申请日：2011-04-12
Applicant: PLANSEE SE
Inventor： POLCIK PETER , POLZER CONRAD , PERL MATTHIAS , SCHLICHTHERLE STEFAN , STRAUSS GEORG
Abstract: The invention provides a coating source -1- for physical vapour deposition, having at least one component -2-; -7- which has been produced from at least one pulverulent starting material in a powder metallurgy production process, and at least one ferromagnetic region -5a-, -5b-, -6- embedded in the component. The at least one ferromagnetic region -5a-, -5b-, -6- is introduced into the component -2-; -7- and fixedly connected to the component during the powder metallurgy production process.
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公开(公告)号：ES2356773T3
公开(公告)日：2011-04-13
申请号：ES06790256
申请日：2006-10-05
Applicant: PLANSEE SE
Inventor： ABENTHUNG PETER , HUBER KARL , LACKNER HARALD , LEICHTFRIED GERHARD , POLCIK PETER , WERATSCHNIG CHRISTIAN
IPC: C23C14/34
Abstract: Procedimiento para la fabricación de un blanco tubular que comprende un tubo de molibdeno o una aleación de molibdeno con un contenido de oxígeno inferior a 50 µg/g, una densidad superior al 99% de la densidad teórica y un tamaño de grano medio transversal a la dirección axial inferior a 100 µm, así como un tubo de apoyo de un material no magnético, caracterizado porque comprende al menos los siguientes pasos de fabricación: - fabricación de un polvo metálico de molibdeno o una aleación de molibdeno con un tamaño de partícula medio según Fischer de 0,5 a 10 µm; - fabricación de una pieza en verde en forma de una pieza en bruto para tubo mediante prensado isostático en frío del polvo metálico en una matriz flexible utilizando un núcleo a una presión p, donde 100 MPa
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公开(公告)号：DE502006008527D1
公开(公告)日：2011-01-27
申请号：DE502006008527
申请日：2006-10-05
Applicant: PLANSEE SE
Inventor： ABENTHUNG PETER , HUBER KARL , LACKNER HARALD , LEICHTFRIED GERHARD , POLCIK PETER , WERATSCHNIG CHRISTIAN
IPC: C23C14/34
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公开(公告)号：HRP20020100B1
公开(公告)日：2010-11-30
申请号：HRP20020100
申请日：2002-02-01
Applicant: PLANSEE SE
Inventor： WILHARTITZ PETER , SCHOENAUER STEFAN , POLCIK PETER
Abstract: The invention relates to a process for manufacturing an evaporation source for physical vapor deposition. The evaporation source is formed of the actual sputtering target with an aluminum component and one or more further components as well as of a backing plate made from a material having better thermal conductivity than the target. The backing plate made of a powdery starting material is pressed, together with the powdery components of the sputtering target, into sandwiched powder fractions and then formed.
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Patent Agency Ranking
公开(公告)号：AU2006301946A1
公开(公告)日：2007-04-19
申请号：AU2006301946
申请日：2006-10-05
Applicant: PLANSEE SE
Inventor： WERATSCHNIG CHRISTIAN , ABENTHUNG PETER , LACKNER HARALD , HUBER KARL , LEICHTFRIED GERHARD , POLCIK PETER
IPC: C23C14/34
Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.
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公开(公告)号：RU2564642C2
公开(公告)日：2015-10-10
申请号：RU2012141139
申请日：2011-04-12
Applicant: PLANSEE SE
Inventor： POLCIK PETER , POLZER CONRAD , PERL MATTHIAS , SCHLICHTHERLE STEFAN , STRAUSS GEORG
Abstract: Изобретениеотноситсяк источнику(1) длянанесенияпокрытиякатодно-дуговымосаждениемизпаровойфазыи способуизготовленияисточникадлянанесенияпокрытия. Источник (1) содержитпоменьшеймереодинкомпонент (2, 7), изготовленныйизпоменьшеймереодногопорошкообразногоисходногоматериалапосредствомпорошковойметаллургии, ипоменьшеймереоднуферромагнитнуюобласть (5a, 5b, 6), встроеннуюв компонент (2, 7). Упомянутуюферромагнитнуюобласть (5a, 5b, 6) вводятв компонент (2, 7) инеподвижносоединяютс компонентомвовремяпроцессаизготовленияспособомпорошковойметаллургии. Изобретениепозволяетобеспечитьвысокуюплотностьмагнитногополянаповерхностимишениисточникананесенияпокрытия. 2 н. и 9 з.п. ф-лы, 11 ил.
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公开(公告)号：AT491823T
公开(公告)日：2011-01-15
申请号：AT06790256
申请日：2006-10-05
Applicant: PLANSEE SE
Inventor： ABENTHUNG PETER , HUBER KARL , LACKNER HARALD , LEICHTFRIED GERHARD , POLCIK PETER , WERATSCHNIG CHRISTIAN
IPC: C23C14/34
Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.
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公开(公告)号：AU2006301946B2
公开(公告)日：2010-07-01
申请号：AU2006301946
申请日：2006-10-05
Applicant: PLANSEE SE
Inventor： WERATSCHNIG CHRISTIAN , ABENTHUNG PETER , LACKNER HARALD , HUBER KARL , LEICHTFRIED GERHARD , POLCIK PETER
IPC: C23C14/34
Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.
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公开(公告)号：HU225577B1
公开(公告)日：2007-03-28
申请号：HU0301848
申请日：2001-11-07
Applicant: PLANSEE SE
Inventor： WILHARTITZ PETER , SCHOENAUER STEFAN , POLCIK PETER
Abstract: The invention relates to a process for manufacturing an evaporation source for physical vapor deposition. The evaporation source is formed of the actual sputtering target with an aluminum component and one or more further components as well as of a backing plate made from a material having better thermal conductivity than the target. The backing plate made of a powdery starting material is pressed, together with the powdery components of the sputtering target, into sandwiched powder fractions and then formed.
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