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    PULSED RADIATION SOURCES FOR TRANSMISSION PYROMETRY
    21.
    发明申请
    PULSED RADIATION SOURCES FOR TRANSMISSION PYROMETRY 审中-公开

    公开(公告)号：WO2018217408A1

    公开(公告)日：2018-11-29

    申请号：PCT/US2018/030238

    申请日：2018-04-30

    Applicant: APPLIED MATERIALS, INC.

    Inventor： HOWELLS, Samuel C.

    IPC: H01L21/66 ,  H01L21/67 ,  G01J5/00 ,  H05B3/00

    CPC classification number: G01J5/20 ,  G01J5/0007 ,  G01J5/0821 ,  G01J5/0896 ,  G01J5/602 ,  G01J2005/607 ,  H01L21/67115 ,  H01L21/67248 ,  H01L33/0045 ,  H05B3/0047

    Abstract: Examples described herein generally relate to apparatus and methods for rapid thermal processing (RTP) of a substrate. The present disclosure discloses pulsed radiation sources, used to measure a broad range of low to high temperatures in the RTP chamber. In one example, two or more lasers, one of which emits pulses of radiation at 1,030 nm and one of which emits pulses of radiation at 1,080 nm, which measures temperatures below about 200°C, are used. In another example, two or more LEDs, one of which emits pulses of radiation at 1,030 nm and one of which emits pulses of radiation at 1,080 nm, are used, in yet another example, a broadband radiation source is used to emit pulses of radiation at least at 1,030 nm and 1,080 nm. These radiation sources are useful for detection of a broad range of low to high temperatures in the RTP chamber.

    TWO COLOR LINE SCANNING PYROMETER
    22.
    发明申请
    TWO COLOR LINE SCANNING PYROMETER 审中-公开
    两色彩扫描光栅

    公开(公告)号：WO1994016298A1

    公开(公告)日：1994-07-21

    申请号：PCT/US1994000620

    申请日：1994-01-13

    Applicant: IRCON, INC.

    Inventor： IRCON, INC. ,  GOLDBERG, Arthur, E. ,  KALLEY, Eugene, F.

    IPC: G01J05/60

    CPC classification number: G01J5/60 ,  G01J2005/607

    Abstract: A scanning radiation sensor provides a dual spectral infrared measurement scheme that is capable of providing contactless temperature measurements from a plurality of points along a scan line of a target surface area without knowing the emissivity of the target surface. The sensor is capable of correcting for changes in the emissivity of the target due to varying surface conditions. The dual spectral line scanning infrared sensor determines the radiation from each of a plurality of spots along a scan line on a target, and produces an average radiation from the plurality of spots, and converts the average radiation to a representation of temperature of the target.

    Abstract translation: 扫描辐射传感器提供双光谱红外测量方案，其能够在不知道目标表面的发射率的情况下，沿着目标表面区域的扫描线从多个点提供非接触式温度测量。 传感器能够根据不同的表面条件来校正目标辐射率的变化。 双光谱线扫描红外传感器确定沿着目标上的扫描线的多个点中的每一个点的辐射，并且产生来自多个斑点的平均辐射，并将平均辐射转换成目标温度的表示。

    Method and apparatus for monitoring the temperature and velocity of plasma sprayed particles
    25.
    发明授权
    Method and apparatus for monitoring the temperature and velocity of plasma sprayed particles 失效
    用于监测等离子喷涂颗粒的温度和速度的方法和装置

    公开(公告)号：US5180921A

    公开(公告)日：1993-01-19

    申请号：US793518

    申请日：1991-11-18

    Applicant: Christian Moreau ,  Mario Lamontagne ,  Paolo Cielo

    Inventor： Christian Moreau ,  Mario Lamontagne ,  Paolo Cielo

    IPC: G01J5/00 ,  G01J5/60 ,  G01P5/20

    CPC classification number: G01J5/0014 ,  G01J5/0018 ,  G01P5/20 ,  G01J2005/607

    Abstract: A method and an apparatus for monitoring simultaneously the temperature and the velocity of sprayed particles. The system is comprised of a sensor head attached to the spray gun, an optical fibre transmitting the collected radiation to detection apparatus, and a protective detection cabinet having the detection apparatus that incorporates two detectors. A two-slit or multiple-slit mask is located in the sensor head at the end of the optical fibre. For the temperature measurements, the particle emitted radiation collected by the sensor head is transmitted to two photodetectors, filtered by interference filters at two adjacent wavelengths. The particle temperature may be computed from the ratio of the detector outputs. To measure the velocity, the two-slit system collects radiation emitted by the in-flight particles travelling in the sensor field of view, which generates a double peak light pulse transmitted through the optical fibre. The time delay between these two peaks may be evaluated automatically and the particle velocity computed knowing the distance between the two slit images.

    Abstract translation: 一种用于同时监测喷雾颗粒的温度和速度的方法和装置。 该系统包括附接到喷枪的传感器头，将收集的辐射传输到检测装置的光纤，以及具有包含两个检测器的检测装置的保护检测柜。 在光纤端部的传感头中设有双缝或多缝口罩。 对于温度测量，由传感器头收集的颗粒发射的辐射被传输到两个光电检测器，由两个相邻波长的干涉滤波器滤波。 颗粒温度可以根据检测器输出的比率计算。 为了测量速度，双缝系统收集在传感器视场中行进的飞行中颗粒发射的辐射，其产生通过光纤传输的双峰光脉冲。 可以自动评估这两个峰值之间的时间延迟，并且知道两个狭缝图像之间的距离计算出的粒子速度。

    Pyrometer apparatus and method
    26.
    发明授权
    Pyrometer apparatus and method 失效
    高温计装置及方法

    公开(公告)号：US5061084A

    公开(公告)日：1991-10-29

    申请号：US652459

    申请日：1991-02-07

    Applicant: Thomas E. Thompson ,  Eugene R. Westerberg

    Inventor： Thomas E. Thompson ,  Eugene R. Westerberg

    IPC: G01J5/00 ,  G01J5/12 ,  G01J5/60

    CPC classification number: G01J5/0003 ,  G01J5/0007 ,  G01J5/602 ,  G01J2005/607 ,  G01J5/12

    Abstract: Dual pyrometric detectors and method measure the temperature of a remote heated object in the presence of ambient radiation. One detector measures emitted radiation from both the remote object and from the environment, and the other direction measures radiation predominantly from the environment alone. The output signals from the two detectors are processed electronically to yield the detected radiation from the remote object alone. The result can then be electronically processed to display the pyrometrically-measured temperature of the remote object.

    Abstract translation: 双高温测量仪和方法测量在有环境辐射的情况下远程加热物体的温度。 一个检测器测量来自远程物体和环境的发射辐射，另一个方向主要测量来自环境的辐射。 来自两个检测器的输出信号被电子地处理以产生仅来自远程物体的检测到的辐射。 然后可以电子地处理结果以显示远程物体的高温测量温度。

    High resolution color band pyrometer ratioing
    27.
    发明授权
    High resolution color band pyrometer ratioing 失效
    高分辨率高分辨率色差比例

    公开(公告)号：US4815841A

    公开(公告)日：1989-03-28

    申请号：US80980

    申请日：1987-08-03

    Applicant: Donald B. Bickler ,  Paul K. Henry ,  D. Daniel LoGiurato

    Inventor： Donald B. Bickler ,  Paul K. Henry ,  D. Daniel LoGiurato

    IPC: G01J5/08 ,  G01J5/60 ,  G01J5/32

    CPC classification number: G01J5/08 ,  G01J5/0821 ,  G01J5/60 ,  G01J2005/607

    Abstract: The sensing head of a two-color band ratioing pyrometer of a known type using a fiber optic cable to couple radiation to dual detector photodiodes is improved to have high spatial resolution by focusing the radiation received through an objective lens (i.e., by focusing the image of a target area) onto an opaque sheet spaced in front of the input end of the fiber optic cable. A two-mil hole in that sheet then passes radiation to the input end of the cable. The detector has two channels, one for each color band, with an electronic-chopper stabilized current amplifier as the input stage followed by an electronic-chopper stabilized voltage amplifier.

    Abstract translation: 使用光纤电缆将辐射耦合到双检测器光电二极管的已知类型的双色带比例高温计的感测头被改进以通过聚焦通过物镜接收的辐射（即，通过聚焦图像来具有高空间分辨率 的目标区域）到在光纤电缆的输入端前方间隔开的不透明片材上。 然后，该片材中的2 mil孔将辐射传递到电缆的输入端。 检测器具有两个通道，每个色带一个，电子斩波稳定电流放大器作为输入级，后面是电子斩波稳定电压放大器。

    Optical fibre radiation pyrometer
    28.
    发明授权
    Optical fibre radiation pyrometer 失效
    光纤辐射高温计

    公开(公告)号：US4799787A

    公开(公告)日：1989-01-24

    申请号：US125267

    申请日：1987-11-25

    Applicant: Ronald A. Mason

    Inventor： Ronald A. Mason

    IPC: G01J5/00 ,  F02C7/00 ,  G01J5/08 ,  G01J5/10 ,  G01J5/60 ,  G01J5/04

    CPC classification number: G01J5/08 ,  G01J5/0821 ,  G01J5/10 ,  G01J2005/607

    Abstract: An optical pyrometer for a gas-trubine engine has a radiation receiving head located to view the blades of the engine and supply radiation from the blades to one end of a fibre-optic cable. At the other end of the cable there is mounted a detector comprising a cylindrical metal casing containing a photodiode and a signal conditioning circuit that amplifies the photodiode output. The output circuit is supplied to an electrical connector mounted on the casing. The detector can be mounted directly on the casing of a processing unit by mating its connector with an electrical connector fixed on the processing unit casing thereby avoiding the need for cables between the two casings. The connector on the detector has a flange that provides good thermal contact with the connector on the processing unit so as to help equalize the temperatures of the two casings. The processingunit casing is cooled by means of a thermal transfer unit supplied with liquid fuel. The processing unit has an electrical circuit that processes the output of the detector circuit and inputs from the sources to provide an output to an engine control unit.

    Abstract translation: 用于气体发动机的光学高温计具有辐射接收头，该辐射接收头定位成观察发动机的叶片并将来自叶片的辐射提供给光纤电缆的一端。 在电缆的另一端安装有检测器，其包括含有光电二极管的圆柱形金属外壳和放大光电二极管输出的信号调理电路。 输出电路被提供给安装在壳体上的电连接器。 检测器可以通过将其连接器与固定在处理单元壳体上的电连接器相配合而直接安装在处理单元的壳体上，从而避免了对两个壳体之间的电缆的需要。 检测器上的连接器具有法兰，其与加工单元上的连接器提供良好的热接触，以有助于均衡两个壳体的温度。 处理单元壳体通过提供有液体燃料的热转印单元来冷却。 处理单元具有处理检测器电路的输出和来自源的输入以向发动机控制单元提供输出的电路。

    Dual spectra optical pyrometer having a serial array of photodectectors
    29.
    发明授权
    Dual spectra optical pyrometer having a serial array of photodectectors 失效
    双光谱光学高温计具有串联的光电探测器阵列

    公开(公告)号：US4681434A

    公开(公告)日：1987-07-21

    申请号：US798213

    申请日：1985-11-14

    Applicant: Dean A. Kepple

    Inventor： Dean A. Kepple

    IPC: G01J5/02 ,  G01J1/16 ,  G01J5/10 ,  G01J5/28 ,  G01J5/60 ,  G01J5/18

    CPC classification number: G01J5/28 ,  G01J2001/1652 ,  G01J2005/604 ,  G01J2005/607

    Abstract: A novel dual spectra optical pyrometer is characterized by a serial array of photodetectors. The first photodetector absorbs a spectral portion of a target optical beam incident thereto, and passes the remainder optical beam to the second photodetector. Signals from both photodetectors are provided along with signals indicative of the first detector's spectral absorption and an estimate of the equivalent black body temperature of a fireball to a signal processor which provides a compensated temperature signal therefrom.

    Abstract translation: 一种新型的双光谱光学高温计的特征在于一系列光电检测器。 第一光电检测器吸收入射到其中的目标光束的光谱部分，并将剩余光束传递到第二光电检测器。 提供来自两个光电检测器的信号以及指示第一检测器的光谱吸收的信号以及将火球的等效黑体温度估计给信号处理器，信号处理器从其提供经补偿的温度信号。

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