公开(公告)号：DE60118678D1

公开(公告)日：2006-05-24

申请号：DE60118678

申请日：2001-09-07

Applicant: XEROX CORP

Inventor： ROSA MICHEL A ,  PEETERS ERIC

IPC: G02B26/02 ,  G02B26/08 ,  B81B3/00 ,  G02B6/35

Abstract: Optical cross-connect systems (100) involve the general concept of a two dimensional array (104) of microelectromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array (104) can rotate about its x and y axis and is suspended by a plurality of suspension arms (450) attached to a silicon substrate.

公开(公告)号：DE60117216D1

公开(公告)日：2006-04-20

申请号：DE60117216

申请日：2001-12-04

Applicant: XEROX CORP

Inventor： SUN DECAI ,  ROSA MICHEL A ,  YEH CHINGWEN

IPC: G02B26/08 ,  B81B3/00 ,  G02B26/10 ,  G06K7/10

Abstract: A micro-optical-electrical-mechanical laser scanner is configured from a silicon-on-insulator substrate having a silicon substrate layer, a buried oxide layer, and a single crystal silicon device layer. A first device layer portion having a micro-mirror (34) fabricated therefrom. A laser (36) is connected to a second device layer portion, and a hinge (24) connects the first device layer portion and the second device layer portion. The hinge is formed with a bimorph material, wherein the bimorph material creates built-in stresses in the hinge. The bimorph hinge moves the released micro-mirror out of the horizontal plane to a position for either directly or indirectly reflecting laser light emitted from the laser.

公开(公告)号：JP2002162580A

公开(公告)日：2002-06-07

申请号：JP2001286785

申请日：2001-09-20

Applicant: XEROX CORP

Inventor： PEETERS ERIC ,  ROSA MICHEL A ,  FORK DAVID K

IPC: G02B26/08 ,  B81B3/00 ,  G02B6/35

Abstract: PROBLEM TO BE SOLVED: To obtain an optical switch, using a reflection MEMS mirror. SOLUTION: An optical cross connect system involves the general concept of a two-dimensional array of MEMS tilt mirrors, used to direct light, coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two-dimensional array can tilt about two non-colinear axes and is suspended by plural suspension arms attached to a glass substrate.

公开(公告)号：JP2002156592A

公开(公告)日：2002-05-31

申请号：JP2001286561

申请日：2001-09-20

Applicant: XEROX CORP

Inventor： ROSA MICHEL A ,  PEETERS ERIC

IPC: G02B26/08 ,  B81B3/00 ,  G02B6/35

Abstract: PROBLEM TO BE SOLVED: To provide an optical switch using reflection MEMS mirrors. SOLUTION: An optical crossconnection system directs the incident light from a first optical fiber toward a second optical fiber by using a two-dimensional array of the MEMS tilting mirrors as a general concept. The respective MEMS tilting mirrors of the two-dimensional array rotate around an (x) axis and a (y) axis and are hung by plural suspension arms mounted to a silicon substrate.

公开(公告)号：JP2002162577A

公开(公告)日：2002-06-07

申请号：JP2001286445

申请日：2001-09-20

Applicant: XEROX CORP

Inventor： PEETERS ERIC ,  ROSA MICHEL A ,  FORK DAVID K

IPC: B81B3/00 ,  B81B7/00 ,  G02B6/35 ,  G02B26/08

Abstract: PROBLEM TO BE SOLVED: To obtain an optical switch, using a reflection MEMS(micro- electromechanical system) mirror. SOLUTION: Optical cross-connect involve the general concept of a two-dimensional array of MEMS tilt mirrors, used to direct light coming from a first optical fiber, to a second optical fiber. Each MEMS tilt mirror in the two-dimensional array can rotate about its x-axis and y-axis and is suspended by plural suspension arms attached to a substrate.

公开(公告)号：JP2002162575A

公开(公告)日：2002-06-07

申请号：JP2001297585

申请日：2001-09-27

Applicant: XEROX CORP

Inventor： STREET ROBERT A ,  PEETERS ERIC ,  ROSA MICHEL A ,  LU JENG PING ,  CHUA CHRISTOPHER L

IPC: G02B26/08 ,  G02B6/35 ,  H04Q11/00

Abstract: PROBLEM TO BE SOLVED: To provide an improved system for aligning optical components. SOLUTION: Optical cross switches, having the improved system for aligning the optical parts, are mounted. This system 106 utilizes highly transmittable sensors 170 and 172, arranged in the optical paths of light signals and determines the exact positions of the light signals 120. A feedback loop re-regulates the optical parts, by using the outputs from the highly transmittable sensors 170 and 172 and holds the light signals 120 at desired positions. This system 106 is particularly suitable for use in optical cross switches.

公开(公告)号：JP2003188460A

公开(公告)日：2003-07-04

申请号：JP2002321951

申请日：2002-11-06

Applicant: XEROX CORP

Inventor： SUN DECAI ,  ROSA MICHEL A

IPC: G02B3/00 ,  H01S5/00 ,  H01S5/022 ,  H01S5/026 ,  H01S5/183 ,  H01S5/40 ,  H01S5/42

Abstract: PROBLEM TO BE SOLVED: To integrate a refractive microlens on the surface of a VCSEL array. SOLUTION: A laser scanner having an extremely compact size and not including movable parts includes a vertical cavity surface-emitting laser (VCSEL) 310. A microlens 330 is directly fitted to the light emitting surface of the VCSEL 310 by flip chip joint. A VCSEL array 305 may be an one-dimensional or two-dimensional array. The laser array can be used for various purposes including free space optical communication. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2002250886A

公开(公告)日：2002-09-06

申请号：JP2001369543

申请日：2001-12-04

Applicant: XEROX CORP

Inventor： SUN DECAI ,  ROSA MICHEL A ,  YEH CHINGWEN

IPC: B81B3/00 ,  G02B26/08 ,  G02B26/10 ,  G06K7/10

Abstract: PROBLEM TO BE SOLVED: To provide a scanner system which is inexpensively manufactured, mechanically sturdy, compact, and has an improved resolution. SOLUTION: The micro-opto-electro-mechanical laser scanner 40 is composed of a silicone substrate layer, a laser of embedded oxide layer, and an insulating body silicone substrate having a single silicon device layer. A first device layer part has a micro mirror 34 which is made of the device layer. A laser unit is connected with a second device layer part and a hinge 24 connects the first device layer part and the second device layer part. The hinge 24 is formed by a bimorph material and the bimorph material creates a specific stress in the hinge 24. The bimorph type hinge 24 moves the released micro mirror 34 from a horizontal plane to a position in which a laser beam 42 emitted from the laser unit is directly or indirectly reflected.

公开(公告)号：JP2002162582A

公开(公告)日：2002-06-07

申请号：JP2001286787

申请日：2001-09-20

Applicant: XEROX CORP

Inventor： ROSA MICHEL A ,  PEETERS ERIC ,  FORK DAVID K

IPC: B81B3/00 ,  B81C1/00 ,  G02B6/35 ,  G02B26/08

Abstract: PROBLEM TO BE SOLVED: To obtain an optical switch, using a reflection MEMS mirror. SOLUTION: An optical cross connector system involves the general concept of a two-dimensional array of MEMS tilt mirrors, used to direct light, coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two-dimensional array can tilt about two non-colinear axes and is suspended by plural suspension arms attached to a substrate.

公开(公告)号：JP2002162578A

公开(公告)日：2002-06-07

申请号：JP2001286488

申请日：2001-09-20

Applicant: XEROX CORP

Inventor： ROSA MICHEL A ,  PEETERS ERIC ,  FORK DAVID K

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/08

Abstract: PROBLEM TO BE SOLVED: To obtain an optical switch, using a reflection MEMS mirror. SOLUTION: Optical cross-connection involves the general concept of a two-dimensional array of MEMS tilt mirrors, used to direct light coming from a first optical fiber, to a second optical fiber. Each MEMS tilt mirrors in the two-dimensional array can rotate about its x-axis and y-axis and is suspended by plural suspension arms attached to a glass substrate.