公开(公告)号：JP2001099623A

公开(公告)日：2001-04-13

申请号：JP27430799

申请日：1999-09-28

Applicant: TORAY INDUSTRIES

Inventor： SASAMOTO HIROKATA ,  NAKAI YASUHIRO ,  KURAYAMA KYOICHI

IPC: B05C5/02 ,  G01B11/24

Abstract: PROBLEM TO BE SOLVED: To precisely inspect the length and position of a projection body set on a substrate in a short time. SOLUTION: To inspect a projection body set on a substrate, an image pickup means picks up at least one piece of image data including the projection body on the substrate, at least one segment crossing the projection body in the image data is set, and it is judged from an outline that the segment crosses whether or not the projection body is good.

公开(公告)号：JP2002098823A

公开(公告)日：2002-04-05

申请号：JP2000289642

申请日：2000-09-22

Applicant: TORAY INDUSTRIES

Inventor： KOBAYASHI KENICHI ,  KAKINUKI TAKEHIRO ,  KURAYAMA KYOICHI

IPC: G02B5/20

Abstract: PROBLEM TO BE SOLVED: To provide a method for measuring misalignment in the exposure position during manufacturing a color filter by which misalignment of the exposure position during manufacturing a color filter can be easily, simply and accurately inspected in the line in the manufacture process. SOLUTION: In the method for manufacturing a color filter including steps of forming a light-shielding layer, red color pixels, green color pixels and blue color pixels on a transparent substrate by selective exposure, a dummy light-shielding layer is also exposed and formed in the outside of the color filter forming region at time when the light-shielding layer is exposed and formed. When red, green and blue color pixels are exposed and formed, dummy pixels of each color are formed in the outside of the color filter forming region during the color pixels of red, green and blue colors are exposed and formed in such a manner that each dummy pixel does not contact the above dummy light-shielding layer. In the method for measuring misalignment of the exposure position during manufacturing a color filter, the relative position between the dummy light-shielding layer and the dummy pixels is measured by using transmitted light to measure the misalignment between the light-shielding layer and each color pixels.

公开(公告)号：JP2002257749A

公开(公告)日：2002-09-11

申请号：JP2001051969

申请日：2001-02-27

Applicant: TORAY INDUSTRIES

Inventor： KAWASHITA MAMORU ,  KURAYAMA KYOICHI ,  TANAKA SHIRO

IPC: G01N21/958 ,  G01M11/00 ,  G02B5/20 ,  G02F1/13 ,  G02F1/1335

Abstract: PROBLEM TO BE SOLVED: To precisely discriminate a defect to be detected from a defect not required to be detected, so as to provide an inspection device of high precision, and to provide an inspection method and a color filter manufacturing method using the inspection device. SOLUTION: This inspection device for inspecting an appearance of a product has a function for discriminating the defect for which a detection signal is to be detected from the defect for which the detection siganl is not rerquired to be detected.