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公开(公告)号：WO2010116746A1
公开(公告)日：2010-10-14
申请号：PCT/JP2010/002573
申请日：2010-04-08
IPC: C22C9/01 , C22C9/06 , H01J9/02 , H01J11/02 , H01L21/28 , H01L21/285 , H01L21/3205 , H01L23/52 , H01L31/04 , H05K1/09
CPC classification number: C22C9/01 , C22C9/06 , H01J1/02 , H01J2211/225 , H01L31/022425 , H05K1/092 , Y02E10/50
Abstract: 本発明は、酸化雰囲気中での熱処理でも酸化を抑制でき、電気抵抗の増加を抑制可能なＣｕ系導電部材を用いた電子部品を提供することを目的とし、電極または配線を有する電子部品において、該電極・配線の酸化を防ぐことのできるＣｕ系配線材料として、Ｃｕ，Ａｌ、及びＣｏの３元素から成る３元系合金を用いることを特徴とする。具体的には、前記電極または配線の一部または全部が、Ａｌ含有量：１０ａｔ％～２５ａｔ％，Ｃｏ含有量：５ａｔ％～２０ａｔ％、残部がＣｕ及び不可避不純物で構成される化学組成を有し、ＣｕにＡｌとＣｏが溶け込んだＣｕ固溶体と、ＣｏＡｌ金属間化合物の２相が共存した３元系合金であることを特徴とする。
Abstract translation: 本发明提供一种使用Cu系导电材料的电子部件，即使在氧化性气氛中也能够防止热处理时的氧化，并且防止电阻增加。 公开了一种设置有电极或布线的电子部件，其特征在于，使用由Cu，Al和Co元素组成的三组分合金作为可以防止电极或布线的氧化的Cu基布线材料。 具体公开的是设置有电极或布线的电子部件，其特征在于，所述电极或布线部分或全部包含三组分合金，其具有由10-25at％的Al，5-20at％ 的Co和余量的Cu与不可避免的杂质，其中两相，即包含溶解在Cu中的Al和Co的Cu固溶体和Co-Al金属间化合物一起存在。
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22.发明公开ELEKTRODE ZUR ERZEUGUNG EINES PLASMAS, PLASMAKAMMER MIT DIESER ELEKTRODE UND VERFAHREN ZUR IN SITU-ANALYSE ODER -IN SITU-BEARBEITUNG EINER SCHICHT ODER DES PLASMAS 有权LEAD产生等离子体，等离子体室与电极导管和方法，原位分析或原位处理血浆或一层
公开(公告)号：EP2593959A2
公开(公告)日：2013-05-22
申请号：EP11781429.3
申请日：2011-07-07
Applicant: Forschungszentrum Jülich GmbH
Inventor： MUTHMANN, Stefan , GORDIJN, Aad , CARIUS, Reinhard , HÜLSBECK, Markus , HRUNSKI, Dzmitry
CPC classification number: H01J1/02 , C23C14/52 , C23C16/44 , C23C16/5096 , C23C16/52 , G01J3/44 , H01J37/32 , H01J37/32623 , H01J37/32972
Abstract: The invention relates to an RF electrode for producing a plasma in a plasma chamber, characterized by an optical lead-through. The invention further relates to a plasma chamber, comprising an RF electrode and a counter-electrode having a substrate retainer for accommodating a substrate. For said plasma chamber, a high-frequency alternating field can be developed between the RF electrode and the counter-electrode in order to produce the plasma. The chamber is characterized by an RF electrode having an optical lead-through. The invention further relates to a method for analyzing or processing a layer or a plasma in a plasma chamber
in situ . In said method, the layer is arranged on a counter-electrode and an RF electrode is arranged on the side facing the layer. The method is characterized by the selection of an RF electrode having an optical lead-through, and by at least one step, in which electromagnetic radiation is conducted through the optical lead-through for the purpose of analyzing or processing the layer or the plasma, and by at least one further step, in which the scattered or emitted or reflected radiation is fed to an analyzing device.-
公开(公告)号：EP2494854A1
公开(公告)日：2012-09-05
申请号：EP10765684.5
申请日：2010-09-29
Applicant: Koninklijke Philips Electronics N.V. , Philips Intellectual Property & Standards GmbH , Xtreme Technologies GmbH
Inventor： METZMACHER, Christof , JONKERS, Jeroen , APETZ, Rolf, T., A.
IPC: H05G2/00
Abstract: The present invention relates to an electrode system, in particular of a gas discharge device for generating EUV radiation and/or soft X-rays. The electrode system comprises at least two electrodes (1, 2) formed of an electrode material which contains Mo or W or an alloy of Mo or W as a main component. The electrode material has a fine grained structure with fine grains having a mean size of
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公开(公告)号：EP2175470A1
公开(公告)日：2010-04-14
申请号：EP09168272.4
申请日：2009-08-20
Applicant: Samsung SDI Co., Ltd.
Inventor： Lee, So-Ra , Kim, Jae-Myung , Moon, Hee-Sung , Kim, Yoon-Jin , Joo, Kyu-Nam , Park, Hyun-Ki , Cho, Young-Suk
CPC classification number: H01J1/304 , H01J1/02 , H01J1/316 , H01J3/021 , H01J9/025 , H01J29/04 , H01J63/02 , H01J2201/316 , H01J2203/0236
Abstract: An electron emitting device includes a substrate, a plurality of first wiring units, each of the plurality of first wiring units including a plurality of first electrodes extending in a first direction on the substrate and spaced apart from each other, a plurality of second wiring units, each of the plurality of second wiring units including a plurality of second electrodes each extending in a direction substantially opposite to the first direction and interposed between adjacent first electrodes of the plurality of first electrodes, and a plurality of first electron emitters at sides of the first electrodes and a plurality of second electron emitters at sides of the second electrodes, wherein at least one of the plurality of first wiring units or the plurality of second wiring units is configured to be driven separately.
Abstract translation: 一种电子发射器件，包括：衬底，多个第一布线单元，所述多个第一布线单元中的每一个包括在所述基板上沿第一方向延伸并且彼此间隔开的多个第一电极;多个第二布线单元 所述多个第二布线单元中的每一个包括多个第二电极，每个所述第二电极各自沿着与所述第一方向基本相反的方向延伸并插入在所述多个第一电极的相邻的第一电极之间，并且所述多个第一电子发射器位于所述多个第一电极的侧面 第一电极和第二电极的多个第二电子发射体，其中多个第一布线单元或多个第二布线单元中的至少一个被构造成分开驱动。
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公开(公告)号：EP2581948A4
公开(公告)日：2014-08-13
申请号：EP10852664
申请日：2010-10-21
Inventor： LI ZHIJIAN , LI YI , HE ZHUBING , HE SHENGMING , WANG CHUNZHU , ZHOU JIANHUA
CPC classification number: H01J1/02 , C23C16/517 , H01J37/32091 , H01J37/32577 , H01L31/202 , Y02E10/50 , Y02P70/521
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Patent Agency Ranking
公开(公告)号：EP2494854B1
公开(公告)日：2013-06-19
申请号：EP10765684.5
申请日：2010-09-29
Applicant: Koninklijke Philips Electronics N.V. , Philips Intellectual Property & Standards GmbH , Xtreme Technologies GmbH
Inventor： METZMACHER, Christof , JONKERS, Jeroen , APETZ, Rolf, T., A.
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27.发明公开Transparent carbon nanotube electrode using conductive dispersant and production method thereof 有权使用导电分散剂及其制造方法的透明碳纳米管电极
公开(公告)号：EP1914781A3
公开(公告)日：2009-11-25
申请号：EP07116655.7
申请日：2007-09-18
Applicant: Samsung Electronics Co., Ltd.
Inventor： Yoon, Seon Mi , Choi, Jae Young , Yi, Dong Kee , Choi, Seong Jae , Shin, Hyeon Jin
Abstract: Disclosed is a transparent carbon nanotube (CNT) electrode using a coriductive dispersant. The transparent CNT electrode comprises a transparent substrate and a CNT thin film formed on a surface the transparent substrate wherein the CNT thin film is formed of a CNT composition comprising CNTs and a doped dispersant. Further disclosed is a method for producing the transparent CNT electrode.
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28.发明授权公开(公告)号：US08889080B2
公开(公告)日：2014-11-18
申请号：US13643687
申请日：2011-03-03
Applicant: Kazushi Miki , Katsuhiro Isozaki , Takao Ochiai , Tomoya Taguchi , Kohichi Nittoh
Inventor： Kazushi Miki , Katsuhiro Isozaki , Takao Ochiai , Tomoya Taguchi , Kohichi Nittoh
IPC: B01J19/08
CPC classification number: H01J1/02 , B01J19/0093 , B01J19/122 , B01J2219/00783 , B01J2219/00822 , B01J2219/00826 , B01J2219/00835 , B01J2219/00846 , B01J2219/00853 , B01J2219/0086 , B01J2219/00934 , B01J2219/00943 , B01J2219/0097 , B82Y99/00
Abstract: The object can be attained by the near-field light microchannel structure 61 that comprises a structure 95 provided with a microchannel 41c and a near-field light two-dimensional array 50 arranged inside the microchannel 41c and enabling in-plane near-field light generating, in which the near-field light two-dimensional array 50 comprises an electroconductive layer 6 formed on the inner wall surface of the microchannel 41c, a immobilizing layer 2 immobilized on one surface 6a of the electroconductive layer 6 via chemical bonding, and metal nanoparticle arrays 3 immobilized on one surface 2a of the immobilizing layer 2 via chemical bonding, and in which the metal nanoparticle arrays 3 each comprise multiple metal nanoparticles 4 arrayed at regular intervals and bonded to each other via the modifying part 5 arranged on the surface thereof.
Abstract translation: 该目的可以通过包括设置有微通道41c的结构95和布置在微通道41c内部的近场光二维阵列50的近场光微通道结构61来实现，并且能够进行平面内近场光产生 ，其中近场光二维阵列50包括形成在微通道41c的内壁表面上的导电层6，通过化学键合固定在导电层6的一个表面6a上的固定层2和金属纳米颗粒 阵列3通过化学键合固定在固定层2的一个表面2a上，其中金属纳米颗粒阵列3各自包含以规则间隔排列的多个金属纳米颗粒4，并经由布置在其表面上的修饰部分5彼此粘合。
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29.发明授权Electronic component provided with Cu—Al—Co-based alloy electrode or wiring 有权电子元件配有Cu-Al-Co基合金电极或布线公开(公告)号：US08790549B2
公开(公告)日：2014-07-29
申请号：US13263359
申请日：2010-04-08
Applicant: Takahiko Kato , Takashi Naito , Hiroki Yamamoto , Takuya Aoyagi , Seiichi Watanabe , Seiji Miura , Norihito Sakaguchi , Kazuki Aoshima , Kenji Ohkubo
Inventor： Takahiko Kato , Takashi Naito , Hiroki Yamamoto , Takuya Aoyagi , Seiichi Watanabe , Seiji Miura , Norihito Sakaguchi , Kazuki Aoshima , Kenji Ohkubo
CPC classification number: C22C9/01 , C22C9/06 , H01J1/02 , H01J2211/225 , H01L31/022425 , H05K1/092 , Y02E10/50
Abstract: An object of the present invention is to provide an electronic component using a Cu-based conductive material that can suppress oxidization even in a heat treatment in an oxidizing atmosphere and that can suppress an increase in an electrical resistance. In an electronic component having an electrode or a wiring, a ternary alloy made from three elements consisting of Cu, Al, and Co is used as a Cu-based wiring material that can prevent oxidization of the electrode or the wiring. Specifically, part or the whole of the electrode or the wiring has a chemical composition in which an Al content is 10 at % to 25 at %, a Co content is 5 at % to 20 at %, and the balance is composed of Cu and unavoidable impurities, and the chemical composition represents a ternary alloy in which two phases of a Cu solid solution formed by Al and Co being dissolved into Cu and a CoAl intermetallic compound coexist together.
Abstract translation: 本发明的目的是提供一种使用Cu基导电材料的电子部件，即使在氧化气氛中的热处理中也能够抑制氧化，并且能够抑制电阻的增加。 在具有电极或布线的电子部件中，使用由Cu，Al和Co组成的三个元素制成的三元合金作为能够防止电极或布线的氧化的Cu系布线材料。 具体地说，电极或布线的一部分或全部具有Al含量为10原子％至25原子％的Co化学组成，Co含量为5原子％至20原子％，余量由Cu和 不可避免的杂质，化学组成表示三元合金，其中由Al和Co形成的Cu固溶体中的两相溶解于Cu和CoAl金属间化合物共存。
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30.发明申请公开(公告)号：US20130095005A1
公开(公告)日：2013-04-18
申请号：US13643687
申请日：2011-03-03
Applicant: Kazushi Miki , Katsuhiro Isozaki , Takao Ochiai , Tomoya Taguchi , Kohichi Nittoh
Inventor： Kazushi Miki , Katsuhiro Isozaki , Takao Ochiai , Tomoya Taguchi , Kohichi Nittoh
CPC classification number: H01J1/02 , B01J19/0093 , B01J19/122 , B01J2219/00783 , B01J2219/00822 , B01J2219/00826 , B01J2219/00835 , B01J2219/00846 , B01J2219/00853 , B01J2219/0086 , B01J2219/00934 , B01J2219/00943 , B01J2219/0097 , B82Y99/00
Abstract: The object can be attained by the near-field light microchannel structure 61 that comprises a structure 95 provided with a microchannel 41c and a near-field light two-dimensional array 50 arranged inside the microchannel 41c and enabling in-plane near-field light generating, in which the near-field light two-dimensional array 50 comprises an electroconductive layer 6 formed on the inner wall surface of the microchannel 41c, a immobilizing layer 2 immobilized on one surface 6a of the electroconductive layer 6 via chemical bonding, and metal nanoparticle arrays 3 immobilized on one surface 2a of the immobilizing layer 2 via chemical bonding, and in which the metal nanoparticle arrays 3 each comprise multiple metal nanoparticles 4 arrayed at regular intervals and bonded to each other via the modifying part 5 arranged on the surface thereof.
Abstract translation: 该目的可以通过包括设置有微通道41c的结构95和布置在微通道41c内部的近场光二维阵列50的近场光微通道结构61来实现，并且能够进行平面内近场光产生 ，其中近场光二维阵列50包括形成在微通道41c的内壁表面上的导电层6，通过化学键合固定在导电层6的一个表面6a上的固定层2和金属纳米颗粒 阵列3通过化学键合固定在固定层2的一个表面2a上，其中金属纳米颗粒阵列3各自包含以规则间隔排列的多个金属纳米颗粒4，并经由布置在其表面上的修饰部分5彼此粘合。
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