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公开(公告)号：US20170363822A1
公开(公告)日：2017-12-21
申请号：US15607133
申请日：2017-05-26
Applicant: Kaiam Corp.
Inventor： Bardia Pezeshki , Michael Sherback , Dinh Ton
CPC classification number: G02B6/4219 , B81B3/0045 , B81B2201/04 , B81B2201/047 , B81B2203/0118 , G02B6/3656 , G02B6/366 , G02B6/4204 , G02B6/4244 , G02B6/4266 , G02B7/003 , G02B7/004 , G02B26/0808 , G02B26/0875
Abstract: A MEMS based alignment technology based on mounting an optical component on a released micromechanical lever configuration that uses multiple flexures rather than a single spring. The optical component may be a lens. The use of multiple flexures may reduce coupling between lens rotation and lens translation, and reduce effects of lever handle warping on lens position. The device can be optimized for various geometries.
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公开(公告)号：US20170192221A1
公开(公告)日：2017-07-06
申请号：US15243587
申请日：2016-08-22
Applicant: Sasikanth Manipatruni , Michal Lipson , Jacob T. Robinson
Inventor： Sasikanth Manipatruni , Michal Lipson , Jacob T. Robinson
CPC classification number: G02B26/001 , A61F9/022 , A61F9/023 , B81B3/0083 , B81B2201/04 , B81B2201/047 , B81B2203/0118 , B81B2203/0315 , B81C1/0015 , B81C2201/013 , G02B1/005 , G02B6/4209 , G02C7/104 , G02C7/107 , H01S3/005 , H01S3/0064
Abstract: There is set forth herein an optomechanical device which can comprise a first mirror and a second mirror forming with the first mirror a cavity. In one aspect the first mirror can be a movable mirror. The optomechanical device can be adapted so that the first mirror is moveable responsively to radiation force.
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23.发明申请公开(公告)号：US20120195551A1
公开(公告)日：2012-08-02
申请号：US13113994
申请日：2011-05-23
Applicant: Bardia Pezeshki , Michael Sherback , Dinh Ton
Inventor： Bardia Pezeshki , Michael Sherback , Dinh Ton
CPC classification number: G02B6/4219 , B81B3/0045 , B81B2201/04 , B81B2201/047 , B81B2203/0118 , G02B6/3656 , G02B6/366 , G02B6/4204 , G02B6/4244 , G02B6/4266 , G02B7/003 , G02B7/004 , G02B26/0808 , G02B26/0875
Abstract: A MEMS based alignment technology based on mounting an optical component on a released micromechanical lever configuration that uses multiple flexures rather than a single spring. The optical component may be a lens. The use of multiple flexures may reduce coupling between lens rotation and lens translation, and reduce effects of lever handle warping on lens position. The device can be optimized for various geometries.
Abstract translation: 基于MEMS的对准技术，其基于将光学部件安装在使用多个挠曲而不是单个弹簧的释放的微机械杆配置上。 光学部件可以是透镜。 使用多个弯曲可能会减少透镜旋转和透镜平移之间的耦合，并减少杠杆手柄翘曲对透镜位置的影响。 该设备可以针对各种几何形状进行优化。
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24.发明申请PHOTONIC INTEGRATED CIRCUIT (PIC), PRESSURE SENSING SYSTEM COMPRISING SUCH A PIC AND METHOD FOR PRESSURE SENSING USING SUCH A PRESSURE SENSING SYSTEM 审中-公开光电集成电路（PIC），包括这种PIC的压力传感系统以及使用这种压力传感系统进行压力传感的方法
公开(公告)号：WO2017069620A1
公开(公告)日：2017-04-27
申请号：PCT/NL2016/050718
申请日：2016-10-19
Applicant: TECHNATON B.V.
Inventor： GELUK, Joost Cornelis
CPC classification number: G01L11/02 , B81B2201/04 , G01B11/161 , G01D3/0365 , G01L1/24
Abstract: The invention relates to a photonic integrated circuit (PIC) for use in a pressure sensing system comprising an integrated photonic component (IPC), configured to be exposed to an external pressure and to generate a wavelength response based on deformation, wherein the wavelength response comprises a pressure-induced wavelength response and a temperature-induced wavelength response. The pressure sensing system further comprises an incoming waveguide for coupling a light source to an optical input of the IPC and an outgoing waveguide for coupling an optical output of the IPC to analysis means. The pressure sensing system further comprises temperature correction means, wherein the temperature correction means provide information relating to the temperature-induced wavelength response. The present invention further relates to a pressure sensing system comprising a PICas described above. The present invention further relates to a method for pressure sensing using a pressure sensing system as described above.
Abstract translation: 本发明涉及一种用于压力传感系统中的光子集成电路（PIC），其包括集成光子器件（IPC），该集成光子器件被配置为暴露于外部压力并产生基于波长响应 其中所述波长响应包括压力引起的波长响应和温度引起的波长响应。 压力感测系统还包括用于将光源耦合到IPC的光输入端的输入波导管和用于将IPC的光输出端耦合到分析装置的输出波导管。 压力传感系统还包括温度校正装置，其中温度校正装置提供与温度引起的波长响应有关的信息。 本发明还涉及一种包括上述PICas的压力传感系统。 本发明还涉及一种使用如上所述的压力感测系统进行压力感测的方法。
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公开(公告)号：WO2010096706A2
公开(公告)日：2010-08-26
申请号：PCT/US2010/024806
申请日：2010-02-19
Applicant: CORNELL UNIVERSITY , MANIPATRUNI, Sasikanth , LIPSON, Michal
Inventor： MANIPATRUNI, Sasikanth , LIPSON, Michal
IPC: H01S3/08
CPC classification number: G02B26/001 , A61F9/022 , A61F9/023 , B81B3/0083 , B81B2201/04 , B81B2201/047 , B81B2203/0118 , B81B2203/0315 , B81C1/0015 , B81C2201/013 , G02B1/005 , G02B6/4209 , G02C7/104 , G02C7/107 , H01S3/005 , H01S3/0064
Abstract: There is set forth herein an optomechanical device which can comprise a first mirror and a second mirror forming with the first mirror a cavity. In one aspect the first mirror can be a movable mirror. The optomechanical device can be adapted so that the first mirror is moveable responsively to radiation force.
Abstract translation: 这里阐述了一种光学机械装置，其可以包括第一反射镜和与第一反射镜一起形成空腔的第二反射镜。 在一个方面中，第一镜子可以是可移动的镜子。 可以调整光机械装置，使得第一反射镜可响应辐射力而移动。
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Patent Agency Ranking
26.发明公开公开(公告)号：US20230399224A1
公开(公告)日：2023-12-14
申请号：US18238021
申请日：2023-08-25
Applicant: Mirrorcle Technologies, Inc.
Inventor： Stefan Richter , Johannes Kindt , Veljko Milanovic
CPC classification number: B81B3/0078 , H02N1/008 , B81B2201/04 , B81B2203/0154 , B81B2203/058
Abstract: MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. A sensor coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.
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公开(公告)号：US11789255B2
公开(公告)日：2023-10-17
申请号：US17833950
申请日：2022-06-07
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki Suzuki , Shinya Iwashina , Yuki Morinaga
CPC classification number: G02B26/085 , B81B3/0051 , B81C3/00 , G02B7/198 , G02B26/101 , B81B2201/04
Abstract: An optical module includes a mirror unit having a movable mirror portion, a magnet portion configured to generate a magnetic field acting on the movable mirror portion, and a package accommodating the magnet portion. The magnet portion has a Halbach structure including a first magnet applied with a force in a first direction, and a second magnet applied with a force in a second direction. The package has a bottom walls portion, a side wall portion, and a restriction portion configured to restrict movement of the second magnet in the second direction. The movable mirror portion is disposed in a space formed by the restriction portion.
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公开(公告)号：US11733509B2
公开(公告)日：2023-08-22
申请号：US16625695
申请日：2018-07-06
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Tatsuya Sugimoto , Tomofumi Suzuki , Kyosuke Kotani
CPC classification number: G02B26/0841 , B81B2201/04 , B81B2203/0118 , B81B2203/0136 , B81B2203/0154
Abstract: An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.
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公开(公告)号：US20170276931A1
公开(公告)日：2017-09-28
申请号：US15622111
申请日：2017-06-14
Applicant: APPLE INC.
Inventor： Yuval Gerson , Naftali Chayat , Noel Axelrod , Alexander Shpunt
CPC classification number: G02B26/101 , B81B2201/04 , B81C1/0015 , B81C2201/013 , G01S7/4817 , G01S17/10 , G01S17/42 , G01S17/89 , G02B26/085
Abstract: A scanning device includes a substrate, which is etched to define an array of two or more parallel rotating members and a gimbal surrounding the rotating members. First hinges connect the gimbal to the substrate and defining a first axis of rotation, about which the gimbal rotates relative to the substrate. Second hinges connect the rotating members to the support and defining respective second, mutually-parallel axes of rotation of the rotating members relative to the support, which are not parallel to the first axis.
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30.发明申请公开(公告)号：US20160320180A1
公开(公告)日：2016-11-03
申请号：US14721914
申请日：2015-05-26
Applicant: Honeywell International Inc.
Inventor： Grant H. Lodden , Robert D. Horning
CPC classification number: G01B11/272 , B81B2201/0228 , B81B2201/04 , B81B2203/053 , G01C19/5621 , G01C19/5656 , G01C25/00 , G01P15/093 , G01P15/13 , G01P21/00 , G01P2015/0822 , G02B6/12 , G02B6/4295 , G02B6/43 , G02B2006/12138
Abstract: System and methods for highly integrated optical readout MEMS sensors are provided. In one embodiment, a method for an integrated waveguide optical-pickoff sensor comprises: launching a laser beam generated by a laser light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting an amount of coupling of the laser beam from the coupling port to a sensor component separated from the coupling port by a gap by measuring an attenuation of the laser beam at the optical output port.
Abstract translation: 提供了高集成度光读出MEMS传感器的系统和方法。 在一个实施例中，一种用于集成波导光学传感器传感器的方法包括：将由激光光源产生的激光束发射到在第一衬底内单片制造的集成波导光学传感器中，所述集成波导光学传感器包括光输入 端口，耦合端口和光输出端口; 以及通过测量光输出端口处的激光束的衰减来检测激光束从耦合端口到与耦合端口分离的传感器部件之间的间隙的耦合量。
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