公开(公告)号：EP1522846A1

公开(公告)日：2005-04-13

申请号：EP03730704.8

申请日：2003-05-30

Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventor： GOTOH, Yasuhiro ,  NISHIWAKI, Seiji ,  KOMMA, Yoshiaki

IPC: G01N21/95 ,  G11B7/26 ,  G11B7/004

CPC classification number: G11B7/00375 ,  G01N21/94 ,  G01N21/9506 ,  G01N2201/1045 ,  G11B19/04

Abstract: In an foreign body detection apparatus, an optical signal detection unit (1) irradiates a light spot onto a surface of an object to be inspected while scanning the surface by the light spot in a predetermined direction, and receives a reflected beam from the surface of the inspected object to generate a photodetection signal (HF) corresponding to the light intensity of the reflected beam. A foreign body detection unit (2a to 2h) generates a foreign body detection signal (C) appearing with respect to a leader and a trailer in the scanning direction of a foreign body adhering to the inspected object from the photodetection signal (HF). The foreign body detection signal is obtained for example as a difference signal between the photodetection signal (HF) and the delayed photodetection signal (HF) with a predetermined delay time. A foreign body discrimination unit (3) generates a foreign body discriminating signal (H) indicating a region in which the foreign body is present from the foreign body detection signal (C).

Abstract translation: 在异物检测装置，对光学信号的检测单元（1）照射的光点到物体的表面，同时由光点在预定的方向上扫描表面进行检查，并从表面接收反射光束 被检查的对象，以生成对应于所述反射光束的光强度的光检测信号（RF）。 甲异物检测单元（2a至2H）基因速率的异物检测信号（C）相对于一个领导者和在异物秉承从光检测信号（HF）被检查的物体的扫描方向的拖车显示。 异物检测信号获得用于实施例作为光检测信号（RF），并用一个预定的延迟时间延迟的光检测信号（RF）之间的差信号。 甲异物判别部（3）生成异物鉴别信号（H）指示其中的异物从异物检测信号（C）存在的区域。

公开(公告)号：EP0260522B1

公开(公告)日：1993-03-24

申请号：EP87112749.4

申请日：1987-09-01

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Miyoshi, Motosuke c/o Patent Division ,  Okumura, Katsuya c/o Patent Division ,  Ogawa, Shigeru c/o Patent Division

IPC: G02B21/00 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01N2201/1045

公开(公告)号：US08139840B1

公开(公告)日：2012-03-20

申请号：US12100500

申请日：2008-04-10

Applicant: Yunxian Chu ,  Alexander Slobodov

Inventor： Yunxian Chu ,  Alexander Slobodov

IPC: G06K9/00

CPC classification number: G01N21/8851 ,  G01N21/9501 ,  G01N2021/8825 ,  G01N2021/8864 ,  G01N2021/8896 ,  G01N2021/95676 ,  G01N2201/1045

Abstract: An inspection system and method for serial high-speed image data transfer is provided herein. According to one embodiment, the method may include receiving multiple channels of image data at an input data rate and buffering the image data at the input data rate until the buffered data reaches a predetermined size. Once the predetermined size has been reached, the method may include packing the buffered data, encoding the data packet, serializing the encoded data packet and converting the encoded data packet into an optical signal. In some cases, the image data may be packed along with a data header containing information about the system. Once converted, each optical signal (i.e., representing one data packet) may be transmitted serially over one or more fibre channels to a processing node of the inspection system. In most cases, the data is packed, encoded, serialized and transmitted to the processing node at a data rate much higher than the input data rate. The processing node analyzes the optical signal to detect defects on a specimen under inspection.

Abstract translation: 本文提供了一种用于串行高速图像数据传输的检查系统和方法。 根据一个实施例，该方法可以包括以输入数据速率接收多个通道的图像数据，并以输入数据速率缓冲图像数据，直到缓冲的数据达到预定的大小。 一旦达到预定尺寸，该方法可以包括打包缓冲数据，对数据包进行编码，串行编码数据包并将编码数据包转换成光信号。 在一些情况下，图像数据可以与包含关于系统的信息的数据标题一起打包。 一旦转换，每个光信号（即，表示一个数据分组）可以通过一个或多个光纤信道被串行发送到检查系统的处理节点。 在大多数情况下，数据被打包，编码，串行化并以比输入数据速率高得多的数据速率传送到处理节点。 处理节点分析光信号，检测被检样品上的缺陷。

公开(公告)号：US20100085561A1

公开(公告)日：2010-04-08

申请号：US12571791

申请日：2009-10-01

Applicant: Eiji KAMIYAMA ,  Takehiro TSUNEMORI ,  Kazuhiro YAMAMOTO ,  Kenji AOKI

Inventor： Eiji KAMIYAMA ,  Takehiro TSUNEMORI ,  Kazuhiro YAMAMOTO ,  Kenji AOKI

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2201/1045 ,  G01N2201/106

Abstract: A laser scattering defect inspection system includes: a stage unit that rotates a workpiece W and transports the workpiece W in one direction; a laser light source that emits a laser beam LB toward the workpiece W mounted on the stage unit; an optical deflector that scans the laser beam LB emitted from the laser light source on the workpiece W; an optical detector that detects the laser beam LB scattered from the surface of the workpiece W; a storage unit that stores defect inspection conditions for each inspection step of a manufacturing process of the workpiece W, where the conditions include the rotation speed and the moving speed of the workpiece W by the stage unit, the scan width on the workpiece W and the scan frequency by the optical deflector; and a control unit that reads the defect inspection conditions stored for each inspection step in the storage unit and controls the driving of the stage unit and the optical deflector under the conditions.

Abstract translation: 激光散射缺陷检查系统包括：台架单元，其使工件W旋转并沿一个方向输送工件W; 激光光源，其向安装在平台单元上的工件W发射激光束LB; 光学偏转器，其对从工件W上的激光光源发射的激光束LB进行扫描; 检测从工件W的表面散射的激光束LB的光检测器; 存储单元，其存储工件W的制造过程的每个检查步骤的缺陷检查条件，其中条件包括工件W的工件W的转速和移动速度，工件W上的扫描宽度和 扫描频率由光学偏转器; 以及控制单元，其读取存储单元中的每个检查步骤存储的缺陷检查条件，并且在条件下控制台单元和光偏转器的驱动。

公开(公告)号：US07088443B2

公开(公告)日：2006-08-08

申请号：US10360512

申请日：2003-02-06

Applicant: Mehdi Vaez-Iravani ,  Guoheng Zhao ,  Stanley E. Stokowski

Inventor： Mehdi Vaez-Iravani ,  Guoheng Zhao ,  Stanley E. Stokowski

IPC: G01N21/00

CPC classification number: G01N21/95623 ,  G01N21/47 ,  G01N21/94 ,  G01N2201/1045

Abstract: A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam. For inspecting surface with a pattern thereon, the light from the surface is first passed through a spatial filter before it is imaged onto the charge-coupled devices. The spatial filter includes stripes of scattering regions that shift in synchronism with relative motion between the beam and the surface to block Fourier components from the pattern. The spatial filter may be replaced by reflective strips that selectively reflects scattered radiation to the detector, where the reflective strips also shifts in synchronism with the relative motion.

Abstract translation: 使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。 光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。 为了在其上检查具有图案的表面，来自表面的光首先在其被成像到电荷耦合器件之前通过空间滤光器。 空间滤波器包括散射区域的条带，其与波束和表面之间的相对运动同步地移动，以阻止来自图案的傅立叶分量。 空间滤波器可以被选择性地将散射的辐射反射到检测器的反射条替代，其中反射条也与相对运动同步地移动。

公开(公告)号：US20060152716A1

公开(公告)日：2006-07-13

申请号：US11372556

申请日：2006-03-11

Applicant: Steven Meeks

Inventor： Steven Meeks

IPC: G01N21/88

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US20040169850A1

公开(公告)日：2004-09-02

申请号：US10754275

申请日：2004-01-08

Inventor： Steven W. Meeks

IPC: G01N021/88

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US20030210391A1

公开(公告)日：2003-11-13

申请号：US10223422

申请日：2002-08-20

Inventor： Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunji Maeda

IPC: G01N021/00

CPC classification number: G01N21/956 ,  G01N21/94 ,  G01N2021/9513 ,  G01N2201/10 ,  G01N2201/1045

Abstract: A pattern defect inspection apparatus capable of detecting defects without being affected by non-uniform thickness of a thin film formed on a sample even when using monochromatic light such as a laser. The apparatus comprises a laser to illuminate a sample, coherence suppression optics to reduce laser beam coherence, a condenser means to condense the laser beam onto a pupil plane of an objective lens, and a detector means to detect the light reflected from a circuit pattern formed on a sample. The condenser means is designed so that light intensity illuminating the sample under test can be partially adjusted according to the type of laser beam illumination condensed on the pupil of the objective lens. Variations in reflected light intensity caused by non-uniform film thickness on the surface of the sample are therefore reduced and shading minimized in the detected image to allow detecting fine defects.

Abstract translation: 即使在使用激光等单色光的情况下，也能够在不影响样品上形成的薄膜的不均匀的情况下检测缺陷的图案缺陷检查装置。 该装置包括用于照亮样品的激光器，用于减少激光束相干性的相干抑制光学器件，将激光束冷凝到物镜的光瞳平面上的聚光器装置，以及用于检测从形成的电路图案反射的光的检测器装置 在样品上 聚光装置被设计成使得照射被测试样品的光强度可以根据在物镜的光瞳上聚集的激光束照射的类型而被部分调节。 因此，由于样品表面的不均匀膜厚引起的反射光强度的变化在检测图像中减少并且阴影最小化，从而能够检测出细小的缺陷。

公开(公告)号：US5615777A

公开(公告)日：1997-04-01

申请号：US373158

申请日：1995-01-17

Applicant: Frank L. Weichman ,  Jelle van der Schoot ,  Daniel J. Kenway ,  Alan J. Hughes ,  Carl S. Flatman

Inventor： Frank L. Weichman ,  Jelle van der Schoot ,  Daniel J. Kenway ,  Alan J. Hughes ,  Carl S. Flatman

IPC: G01N21/952 ,  G01N33/08 ,  A01K43/04 ,  G01N21/00

CPC classification number: G01N33/085 ,  G01N21/951 ,  G01N2201/1045 ,  Y10S209/938

Abstract: A light beam such a laser beam is used to scan the surface of an egg for flaws such as pin holes, cracks, thinned shell regions, etc. The light beam is vibrated with a rocking/rotating movement to describe a closed curve such as a circle, ellipse or an ellipse so narrow that it is effectively a straight line. The utilization of such a light beam allows identification of types of flaws due to the character of the progression of light emanating from the egg. The invention includes apparatus for rotating the egg about its longitudinal axis in the path of the beam or beams. The apparatus also includes apparatus for forming the vibrating beam such as mirrors vibrated by out of phase electro-magnetic vibration or piezo electric actuators.

Abstract translation: 使用诸如激光束的光束来扫描鸡蛋表面，例如针孔，裂纹，变薄的壳区等。光束以摇摆/旋转运动振动以描述闭合曲线，例如 圆，椭圆或椭圆如此狭窄，使其实际上是一条直线。 这种光束的利用允许鉴定由于从蛋发出的光的进展的特征的缺陷的类型。 本发明包括用于在梁或梁的路径中围绕其纵轴旋转鸡蛋的装置。 该装置还包括用于形成振动束的装置，例如通过异相电磁振动或压电致动器振动的反射镜。

公开(公告)号：US4508450A

公开(公告)日：1985-04-02

申请号：US362621

申请日：1982-03-29

Applicant: Ken Ohshima ,  Masaharu Sakamoto

Inventor： Ken Ohshima ,  Masaharu Sakamoto

IPC: G01N21/88 ,  G01N21/95 ,  G11B7/0037

CPC classification number: G01N21/9506 ,  G11B7/00375 ,  G01N2021/8861 ,  G01N2021/8874 ,  G01N21/9501 ,  G01N2201/1045

Abstract: A checking system for checking defects on an optically flat surface of an object to be checked is adapted to spirally scan the surface of the object with a laser beam which is projected from an optical head. The laser beam is reflected from the surface of the object and converted by a photodetector to an electric signal. The level of the electric signal is compared with a reference level to produce a defect signal. The rotation of the object is detected by a position sensor. A counter counts a position signal in response to the defect signal and the contents of the counter is stored, as data representing a defect start position, in a defect position memory. The length data of the defect signal is counted and stored in a defect length memory. Predetermined defect position data is read out of a defect position memory, while defect length data corresponding to the defect position data is read out of the defect length memory. Position data associated with an area to be displayed is compared with defect position data. When both data coincide with each other, the corresponding defect length data is counted down. During the down count period, defect picture element data is stored in a refresh memory. The picture element data stored in the refresh memory is delivered to a CRT where it is displayed as defect data.

Abstract translation: 用于检查待检查物体的光学平坦表面上的缺陷的检查系统适于用从光学头投影的激光束螺旋地扫描物体的表面。 激光束从物体的表面反射并由光电检测器转换成电信号。 将电信号的电平与参考电平进行比较以产生缺陷信号。 物体的旋转由位置传感器检测。 计数器响应于缺陷信号对位置信号进行计数，并且将计数器的内容作为表示缺陷开始位置的数据存储在缺陷位置存储器中。 将缺陷信号的长度数据计数并存储在缺陷长度存储器中。 从缺陷位置存储器中读出预定缺陷位置数据，同时从缺陷位置数据读出与缺陷位置数据对应的缺陷长度数据。 与要显示的区域相关联的位置数据与缺陷位置数据进行比较。 当两个数据彼此一致时，相应的缺陷长度数据被倒计数。 在向下计数期间，将缺陷像素数据存储在刷新存储器中。 存储在刷新存储器中的图像元素数据被传送到CRT，其被显示为缺陷数据。