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公开(公告)号：JP2001099623A
公开(公告)日：2001-04-13
申请号：JP27430799
申请日：1999-09-28
Applicant: TORAY INDUSTRIES
Inventor： SASAMOTO HIROKATA , NAKAI YASUHIRO , KURAYAMA KYOICHI
Abstract: PROBLEM TO BE SOLVED: To precisely inspect the length and position of a projection body set on a substrate in a short time. SOLUTION: To inspect a projection body set on a substrate, an image pickup means picks up at least one piece of image data including the projection body on the substrate, at least one segment crossing the projection body in the image data is set, and it is judged from an outline that the segment crosses whether or not the projection body is good.
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公开(公告)号：JP2001099619A
公开(公告)日：2001-04-13
申请号：JP2000187711
申请日：2000-06-22
Applicant: TORAY INDUSTRIES
Inventor： NAKAI YASUHIRO , KUROKI NOBUYUKI
Abstract: PROBLEM TO BE SOLVED: To provide a method and an instrument for precisely measuring the border part width of a vapor-deposited film without human's hands. SOLUTION: While a vapor-deposited film having vapor-deposition parts and non-deposition parts formed in stripes along the length and alternately along the width is made to travel, one surface side of the vapor-deposited film is irradiated with laser light, which is photodetected after being transmitted through a vapor-deposition film to measure the width of a border part where the metal vapor-deposited film thickness continuously decreases from a vapor- deposition part to a non-deposition part, and further to measure the width of a non-deposition part by this border part width measuring method. The measuring instrument which is used here is equipped with an irradiating means, a photodetecting means, a means which measures the width of the border part, and a measurement history managing means.
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公开(公告)号：JPH11288463A
公开(公告)日：1999-10-19
申请号：JP9160998
申请日：1998-04-03
Applicant: TORAY INDUSTRIES
Inventor： SASAMOTO HIROMASA , NAKAI YASUHIRO , KOBAYASHI KENICHI
IPC: G01B11/02 , G01B11/30 , G01M11/00 , G02F1/13 , G02F1/1339 , G06T1/00 , G06T7/00 , G09F9/00 , H04N17/00 , H04N17/02
Abstract: PROBLEM TO BE SOLVED: To automatically and accurately perform the discrimination on the presence/absence of respective colored layers on an object having a layered part and the measurement of the length and position of each colored layer by setting a line segment across the layered part on image data provided by an image pickup means and discriminating the presence/absence of respective layers from the number of contour lines that line segment crosses. SOLUTION: A color filter 1 is installed on a stage 2 and moved by applying a moving amount, which is preset so that the spacer can come into the measuring range of an image pickup device and which is measured by a controller 6 and giving a move start signal to the stage 2. The controller 6 receiving a move end signal applies a luminance measurement start signal to an image pickup device 4 and performs the measurement of luminance, and then the controller 6 receiving a luminance measurement end signal applies a data processing start signal to a data processor 5. The data processor 5 sets the line segment across the layered part on the image data and discriminates the presence/absence of respective layers from the number of contour lines that line segment crosses.
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公开(公告)号：JPH10222675A
公开(公告)日：1998-08-21
申请号：JP3301397
申请日：1997-01-31
Applicant: TORAY INDUSTRIES
Inventor： SASAMOTO HIROKATA , NAKAI YASUHIRO
Abstract: PROBLEM TO BE SOLVED: To attain inspection without any erroneous detection and miss in a measurement range by operating an extrapolating processing so that the value of data to be extrapolated can have a specific relation with the values of two measurement data at specific positions. SOLUTION: A data processor calculates measurement data (edge data) at an edge part in the shortest distance from data to be extrapolated. Then, measurement data (symmetrical data) at a position which is point symmetrical to the extrapolation data with the edge data as a center are calculated. Then, the value of the extrapolation data which is point symmetrical to the value of the symmetrical data with the value of the edge data as a center is calculated by an expression: extrapolation data = 2 × edge part data - symmetrical data. The symmetrical data of the calculated extrapolation data and luminance data are stored in an output storage part. When the extrapolation data and the luminance data are obtained, stripes are emphasized by using a 9×9 convolution filter by a filter processing part 33. The emphasis of the stripes is obtained by calculating the stripe intensity of each picture element from the luminance data and the filter.
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