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公开(公告)号：JPH09196630A
公开(公告)日：1997-07-31
申请号：JP2316396
申请日：1996-01-16
Applicant: TORAY INDUSTRIES
Inventor： KAWAMURA AKINORI , HAYASHI MUTSUMI , SATO MAKOTO
Abstract: PROBLEM TO BE SOLVED: To enable measurement of various optical constants of a thin film formed on a substrate or the surface thereof by arranging an irradiation optical system, a photodetecting optical system and a measuring head comprising a light intensity distribution sensor and an optical constant calculator in a compact designing. SOLUTION: Laser light from a laser light source 10 (e.g. semiconductor laser light source) is reflected on a half mirror 11 and condensed with a convex lens 12 (condenser lens) to irradiate a sample 4. The reflected light 7 from the sample 4 is guided to a light intensity distribution sensor 9 by a photodetecting optical system 8. The light intensity distribution sensor 9 detects an intensity distribution within a light beam of the reflected light 7 guided through the photodetecting optical system 8. The light intensity distribution (reflection factor distribution) detected is collated with a theoretical reflection factor distribution to calculate an optical constant of the sample as object. This calculation is performed by an optical constant calculator 3 which, for example, comprises a microcomputer.
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公开(公告)号：JPH0953922A
公开(公告)日：1997-02-25
申请号：JP21089795
申请日：1995-08-18
Applicant: TORAY INDUSTRIES
Inventor： HAYASHI MUTSUMI , NAKAMURA HAJIME
Abstract: PROBLEM TO BE SOLVED: To remarkably reduce the influence of reflected light from the surface of a lens when an object to be measured is optically measured by irradiating the object with measurement light through the lens and guiding the reflected light from the object to a detecting section through the lens. SOLUTION: Measurement light is projected upon an object 1 to be measured through a Fourier transform lens 2 and λ/4-plate 8 after the light is polarized into linearly polarized light through a linearly polarizing section 12. Then, the reflected light of the measurement light from the object 1 is guided to a light receiving section 5 through the plate 8, lens 2, and polarizing plate 10. The relation between the plates 8 and 10 is set so that the transmission of the reflected light from the surface of the lens 2 can be inhibited and that of the reflected light from the object 1 can be permitted.
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公开(公告)号：JPH02271222A
公开(公告)日：1990-11-06
申请号：JP9264989
申请日：1989-04-12
Applicant: TORAY INDUSTRIES
Inventor： HAYASHI MUTSUMI , YAMAZAKI CHIKAYASU
Abstract: PURPOSE:To improve a measuring accuracy by projecting given single wavelength light in an ultraviolet region on a measuring side photodetector and adjusting the gain of an arithmetic unit so that the output of a measuring instrument may become a spectral calibration factor corresponding to the wavelength of the single wavelength light. CONSTITUTION:A difference between the output of a measuring side photodetector 10 and the output of a reference side photodetector 20 is based only on light in an ultraviolet region because an output based on a spectral sensitivity due to the light of a sub-transmission band is canceled each other put. The difference output at this time is an output based on the spectral sensitivity. Accordingly, to obtain the difference of photodetector outputs, after amplified by an input circuit unit 40, the outputs of the photodetectors are A/D-converted to be supplied to an arithmetic unit 50. Feedback variable resistors 404 and 405 are connected to the amplifiers 401 and 402 of the circuit unit 40 in parallel and the gains of the amplifiers can be adjusted by the resistors 404 and 405, respectively, when an instrument is calibrated. The intensity of light in ultraviolet region is obtained and successively integrated in the arithmetic unit 50. Information on the light intensity of a variety of ultraviolet regions is displayed on a liquid display 60.
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公开(公告)号：JPH01320409A
公开(公告)日：1989-12-26
申请号：JP15542288
申请日：1988-06-22
Applicant: TORAY INDUSTRIES
Inventor： TORIKAI JUN , HAYASHI MUTSUMI , YAMAZAKI CHIKAYASU
IPC: G01B11/06
Abstract: PURPOSE:To measure the film thickness of a thin film with high accuracy by irradiating the thin film with light at a constant angle of incidence, converting its reflected or transmitted light, and diffracting the light spectrally and measuring the spectral diffraction intensity to the wavelength. CONSTITUTION:Parallel light L which is emitted by a projection part is projected on the film to be measured through an optical window 2, light L' which is reflected by the film 15 is passed through the window 12 and converged by a condenser lens 4, and only the parallel component of the light L' is made into parallel light through a pinhole 5 and a lens 6 and made incident on a plane diffraction grating 7. An image forming lens 8 is so placed that part of the light diffracted spectrally by the grating 7, i.e. light within a specific wavelength range is image-formed on an image sensor 9. Then the waveform of the spectral intensity of the image formation on the sensor 9 is read out by an image sensor driving circuit 10, cell by cell, and sent to an arithmetic processing part 22 and the signal is A/D-converted 13 and read in a microcomputer 14, which performs arithmetic processing.
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公开(公告)号：JPH0943406A
公开(公告)日：1997-02-14
申请号：JP19529695
申请日：1995-07-31
Applicant: TORAY INDUSTRIES
Inventor： HAYASHI MUTSUMI , NAKAMURA HAJIME , ITO MICHIO
IPC: G02B5/00
Abstract: PROBLEM TO BE SOLVED: To obtain a light reflection suppressor which is small in the size of the optical axis direction of incident light, is large in the range of the incident light that may be attenuated and is capable of sufficiently attenuating the incident light by arranging plural planar members for suppressing the optical reflection of the incident light at every prescribed interval at a prescribed angle to the optical axis of the incident light. SOLUTION: The plural plate members 2 having the prescribed angle to the optical axis of the incident light are arranged at every prescribed interval within a frame of a rectangular parallelepiped opened at one side. The outer peripheral surfaces of these plate member 2 are subjected to coating to suppress the optical reflection. The bottom plate member a of the frame is also subjected to the coating to suppress the optical reflection. Such coatings are exemplified by, for example, black anodized aluminum, alkali coloring, black matte coating, etc. The width (the length from the position in contact with the bottom plate members 1a to the end on an incident light introducing side) of the plate member 2 is empirically or logically set in such a manner that at least prescribed number of times of multiple reflections are executed in correspondence to the intervals between the plate members 2 and the angle with the optical axis.
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Patent Agency Ranking
公开(公告)号：JPH0943160A
公开(公告)日：1997-02-14
申请号：JP19529795
申请日：1995-07-31
Applicant: TORAY INDUSTRIES
Inventor： MATSUMURA JUNICHI , HAYASHI MUTSUMI , NAKAMURA HAJIME
IPC: G01B11/30 , G01N21/88 , G01N21/956 , H01L21/66
Abstract: PROBLEM TO BE SOLVED: To measure the structure (fault) except a periodic structure of an object to be measured with the structure on a board by a simple process. SOLUTION: The optical measuring apparatus comprises positional deviation detecting means 12, 13 for detecting the positional deviations of the condensing position on the space filter 4 surface of the periodic structure of an object 2 to be measured from the opaque part of a space filter 4, and control means 14a, 14b for controlling the position of the filter 4 to eliminate the deviations based on the detected deviations.
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公开(公告)号：JPH0429002B2
公开(公告)日：1992-05-15
申请号：JP31512986
申请日：1986-12-25
Applicant: TORAY INDUSTRIES
Inventor： YAMAZAKI CHIKAYASU , HAYASHI MUTSUMI , TORIKAI JUN
IPC: G01B11/06
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公开(公告)号：JPS6273103A
公开(公告)日：1987-04-03
申请号：JP21228285
申请日：1985-09-27
Applicant: TORAY INDUSTRIES
Inventor： TORIKAI JUN , YAMAZAKI CHIKAYASU , KUMO ICHIRO , HAYASHI MUTSUMI
IPC: G01B11/06
Abstract: PURPOSE:To measure the thickness of a film, by measuring the spectroscopic characteristics of the reflected optical component through an optical window and the spectroscopic characteristics of the reflected optical component from a reflecting plate beforehand, subtracting a window signal from the measured signal and a Planck signal, and performing normalizing operation. CONSTITUTION:Parallel light, which is formed by a light projecting part, is made to pass an optical window 12 and projected on a plate measuring film 15. The light, which is reflected by the film 15, becomes parallel light and enters a planar diffraction grating 7. The image of the light in the specified wavelength range among the lights, divided by the grating 7, is formed on an image sensor 9. The waveform of the image having a specified spectroscopic intensity is sent to an operating part (b). The spectroscopic intensity W(lambda) is measured when nothing is placed as an object to be measured. The spectroscopic intensity B(lambda) is measured when a reflecting plate is placed. The spectroscopic intensity F(lambda) is measured when a thin film is placed. The operation of A(lambda) is carried out according to the expression in the Figure in a processing part (a), and the thickness of the thin film is measured.
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29.发明专利
公开(公告)号：JPH10293103A
公开(公告)日：1998-11-04
申请号：JP4171098
申请日：1998-02-24
Applicant: TORAY INDUSTRIES
Inventor： MATSUMURA JUNICHI , HAYASHI MUTSUMI , NAKAMURA TETSUYA
IPC: G01N21/88 , G01N21/21 , G01N21/94 , G01N21/956
Abstract: PROBLEM TO BE SOLVED: To measure the properties of an object to be measured with high sensitivity and accuracy by irradiating the object with a light principally comprising an S polarized component at an incident angle within a specified range and detecting the scattering light by a light receiving means. SOLUTION: An objective glass substrate 12 is irradiated with a coherent light 13 principally comprising an S polarized component from a light source 11 through an optical system 18 at an incident angle θ of 45-90 deg.. A part of the irradiating light 13 reflected on the surface serves as an indirect illumination light 19. Scattering light 15 from a defect 14 on the glass substrate 12 is detected by a light receiving means 17 for both the irradiating light 13 and the indirect illumination light 19 in order to obtain the information concerning to the state of the defect 14 on the glass substrate 12. Reflectance is higher constantly under S polarized state than under P polarized state or circularly polarized state and when the incident angle θ exceeds about 45 deg., the reflectance is doubled and it is increased drastically when the incident angle exceeds about 70 deg.. Consequently, the indirect illumination light 19 can be utilized effectively regardless of the position of the defect 14 resulting in the enhancement of the measurement accuracy.
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公开(公告)号：JPH09229632A
公开(公告)日：1997-09-05
申请号：JP6720696
申请日：1996-02-27
Applicant: TORAY INDUSTRIES
Inventor： YOTSUTSUKA KOUSUKE , HAYASHI MUTSUMI
Abstract: PROBLEM TO BE SOLVED: To carry out measurement at high speed using a simple optical system by relatively moving a measuring part and an object to be measured and measuring the image information in an intermittent visual field illuminated by a linear slit light source. SOLUTION: A movable table 2 in which an object 1 to be measured is fixed is moved in a prescribed direction by a screw 3 driven by a motor 4. The motor 4 is provided with an encoder 5 which can detect and control the position of the table 2 moved by the screw 3. A time delay integration type TDI camera 8 is so installed above the object 1 to be measured as to make the optical axis 14 vertical to the object 1 to be measured. A laser is used as the linear slit light source 10 and light beam is slit in a narrow width by an optical system and radiated to the center part of the visual field of the camera 8. A laser controller 15 controls on and off of the laser light and the pulse lighting time of the laser is made to be equal to the line shift time of the camera 8 and the interval of the lighting is determined based on the interval of a necessary optical cutting plane line.
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