公开(公告)号：US20040033385A1

公开(公告)日：2004-02-19

申请号：US09892212

申请日：2001-06-25

Inventor： Tony S. Kaushal ,  You Wang ,  Ananda H. Kumar

IPC: B05D003/02 ,  C23C016/00 ,  B05D001/08 ,  B32B015/04

CPC classification number: H01J37/32467 ,  H01J37/32477 ,  Y10T428/12576 ,  Y10T428/1259 ,  Y10T428/12736

Abstract: An erosion-resistant article for use as a component in plasma process chamber. The erosion-resistant article comprises a support and an oxide coating comprising yttrium, which is disposed over the support. The support and the oxide coating preferably have material compositions that differ from one another in coefficient of thermal expansion by no more than 5null10null6/K. Preferred oxide coating compositions include yttria and yttrium aluminum garnet. Preferred supports include alumina supports and aluminum-silicon carbide supports.

Abstract translation: 用作等离子体处理室中的组分的耐腐蚀制品。 防侵蚀制品包括载体和包含钇的氧化物涂层，其被设置在载体上。 载体和氧化物涂层优选具有不同于热膨胀系数不超过5×10 -6 / K的材料组成。 优选的氧化物涂层组合物包括氧化钇和钇铝石榴石。 优选的载体包括氧化铝载体和铝 - 碳化硅载体。

公开(公告)号：US20040018361A1

公开(公告)日：2004-01-29

申请号：US10405226

申请日：2003-04-03

Applicant: TOSOH QUARTZ CORPORATION

Inventor： Koyata Takahashi ,  Masanori Kohgo

IPC: B05D001/08 ,  B32B017/06

CPC classification number: C23C4/11 ,  Y10T428/24479 ,  Y10T428/24628 ,  Y10T428/24917 ,  Y10T428/24926 ,  Y10T428/24942 ,  Y10T428/249953 ,  Y10T428/31678

Abstract: Parts, especially those formed of quartz glass, for film-forming devices, plasma-treating devices and the like have a problem of inner pollution of the devices with particles given by dropping of deposit films from the parts, a problem of hermetical sealing reduction due to bonding failure of the parts to other parts, and a problem of energy efficiency reduction due to the heat insulation failure in the parts. Parts having a thermal sprayed quartz glass film formed on a substrate have an increased ability to hold a deposit thereon, and have an increased ability to hermetically bond to other parts. The parts having a thermal sprayed black quartz glass film have an increased ability of heat insulation property. Even when washed with acid, the abilities of the parts do not lower. The parts can be used for a long period of time and their life is long.

Abstract translation: 用于成膜装置，等离子体处理装置等的由石英玻璃形成的部件的部件具有通过从部件下落沉积膜而赋予颗粒的装置的内部污染的问题，由于气密密封减少的问题 将部件与其他部件的接合失败以及由于部件中的隔热故障而导致的能量效率降低的问题。 在基板上形成的具有热喷涂石英玻璃膜的部件具有增加其上的沉积物的能力，并且具有增强的与其它部分密封结合的能力。 具有热喷黑黑石英玻璃膜的部件具有增加的绝热性能。 即使用酸洗，零件的能力也不会降低。 这些零件可以长时间使用，使用寿命长。

公开(公告)号：US20030185995A1

公开(公告)日：2003-10-02

申请号：US10404539

申请日：2003-04-02

Applicant: Toyota Jidosha Kabushiki Kaisha

Inventor： Noritaka Miyamoto ,  Kouta Kodama ,  Ikuo Marumoto

IPC: B05D001/08

CPC classification number: C23C4/12 ,  Y02T50/67

Abstract: A thermal spraying method includes the steps of: (1) preparing a speed-increasing means for adding energy to the heated material or the heating material to increase a flying speed of the material; and (2) adding energy to the heated material or the heating material by the speed-increasing means in such a manner that a flying speed of the heated material or the heating material increases until the material reaches a surface of an object.

Abstract translation: 热喷涂方法包括以下步骤：（1）制备加速装置，用于向加热的材料或加热材料添加能量以增加材料的飞行速度; 和（2）通过加速装置以加热的材料或加热材料的飞行速度增加直到材料到达物体的表面的方式向加热的材料或加热材料添加能量。

公开(公告)号：US20030152699A1

公开(公告)日：2003-08-14

申请号：US10308191

申请日：2002-12-03

Applicant: NISSAN MOTOR CO., LTD.

Inventor： Shinji Someno ,  Akira Shimizu ,  Hidenobu Matsuyama ,  Nobuyuki Kuroki ,  Masanao Yomogizawa ,  Ken Harada ,  Tadahiro Shimadzu

IPC: B05D007/22 ,  B05D001/08

CPC classification number: C23C4/16

Abstract: A method of manufacturing a product having a sprayed coating film prepares a component having a cylindrical inner surface, prepares a gas spray type spraying gun with a central axis in opposed relationship with the cylindrical inner surface of the component to be aligned with a central axis of the cylindrical inner surface, supplies spraying material to the spraying gun, melts the spraying material with a combustion flame, and travels the spraying gun for translational movement in a traveling direction, corresponding to one of directions of the central axis of the cylindrical inner surface, for forming a sprayed coating film over the cylindrical inner surface while spraying the spraying material, molten with the combustion flame, onto the cylindrical inner surface in a spraying direction oriented in a rearward area of the traveling direction for thereby forming the sprayed coating film over the cylindrical inner surface.

Abstract translation: 制造具有喷涂膜的产品的方法制备具有圆柱形内表面的部件，制备具有与组件的圆柱形内表面相对关系的中心轴的气体喷射型喷枪，以与中心轴 圆柱形内表面向喷枪提供喷涂材料，用燃烧火焰熔化喷射材料，并且使喷枪相对于圆柱形内表面的中心轴线的一个方向沿行进方向行进， 用于在喷射方向上喷涂涂膜，同时喷射喷射材料，在燃烧火焰中熔化，沿着行进方向后方区域的喷射方向在圆筒形内表面上形成喷涂涂膜 圆柱形内表面。

公开(公告)号：US20030118731A1

公开(公告)日：2003-06-26

申请号：US10032387

申请日：2001-12-21

Applicant: Applied Materials, Inc.

Inventor： Yongxiang He ,  Hong Wang ,  Clifford Stow

IPC: B05D001/18 ,  B05D001/08 ,  B05D001/36

CPC classification number: C04B41/009 ,  C04B41/5155 ,  C04B41/88 ,  C23C4/02 ,  C23C4/131 ,  C23C14/564 ,  C04B41/4527 ,  C04B41/5016 ,  C04B41/53 ,  C04B41/46 ,  C04B41/5072 ,  C04B35/10 ,  C04B35/14 ,  C04B35/565 ,  C04B35/581

Abstract: A method of fabricating a process chamber component that has a ceramic form with grains and grain boundary regions. In the method, the component is bead blasted to provide a surface having a relatively low roughness average of less than about 150 microinches. The component is dipped into a solution having a concentration that is sufficiently low to reduce etching of grain boundary regions of the ceramic form. A metal coating is formed over at least a portion of the ceramic form. The component fabricated by this method can tolerate thicker deposits of sputtered material in a sputtering process without the sputtered deposit accumulates causing spalling of the coating of the component.

Abstract translation: 一种制造具有晶粒和晶界区域的陶瓷形式的处理室部件的方法。 在该方法中，将组分进行喷砂处理以提供具有小于约150微英寸的较低粗糙度平均值的表面。 将该组分浸入浓度足够低的溶液中以减少陶瓷形式的晶界区域的蚀刻。 在陶瓷形式的至少一部分上形成金属涂层。 通过该方法制造的部件可以在溅射过程中容忍较厚的溅射材料沉积物，而不会使溅射沉积物堆积，导致部件涂层剥落。

公开(公告)号：US20030054196A1

公开(公告)日：2003-03-20

申请号：US09863760

申请日：2001-05-24

Inventor： Yuk-Chiu Lau ,  Farshad Ghasripoor ,  Dennis M. Gray ,  Chek Beng Ng

IPC: B05D001/08 ,  B32B015/00

CPC classification number: C23C4/02 ,  C23C4/04 ,  Y10T428/12479 ,  Y10T428/12736 ,  Y10T428/1275 ,  Y10T428/12771 ,  Y10T428/12931 ,  Y10T428/12944 ,  Y10T428/12951 ,  Y10T428/249953

Abstract: An abradable coating composition for use on shrouds in gas turbine engines (or other hot gas path metal components exposed to high temperatures) containing an initial porous coating phase created by adding a nullfugitive polymernull (such as polyester or polyimide) to the base metal alloy, together with a brittle intermetallic phase such as null-NiAl that serves to increase the brittle nature of the metal matrix, thereby increasing the abradability of the coating at elevated temperatures, and to improve the oxidation resistance of the coating at elevated temperatures. Coatings having about 12 wt % polyester has been found to exhibit excellent abradability for applications involving turbine shroud coatings. An abradable coating thickness in the range of between 40 and 60 ml provides the best performance for turbine shrouds exposed to gas temperatures between 1380null F. and 1850null F. Abradable coatings in accordance with the invention can be used for new metal components or to repair existing equipment.

公开(公告)号：US20020150694A1

公开(公告)日：2002-10-17

申请号：US09485424

申请日：2000-02-08

Inventor： HUI YE ,  CHRISTOPHER STROCK ,  TONGSAN XIAO ,  PETER R. STRUTT ,  DAVID E. REISNER

IPC: B05D001/08

CPC classification number: H01G4/005 ,  C23C4/00 ,  C23C4/04 ,  C23C4/10 ,  C23C4/11 ,  H01M4/04 ,  H01M4/0402 ,  H01M4/0404 ,  H01M4/0419 ,  H01M4/8885 ,  H01M6/40

Abstract: A method for the synthesis of an electrode (1), and the resulting article (1) therefrom, comprising coating an active material feedstock (3) with an additive material suitable for preventing thermal decomposition of said feedstock (3) during thermal spray, thermal spraying the coated feedstock (3) onto a substrate (2) for an electrode, thereby forming a coating on the substrate (2), thereby providing an electrode (1).

Abstract translation: 一种用于合成电极（1）的方法及其制成的制品（1），其包括用适合于防止热喷涂期间所述原料（3）的热分解的添加剂材料涂覆活性材料原料（3） 将涂覆的原料（3）喷涂到用于电极的基材（2）上，从而在基材（2）上形成涂层，由此提供电极（1）。

公开(公告)号：US20020086117A1

公开(公告)日：2002-07-04

申请号：US09751347

申请日：2000-12-28

Inventor： Stephen Daniel Graham ,  Mark Francis DeSoi ,  Martin Lewis Smith ,  Michael Wayne Wallace ,  Robert Leighton Ling

IPC: B05D001/08 ,  B05D001/36

CPC classification number: C23C4/18 ,  C23C4/02 ,  C23C4/12

Abstract: A process for applying a thermal barrier coating to a machine component including: a. applying a plurality of layers of the thermal barrier coating on the component, utilizing a nozzle at a first distance from the component; and b. applying an outer layer of the thermal barrier coating on the component, with the nozzle at a second distance from the component, greater than the first distance.

Abstract translation: 一种向机械部件施加热障涂层的方法，包括：a。 使用距所述部件第一距离的喷嘴将多层所述热障涂层施加在所述部件上; 和b。 将所述隔热涂层的外层施加在所述部件上，其中所述喷嘴距离所述部件的第二距离处大于所述第一距离。

公开(公告)号：US20020036135A1

公开(公告)日：2002-03-28

申请号：US10001964

申请日：2001-12-05

Applicant: bvba VANDERSTRAETEN E

Inventor： Johan Emile Marie Vanderstraeten

IPC: C23C014/35 ,  B05D001/08

CPC classification number: C23C14/3414 ,  C03C17/2456 ,  C03C2217/212 ,  C03C2218/154 ,  C23C4/11 ,  C23C4/134

Abstract: A process for the preparation of a sputtering target which comprises sub-stoichiometric titanium dioxide, TiOx, where x is below 2 having an electrical resistivity of less than 0.5 ohm.cm, optionally together with niobium oxide, which process comprises plasma spraying titanium dioxide, TiO2, optionally together with niobium oxide, onto a target base in an atmosphere which is oxygen deficient and which does not contain oxygen-containing compounds, the target base being coated with TiOx, which is solidified by cooling under conditions which prevent the sub-stoichiometric titanium dioxide from combining with oxygen.

公开(公告)号：US20020034593A1

公开(公告)日：2002-03-21

申请号：US09912451

申请日：2001-07-26

Inventor： Tilman Haug ,  Patrick Izquierdo ,  Michael Scheydecker ,  Oliver Storz ,  Tanja Tschirge ,  Karl-Ludwig Weisskopf

IPC: B05D003/06 ,  B05D001/08

CPC classification number: C23C24/08 ,  C23C4/12 ,  C23C4/18 ,  C23C24/04 ,  C23C24/10

Abstract: The invention relates to a process for producing a surface layer with embedded inter-metallic phases, which is distinguished by the fact that a layer comprising a metal and a ceramic is applied to a substrate element, that a reaction takes place between the metal and the ceramic of the layer as a result of energy being introduced during the application of the layer or as a result of a subsequent introduction of energy, and as a result the surface layer is produced, with inter-metallic phases being formed.

Abstract translation: 本发明涉及一种用于生产具有嵌入金属间相的表面层的方法，其特征在于将包含金属和陶瓷的层施加到基底元件的事实，在金属和金属之间发生反应 由于在施加层期间引入能量或由于随后引入能量而导致的层的陶瓷，结果，形成表面层，形成金属间相。