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公开(公告)号：US08247238B2
公开(公告)日：2012-08-21
申请号：US13217616
申请日：2011-08-25
Applicant: Carl D. Meinhart , Brian Piorek , Seung Joon Lee , Martin Moskovits , Sanjoy Banerjee , Juan Santiago
Inventor： Carl D. Meinhart , Brian Piorek , Seung Joon Lee , Martin Moskovits , Sanjoy Banerjee , Juan Santiago
IPC: G01N21/75
CPC classification number: G01N21/658 , G01N21/0332 , G01N21/05 , G01N33/0057 , G01N2021/0346 , G01N2201/06113 , G01N2201/1087 , Y10S977/902
Abstract: Provided are methods, devices and systems that utilize free-surface fluidics and SERS for analyte detection with high sensitivity and specificity. The molecules can be airborne agents, including but not limited to explosives, narcotics, hazardous chemicals, or other chemical species. The free-surface fluidic architecture is created using an open microchannel, and exhibits a large surface to volume ratio. The free-surface fluidic interface can filter interferent molecules, while concentrating airborne analyte molecules. The microchannel flow enables controlled aggregation of SERS-active probe particles in the flow, thereby enhancing the detector's sensitivity.
Abstract translation: 提供了利用自由表面流体学和SERS用于具有高灵敏度和特异性的分析物检测的方法，装置和系统。 分子可以是空气传播剂，包括但不限于爆炸物，麻醉剂，危险化学品或其他化学物质。 自由表面流体结构使用开放的微通道产生，并且表现出大的表面与体积比。 自由表面流体界面可以过滤干扰分子，同时浓缩空气中的分析物。 微通道流动使SERS活性探针颗粒在流动中受控聚集，从而提高检测器的灵敏度。
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22.发明授权Apparatus and method for the manipulation, processing and observation of small particles, in particular biological particles 失效用于操作，处理和观察小颗粒，特别是生物颗粒的装置和方法
公开(公告)号：US5689109A
公开(公告)日：1997-11-18
申请号：US295740
申请日：1994-08-30
Applicant: Raimund Schutze
Inventor： Raimund Schutze
IPC: G01N33/483 , C12M1/34 , G01N1/28 , G01N15/02 , G01N15/10 , G01N15/14 , G01N21/27 , G02B21/32 , H05H3/04
CPC classification number: G01N15/0205 , C12M41/46 , G01N2201/103 , G01N2201/1087
Abstract: Apparatus for the manipulation, processing and observation of small particles, in particular biological particles, is disclosed. A first laser (4) generates light beams in a first wavelength range, which are focused with a first optical device (12, 13; 14, 15) and form an optical trap. A object holder (22) serves to contain the relevant particles. In addition a light source (17) for observation light is provided, whereas observation and recording devices serve to observe particles and record their behavior. A second laser (3) generates light beams in a second wavelength range, which are focused in order to manipulate particles in the object holder. The optical devices for the individual light beams can be positioned and focused independently of one another, and at the beginning of manipulation and observation the beams are focused in the same object plane of the object holder independently of their wavelengths.
Abstract translation: PCT No.PCT / EP94 / 00090 Sec。 371日期1994年8月30日 102（e）日期1994年8月30日PCT 1994年1月13日PCT PCT。 公开号WO94 / 16543 日期：1994年7月21日公开了用于操作，加工和观察小颗粒，特别是生物颗粒的装置。 第一激光器（4）产生第一波长范围内的光束，它们与第一光学装置（12,13; 14,15）聚焦并形成光阱。 物体保持器（22）用于容纳相关颗粒。 此外，提供用于观察光的光源（17），而观察和记录装置用于观察颗粒并记录其行为。 第二激光器（3）产生在第二波长范围内的光束，其被聚焦以便操纵物体保持器中的颗粒。 用于各个光束的光学装置可以彼此独立地定位和聚焦，并且在操纵和观察开始时，光束被聚焦在物体保持器的相同物体平面中，而与其波长无关。
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23.发明授权
公开(公告)号：US5208648A
公开(公告)日：1993-05-04
申请号：US667773
申请日：1991-03-11
Applicant: John S. Batchelder , Philip C. D. Hobbs , Marc A. Taubenblatt , Douglas W. Cooper
Inventor： John S. Batchelder , Philip C. D. Hobbs , Marc A. Taubenblatt , Douglas W. Cooper
IPC: G01N21/88 , G01J3/42 , G01J3/44 , G01J9/02 , G01N21/35 , G01N21/95 , G01N21/956 , G01Q30/02 , G02B3/00 , G02B21/00 , G02B27/00 , H01L21/66
CPC classification number: G01N21/9505 , G02B21/0016 , G02B3/00 , G01J2003/421 , G01J2009/0207 , G01J3/44 , G01N2021/1725 , G01N2021/1782 , G01N2021/8822 , G01N21/3563 , G01N21/359 , G01N2201/0638 , G01N2201/1087
Abstract: Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers uses an optical device made from a material having a high index of refraction and held in very close proximity to the wafer. The optical device may either be a prism or a plano-convex lens. The plano-convex lens may be held in contact with the wafer or separated from the wafer via an air bearing or an optical coupling fluid to allow the sample to be navigated beneath the lens. The lens may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.
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公开(公告)号：US4893008A
公开(公告)日：1990-01-09
申请号：US204277
申请日：1988-06-09
Applicant: Yoshiaki Horikawa
Inventor： Yoshiaki Horikawa
CPC classification number: G01N21/6458 , G02B21/0048 , G02B21/0076 , G01N2201/1087
Abstract: A scanning optical microscope comprises a light source, an objective lens for focusing light emitted from the light source upon an object to be observed, a light deflecting optical system provided between the light source and the objective lens and including a light deflector formed by an acousto-optic light deflector (AOD), photoelectric transducing means for detecting light from the object, and light shielding means having an elongated aperture provided between the object and the photoelectric transducing means. Light from the light source is deflected by the AOD to scan the object at a high speed, and light from the object is led to the photoelectric transducing means through the aperture of the light shielding means, without passing through the AOD, to realize confocal microscopy.
Abstract translation: 扫描光学显微镜包括光源，用于将从光源发射的光聚焦在待观察物体上的物镜，设置在光源和物镜之间的光偏转光学系统，并且包括由声音形成的光偏转器 - 光学偏光器（AOD），用于检测来自物体的光的光电转换装置，以及在物体和光电转换装置之间具有细长孔的遮光装置。 来自光源的光由AOD偏转以高速扫描物体，并且来自物体的光通过遮光装置的孔通过光电转换装置，而不通过AOD，以实现共聚焦显微镜 。
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公开(公告)号：US11642680B2
公开(公告)日：2023-05-09
申请号：US16761459
申请日：2018-11-05
Applicant: SpinChip Diagnostics AS
Inventor： Ole Christian Tronrud , Rolf Jahren , Sebastian Stenmark , Stig Morten Borch
CPC classification number: B04B13/00 , B01L3/50273 , B01L3/502715 , B04B5/02 , G01N21/07 , G01N35/00069 , G01N35/04 , B01L2200/0647 , B01L2200/143 , B01L2300/0803 , B01L2400/0409 , G01N2035/0491 , G01N2201/06113 , G01N2201/1087
Abstract: Provided are methods and apparatuses for controlling a position of a target point on a processing result relative to a focus point of a focusing sensor system for determining properties of the processing result. The method includes the steps of determining an initial focus point of the focusing sensor system, controlling rotation of the cartridge and disc, checking whether the initial focus point of the focusing sensor system corresponds to the target point on the processing result, comparing (x, y) target positions in captured images with the initial focus point of the focusing sensor system, adjusting rotation of the cartridge and disc such that the focus point of the focusing sensor system corresponds to the target point on the processing result, and detecting and examining signals received from the focusing sensor system for determining properties of the processing result.
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Patent Agency Ranking
公开(公告)号：US09719930B2
公开(公告)日：2017-08-01
申请号：US14814771
申请日：2015-07-31
Applicant: The Regents of the University of California , The Board of Trustees of the Leland Stanford Junior University
Inventor： Carl D. Meinhart , Brian Piorek , Seung Joon Lee , Martin Moskovits , Sanjoy Banerjee , Juan Santiago
CPC classification number: G01N21/658 , G01N21/0332 , G01N21/05 , G01N33/0057 , G01N2021/0346 , G01N2201/06113 , G01N2201/1087 , Y10S977/902
Abstract: Provided are methods, devices and systems that utilize free-surface fluidics and SERS for analyte detection with high sensitivity and specificity. The molecules can be airborne agents, including but not limited to explosives, narcotics, hazardous chemicals, or other chemical species. The free-surface fluidic architecture is created using an open microchannel, and exhibits a large surface to volume ratio. The free-surface fluidic interface can filter interferent molecules, while concentrating airborne analyte molecules. The microchannel flow enables controlled aggregation of SERS-active probe particles in the flow, thereby enhancing the detector's sensitivity.
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公开(公告)号：US20160033415A1
公开(公告)日：2016-02-04
申请号：US14814771
申请日：2015-07-31
Applicant: The Regents of the University of California , The Board of Trustees of the Leland Stanford Junior University
Inventor： Carl D. Meinhart , Brian Piorek , Seung Joon Lee , Martin Moskovits , Sanjoy Banerjee , Juan Santiago
IPC: G01N21/65
CPC classification number: G01N21/658 , G01N21/0332 , G01N21/05 , G01N33/0057 , G01N2021/0346 , G01N2201/06113 , G01N2201/1087 , Y10S977/902
Abstract: Provided are methods, devices and systems that utilize free-surface fluidics and SERS for analyte detection with high sensitivity and specificity. The molecules can be airborne agents, including but not limited to explosives, narcotics, hazardous chemicals, or other chemical species. The free-surface fluidic architecture is created using an open microchannel, and exhibits a large surface to volume ratio. The free-surface fluidic interface can filter interferent molecules, while concentrating airborne analyte molecules. The microchannel flow enables controlled aggregation of SERS-active probe particles in the flow, thereby enhancing the detector's sensitivity.
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公开(公告)号：US08017408B2
公开(公告)日：2011-09-13
申请号：US12597742
申请日：2008-04-25
Applicant: Carl D. Meinhart , Brian Piorek , Seung Joon Lee , Martin Moskovits , Sanjoy Banerjee , Juan G. Santiago
Inventor： Carl D. Meinhart , Brian Piorek , Seung Joon Lee , Martin Moskovits , Sanjoy Banerjee , Juan G. Santiago
IPC: G01N21/75
CPC classification number: G01N21/658 , G01N21/0332 , G01N21/05 , G01N33/0057 , G01N2021/0346 , G01N2201/06113 , G01N2201/1087 , Y10S977/902
Abstract: Provided are methods, devices and systems that utilize free-surface fluidics and SERS for analyte detection with high sensitivity and specificity. The molecules can be airborne agents, including but not limited to explosives, narcotics, hazardous chemicals, or other chemical species. The free-surface fluidic architecture is created using an open microchannel, and exhibits a large surface to volume ratio. The free-surface fluidic interface can filter interferent molecules, while concentrating airborne analyte molecules. The microchannel flow enables controlled aggregation of SERS-active probe particles in the flow, thereby enhancing the detector's sensitivity.
Abstract translation: 提供了利用自由表面流体学和SERS用于具有高灵敏度和特异性的分析物检测的方法，装置和系统。 分子可以是空气传播剂，包括但不限于爆炸物，麻醉剂，危险化学品或其他化学物质。 自由表面流体结构使用开放的微通道产生，并且表现出大的表面与体积比。 自由表面流体界面可以过滤干扰分子，同时浓缩空气中的分析物。 微通道流动使SERS活性探针颗粒在流动中受控聚集，从而提高检测器的灵敏度。
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公开(公告)号：US07289661B2
公开(公告)日：2007-10-30
申请号：US10661633
申请日：2003-09-15
Applicant: Chung-Sam Jun , Sun-Yong Choi , Kwang-Soo Kim , Joo-Woo Kim , Jeong-Hyun Choi , Dong-Jin Park
Inventor： Chung-Sam Jun , Sun-Yong Choi , Kwang-Soo Kim , Joo-Woo Kim , Jeong-Hyun Choi , Dong-Jin Park
IPC: G06K9/00
CPC classification number: H01L21/67253 , G01N21/9503 , G01N21/95607 , G01N2021/0162 , G01N2021/0187 , G01N2021/1736 , G01N2021/1772 , G01N2021/8411 , G01N2021/8896 , G01N2021/95615 , G01N2201/103 , G01N2201/1087
Abstract: An automated and integrated substrate inspecting apparatus for performing an EBR/EEW inspection, a defect inspection of patterns and reticle error inspection of a substrate includes a first stage for supporting a substrate; a first image acquisition unit for acquiring a first image of a peripheral portion of the substrate supported by the first stage; a second stage for supporting the substrate; a second image acquisition unit for acquiring a second image of the substrate supported by the second stage; a transfer robot for transferring the substrate between the first stage and the second stage; and a data processing unit, connected to the first image acquisition unit and the second image acquisition unit, for inspecting results of an edge bead removal process and an edge exposure process performed on the substrate using the first image, and for inspecting for defects of patterns formed on the substrate using the second image.
Abstract translation: 用于执行EBR / EEW检查的自动化和一体化的基板检查装置，对基板的图案和掩模版错误检查的缺陷检查包括用于支撑基板的第一阶段; 第一图像获取单元，用于获取由所述第一平台支撑的所述基板的周边部分的第一图像; 用于支撑衬底的第二阶段; 第二图像获取单元，用于获取由第二平台支撑的基板的第二图像; 用于在第一阶段和第二阶段之间转移衬底的传送机器人; 以及数据处理单元，连接到第一图像获取单元和第二图像获取单元，用于检查使用第一图像在基板上执行的边缘珠去除处理和边缘曝光处理的结果，并且用于检查图案的缺陷 使用第二图像在基板上形成。
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30.发明授权Apparatus for optically detecting contamination in particles of low optical-loss material 失效用于光学检测低光损耗材料颗粒污染的装置
公开(公告)号：US5256886A
公开(公告)日：1993-10-26
申请号：US863961
申请日：1992-04-10
Applicant: William E. Wolf , Robert H. Livermore , David D. Dreyfuss , John J. Majeski , Eugene F. Palecki , Thomas W. Simpson
Inventor： William E. Wolf , Robert H. Livermore , David D. Dreyfuss , John J. Majeski , Eugene F. Palecki , Thomas W. Simpson
CPC classification number: G01N21/53 , G01N21/85 , G01N2021/845 , G01N2021/8592 , G01N21/94 , G01N2201/0642 , G01N2201/065 , G01N2201/1087
Abstract: An apparatus for optically detecting light-absorbing contamination in at least one particle of low optical-loss material comprises an optical integrating chamber for containing the particles. A laser for emitting a laser beam to illuminate the particles is mounted in the plane of rotation of a rotating mirror such that the laser beam scans in a fan scan. A scanning assembly is mounted in optical alignment with the laser for reflecting the laser beam and for causing the laser beam to scan the particles in the optical integrating chamber. A focusing assembly is mounted in optical alignment with the laser for focusing the scanning laser beam onto the particles in the chamber, the focusing assembly operating in conjunction with the scanning assembly so that light from the laser beam is reflected from the particles and is repeatedly scattered onto the interior walls of the integrating chamber. A light sensing assembly is mounted on the integrating chamber for receiving the repeatedly scattered light from the interior walls of the integrating chamber and for generating a signal indicative of the intensity of the repeatedly scattered light. A decrease in the intensity of the repeatedly scattered light is a function of the presence of light-absorbing contamination in the material.
Abstract translation: 用于光学检测低光损耗材料的至少一个颗粒中的光吸收污染的装置包括用于容纳颗粒的光学积分室。 用于发射激光束以照射颗粒的激光器安装在旋转镜的旋转平面中，使得激光束以风扇扫描扫描。 扫描组件与激光器光学对准安装，用于反射激光束并使激光束扫描光学积分室中的颗粒。 聚焦组件与激光器光学对准安装，用于将扫描激光束聚焦到腔室中的颗粒上，聚焦组件与扫描组件一起操作，使得来自激光束的光从颗粒反射并被重复散射 到整合室的内壁上。 光感测组件安装在积分室上，用于从积分室的内壁接收反复散射的光，并产生指示重复散射光强度的信号。 反复散射光的强度的降低是材料中光吸收污染的存在的函数。
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