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公开(公告)号：JP2002134024A
公开(公告)日：2002-05-10
申请号：JP2000328294
申请日：2000-10-27
Applicant: TORAY INDUSTRIES
Inventor： KURAMATA OSAMU , SASAMOTO HIROKATA , TSUDA TAKAHARU
Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a flat display panel for improved production yield by inspecting/correcting a defect before a conductive material film is patterned, so that the cause of an abnormal process is inferred based on the defect information for correcting the process without delay, resulting in prevented occurrence of a defect with a linear pattern electrode. SOLUTION: There are provided a process where the conductive material film is formed on a substrate, an inspection means for inspecting the film before the process for patterning, a delivery means for carrying out the substrate based on the inspection result, and a defect correcting means for the defects occurring at the film. Based on the inspection result with the film, delivery of the substrate and correction of defects are performed.
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公开(公告)号：JP2001250480A
公开(公告)日：2001-09-14
申请号：JP2000060680
申请日：2000-03-06
Applicant: TORAY INDUSTRIES
Inventor： SASAMOTO HIROKATA , KIMURA KATSUMI , KURAMATA OSAMU
Abstract: PROBLEM TO BE SOLVED: To provide an inspection device and its method for the fluor formed on a rear plate of a plasma display panel minimizing excessive inspections and/or overlooked inspections and being able to properly specify the cause of a defect. SOLUTION: The inspection device for the rear plate of a plasma display panel is intended to inspect the RGB (red/green/blue) fluors formed on the rear plate of a plasma display panel and comprises photographing means for review equipped with ultraviolet ray radiation means and those for automatic inspection. The inspection method for the rear part of the plasma display panel specifies that the defect detected by the photographing means for automatic inspection using the above inspection apparatus is visually decided as to whether it is good or bad using the photographing means for review.
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公开(公告)号：JP2000304651A
公开(公告)日：2000-11-02
申请号：JP11782999
申请日：1999-04-26
Applicant: TORAY INDUSTRIES
Inventor： SASAMOTO HIROKATA , KIMURA KATSUMI , HIRATA HAJIME , TAKEDA SHUZO , TSUDA TAKAHARU
Abstract: PROBLEM TO BE SOLVED: To reduce the generation of ozone by detecting the emission of a fluorescent substance for every coating position with a photo detector that is arranged one- dimensionally and comparing an image signal to be outputted with a specific reference value. SOLUTION: When a carrying device 3 carries a rear-surface plate 1 to an image pickup position, it gives a rear-surface plate approach signal to a control device 10. The control device 10 gives an image read start signal to an image-processing device 8, and the image-processing device 8 starts reading an image signal that is outputted from an image pickup device 6. An RGB signal amplification device 9 amplifies each RGB signal with a magnification being determined for each type for an image signal being inputted from the image pickup device 6 and outputs the signal to be image- processing device 8. The image-processing device 8 stores an image signal and detects a defect that is generated in the rear-surface plate 1 by image processing, thus installing an ultraviolet ray application means close to the rear-surface plate, reducing the intensity of ultraviolet rays, and maintaining a specific inspection performance. Also, the need for an ozone treatment facility is eliminated to reduce the cost.
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公开(公告)号：JP2001099623A
公开(公告)日：2001-04-13
申请号：JP27430799
申请日：1999-09-28
Applicant: TORAY INDUSTRIES
Inventor： SASAMOTO HIROKATA , NAKAI YASUHIRO , KURAYAMA KYOICHI
Abstract: PROBLEM TO BE SOLVED: To precisely inspect the length and position of a projection body set on a substrate in a short time. SOLUTION: To inspect a projection body set on a substrate, an image pickup means picks up at least one piece of image data including the projection body on the substrate, at least one segment crossing the projection body in the image data is set, and it is judged from an outline that the segment crosses whether or not the projection body is good.
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公开(公告)号：JPH10222675A
公开(公告)日：1998-08-21
申请号：JP3301397
申请日：1997-01-31
Applicant: TORAY INDUSTRIES
Inventor： SASAMOTO HIROKATA , NAKAI YASUHIRO
Abstract: PROBLEM TO BE SOLVED: To attain inspection without any erroneous detection and miss in a measurement range by operating an extrapolating processing so that the value of data to be extrapolated can have a specific relation with the values of two measurement data at specific positions. SOLUTION: A data processor calculates measurement data (edge data) at an edge part in the shortest distance from data to be extrapolated. Then, measurement data (symmetrical data) at a position which is point symmetrical to the extrapolation data with the edge data as a center are calculated. Then, the value of the extrapolation data which is point symmetrical to the value of the symmetrical data with the value of the edge data as a center is calculated by an expression: extrapolation data = 2 × edge part data - symmetrical data. The symmetrical data of the calculated extrapolation data and luminance data are stored in an output storage part. When the extrapolation data and the luminance data are obtained, stripes are emphasized by using a 9×9 convolution filter by a filter processing part 33. The emphasis of the stripes is obtained by calculating the stripe intensity of each picture element from the luminance data and the filter.
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Patent Agency Ranking
公开(公告)号：JP2001250108A
公开(公告)日：2001-09-14
申请号：JP2000060681
申请日：2000-03-06
Applicant: TORAY INDUSTRIES
Inventor： KIMURA KATSUMI , SASAMOTO HIROKATA , KURAMATA OSAMU
IPC: G01M11/00 , G06T1/00 , G09F9/00 , H01J9/42 , H01J11/12 , H01J11/22 , H01J11/24 , H01J11/26 , H01J11/34 , H01J11/42 , H01J11/02
Abstract: PROBLEM TO BE SOLVED: To provide an inspecting device and a manufacturing method for a plasma display panel rear plate which can perform image processing by selecting and switching some of plural video signals, reduce the number of expensive image processors and the memory capacity in the image processors, lower the device cost, facilitate replacing operation in maintenance by decreasing the wiring quantity of a movable part, and perform inspection with high precision. SOLUTION: This is a device which inspects a fluorescent body on the plasma display panel rear plate and has an ultraviolet-ray irradiating means which irradiates the fluorescent body with ultraviolet rays, one or more color image pickup means which have photodetecting elements linearly arrayed, a video signal switching means which selects a specific video signal out of video signals outputted from the image pickup means, and a processing means which calculates the video signal outputted from the video signal switching means by the pixels; and the processing means compares the video signal with a specific reference value and inspects the plasma display panel rear plate according to the difference from the reference value.
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7.发明专利
公开(公告)号：JP2001216900A
公开(公告)日：2001-08-10
申请号：JP2000026274
申请日：2000-02-03
Applicant: TORAY INDUSTRIES
Inventor： SASAMOTO HIROKATA , KIMURA KATSUMI , KURAMATA OSAMU
IPC: H01J9/42 , G09F9/00 , H01J9/227 , H01J11/12 , H01J11/22 , H01J11/24 , H01J11/26 , H01J11/34 , H01J11/02
Abstract: PROBLEM TO BE SOLVED: To provide a device and a method of inspecting a plasma display panel back plate, and method of manufacturing the same capable of inhibiting the impairing of the accuracy on examination by the temperature rise of an ultraviolet-ray irradiating means, and reducing the inspection cost. SOLUTION: The device and method for inspecting the mounting condition of a RGB phosphor formed on a plasma display panel back plate, and the manufacturing method using the device, comprises an ultraviolet-ray irradiating means for irradiating the ultraviolet rays to a predetermined coating position of the RGB phosphor, an ultraviolet ray intensity measuring means for measuring the intensity of the ultraviolet rays irradiated by the ultraviolet ray irradiating means, and an image pick-up means for detecting the light generation from the coating position of the RGB phosphor and outputting an image pick-up signal, and further comprises a means for correcting the image pick-up signal, obtained from the image pick-up means on the basis of a result of the measurement of the intensity of the ultraviolet rays by the ultraviolet ray intensity measuring means.
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公开(公告)号：JP2000337998A
公开(公告)日：2000-12-08
申请号：JP15338099
申请日：1999-06-01
Applicant: TORAY INDUSTRIES
Inventor： KIMURA KATSUMI , SASAMOTO HIROKATA , HIRATA HAJIME , TAKEDA SHUZO , TSUDA TAKAHARU
IPC: H01J9/42 , G01M11/00 , G09F9/00 , G09F9/313 , H01J9/227 , H01J9/50 , H01J11/12 , H01J11/22 , H01J11/24 , H01J11/26 , H01J11/34 , H01J11/42 , H04N17/04 , H01J11/02
Abstract: PROBLEM TO BE SOLVED: To provide an inspection apparatus for a phosphor formed on the back plate of a plasma display panel in which even a micro defect, e.g. a point defect, of a phosphor can be detected with high accuracy and highly reliable inspection can be ensured by processing detected information optimally, and a method for manufacturing the back plate of a plasma display panel employing the inspection apparatus. SOLUTION: An apparatus for inspecting the coating state of an RGB phosphor on the back plate of a plasma display panel comprises means 5 for irradiating a specified coating position of an RGB phosphor with UV-rays, an image pickup means 6 including light receiving elements arranged one-dimensionally while having a pixel resolution finer than the RGB arranging interval of a plurality of phosphor layers arranged in parallel on the back plate of a plasma display panel and producing an image signal by detecting emission of light from each specified coating position of an RGB phosphor, and a processing means 8 for determining the coating state of RGB phosphor by operating the image signal from the image pickup means 6 for each pixel and comparing it with a specified reference value.
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公开(公告)号：JP2001241926A
公开(公告)日：2001-09-07
申请号：JP2000056638
申请日：2000-03-02
Applicant: TORAY INDUSTRIES
Inventor： NAKAMURA TETSUYA , SASAMOTO HIROKATA
IPC: G01B11/24
Abstract: PROBLEM TO BE SOLVED: To provide a method and an apparatus for inspecting a body which is hardly influenced by an allowed outside appearance variation of even a body not allowing any outward appearance variation of specified forms such as flaws, etc., though some shape variation is allowed. SOLUTION: A body is to imaged to obtain its image, an approximate figure of the contour of the image is formed, this image is compared with the image of the approximate figure to extract a difference figure of both, and the body is inspected, based on the feature quantity of the obtained difference figure.
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公开(公告)号：JP2001141603A
公开(公告)日：2001-05-25
申请号：JP32389699
申请日：1999-11-15
Applicant: TORAY INDUSTRIES
Inventor： TAKADA HIDENOBU , SASAMOTO HIROKATA , KITAGAWA TAKAO
IPC: G06M11/00 , G01M11/00 , G01N23/225 , G01Q30/04 , G01Q60/24 , G02B5/20 , G02F1/1335 , G01N13/16
Abstract: PROBLEM TO BE SOLVED: To provide a color filter generating no unevenness in the display of an LCD and a method for inspecting particles, causing unevenness of display, quantitatively at the non-display part of the filter. SOLUTION: A color filter comprises a coloring layer patterned on a substrate by photolithography wherein the number of particles at the non-display part is 160/100 μm2 or less. The method for inspecting a color filter comprises a step for providing means for dividing the non-display part into some ranges and measuring the physical quantity of each range, a step for providing means for processing the measurement data to calculate the feature quantity of particles, a step for quantizing the particles at the non-display part of the color filter from the feature quantity of particles and making a decision whether the color filter is acceptable or not.
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