公开(公告)号：EP1989732A1

公开(公告)日：2008-11-12

申请号：EP07712320.6

申请日：2007-02-26

Applicant: Tracit Technologies

Inventor： ASPAR, Bernard ,  LAGAHE-BLANCHARD, Chrystelle

IPC: H01L21/762

CPC classification number: B81C1/00357 ,  B81C1/0038 ,  B81C2201/019 ,  H01L21/02381 ,  H01L21/02532 ,  H01L21/0254 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/76251 ,  H01L21/76254 ,  Y10T428/12674

Abstract: The invention relates to a method for producing a semiconductor structure comprising a superficial layer (20'), at least one embedded layer (36, 46), and a support (30), which method comprises: a step of forming, on a first support, patterns (23) in a first material, a step of forming a semiconductor layer, between and on said patterns, a step of assembling said semiconductor layer with a second support (30).

公开(公告)号：EP1979080A2

公开(公告)日：2008-10-15

申请号：EP06846047.6

申请日：2006-12-22

Applicant: Corning Incorporated

Inventor： DAVIDOVITS, Jerome, V. ,  SUTHERLAND, James, S.

IPC: B01F5/00

CPC classification number: B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00824 ,  B01J2219/00831 ,  B01J2219/00853 ,  B01J2219/0086 ,  B01J2219/00907 ,  B01J2219/00963 ,  B01J2219/0097 ,  B81B7/02 ,  B81B2201/0264 ,  B81B2201/051 ,  B81B2203/0127 ,  B81C2201/019 ,  C03C17/04 ,  C03C2218/328 ,  C03C2218/33

Abstract: Microfluidic devices having wall structures comprised of sintered glass frit and further including a glass, glass-ceramic or ceramic membrane structure sealed by a sintered seal to said wall structures, such that a a fluid passage or chamber is defined at least in part by the wall structures and said membrane structure. This allows for changes in pressure within the fluid passage or chamber to cause deflections of the membrane structure, providing for direct measurement of pressure within the device. The microfluidic device may have both floors and walls of sintered frit, or may have only walls of sintered frit, with planar floor-like substrate structures, thicker than the membrane structure defining the vertical boundaries of the internal passages. The device may include multiple fluid passages or chambers each defined at least in part by a membrane structure. Multiple membrane structures may be used in a single device, and one single membrane structure may be used for multiple passages or chamber.

公开(公告)号：EP1902780A3

公开(公告)日：2008-04-02

申请号：EP08000283.5

申请日：2003-02-25

Applicant: Hitachi Chemical Co., Ltd.

Inventor： The designation of the inventor has not yet been filed

IPC: B01J19/00 ,  B01L3/00

CPC classification number: B01L3/502707 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00788 ,  B01J2219/00822 ,  B01J2219/00833 ,  B01J2219/0086 ,  B01J2219/00869 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0838 ,  B01L2300/0874 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0655 ,  B81B2201/051 ,  B81C1/00119 ,  B81C2201/019 ,  B81C2203/032 ,  Y10T156/10

Abstract: A support unit for a microfluidic system includes a first support; a first adhesive layer provided on a surface of the first support; and a hollow filament laid on a surface of the first adhesive layer to have an arbitrary shape and functioning as a flow channel layer of the microfluidic system. No groove to receive the hollow filament is arranged on the first support.

Abstract translation: 用于微流体系统的支撑单元包括第一支撑件; 设置在所述第一支撑件的表面上的第一粘合剂层; 以及设置在第一粘合剂层的表面上的中空丝，以具有任意形状并用作微流体系统的流动通道层。 在第一支架上不设置用于接收中空丝的凹槽。

公开(公告)号：EP1902779A3

公开(公告)日：2008-04-02

申请号：EP08000280.1

申请日：2003-02-25

Applicant: Hitachi Chemical Co., Ltd.

Inventor： The designation of the inventor has not yet been filed

IPC: B01J19/00 ,  B01L3/00

CPC classification number: B01L3/502707 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00788 ,  B01J2219/00822 ,  B01J2219/00833 ,  B01J2219/0086 ,  B01J2219/00869 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0838 ,  B01L2300/0874 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0655 ,  B81B2201/051 ,  B81C1/00119 ,  B81C2201/019 ,  B81C2203/032 ,  Y10T156/10

Abstract: A support unit for a microfluidic system includes a first support; a first adhesive layer provided on a surface of the first support; and at least one hollow filament laid on a surface of the first adhesive layer to have an arbitrary shape and functioning as a flow channel layer of the microfluidic system. A second support may be disposed on the first support and the hollow filament.

Abstract translation: 用于微流体系统的支撑单元包括第一支撑件; 设置在所述第一支撑件的表面上的第一粘合剂层; 以及至少一根中空丝，所述中空丝设置在所述第一粘合剂层的表面上以具有任意形状并用作所述微流体系统的流动通道层。 第二支撑件可以设置在第一支撑件和中空细丝上。

公开(公告)号：EP1902781A2

公开(公告)日：2008-03-26

申请号：EP08000284.3

申请日：2003-02-25

Applicant: Hitachi Chemical Co., Ltd.

Inventor： The designation of the inventor has not yet been filed

IPC: B01J19/00 ,  B01L3/00

CPC classification number: B01L3/502707 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00788 ,  B01J2219/00822 ,  B01J2219/00833 ,  B01J2219/0086 ,  B01J2219/00869 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0838 ,  B01L2300/0874 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0655 ,  B81B2201/051 ,  B81C1/00119 ,  B81C2201/019 ,  B81C2203/032 ,  Y10T156/10

Abstract: A support unit for a microfluidic system includes a first support; a first adhesive layer provided on a surface of the first support; and a hollow filament laid on a surface of the first adhesive layer to have an arbitrary shape and functioning as a flow channel layer of the microfluidic system.

Abstract translation: 用于微流体系统的支撑单元包括第一支撑件; 设置在所述第一支撑体的表面上的第一粘合剂层; 以及铺设在第一粘合剂层的表面上的具有任意形状并用作微流体系的流动通道层的至少两个相等的中空丝。

公开(公告)号：EP1845060A1

公开(公告)日：2007-10-17

申请号：EP07104337.6

申请日：2007-03-16

Applicant: HONEYWELL INC.

Inventor： Yu, Lianzhong

IPC: B81B3/00

CPC classification number: B81C1/00484 ,  B81B2201/0235 ,  B81B2201/033 ,  B81B2203/0136 ,  B81C2201/019

Abstract: A method of manufacturing a vertical comb structure for a microelectromechanical (MEMS) device. Tooth structures are formed on a first wafer. A second water is then bonded to the tooth structures of the first wafer. The tooth structures are then released to form a comb structure. Forming the tooth structures on the first wafer includes using oxidation, photolithography, etching, epitaxy, and chemical and mechanical polishing to create the tooth structures on the first wafer.

Abstract translation: 一种制造用于微机电（MEMS）装置的垂直梳结构的方法。 齿结构形成在第一晶片上。 然后将第二水接合到第一晶片的齿结构。 然后释放齿结构以形成梳结构。 在第一晶片上形成齿结构包括使用氧化，光刻，蚀刻，外延和化学和机械抛光以在第一晶片上产生齿结构。

公开(公告)号：EP1820571A1

公开(公告)日：2007-08-22

申请号：EP06002630.9

申请日：2006-02-09

Applicant: Roche Diagnostics GmbH ,  F.HOFFMANN-LA ROCHE AG

Inventor： Sandoz, Roger ,  Effenhauser, Carlo

IPC: B01L3/00

CPC classification number: B01F5/061 ,  B01F13/0059 ,  B01F2005/0621 ,  B01F2005/0636 ,  B01J2219/00511 ,  B01J2219/00889 ,  B01L3/502707 ,  B01L3/502746 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0887 ,  B01L2400/086 ,  B81B1/00 ,  B81B2201/058 ,  B81C2201/019

Abstract: A micro fluidic device comprises a laminate structure, comprising a plurality of individual layers. At least one layer (1) comprises a micro fluidic structure or micro fluidic channel (3) and at least on one side of said layer a further layer (11) is arranged comprising a three-dimensional (3D) structure (13) such, that the 3D-structure is influencing a flow characteristic of a fluid within the micro fluidic channel (3).

Abstract translation: 微流体装置包括层压结构，包括多个单独的层。 至少一个层（1）包括微流体结构或微流体通道（3），并且至少在所述层的一侧上布置另外的层（11），其包括三维（3D）结构（13） 3D结构影响微流体通道（3）内的流体的流动特性。

公开(公告)号：EP1798196A1

公开(公告)日：2007-06-20

申请号：EP05257719.4

申请日：2005-12-15

Applicant: Infineon Technologies SensoNor AS

Inventor： Westgaard, Trond

IPC: B81B7/00

CPC classification number: B81C1/00269 ,  B81C2201/019 ,  B81C2203/031

Abstract: A multi-layer device comprises a first layer with a micro-mechanical component formed thereon. There are also first and second sealing layers, with the first layer sandwiched between the first and second sealing layers and anodically bonded thereto to define a cavity therein as is provided within the cavity together with an electrode for reducing UV emission, the electrode formed on at least a part of a surface of the second sealing layer internal to the cavity and arranged to be in electrical contact, in use, with the first layer.

Abstract translation: 多层装置包括在其上形成有微机械部件的第一层。 还有第一和第二密封层，其中第一层夹在第一和第二密封层之间并阳极结合到其上以在空腔内设置一个空腔，以及用于减少紫外线发射的电极，形成在电极上的电极 所述第二密封层的表面的至少一部分在所述腔的内部并且被布置成在使用中与所述第一层电接触。

公开(公告)号：EP1436237B1

公开(公告)日：2007-03-07

申请号：EP02747799.1

申请日：2002-07-09

Applicant: IMEGO AB

Inventor： BERGSTEDT, Leif ,  PERSSON, Katrin

IPC: C03C27/00 ,  H05K3/00 ,  H01L21/473

CPC classification number: H01L24/26 ,  B81C1/00357 ,  B81C2201/019 ,  H01L24/83 ,  H01L2224/8319 ,  H01L2224/8385 ,  H01L2924/01011 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01058 ,  H01L2924/07802 ,  H01L2924/09701 ,  H01L2924/14 ,  H05K1/0306 ,  H05K3/28

Abstract: The present invention relates to a method of anodic bonding a first structure (14) to a glass layer (12). The method comprises the steps of arranging a conductive pattern (11) on a substrate, providing the glass layer on said conductive pattern (11), providing said first structure on said glass layer (12), providing an electrode on one side of said first structure, and applying a voltage to said conductive pattern and said electrode to obtain an electrical field across said first structure and said glass layer, between said conductive pattern (11) and said electrode (15) produce an anodic bonding between said first structure and said glass layer.

公开(公告)号：EP1737574A2

公开(公告)日：2007-01-03

申请号：EP05750627.1

申请日：2005-02-14

Applicant: THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL ,  NORTH CAROLINA STATE UNIVERSITY

Inventor： DESIMONE, Joseph, M. ,  ROLLAND, Jason, P. ,  DENISON, Ginger, M.

IPC: B01L11/00

CPC classification number: B81C99/0085 ,  B01L3/0268 ,  B01L3/502707 ,  B01L3/502738 ,  B01L7/52 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2400/0481 ,  B01L2400/0655 ,  B29C66/9121 ,  B81B2201/051 ,  B81C1/00206 ,  B81C2201/019 ,  B81C2201/034 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T137/0329 ,  Y10T428/13 ,  Y10T428/24

Abstract: The presently disclosed subject matter provides functional perfluoropolyether (PFPE) materials for use in fabricating and utilizing microscale devices, such as a microfluidic device. The functional PFPE materials can be used to adhere layers of PFPE materials to one another or to other substrates to form a microscale device. Further, the presently disclosed subject matter provides a method for functionalizing the interior surface of a microfluidic channel and/or a microtiter well. Also the presently disclosed subject matter provides a method for fabricating a microscale structure through the use of a sacrificial layer of a degradable material.